JPH0658955A - Probe head for four-terminal resistance measurement - Google Patents
Probe head for four-terminal resistance measurementInfo
- Publication number
- JPH0658955A JPH0658955A JP4210578A JP21057892A JPH0658955A JP H0658955 A JPH0658955 A JP H0658955A JP 4210578 A JP4210578 A JP 4210578A JP 21057892 A JP21057892 A JP 21057892A JP H0658955 A JPH0658955 A JP H0658955A
- Authority
- JP
- Japan
- Prior art keywords
- probes
- probe
- pair
- probe head
- insulating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、プリント配線基板など
の抵抗測定を４端子法で行う際に用いる４端子抵抗測定
用プローブヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe head for four-terminal resistance measurement used when the resistance of a printed wiring board or the like is measured by the four-terminal method.
【０００２】近年、プリント配線基板では、高密度化が
進み、また布線間の信号伝播における速度に多大の影響
を与える導体抵抗の精密な測定が必要となっている。こ
のため、被測定基板の表面形状に左右されず的確に接触
でき、また高密度化された基板に対しても対応が可能な
構造を持つ４端子抵抗測定用プローブヘッドが要求され
ている。In recent years, the density of printed wiring boards has been increasing, and it is necessary to precisely measure the conductor resistance which greatly affects the speed of signal propagation between wirings. Therefore, there is a demand for a four-terminal resistance measurement probe head that has a structure that can be accurately contacted regardless of the surface shape of the substrate to be measured, and that can cope with a highly densified substrate.
【０００３】[0003]
【従来の技術】導体抵抗の測定に用いる従来のプローブ
には、スプリングコンタクトプローブやプローブカード
などが用いられていた。2. Description of the Related Art A spring contact probe, a probe card, or the like has been used as a conventional probe for measuring conductor resistance.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記ス
プリングコンタクトプローブでは、２端子法で測定する
場合は被測定物とプローブ先端の接触抵抗のばらつきに
より測定精度が悪く、また４端子法で測定する場合は１
箇所に２本のプローブが必要であり、高密度基板の微小
導体に２本のプローブを接触させることが困難であるな
どの問題があった。また、プローブカードでは、高密度
にプローブを配置することが困難であり、然も加圧方向
のストロークが少ないため基板表面の凹凸に対して接触
良好とならないといった問題があった。However, in the above-mentioned spring contact probe, when the two-terminal method is used for measurement, the measurement accuracy is poor due to the variation in the contact resistance between the object to be measured and the probe tip, and when the four-terminal method is used for the measurement. Is 1
There are problems such as the need for two probes at the location, and the difficulty of bringing the two probes into contact with the minute conductors of the high-density substrate. Further, in the probe card, it is difficult to arrange the probes at a high density, and since there are few strokes in the pressing direction, there is a problem in that good contact cannot be obtained with unevenness on the substrate surface.
【０００５】本発明は、プリント配線基板などの抵抗測
定を４端子法で行う際に用いる４端子抵抗測定用プロー
ブヘッドに関し、被測定基板が表面に凹凸を有してもま
た高密度化されている場合でも測定を可能にさせる４端
子抵抗測定用プローブヘッドの提供を目的とする。The present invention relates to a probe head for four-terminal resistance measurement, which is used when the resistance of a printed wiring board or the like is measured by the four-terminal method. An object of the present invention is to provide a probe head for four-terminal resistance measurement that enables measurement even when there is.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、本発明による４端子抵抗測定用プローブヘッドは、
一方を電流供給用にし他方を電圧測定用にする対のプロ
ーブを有し、該対のブローブのそれぞれは、長手方向に
沿った平面を有して先端を尖らせた線状の導電性弾性体
であり、該対のプローブの先端側は、該平面同士が絶縁
膜の介在により絶縁されて滑動可能に対向して両プロー
ブの先端が揃い、その対向形態で第１絶縁板の孔を貫通
して、それぞれのブローブの先端が該孔に沿った方向に
移動可能であり、該対のプローブの基部側は、両プロー
ブの間がそれぞれのプローブの中間の異なった位置での
同方向への曲げにより離間されて、その離間形態でそれ
ぞれのプローブの基部が第２絶縁板に固定されており、
該第１絶縁板と該第２絶縁板が相互に固定されているこ
とを特徴としている。In order to achieve the above object, a probe head for four-terminal resistance measurement according to the present invention comprises:
The probe has a pair of probes, one of which supplies current and the other of which measures voltage, and each probe of the pair has a linear conductive elastic body having a flat surface along the longitudinal direction and having a sharp tip. At the tip side of the pair of probes, the planes are insulated by the interposition of an insulating film and slidably face each other so that the tips of both probes are aligned, and penetrate the hole of the first insulating plate in the facing form. The tip of each probe is movable in the direction along the hole, and the base side of the pair of probes is bent in the same direction between the probes at different positions in the middle of each probe. Are separated by, and the base of each probe is fixed to the second insulating plate in the separated form,
The first insulating plate and the second insulating plate are fixed to each other.
