JPS55113321A - Jig for heat treatment - Google Patents
Jig for heat treatmentInfo
- Publication number
- JPS55113321A JPS55113321A JP1980479A JP1980479A JPS55113321A JP S55113321 A JPS55113321 A JP S55113321A JP 1980479 A JP1980479 A JP 1980479A JP 1980479 A JP1980479 A JP 1980479A JP S55113321 A JPS55113321 A JP S55113321A
- Authority
- JP
- Japan
- Prior art keywords
- jigs
- quartz
- supporting
- wafer
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent deformation in long hours' processing at high temperature by connecting groove-fitted jigs, made of quartz and supporting a wafer, by means of jigs made of Si or SiC.
CONSTITUTION: Quartz rods 1a, 1b, ... are provided with grooves 3 for supporting a wafer. Arc-shaped supporting jigs 2a, 2b, ... are made of Si or SiC for connecting and supporting the quartz jigs. By this structure, no deformation occurs on the jigs as a whole even if they are used at high temperature and in long hours. Since the groove-fitted rods are made of quartz, no small pieces stick to the wafer as in the case of Si rods, so that damage to the mask can be prevented in photo-etching.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980479A JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980479A JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55113321A true JPS55113321A (en) | 1980-09-01 |
Family
ID=12009518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980479A Pending JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55113321A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09120948A (en) * | 1996-09-30 | 1997-05-06 | Hitachi Ltd | Wafer support device of semiconductor wafer heat treatment system and semiconductor wafer heat treatment system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056154A (en) * | 1973-09-14 | 1975-05-16 |
-
1979
- 1979-02-23 JP JP1980479A patent/JPS55113321A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056154A (en) * | 1973-09-14 | 1975-05-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09120948A (en) * | 1996-09-30 | 1997-05-06 | Hitachi Ltd | Wafer support device of semiconductor wafer heat treatment system and semiconductor wafer heat treatment system |
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