JP7008633B2 - 弾性波フィルタ装置 - Google Patents
弾性波フィルタ装置 Download PDFInfo
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- JP7008633B2 JP7008633B2 JP2018544960A JP2018544960A JP7008633B2 JP 7008633 B2 JP7008633 B2 JP 7008633B2 JP 2018544960 A JP2018544960 A JP 2018544960A JP 2018544960 A JP2018544960 A JP 2018544960A JP 7008633 B2 JP7008633 B2 JP 7008633B2
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- 239000011295 pitch Substances 0.000 claims description 68
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- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
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- 229910052796 boron Inorganic materials 0.000 description 1
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- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/1457—Transducers having different finger widths
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
- H03H9/725—Duplexers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/01—Frequency selective two-port networks
- H03H7/0153—Electrical filters; Controlling thereof
- H03H7/0161—Bandpass filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/46—Networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14544—Transducers of particular shape or position
- H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6436—Coupled resonator filters having one acoustic track only
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6423—Means for obtaining a particular transfer characteristic
- H03H9/6433—Coupled resonator filters
- H03H9/6483—Ladder SAW filters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/005—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission adapting radio receivers, transmitters andtransceivers for operation on two or more bands, i.e. frequency ranges
- H04B1/0053—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission adapting radio receivers, transmitters andtransceivers for operation on two or more bands, i.e. frequency ranges with common antenna for more than one band
- H04B1/0057—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission adapting radio receivers, transmitters andtransceivers for operation on two or more bands, i.e. frequency ranges with common antenna for more than one band using diplexing or multiplexing filters for selecting the desired band
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
2a~2d…第1~第4の帯域通過型フィルタ
3…アンテナ端子
4a,4b…第1,第2の信号端子
5…IDT電極
5a1…電極指
6a,6b…反射器
6a1,6b1…電極指
7…圧電薄膜
8…低音速膜
9…支持基板
10…誘電体膜
25…IDT電極
36a,36b…反射器
55…IDT電極
56a,56b…反射器
62a…第1の帯域通過型フィルタ
67…縦結合共振子型弾性波フィルタ
72a…第1の帯域通過型フィルタ
L1,L2…インダクタ
P1~P4,P75…並列腕共振子
P61,P62…弾性波共振子
S1~S5,S45…直列腕共振子
S61,S62…弾性波共振子
Claims (6)
- アンテナに接続されるアンテナ端子と、
前記アンテナ端子に電気的に接続されている第1の信号端子と、
前記アンテナ端子に電気的に接続されている第2の信号端子と、
前記アンテナ端子と前記第1の信号端子との間に接続されている複数の第1の弾性波共振子を有し、かつ第1の通過帯域を有する第1の帯域通過型フィルタと、
前記アンテナ端子と前記第2の信号端子との間に接続されており、前記第1の通過帯域より高域側である第2の通過帯域を有する第2の帯域通過型フィルタと、
を備え、
前記第1の帯域通過型フィルタが少なくとも一部に圧電性を有する基板を有し、前記第1の弾性波共振子が、前記基板上に設けられているIDT電極と、前記IDT電極の弾性波伝搬方向両側に配置されている反射器と、を有し、
前記複数の第1の弾性波共振子のうちの、最も前記アンテナ端子側に配置されている前記第1の弾性波共振子のみの前記IDT電極及び前記反射器のうち少なくとも一方において、少なくとも一部の電極指ピッチが他の部分の電極指ピッチと異なっており、
最も前記アンテナ端子側に配置されている前記第1の弾性波共振子の前記IDT電極が、弾性波伝搬方向に並ぶ3種以上の領域を有し、同じ領域内において電極指ピッチが同じであり、異なる領域間において電極指ピッチが異なる、弾性波フィルタ装置。 - 前記第1の帯域通過型フィルタが、前記アンテナ端子と前記第1の信号端子とを接続している直列腕と、グラウンド電位との間に接続されている第2の弾性波共振子を有し、
最も前記アンテナ端子側に配置されている前記第1の弾性波共振子より前記第1の信号端子側に、前記第2の弾性波共振子が配置されている、請求項1に記載の弾性波フィルタ装置。 - 前記第1の帯域通過型フィルタが、前記アンテナ端子と前記第1の信号端子とを接続している直列腕と、グラウンド電位との間に接続されている第2の弾性波共振子を有し、
最も前記アンテナ端子側に配置されている前記第1の弾性波共振子より前記アンテナ端子側に、前記第2の弾性波共振子が配置されている、請求項1または2に記載の弾性波フィルタ装置。 - 前記第1の帯域通過型フィルタがラダー型フィルタであり、前記第1の弾性波共振子が直列腕共振子であり、前記第2の弾性波共振子が並列腕共振子である、請求項2または3に記載の弾性波フィルタ装置。
- 前記第1の帯域通過型フィルタが、前記アンテナ端子と前記第1の信号端子との間に接続されている縦結合共振子型弾性波フィルタをさらに有し、前記第1の通過帯域が前記縦結合共振子型弾性波フィルタにより構成されている、請求項1~3のいずれか1項に記載の弾性波フィルタ装置。
- 前記アンテナ端子に接続されている、前記第1,第2の帯域通過型フィルタ以外の少なくとも1つの帯域通過型フィルタをさらに備える、請求項1~5のいずれか1項に記載の弾性波フィルタ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2016201710 | 2016-10-13 | ||
