JP5695882B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5695882B2 JP5695882B2 JP2010243010A JP2010243010A JP5695882B2 JP 5695882 B2 JP5695882 B2 JP 5695882B2 JP 2010243010 A JP2010243010 A JP 2010243010A JP 2010243010 A JP2010243010 A JP 2010243010A JP 5695882 B2 JP5695882 B2 JP 5695882B2
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- electrode layer
- oxide semiconductor
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- thin film
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Images
Classifications
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133345—Insulating layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133357—Planarisation layers
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133388—Constructional arrangements; Manufacturing methods with constructional differences between the display region and the peripheral region
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133742—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers for homeotropic alignment
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
- G02F1/13793—Blue phases
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Geometry (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Liquid Crystal Display Device Control (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
本実施の形態の半導体装置について図1を用いて説明する。本実施の形態の半導体装置は液晶表示装置である。
実施の形態1で示す、第1の基板と第2の基板の間に液晶層を封入する半導体装置において、第2の基板に設けられた対向電極層(第1の対向電極層及び第2の対向電極層)と接続配線を電気的に接続するための接続領域に共通接続部を第1の基板上に形成する他の例を示す。なお、第1の基板にはスイッチング素子として薄膜トランジスタが形成されており、共通接続部の作製工程を画素部のスイッチング素子の作製工程と共通化させることで工程を複雑にすることなく共通接続部を形成する。
実施の形態2では、共通電位線としてソース電極層及びドレイン電極層と同じ材料及び同じ工程で形成される配線を用いて共通接続部を作製する例を示したが、本実施の形態では、図2とは異なる共通接続部の例を示す。
本実施の形態は、本明細書で開示する半導体装置に適用できる薄膜トランジスタの例を示す。本実施の形態で示す薄膜トランジスタ410、420は、実施の形態1の駆動回路用薄膜トランジスタ1223、画素用薄膜トランジスタ1211、実施の形態2または実施の形態3の薄膜トランジスタ320として用いることができる。
本実施の形態は、本明細書で開示する半導体装置に適用できる薄膜トランジスタの他の例を示す。本実施の形態で示す薄膜トランジスタ450、460は、実施の形態1の駆動回路用薄膜トランジスタ1223、画素用薄膜トランジスタ1211、実施の形態2の薄膜トランジスタ320として用いることができる。
本実施の形態は、本明細書で開示する半導体装置に適用できる薄膜トランジスタの他の例を示す。本実施の形態で示す薄膜トランジスタ240、260は、実施の形態1の駆動回路用薄膜トランジスタ1223、画素用薄膜トランジスタ1211、実施の形態2の薄膜トランジスタ320として用いることができる。
本実施の形態は、本明細書で開示する半導体装置に適用できる薄膜トランジスタの他の例を示す。本実施の形態で示す薄膜トランジスタ210、220は、実施の形態1の駆動回路用薄膜トランジスタ1223、画素用薄膜トランジスタ1211、実施の形態2の薄膜トランジスタ320として用いることができる。
本実施の形態は、本明細書で開示する半導体装置に適用できる薄膜トランジスタの例を示す。本実施の形態で示す薄膜トランジスタ270、280は、実施の形態1の駆動回路用薄膜トランジスタ1223、画素用薄膜トランジスタ1211、実施の形態2の薄膜トランジスタ320として用いることができる。
本実施の形態は、本明細書で開示される半導体装置の一例として、液晶表示装置を示す。
本明細書に開示される半導体装置には、特に限定されず、TN液晶、OCB液晶、STN液晶、VA液晶、ECB型液晶、GH液晶、高分子分散型液晶、ディスコティック液晶などを用いることができるが、中でもノーマリーブラック型の液晶パネル、例えば垂直配向(VA)モードを採用した透過型の液晶表示装置とすることが好ましい。垂直配向モードとしては、いくつか挙げられるが、例えば、MVA(Multi−Domain Vertical Alignment)モード、PVA(Patterned Vertical Alignment)モード、ASVモードなどを用いることができる。
本明細書に開示する半導体装置は、さまざまな電子機器(遊技機も含む)に適用することができる。電子機器としては、例えば、テレビジョン装置(テレビ、またはテレビジョン受信機ともいう)、コンピュータ用などのモニタ、デジタルカメラ、デジタルビデオカメラなどのカメラ、デジタルフォトフレーム、携帯電話機(携帯電話、携帯電話装置ともいう)、携帯型ゲーム機、携帯情報端末、音響再生装置、パチンコ機などの大型ゲーム機などが挙げられる。
