JPS5528340A - Plating apparatus - Google Patents

Plating apparatus

Info

Publication number
JPS5528340A
JPS5528340A JP10079478A JP10079478A JPS5528340A JP S5528340 A JPS5528340 A JP S5528340A JP 10079478 A JP10079478 A JP 10079478A JP 10079478 A JP10079478 A JP 10079478A JP S5528340 A JPS5528340 A JP S5528340A
Authority
JP
Japan
Prior art keywords
plated
plating solution
plating
mask body
boundary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10079478A
Other languages
Japanese (ja)
Other versions
JPS6059998B2 (en
Inventor
Koji Hasegawa
Masato Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EEJA Ltd
Original Assignee
Electroplating Engineers of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electroplating Engineers of Japan Ltd filed Critical Electroplating Engineers of Japan Ltd
Priority to JP10079478A priority Critical patent/JPS6059998B2/en
Publication of JPS5528340A publication Critical patent/JPS5528340A/en
Publication of JPS6059998B2 publication Critical patent/JPS6059998B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE: To clearly distinguish the boundary of the plated part and unplated part, and recover the plating solution completely, by injecting the plating solution from above onto the material being plated of which part to be plated is divided and exposed by masks.
CONSTITUTION: A material being plated 20 is placed on a back side mask body 21 on a table 2, and a plating box 1 is lowered to contact a mask body 18 closely on the upper surface of the material being plated 20. The plating solution A is injected downward from an anode/nozzle 6, and an opening part 19 is electrolycally plated. After plating treatment, solenoid valves 8, 9 are operated to inject the air from an air supply pipe 5 through the nozzle 6 to blow off the plating solution remaining in the opening part 19 of the mask body and plating solution injection opening 11, and the plating solution is recovered into a tank 12 through a recovery route 4. Besides, since the mask body 18 is press-contacted to the material being plated 20 in the plating box 1, the plating solution does not pentrate into the nonplating part, so that the boundary may not be vague.
COPYRIGHT: (C)1980,JPO&Japio
JP10079478A 1978-08-18 1978-08-18 plating device Expired JPS6059998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10079478A JPS6059998B2 (en) 1978-08-18 1978-08-18 plating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10079478A JPS6059998B2 (en) 1978-08-18 1978-08-18 plating device

Publications (2)

Publication Number Publication Date
JPS5528340A true JPS5528340A (en) 1980-02-28
JPS6059998B2 JPS6059998B2 (en) 1985-12-27

Family

ID=14283324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10079478A Expired JPS6059998B2 (en) 1978-08-18 1978-08-18 plating device

Country Status (1)

Country Link
JP (1) JPS6059998B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288092A (en) * 1985-06-17 1986-12-18 Hitachi Ltd Partial plating method
JPH01180995A (en) * 1988-01-11 1989-07-18 Union Tool Kk Marking method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61288092A (en) * 1985-06-17 1986-12-18 Hitachi Ltd Partial plating method
JPH01180995A (en) * 1988-01-11 1989-07-18 Union Tool Kk Marking method

Also Published As

Publication number Publication date
JPS6059998B2 (en) 1985-12-27

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