JPS5434107A - Fixing process of wafter - Google Patents

Fixing process of wafter

Info

Publication number
JPS5434107A
JPS5434107A JP9947177A JP9947177A JPS5434107A JP S5434107 A JPS5434107 A JP S5434107A JP 9947177 A JP9947177 A JP 9947177A JP 9947177 A JP9947177 A JP 9947177A JP S5434107 A JPS5434107 A JP S5434107A
Authority
JP
Japan
Prior art keywords
wafter
fixing process
fixing
fix
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9947177A
Other languages
Japanese (ja)
Inventor
Masahiko Yotsuyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9947177A priority Critical patent/JPS5434107A/en
Publication of JPS5434107A publication Critical patent/JPS5434107A/en
Pending legal-status Critical Current

Links

Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

PURPOSE: A process to fix a wafter automatically in a low cost by firm fixing a fixing piece to a shaft in heating and cooling.
COPYRIGHT: (C)1979,JPO&Japio
JP9947177A 1977-08-22 1977-08-22 Fixing process of wafter Pending JPS5434107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9947177A JPS5434107A (en) 1977-08-22 1977-08-22 Fixing process of wafter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9947177A JPS5434107A (en) 1977-08-22 1977-08-22 Fixing process of wafter

Publications (1)

Publication Number Publication Date
JPS5434107A true JPS5434107A (en) 1979-03-13

Family

ID=14248219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9947177A Pending JPS5434107A (en) 1977-08-22 1977-08-22 Fixing process of wafter

Country Status (1)

Country Link
JP (1) JPS5434107A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015500438A (en) * 2011-12-14 2015-01-05 ヌオーヴォ ピニォーネ ソシエタ ペル アチオニ Rotating machine including a machine rotor having a composite impeller and a metal shaft
US9810230B2 (en) 2009-05-08 2017-11-07 Nuovo Pignone Srl Impeller for a turbomachine and method for attaching a shroud to an impeller
US9810235B2 (en) 2009-11-23 2017-11-07 Massimo Giannozzi Mold for a centrifugal impeller, mold inserts and method for building a centrifugal impeller
US9816518B2 (en) 2009-11-23 2017-11-14 Massimo Giannozzi Centrifugal impeller and turbomachine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9810230B2 (en) 2009-05-08 2017-11-07 Nuovo Pignone Srl Impeller for a turbomachine and method for attaching a shroud to an impeller
US9810235B2 (en) 2009-11-23 2017-11-07 Massimo Giannozzi Mold for a centrifugal impeller, mold inserts and method for building a centrifugal impeller
US9816518B2 (en) 2009-11-23 2017-11-14 Massimo Giannozzi Centrifugal impeller and turbomachine
JP2015500438A (en) * 2011-12-14 2015-01-05 ヌオーヴォ ピニォーネ ソシエタ ペル アチオニ Rotating machine including a machine rotor having a composite impeller and a metal shaft
US9797255B2 (en) 2011-12-14 2017-10-24 Nuovo Pignone S.P.A. Rotary machine including a machine rotor with a composite impeller portion and a metal shaft portion

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