【０００７】[0007]
【作用】一方を電流供給用にし他方を電圧測定用にする
対のプローブが上記のように構成されるので、電流供給
用の先端と電圧測定用の先端を接近させることができ
て、微小導体に対して両先端を接触させることが可能と
なる。また、各プローブの基部側の撓みによりそれぞれ
の先端の加圧ストロークを大きくとることができて、被
測定基板の表面形状に左右されることなく各先端を導体
に良好に接触させることが可能となる。Since the pair of probes, one of which is for supplying current and the other of which is for measuring voltage, are configured as described above, the tip for supplying current and the tip for measuring voltage can be brought close to each other, and the fine conductor It is possible to bring both tips into contact with each other. In addition, it is possible to make the pressing stroke of each tip large due to the bending of the base side of each probe, and it is possible to bring each tip into good contact with the conductor without being influenced by the surface shape of the measured substrate. Become.
【０００８】このことにより本プローブヘッドは、被測
定基板が表面に凹凸を有してもまた高密度化されている
場合でも、４端子法による測定を可能にさせる。As a result, the present probe head enables measurement by the four-terminal method even when the substrate to be measured has unevenness on the surface or has a high density.
【０００９】[0009]
【実施例】以下本発明の実施例について図１、図２を用
いて説明する。図１は実施例１の側面図であり、図２は
実施例２の側面図である。Embodiments of the present invention will be described below with reference to FIGS. 1 is a side view of the first embodiment, and FIG. 2 is a side view of the second embodiment.
【００１０】図１において、１Ａと１Ｂは一方を電流供
給用にし他方を電圧測定用にする対のプローブ、２は第
１絶縁板、３は第２絶縁板、４はパイプ、である。対の
プローブ１Ａと１Ｂのそれぞれは、長手方向に沿った平
面を有して先端を尖らした線状の導電性弾性体であり、
ここでは、断面形状が半円であり、材料がベリリウム銅
（ＢｅＣｕ）である。断面形状は半円でなくとも良く、
材料もベリリウム銅に限定する必要はない。In FIG. 1, 1A and 1B are a pair of probes, one for supplying current and the other for measuring voltage, 2 is a first insulating plate, 3 is a second insulating plate, and 4 is a pipe. Each of the pair of probes 1A and 1B is a linear conductive elastic body having a plane along the longitudinal direction and having a pointed tip,
Here, the cross-sectional shape is a semicircle, and the material is beryllium copper (BeCu). The cross-sectional shape does not have to be a semicircle,
The material also need not be limited to beryllium copper.
【００１１】対のプローブ１Ａと１Ｂの先端側は、上記
平面同士が絶縁膜の介在により絶縁されて滑動可能に対
向して両プローブ１Ａ，１Ｂの先端が揃い、その対向形
態で第１絶縁板２の孔２ａを貫通して、それぞれのブロ
ーブ１Ａ，１Ｂの先端が孔２ａに沿った方向に移動可能
である。On the tip side of the pair of probes 1A and 1B, the above-mentioned planes are insulated by the interposition of an insulating film and slidably face each other so that the tips of both probes 1A and 1B are aligned with each other, and the first insulating plate is in the facing form. The tips of the probes 1A and 1B are movable in the direction along the hole 2a through the two holes 2a.
