JPS5432984A - Integrated circuit device - Google Patents
Integrated circuit deviceInfo
- Publication number
- JPS5432984A JPS5432984A JP9866477A JP9866477A JPS5432984A JP S5432984 A JPS5432984 A JP S5432984A JP 9866477 A JP9866477 A JP 9866477A JP 9866477 A JP9866477 A JP 9866477A JP S5432984 A JPS5432984 A JP S5432984A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit device
- oxidizing
- insulator
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To manufacture an element insulation layer by filling a groove, whose flank except its bottom is surrounded with an insulator, with Si or poly Si and by oxidizing it.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9866477A JPS5432984A (en) | 1977-08-19 | 1977-08-19 | Integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9866477A JPS5432984A (en) | 1977-08-19 | 1977-08-19 | Integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5432984A true JPS5432984A (en) | 1979-03-10 |
Family
ID=14225768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9866477A Pending JPS5432984A (en) | 1977-08-19 | 1977-08-19 | Integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5432984A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58182A (en) * | 1981-06-25 | 1983-01-05 | Seiko Epson Corp | Semiconductor device |
JPS58142540A (en) * | 1982-02-19 | 1983-08-24 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS58168260A (en) * | 1982-03-30 | 1983-10-04 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device and manufacture thereof |
JPS598351A (en) * | 1982-06-30 | 1984-01-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Method of forming insulating region on semiconductor substrate |
US4470062A (en) * | 1979-08-31 | 1984-09-04 | Hitachi, Ltd. | Semiconductor device having isolation regions |
JPS60161631A (en) * | 1984-02-01 | 1985-08-23 | Hitachi Ltd | Semiconductor device |
JPS60208843A (en) * | 1984-04-03 | 1985-10-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS60218854A (en) * | 1984-04-13 | 1985-11-01 | Nec Corp | Element isolating method of semiconductor device |
JPS6257232A (en) * | 1985-09-05 | 1987-03-12 | イ−ストマン コダツク カンパニ− | Isolation device and making thereof |
JPS63141346A (en) * | 1986-12-03 | 1988-06-13 | Sony Corp | Manufacture of semiconductor device |
-
1977
- 1977-08-19 JP JP9866477A patent/JPS5432984A/en active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4470062A (en) * | 1979-08-31 | 1984-09-04 | Hitachi, Ltd. | Semiconductor device having isolation regions |
JPS58182A (en) * | 1981-06-25 | 1983-01-05 | Seiko Epson Corp | Semiconductor device |
JPS58142540A (en) * | 1982-02-19 | 1983-08-24 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS58168260A (en) * | 1982-03-30 | 1983-10-04 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device and manufacture thereof |
JPS598351A (en) * | 1982-06-30 | 1984-01-17 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Method of forming insulating region on semiconductor substrate |
JPS60161631A (en) * | 1984-02-01 | 1985-08-23 | Hitachi Ltd | Semiconductor device |
JPS60208843A (en) * | 1984-04-03 | 1985-10-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS60218854A (en) * | 1984-04-13 | 1985-11-01 | Nec Corp | Element isolating method of semiconductor device |
JPS6257232A (en) * | 1985-09-05 | 1987-03-12 | イ−ストマン コダツク カンパニ− | Isolation device and making thereof |
JPS63141346A (en) * | 1986-12-03 | 1988-06-13 | Sony Corp | Manufacture of semiconductor device |
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