KR100628018B1 - 실리콘웨이퍼 외주부 가공용 베벨링휠 및 그 제조방법 - Google Patents

실리콘웨이퍼 외주부 가공용 베벨링휠 및 그 제조방법 Download PDF

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Publication number
KR100628018B1
KR100628018B1 KR1020020004463A KR20020004463A KR100628018B1 KR 100628018 B1 KR100628018 B1 KR 100628018B1 KR 1020020004463 A KR1020020004463 A KR 1020020004463A KR 20020004463 A KR20020004463 A KR 20020004463A KR 100628018 B1 KR100628018 B1 KR 100628018B1
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KR
South Korea
Prior art keywords
processing
abrasive layer
adhesive
wheel
beveling wheel
Prior art date
Application number
KR1020020004463A
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English (en)
Korean (ko)
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KR20020065838A (ko
Inventor
다나까요시히로
가와사끼가즈요시
Original Assignee
가부시키가이샤 노리타케 캄파니 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 노리타케 캄파니 리미티드 filed Critical 가부시키가이샤 노리타케 캄파니 리미티드
Publication of KR20020065838A publication Critical patent/KR20020065838A/ko
Application granted granted Critical
Publication of KR100628018B1 publication Critical patent/KR100628018B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020020004463A 2001-02-07 2002-01-25 실리콘웨이퍼 외주부 가공용 베벨링휠 및 그 제조방법 KR100628018B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001031366A JP3434801B2 (ja) 2001-02-07 2001-02-07 シリコンウエハ外周部加工用ベベリングホイールの製造方法
JPJP-P-2001-00031366 2001-02-07

Publications (2)

Publication Number Publication Date
KR20020065838A KR20020065838A (ko) 2002-08-14
KR100628018B1 true KR100628018B1 (ko) 2006-09-26

Family

ID=18895461

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020004463A KR100628018B1 (ko) 2001-02-07 2002-01-25 실리콘웨이퍼 외주부 가공용 베벨링휠 및 그 제조방법

Country Status (3)

Country Link
JP (1) JP3434801B2 (ja)
KR (1) KR100628018B1 (ja)
TW (1) TW584585B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MXPA03006434A (es) * 2003-07-18 2005-01-21 Univ Mexico Nacional Autonoma Herramienta hidrodinamica de flujo radial para el pulido y esmerilado de superficies opticas.
JP4815801B2 (ja) * 2004-12-28 2011-11-16 信越半導体株式会社 シリコンウエーハの研磨方法および製造方法および円板状ワークの研磨装置ならびにシリコンウエーハ
KR102396166B1 (ko) * 2015-10-05 2022-05-11 이화다이아몬드공업 주식회사 냉각수 유로를 포함하는 기판의 엣지 연삭용 엣지휠 및 그 엣지휠의 제조방법
KR101920901B1 (ko) * 2017-07-24 2018-11-22 이화다이아몬드공업 주식회사 연삭블록을 활용한 엣지휠 및 그 제조방법
JP7093875B2 (ja) * 2021-06-24 2022-06-30 一郎 片山 ワーク加工装置、砥石、およびワーク加工方法

Also Published As

Publication number Publication date
KR20020065838A (ko) 2002-08-14
JP3434801B2 (ja) 2003-08-11
TW584585B (en) 2004-04-21
JP2002239912A (ja) 2002-08-28

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