【００１２】対のプローブの１Ａと１Ｂ基部側は、両プ
ローブ１Ａ，１Ｂの間がそれぞれのプローブ１Ａ，１Ｂ
の中間の異なった位置での同方向へのＬ字状な曲げ５に
より離間されて、その離間形態でそれぞれのプローブ１
Ａ，１Ｂの基部がパイプ４に嵌められて第２絶縁板３に
固定されている。On the base side of the pair of probes 1A and 1B, the space between both probes 1A and 1B is the respective probe 1A, 1B.
Are separated by L-shaped bends 5 in the same direction at different positions in the middle of the
The base portions of A and 1B are fitted into the pipe 4 and fixed to the second insulating plate 3.
【００１３】プローブ１Ａと１Ｂの間を絶縁する上記絶
縁膜は、プローブ１Ａ，１Ｂの先端部分から曲げ５の部
分までを絶縁コーティングした膜でなり、パイプ４は、
導電体からなり、プローブ１Ａまたは１Ｂの曲げ５の部
位から基部の方に至る自由長を定める。The insulating film for insulating between the probes 1A and 1B is a film in which the tip portions of the probes 1A and 1B to the bend 5 are insulation-coated, and the pipe 4 is
It is made of a conductor and defines a free length from the bent portion 5 of the probe 1A or 1B to the base portion.
【００１４】そして第１の絶縁板２と第２の絶縁板３が
相互に固定されている。上述の構造では、プローブ１
Ａ，１Ｂは、それぞれ単独に、基部の固定に対して曲げ
５の部分が撓むことにより先端の加圧ストロークを大き
くとることができ、然も、両先端が接近している。ま
た、上記加圧ストロークに対するスチフネスは、先の自
由長に依存するのでパイプ４の長さにより加減すること
ができる。The first insulating plate 2 and the second insulating plate 3 are fixed to each other. In the above structure, the probe 1
Each of A and 1B can independently increase the pressing stroke of the tip by bending the portion of bending 5 with respect to the fixing of the base portion, and both tips are still close to each other. Further, the stiffness with respect to the pressurizing stroke depends on the free length, and can be adjusted depending on the length of the pipe 4.
【００１５】このことからこのプローブヘッドは、使用
時に第１絶縁板２を被測定基板に対向接近させることに
より、微小導体に対してプローブ１Ａ，１Ｂの両先端を
接触させることが可能となり、また、被測定基板の表面
形状に左右されることなく各先端を導体に良好に接触さ
せることが可能となる。From this fact, this probe head can bring both ends of the probes 1A and 1B into contact with the minute conductor by bringing the first insulating plate 2 close to the substrate to be measured in use. It is possible to bring each tip into good contact with the conductor without being influenced by the surface shape of the substrate to be measured.
【００１６】実施例２を示す図２において、このプロー
ブヘッドは、被測定基板のプローブ接触箇所の配列に合
わせてプローブを配列した一例である。図中、６Ａと６
Ｂ，７Ａと７Ｂ，８Ａと８Ｂ，９Ａと９Ｂのそれぞれは
実施例１における対のプローブ１Ａと１Ｂに相当する対
のプローブ、１０及び１１は同じく第１絶縁板２及び第
２絶縁板３に相当する第１絶縁板及び第２絶縁板、１２
は同じくパイプ４に相当するパイプ、１３は同じく曲げ
５に相当する曲げ、１４及び１５は第１絶縁板１０と第
２絶縁板１１の相互間を固定する固定板、である。In FIG. 2 showing the second embodiment, this probe head is an example in which the probes are arranged in accordance with the arrangement of the probe contact points on the substrate to be measured. 6A and 6 in the figure
B, 7A and 7B, 8A and 8B, 9A and 9B correspond to the pair of probes 1A and 1B in the first embodiment, and 10 and 11 are the same as the first insulating plate 2 and the second insulating plate 3. Corresponding first insulating plate and second insulating plate, 12
Is a pipe corresponding to the pipe 4, 13 is a bend corresponding to the bend 5, and 14 and 15 are fixing plates for fixing the first insulating plate 10 and the second insulating plate 11 to each other.