JP2016201710 | 2016-10-13 | ||
PCT/JP2017/035498 WO2018070273A1 (ja) | 2016-10-13 | 2017-09-29 | 弾性波フィルタ装置 |
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JPWO2018070273A1 JPWO2018070273A1 (ja) | 2019-06-24 |
JP7008633B2 true JP7008633B2 (ja) | 2022-01-25 |
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US (1) | US10812043B2 (ja) |
JP (1) | JP7008633B2 (ja) |
KR (1) | KR102399689B1 (ja) |
CN (1) | CN109845105B (ja) |
WO (1) | WO2018070273A1 (ja) |
Families Citing this family (7)
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US11349452B2 (en) * | 2018-06-15 | 2022-05-31 | Resonant Inc. | Transversely-excited film bulk acoustic filters with symmetric layout |
JP7250533B2 (ja) * | 2019-01-21 | 2023-04-03 | 京セラ株式会社 | 弾性波装置 |
JP7344662B2 (ja) | 2019-03-26 | 2023-09-14 | 太陽誘電株式会社 | マルチプレクサ |
US11881836B2 (en) * | 2019-11-25 | 2024-01-23 | Skyworks Solutions, Inc. | Cascaded resonator with different reflector pitch |
JP2021141500A (ja) * | 2020-03-06 | 2021-09-16 | 株式会社村田製作所 | 弾性波フィルタ装置およびそれを用いたマルチプレクサ |
JP7188406B2 (ja) * | 2020-03-06 | 2022-12-13 | 株式会社村田製作所 | 弾性波フィルタ装置およびそれを用いたマルチプレクサ |
JP7468627B2 (ja) * | 2020-03-31 | 2024-04-16 | 株式会社村田製作所 | マルチプレクサ |
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JP2000261288A (ja) | 1999-03-11 | 2000-09-22 | Murata Mfg Co Ltd | 弾性表面波フィルタ、デュプレクサ、通信機装置 |
JP2005295203A (ja) | 2004-03-31 | 2005-10-20 | Tdk Corp | デュプレクサ |
WO2015080278A1 (ja) | 2013-11-29 | 2015-06-04 | 京セラ株式会社 | 弾性波素子、分波器および通信装置 |
JP2015201808A (ja) | 2014-04-10 | 2015-11-12 | 太陽誘電株式会社 | マルチプレクサ |
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JP2901181B2 (ja) * | 1996-07-24 | 1999-06-07 | 五洋電子工業株式会社 | アンテナ共用器 |
JP3224202B2 (ja) * | 1996-11-28 | 2001-10-29 | 富士通株式会社 | 弾性表面波装置 |
JP2005244669A (ja) * | 2004-02-26 | 2005-09-08 | Fujitsu Media Device Kk | 弾性表面波装置 |
US7339445B2 (en) * | 2005-10-07 | 2008-03-04 | Infineon Technologies Ag | BAW duplexer without phase shifter |
JP4943137B2 (ja) | 2006-12-25 | 2012-05-30 | 京セラ株式会社 | 分波器および通信装置 |
WO2010035372A1 (ja) * | 2008-09-24 | 2010-04-01 | 株式会社村田製作所 | 弾性波フィルタ装置 |
JP5018894B2 (ja) * | 2008-11-25 | 2012-09-05 | 株式会社村田製作所 | 弾性波フィルタ装置 |
JP2012028896A (ja) | 2010-07-21 | 2012-02-09 | Taiyo Yuden Co Ltd | 分波器 |
DE112011103018B4 (de) * | 2010-09-10 | 2016-03-24 | Murata Manufacturing Co., Ltd. | Verzweigungsfilter für elastische Wellen |
US9419585B2 (en) * | 2013-08-22 | 2016-08-16 | Murata Manufacturing Co., Ltd. | Elastic wave filter device and duplexer |
EP3176948B1 (en) * | 2014-07-30 | 2021-03-17 | Kyocera Corporation | Elastic wave element, filter element, and communication device |
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WO2016104598A1 (ja) * | 2014-12-26 | 2016-06-30 | 京セラ株式会社 | 弾性波装置 |
JP6658070B2 (ja) * | 2016-02-24 | 2020-03-04 | 株式会社村田製作所 | マルチプレクサ、送信装置および受信装置 |
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2017
- 2017-09-29 KR KR1020197008955A patent/KR102399689B1/ko active IP Right Grant
- 2017-09-29 WO PCT/JP2017/035498 patent/WO2018070273A1/ja active Application Filing
- 2017-09-29 JP JP2018544960A patent/JP7008633B2/ja active Active
- 2017-09-29 CN CN201780062682.0A patent/CN109845105B/zh active Active
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2019
- 2019-04-04 US US16/374,765 patent/US10812043B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000261288A (ja) | 1999-03-11 | 2000-09-22 | Murata Mfg Co Ltd | 弾性表面波フィルタ、デュプレクサ、通信機装置 |
JP2005295203A (ja) | 2004-03-31 | 2005-10-20 | Tdk Corp | デュプレクサ |
WO2015080278A1 (ja) | 2013-11-29 | 2015-06-04 | 京セラ株式会社 | 弾性波素子、分波器および通信装置 |
JP2015201808A (ja) | 2014-04-10 | 2015-11-12 | 太陽誘電株式会社 | マルチプレクサ |
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CN109845105A (zh) | 2019-06-04 |
JPWO2018070273A1 (ja) | 2019-06-24 |
KR20190049761A (ko) | 2019-05-09 |
WO2018070273A1 (ja) | 2018-04-19 |
US20190238116A1 (en) | 2019-08-01 |
KR102399689B1 (ko) | 2022-05-19 |
US10812043B2 (en) | 2020-10-20 |
CN109845105B (zh) | 2023-06-13 |
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