JP5826942B2 - 走査電子顕微鏡及びこれを用いた1次電子の電流量測定方法 - Google Patents
走査電子顕微鏡及びこれを用いた1次電子の電流量測定方法 Download PDFInfo
- Publication number
- JP5826942B2 JP5826942B2 JP2014533170A JP2014533170A JP5826942B2 JP 5826942 B2 JP5826942 B2 JP 5826942B2 JP 2014533170 A JP2014533170 A JP 2014533170A JP 2014533170 A JP2014533170 A JP 2014533170A JP 5826942 B2 JP5826942 B2 JP 5826942B2
- Authority
- JP
- Japan
- Prior art keywords
- primary
- filter
- detector
- electrons
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
- H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
- H01J2237/24535—Beam current
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2011-0097829 | 2011-09-27 | ||
KR1020110097829A KR101348581B1 (ko) | 2011-09-27 | 2011-09-27 | 주사전자현미경 및 이를 이용한 1차전자의 전류량 측정 방법 |
PCT/KR2011/007129 WO2013047920A1 (ko) | 2011-09-27 | 2011-09-28 | 주사전자현미경 및 이를 이용한 1차전자의 전류량 측정 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014528154A JP2014528154A (ja) | 2014-10-23 |
JP5826942B2 true JP5826942B2 (ja) | 2015-12-02 |
Family
ID=47995930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014533170A Expired - Fee Related JP5826942B2 (ja) | 2011-09-27 | 2011-09-28 | 走査電子顕微鏡及びこれを用いた1次電子の電流量測定方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5826942B2 (ko) |
KR (1) | KR101348581B1 (ko) |
CN (1) | CN103890896B (ko) |
TW (1) | TWI456622B (ko) |
WO (1) | WO2013047920A1 (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101493215B1 (ko) * | 2013-07-31 | 2015-02-16 | 케이맥(주) | 이온 및 전자 빔 전류 측정을 위한 패러데이 컵 |
WO2015016632A1 (ko) * | 2013-07-31 | 2015-02-05 | 케이맥(주) | 비행시간을 이용한 조성 및 정량 분석 장치 및 방법, 이에 이용되는 패러데이 컵 어셈블리 |
KR101756171B1 (ko) | 2015-12-15 | 2017-07-12 | (주)새론테크놀로지 | 주사 전자 현미경 |
US20220254599A1 (en) * | 2019-07-26 | 2022-08-11 | Asml Netherlands B.V. | Multiple landing energy scanning electron microscopy systems and methods |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04115447A (ja) * | 1990-09-04 | 1992-04-16 | Jeol Ltd | イオンビーム装置 |
JP3148353B2 (ja) * | 1991-05-30 | 2001-03-19 | ケーエルエー・インストルメンツ・コーポレーション | 電子ビーム検査方法とそのシステム |
JP3101114B2 (ja) * | 1993-02-16 | 2000-10-23 | 日本電子株式会社 | 走査電子顕微鏡 |
JPH07105888A (ja) * | 1993-10-05 | 1995-04-21 | Jeol Ltd | 走査電子顕微鏡 |
JP3376793B2 (ja) * | 1995-12-20 | 2003-02-10 | 株式会社日立製作所 | 走査形電子顕微鏡 |
JP2003187733A (ja) * | 2001-12-14 | 2003-07-04 | Ebara Corp | 電子線装置及びこの装置を用いたデバイス製造方法 |
JP4636897B2 (ja) * | 2005-02-18 | 2011-02-23 | 株式会社日立ハイテクサイエンスシステムズ | 走査電子顕微鏡 |
JP5075375B2 (ja) | 2006-08-11 | 2012-11-21 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
JP4889105B2 (ja) * | 2006-08-23 | 2012-03-07 | エスアイアイ・ナノテクノロジー株式会社 | 荷電粒子ビーム装置 |
JP5276860B2 (ja) | 2008-03-13 | 2013-08-28 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
US7960697B2 (en) * | 2008-10-23 | 2011-06-14 | Hermes-Microvision, Inc. | Electron beam apparatus |
-
2011
- 2011-09-27 KR KR1020110097829A patent/KR101348581B1/ko not_active IP Right Cessation
- 2011-09-28 WO PCT/KR2011/007129 patent/WO2013047920A1/ko active Application Filing
- 2011-09-28 JP JP2014533170A patent/JP5826942B2/ja not_active Expired - Fee Related
- 2011-09-28 CN CN201180073722.4A patent/CN103890896B/zh not_active Expired - Fee Related
- 2011-09-29 TW TW100135369A patent/TWI456622B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201314732A (zh) | 2013-04-01 |
TWI456622B (zh) | 2014-10-11 |
JP2014528154A (ja) | 2014-10-23 |
WO2013047920A1 (ko) | 2013-04-04 |
CN103890896B (zh) | 2016-08-17 |
KR20130033877A (ko) | 2013-04-04 |
CN103890896A (zh) | 2014-06-25 |
KR101348581B1 (ko) | 2014-01-09 |
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