【００１７】対のプローブ６Ａと６Ｂ〜９Ａと９Ｂは一
列に並び、その並びの組を９組並列させて、第１絶縁膜
１０から突出する各プローブ先端の配列を被測定基板の
プローブ接触箇所の配列に合わせてある。また、この先
端の配列が比較的に蜜なので、曲げ１３の曲げ角度を４
５度にして、第２絶縁膜１１におけるプローブ基部の配
列に無理が生じないようにしてある。The pair of probes 6A and 6B to 9A and 9B are arranged in a line, and 9 sets of the arranged lines are arranged in parallel, and the array of the tips of the probes protruding from the first insulating film 10 is arranged at the probe contact point of the substrate to be measured. It is adapted to the arrangement of. Also, since the arrangement of this tip is relatively tight, the bending angle of bending 13 is set to 4
It is set to 5 degrees so that the arrangement of the probe bases in the second insulating film 11 does not become unreasonable.
【００１８】そしてこの実施例２のプローブヘッドも、
対のプローブの両先端が接近しており、且つ各プローブ
が実施例１のプローブと同様に機能するので、実施例１
のプローブヘッドと同様に、被測定基板が表面に凹凸を
有してもまた高密度化されている場合でも４端子法によ
る測定を可能にさせる。The probe head of the second embodiment is also
Since both tips of the pair of probes are close to each other and each probe functions in the same manner as the probe of Example 1, Example 1
Similar to the probe head of 1), even if the substrate to be measured has unevenness on the surface or is densified, measurement by the four-terminal method becomes possible.
【００１９】[0019]
【発明の効果】以上説明したように本発明によれば、プ
リント配線基板などの抵抗測定を４端子法で行う際に用
いる４端子抵抗測定用プローブヘッドに関し、被測定基
板が表面に凹凸を有してもまた高密度化されている場合
でも測定を可能にさせる４端子抵抗測定用プローブヘッ
ドが提供されて、高密度化されたプリント配線基板に対
する４端子法の測定を安定化させる効果がある。As described above, according to the present invention, there is provided a 4-terminal resistance measuring probe head used when the resistance of a printed wiring board or the like is measured by the 4-terminal method. A probe head for 4-terminal resistance measurement that enables measurement even when the density is high is provided, and it has an effect of stabilizing the measurement by the 4-terminal method for a high-density printed wiring board. .
【図１】 実施例１の側面図FIG. 1 is a side view of the first embodiment.
【図２】 実施例２の正面図と側面図FIG. 2 is a front view and a side view of the second embodiment.
１Ａ，１Ｂ，６Ａ，６Ｂ〜９Ａ，９Ｂ プローブ ２，１０ 第１絶縁板 ２ａ 孔 ３，１１ 第２絶縁板 ４，１２ パイプ ５，１３ 曲げ １４，１５ 固定板 1A, 1B, 6A, 6B-9A, 9B Probe 2,10 1st insulating plate 2a hole 3,11 2nd insulating plate 4,12 Pipe 5,13 Bending 14,15 Fixing plate
Claims (1)
にする対のプローブを有し、 該対のブローブのそれぞれは、長手方向に沿った平面を
有して先端を尖らせた線状の導電性弾性体であり、 該対のプローブの先端側は、該平面同士が絶縁膜の介在
により絶縁されて滑動可能に対向して両プローブの先端
が揃い、その対向形態で第１絶縁板の孔を貫通して、そ
れぞれのブローブの先端が該孔に沿った方向に移動可能
であり、 該対のプローブの基部側は、両プローブの間がそれぞれ
のプローブの中間の異なった位置での同方向への曲げに
より離間されて、その離間形態でそれぞれのプローブの
基部が第２絶縁板に固定されており、 該第１絶縁板と該第２絶縁板が相互に固定されているこ
とを特徴とする４端子抵抗測定用プローブヘッド。1. A pair of probes, one of which is for supplying current and the other of which is for measuring voltage, each of the probes of the pair having a plane along the longitudinal direction and having a pointed linear shape. And the tips of the pair of probes are slidably opposed to each other by the interposition of an insulating film so that the tips of both the probes are aligned. Through each of the holes, the tip of each probe is movable in a direction along the hole, and the base side of the pair of probes is located between the two probes at different positions in the middle of each probe. The probes are separated by bending in the same direction, and the bases of the probes are fixed to the second insulating plate in the