JPS55113321A - Jig for heat treatment - Google Patents
Jig for heat treatmentInfo
- Publication number
- JPS55113321A JPS55113321A JP1980479A JP1980479A JPS55113321A JP S55113321 A JPS55113321 A JP S55113321A JP 1980479 A JP1980479 A JP 1980479A JP 1980479 A JP1980479 A JP 1980479A JP S55113321 A JPS55113321 A JP S55113321A
- Authority
- JP
- Japan
- Prior art keywords
- jigs
- quartz
- supporting
- wafer
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980479A JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980479A JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55113321A true JPS55113321A (en) | 1980-09-01 |
Family
ID=12009518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980479A Pending JPS55113321A (en) | 1979-02-23 | 1979-02-23 | Jig for heat treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55113321A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09120948A (ja) * | 1996-09-30 | 1997-05-06 | Hitachi Ltd | 半導体ウエハ熱処理装置のウエハ支持装置及び半導体ウエハ熱処理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056154A (ja) * | 1973-09-14 | 1975-05-16 |
-
1979
- 1979-02-23 JP JP1980479A patent/JPS55113321A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5056154A (ja) * | 1973-09-14 | 1975-05-16 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09120948A (ja) * | 1996-09-30 | 1997-05-06 | Hitachi Ltd | 半導体ウエハ熱処理装置のウエハ支持装置及び半導体ウエハ熱処理装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
MY103538A (en) | Microplastic structures, process for forming such structures, and photomask suitable for use in such process | |
JPS55113321A (en) | Jig for heat treatment | |
JPS52153005A (en) | Exhaust chamber of axial turbo-machine | |
JPS5227372A (en) | Photo mask processing system and its device | |
JPS5599719A (en) | Heat treatment jig of wafer | |
JPS52142972A (en) | Semiconductor production device | |
JPS548571A (en) | Pressure measuring device | |
JPS5434107A (en) | Fixing process of wafter | |
JPS5219882A (en) | Digital method of setting position | |
JPS52135667A (en) | Dicing method of semiconductor wafer | |
JPS5267838A (en) | High frequency heater | |
JPS51147623A (en) | A process for manufacturing silicon carbide fibers with high strength | |
JPS5314301A (en) | Fixing member | |
JPS525270A (en) | Photo-mask | |
JPS52129291A (en) | Semiconductor laser device | |
JPS5236282A (en) | Installing method for nuclear fuel assembly | |
JPS5362093A (en) | Fuel assembly | |
JPS5274951A (en) | High temperature heat exchanger | |
JPS5250438A (en) | Cooling process of heating element such as bearing and so on | |
JPS54153569A (en) | Heat treatment method for semiconductor wafer | |
JPS52147385A (en) | Round blade tool | |
JPS5546758A (en) | Mask for x-ray exposure | |
JPS5281977A (en) | Socket | |
JPS5243051A (en) | Holding cage for ball bearing | |
JPS52139363A (en) | Heat treatment method for wafers |