JPS52143760A - Quartz tube in heat treatment furnace - Google Patents

Quartz tube in heat treatment furnace

Info

Publication number
JPS52143760A
JPS52143760A JP6003876A JP6003876A JPS52143760A JP S52143760 A JPS52143760 A JP S52143760A JP 6003876 A JP6003876 A JP 6003876A JP 6003876 A JP6003876 A JP 6003876A JP S52143760 A JPS52143760 A JP S52143760A
Authority
JP
Japan
Prior art keywords
quartz tube
heat treatment
treatment furnace
quartz
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6003876A
Other languages
Japanese (ja)
Inventor
Seiichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6003876A priority Critical patent/JPS52143760A/en
Publication of JPS52143760A publication Critical patent/JPS52143760A/en
Pending legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a quartz tube of a long service life which does not give any advars adverse influence to the objects to be treated by providing ring belts at equal spacing on the outside circumference of a quartz core tube.
COPYRIGHT: (C)1977,JPO&Japio
JP6003876A 1976-05-26 1976-05-26 Quartz tube in heat treatment furnace Pending JPS52143760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6003876A JPS52143760A (en) 1976-05-26 1976-05-26 Quartz tube in heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6003876A JPS52143760A (en) 1976-05-26 1976-05-26 Quartz tube in heat treatment furnace

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP20260683A Division JPS5997600A (en) 1983-10-31 1983-10-31 Quartz pipe in heat treatment furnace

Publications (1)

Publication Number Publication Date
JPS52143760A true JPS52143760A (en) 1977-11-30

Family

ID=13130492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6003876A Pending JPS52143760A (en) 1976-05-26 1976-05-26 Quartz tube in heat treatment furnace

Country Status (1)

Country Link
JP (1) JPS52143760A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997600A (en) * 1983-10-31 1984-06-05 Hitachi Ltd Quartz pipe in heat treatment furnace
JPS61288417A (en) * 1985-06-17 1986-12-18 Toshiba Ceramics Co Ltd Heating furnace for manufacture of semiconductor
JPS631324U (en) * 1986-06-20 1988-01-07
JPS63217622A (en) * 1987-03-06 1988-09-09 Toshiba Ceramics Co Ltd Silicon carbide jig for heat treatment of wafer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5997600A (en) * 1983-10-31 1984-06-05 Hitachi Ltd Quartz pipe in heat treatment furnace
JPS61288417A (en) * 1985-06-17 1986-12-18 Toshiba Ceramics Co Ltd Heating furnace for manufacture of semiconductor
JPS631324U (en) * 1986-06-20 1988-01-07
JPH0220831Y2 (en) * 1986-06-20 1990-06-06
JPS63217622A (en) * 1987-03-06 1988-09-09 Toshiba Ceramics Co Ltd Silicon carbide jig for heat treatment of wafer
JPH06105693B2 (en) * 1987-03-06 1994-12-21 東芝セラミックス株式会社 Silicon Carbide Jig for Wafer Heat Treatment

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