JP6431106B2 - ナノ構造材料の方法および素子 - Google Patents
ナノ構造材料の方法および素子 Download PDFInfo
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Description
本実施例では、図(a)でも示されるように、量子ドット(QD)を、UVバックライトLEDによって励起されたレプリカモールドした軟質ポリマーに基づくPC構造に組み込んだ。UV励起源をPCの共振モードに結合し、PCの中のQDが受ける電界の大きさを増加させることによって、結合波長での増強された励起をもたらし、したがって、PC構造を伴わないときに起こるよりも大きい光子出力を生成する。非対称のPCは、QD放射の波長での共振を生成するように設計され、PCの表面に対して効率的に垂直に向けられた光子放出をもたらす。図2でさらに示されるように、2つのPC設計を含むチェッカーボードパターンで、交互配置した表面を設計し、製作した。どちらの領域も同じUV励起波長に対して共振を生成するように設計したが、各領域は、異なるQD放射波長に対して最適化した。したがって、特定の全出力スペクトルを生成するために、各PC設計によって表される相対的な表面領域の選択によって、QDの混合物をポピュレートした単一の表面を調整することができる。
シリコンウエハを、レプリカモールディング過程の「マスター」テンプレートとしての役割を果たすように製作し、したがって、所望のPC格子構造のネガ表面画像を含む。図2(c)で示されるように、マスターの格子構造は、Siウエハ上の熱成長させたSiO2の層上への電子ビームリソグラフィを介して製作したが、その時点で、高さ80nmのピラーを生成するために、反応性イオンエッチングを使用した。パターン化した素子の面積は、3×3mm2であった。マスターからのレプリカの完全な除去を促進するために、ウエハを、ピラニア溶液(硫酸および過酸化水素の3:1の混合物(v/v))によって20分間にわたり洗浄し、DI水(MilliQ)で洗い流し、そして、N2で乾燥した。次に、2滴のNo−Stick溶液を加えた密閉容器の中へウエハを1時間にわたり配置することによって、(トリデカフルオロ−1,1,2,2−テトラヒドロオクチル)トリクロロシラン(No−Stick、Alfa Aesar)の気相蒸着を行った。
素子構造は、チェッカーボードパターンで、2つの別個の2DのPCの領域を交互配置する。図2(b)で示されるように、各領域は、長方形の空洞から成り、表面の直交方向における周期的な変動によって生じる共振を伴う。各領域は、1つの方向においては、同じUV励起源(領域1および2において、それぞれ、40%および70%のデューティサイクルを伴う、200nmの周期)からの増強を提供するように選択された次元によって変動し、一方で、直交方向は、可視波長での共振を生成するための、より大きい特徴サイズを有する。領域1におけるより大きい特徴は、λ=490nmで共振を生成するために、250nmの横幅を有し、一方で、領域2における特徴は、λ=590nmで共振を生成するように設計された、340nmの横幅を有する。すなわち、第1の領域の第1の周期性は、第2の領域の第1の周期性と異なる。この素子において、その第1の領域の第2の周期性は、その第2の領域の第2の周期性と少なくとも実質的に同じである。どちらの領域についても、構造は、85nmのTiO2の薄膜でコーティングされる80nmの格子深さを有するQDドープポリマーから形成される。構造の周期は、共振波長の主な決定要素であるが、共振はまた、TiO2厚さの制御を介して調整することもできる。
素子の放射特性は、励起源として20nmの全幅半値を有する、λ=375nmを中心とするUV−LED(Thor Labs,Ultra Bright Deep Violet LED)を使用して測定した。LEDから任意の非UV放射を排除するために、350<λ<390nmの帯域通過フィルタを使用した。LED出力は、PCを照明する前にコリメートした。素子は、直径3mmの開口部を有するカバーの上に載置し、パターン化したPC領域だけが励起され、測定されることを確実にした。
PC構造を使用した素子は、本実施例において、いかなるPC構造も伴わずに生成したQD出力の最大で5.8倍の励起および抽出の増強の両立を実証した。QDがPC構造の双方の領域を通して分散すると仮定すると、励起と抽出との改善の差が予期される。したがって、あらゆる領域の中のQDは、UV励起波長の増強を受けるが、出力波長は、一方の領域においてだけしか、または全素子面積の半分だけしか増強されない。
Claims (11)
- 構造であって、
第1の表面および第2の表面を有する基材と、
前記基材の前記第1の表面に配置されるポリマー層であって、ポリマーおよび複数の発光ナノ結晶を含む、ポリマー層と、を備え、
前記ポリマー層は、パターン化表面を有し、前記パターン化表面は、第1の複数の陥凹部を有する第1のパターン化領域および第2の複数の陥凹部を有する第2のパターン化領域を有し、
各領域の中の前記複数の陥凹部は、第1の方向の第1の周期性および、前記第1の方向と交差する第2の方向の第2の周期性を有し、前記第1の領域の前記第1の周期性は、前記第2の領域の前記第1の周期性と異なり、
前記第1の領域中の前記第1の周期性が等間隔周期性であり、前記第1の領域中の前記第2の周期性が等間隔周期性であり、前記第2の領域中の前記第1の周期性が等間隔周期性であり、および前記第2の領域中の前記第2の周期性が等間隔周期性である、
構造。 - 前記第1の領域の前記第2の周期性は、前記第2の領域の前記第2の周期性と同じである、請求項1に記載の構造。
- 前記ポリマー層は、複数の第1の領域および複数の第2の領域を備える、請求項1に記載の構造。
- 前記第1および第2の領域は、互いに交互の関係にある、請求項3に記載の構造。
- 前記発光ナノ結晶は、1つ以上のヘテロ接合を含む、請求項1に記載の構造。
- 前記発光ナノ結晶は、量子ドットを含む、請求項1に記載の構造。
- 前記基材は、光透過性である、請求項1に記載の構造。
- 前記第2の方向は、65〜115°の角度で前記第1の方向と交差する、請求項1に記載の構造。
- 前記第2の方向は、前記第1の方向に対して実質的に直角である、請求項1に記載の構造。
- 請求項1に記載の構造を形成することを含む、発光システムを形成する方法。
- 前記ポリマー層は、複数の第1の領域および複数の第2の領域を備える、請求項10に記載の方法。
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