JPS52143760A - Quartz tube in heat treatment furnace - Google Patents
Quartz tube in heat treatment furnaceInfo
- Publication number
- JPS52143760A JPS52143760A JP6003876A JP6003876A JPS52143760A JP S52143760 A JPS52143760 A JP S52143760A JP 6003876 A JP6003876 A JP 6003876A JP 6003876 A JP6003876 A JP 6003876A JP S52143760 A JPS52143760 A JP S52143760A
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- heat treatment
- treatment furnace
- quartz
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a quartz tube of a long service life which does not give any advars adverse influence to the objects to be treated by providing ring belts at equal spacing on the outside circumference of a quartz core tube.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6003876A JPS52143760A (en) | 1976-05-26 | 1976-05-26 | Quartz tube in heat treatment furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6003876A JPS52143760A (en) | 1976-05-26 | 1976-05-26 | Quartz tube in heat treatment furnace |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20260683A Division JPS5997600A (en) | 1983-10-31 | 1983-10-31 | Quartz pipe in heat treatment furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52143760A true JPS52143760A (en) | 1977-11-30 |
Family
ID=13130492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6003876A Pending JPS52143760A (en) | 1976-05-26 | 1976-05-26 | Quartz tube in heat treatment furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52143760A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5997600A (en) * | 1983-10-31 | 1984-06-05 | Hitachi Ltd | Quartz pipe in heat treatment furnace |
JPS61288417A (en) * | 1985-06-17 | 1986-12-18 | Toshiba Ceramics Co Ltd | Heating furnace for manufacture of semiconductor |
JPS631324U (en) * | 1986-06-20 | 1988-01-07 | ||
JPS63217622A (en) * | 1987-03-06 | 1988-09-09 | Toshiba Ceramics Co Ltd | Silicon carbide jig for heat treatment of wafer |
-
1976
- 1976-05-26 JP JP6003876A patent/JPS52143760A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5997600A (en) * | 1983-10-31 | 1984-06-05 | Hitachi Ltd | Quartz pipe in heat treatment furnace |
JPS61288417A (en) * | 1985-06-17 | 1986-12-18 | Toshiba Ceramics Co Ltd | Heating furnace for manufacture of semiconductor |
JPS631324U (en) * | 1986-06-20 | 1988-01-07 | ||
JPH0220831Y2 (en) * | 1986-06-20 | 1990-06-06 | ||
JPS63217622A (en) * | 1987-03-06 | 1988-09-09 | Toshiba Ceramics Co Ltd | Silicon carbide jig for heat treatment of wafer |
JPH06105693B2 (en) * | 1987-03-06 | 1994-12-21 | 東芝セラミックス株式会社 | Silicon Carbide Jig for Wafer Heat Treatment |
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