separated form, and the first insulating plate and the second insulating plate are fixed to each other. Characteristic 4-terminal resistance measurement probe head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21057892A JP3190128B2 (en) | 1992-08-07 | 1992-08-07 | 4-terminal resistance measurement probe head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21057892A JP3190128B2 (en) | 1992-08-07 | 1992-08-07 | 4-terminal resistance measurement probe head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0658955A true JPH0658955A (en) | 1994-03-04 |
| JP3190128B2 JP3190128B2 (en) | 2001-07-23 |
Family
ID=16591635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21057892A Expired - Lifetime JP3190128B2 (en) | 1992-08-07 | 1992-08-07 | 4-terminal resistance measurement probe head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3190128B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995023979A1 (en) * | 1994-03-02 | 1995-09-08 | Industrial Research Limited | A resistance network |
| JP2004077191A (en) * | 2002-08-12 | 2004-03-11 | Micronics Japan Co Ltd | Electrical connection apparatus |
| WO2006003722A1 (en) * | 2004-07-05 | 2006-01-12 | Kabushiki Kaisha Nihon Micronics | Contact block and electrical connection device |
| JP2008076268A (en) * | 2006-09-22 | 2008-04-03 | Nidec-Read Corp | Inspection tool |
| KR100830352B1 (en) * | 2006-12-21 | 2008-05-19 | 주식회사 파이컴 | Probe tip, probe card, method of manufacturing the probe tip and method of manufacturing a probe structure |
| KR100852625B1 (en) * | 2006-12-04 | 2008-08-18 | 가부시키가이샤 니혼 마이크로닉스 | Contact Block and Electrical Connection Device |
-
1992
- 1992-08-07 JP JP21057892A patent/JP3190128B2/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995023979A1 (en) * | 1994-03-02 | 1995-09-08 | Industrial Research Limited | A resistance network |
| US5867018A (en) * | 1994-03-02 | 1999-02-02 | Industrial Research Limited | High accuracy four-terminal standard resistor for use in electrical metrology |
| JP2004077191A (en) * | 2002-08-12 | 2004-03-11 | Micronics Japan Co Ltd | Electrical connection apparatus |
| WO2006003722A1 (en) * | 2004-07-05 | 2006-01-12 | Kabushiki Kaisha Nihon Micronics | Contact block and electrical connection device |
| JPWO2006003722A1 (en) * | 2004-07-05 | 2008-04-17 | 株式会社日本マイクロニクス | Contact block and electrical connection device |
| US7404719B2 (en) | 2004-07-05 | 2008-07-29 | Kabushiki Kaisha Nihon Micronics | Contact block and electrical connecting apparatus |
| JP4571640B2 (en) * | 2004-07-05 | 2010-10-27 | 株式会社日本マイクロニクス | Contact block and electrical connection device |
| JP2008076268A (en) * | 2006-09-22 | 2008-04-03 | Nidec-Read Corp | Inspection tool |
| KR100852625B1 (en) * | 2006-12-04 | 2008-08-18 | 가부시키가이샤 니혼 마이크로닉스 | Contact Block and Electrical Connection Device |
| KR100830352B1 (en) * | 2006-12-21 | 2008-05-19 | 주식회사 파이컴 | Probe tip, probe card, method of manufacturing the probe tip and method of manufacturing a probe structure |
| WO2008075918A1 (en) * | 2006-12-21 | 2008-06-26 | Phicom Corporation | Probe tip, probe card, method of manufacturing a probe tip and method of manufacturing a probe structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3190128B2 (en) | 2001-07-23 |
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