JPS55113321A - Jig for heat treatment - Google Patents

Jig for heat treatment

Info

Publication number
JPS55113321A
JPS55113321A JP1980479A JP1980479A JPS55113321A JP S55113321 A JPS55113321 A JP S55113321A JP 1980479 A JP1980479 A JP 1980479A JP 1980479 A JP1980479 A JP 1980479A JP S55113321 A JPS55113321 A JP S55113321A
Authority
JP
Japan
Prior art keywords
jigs
quartz
supporting
wafer
rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1980479A
Other languages
Japanese (ja)
Inventor
Isao Shimura
Ichiro Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1980479A priority Critical patent/JPS55113321A/en
Publication of JPS55113321A publication Critical patent/JPS55113321A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent deformation in long hours' processing at high temperature by connecting groove-fitted jigs, made of quartz and supporting a wafer, by means of jigs made of Si or SiC.
CONSTITUTION: Quartz rods 1a, 1b, ... are provided with grooves 3 for supporting a wafer. Arc-shaped supporting jigs 2a, 2b, ... are made of Si or SiC for connecting and supporting the quartz jigs. By this structure, no deformation occurs on the jigs as a whole even if they are used at high temperature and in long hours. Since the groove-fitted rods are made of quartz, no small pieces stick to the wafer as in the case of Si rods, so that damage to the mask can be prevented in photo-etching.
COPYRIGHT: (C)1980,JPO&Japio
JP1980479A 1979-02-23 1979-02-23 Jig for heat treatment Pending JPS55113321A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980479A JPS55113321A (en) 1979-02-23 1979-02-23 Jig for heat treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980479A JPS55113321A (en) 1979-02-23 1979-02-23 Jig for heat treatment

Publications (1)

Publication Number Publication Date
JPS55113321A true JPS55113321A (en) 1980-09-01

Family

ID=12009518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980479A Pending JPS55113321A (en) 1979-02-23 1979-02-23 Jig for heat treatment

Country Status (1)

Country Link
JP (1) JPS55113321A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09120948A (en) * 1996-09-30 1997-05-06 Hitachi Ltd Wafer support device of semiconductor wafer heat treatment system and semiconductor wafer heat treatment system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056154A (en) * 1973-09-14 1975-05-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056154A (en) * 1973-09-14 1975-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09120948A (en) * 1996-09-30 1997-05-06 Hitachi Ltd Wafer support device of semiconductor wafer heat treatment system and semiconductor wafer heat treatment system

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