81a グレートーンマスク
81b ハーフトーンマスク
83 透光性基板
84 遮光部
85 回折格子
87 半透過部
88 遮光部
200 基板
202 ゲート絶縁層
203 保護絶縁層
204 平坦化絶縁層
210 薄膜トランジスタ
211 ゲート電極層
213 チャネル形成領域
214a 高抵抗ソース領域
214b 高抵抗ドレイン領域
215a ソース電極層
215b ドレイン電極層
216 酸化物絶縁層
217 導電層
220 薄膜トランジスタ
221 ゲート電極層
223 チャネル形成領域
224a 高抵抗ソース領域
224b 高抵抗ドレイン領域
225a ソース電極層
225b ドレイン電極層
227 画素電極層
230 酸化物半導体膜
231a レジストマスク
231b レジストマスク
232 金属導電層
233 酸化物半導体層
236a レジストマスク
236b レジストマスク
236d レジストマスク
236e レジストマスク
237 金属導電膜
240 薄膜トランジスタ
241 ゲート電極層
242 酸化物半導体層
245a ソース電極層
245b ドレイン電極層
246 酸化物絶縁層
247 導電層
250 基板
252 ゲート絶縁層
253 保護絶縁層
254 平坦化絶縁層
256 酸化物絶縁層
261 ゲート電極層
265a ソース電極層
265b ドレイン電極層
267 画素電極層
270 薄膜トランジスタ
271 ゲート電極層
272 酸化物半導体層
273 チャネル形成領域
274a 高抵抗ソース領域
274b 高抵抗ドレイン領域
275a ソース電極層又はドレイン電極層
275b ソース電極層又はドレイン電極層
277 導電層
280 薄膜トランジスタ
282 酸化物半導体層
283 チャネル形成領域
284a 高抵抗ソース領域
284b 高抵抗ドレイン領域
285a ソース電極層又はドレイン電極層
285b ソース電極層又はドレイン電極層
287 画素電極層
290 基板
292 ゲート絶縁層
293 保護絶縁層
294 平坦化絶縁層
295 酸化物半導体膜
296 酸化物半導体層
300 第1の基板
302 ゲート絶縁層
303 保護絶縁層
304 ドレイン電極層
305 共通電位線
306 共通電極層
310 共通電位線
311 共通電極
320 薄膜トランジスタ
327 画素電極層
400:基板
402:ゲート絶縁層
403:保護絶縁層
404:平坦化絶縁層
410:薄膜トランジスタ
411:ゲート電極層
413 チャネル形成領域
414a 高抵抗ソース領域
414b 高抵抗ドレイン領域
415a:ソース電極層
415b:ドレイン電極層
416:酸化物絶縁層
417:導電層
420:薄膜トランジスタ
421:ゲート電極層
423 チャネル形成領域
424a 高抵抗ソース領域
424b 高抵抗ドレイン領域
425a ソース電極層
425b ドレイン電極層
427 画素電極層
430:酸化物半導体膜
431 酸化物半導体層
450 薄膜トランジスタ
451 ゲート電極層
452 酸化物半導体層
453 チャネル形成領域
454a 高抵抗ソース領域
454b 高抵抗ドレイン領域
455a ソース電極層
455b ドレイン電極層
456 酸化物絶縁層
457 導電層
461 ゲート電極層
465a ソース電極層
465b ドレイン電極層
466 酸化物絶縁層
467 画素電極層
600 基板
601 対向基板
602 ゲート配線
603 ゲート配線
606 ゲート絶縁層
616 ソース電極層またはドレイン電極層
618 ソース電極層またはドレイン電極層
619 ソース電極層またはドレイン電極層
620 絶縁層
621 絶縁層
622 絶縁層
623 コンタクトホール
624 画素電極層
626 画素電極層
627 コンタクトホール
628 TFT
629 TFT
632 遮光膜
636 着色膜
637 平坦化膜
640 対向電極層
641 スリット
646 配向膜
648 配向膜
650 液晶層
663 配線
690 容量配線
1200 信号線駆動回路部
1201 走査線駆動回路部
1202 画素部
1204 第2の基板
1205 シール材
1206 第1の配向膜
1207 第2の配向膜
1208 接続配線
1210 第1の基板
1211 画素用薄膜トランジスタ
1214 絶縁層
1223 駆動回路用薄膜トランジスタ
1235 樹脂層
1240 端子部
1241 接続端子
1242 接続配線
1243 接続端子
1246 接続配線
1250 画素電極層
1255 柱状スペーサー
1270 導電粒子
1280 液晶
1290 第1偏光板
1291 対向電極層
1292 対向電極層
1293 導電層
1295 第2偏光板
2700 電子書籍
2701 筐体
2703 筐体
2705 表示部
2707 表示部
2711 軸部
2721 電源
2723 操作キー
2725 スピーカ
2800 筐体
2801 筐体
2802 表示パネル
2803 スピーカー
2804 マイクロフォン
2805 操作キー
2806 ポインティングデバイス
2807 カメラ用レンズ
2808 外部接続端子
2810 太陽電池セル
2811 外部メモリスロット
3001 本体
3002 筐体
3003 表示部
3004 キーボード
3021 本体
3022 スタイラス
3023 表示部
3024 操作ボタン
3025 外部インターフェイス
3051 本体
3053 接眼部
3054 操作スイッチ
3055 表示部(B)
3056 バッテリー
3057 表示部(A)
Claims (3)
- 第1の基板と、
第2の基板と、
前記第1の基板と、前記第2の基板との間の液晶とを有し、
前記第1の基板は、画素部と、駆動回路部と、第1の導電層とを有し、
前記画素部は、第1のトランジスタを有し、
前記駆動回路部は、第2のトランジスタを有し、
前記第1のトランジスタは、第1の酸化物半導体層と、前記第1の酸化物半導体層と重なる領域を有する第1のゲート電極とを有し、
前記第2のトランジスタは、第2の酸化物半導体層と、前記第2の酸化物半導体層と重なる領域を有する第2のゲート電極とを有し、
前記第1の導電層は、前記第2の酸化物半導体層と重なる領域を有し、
前記第1の導電層は、前記第2の酸化物半導体層を介して、前記第2のゲート電極と対向して配置され、
前記第1の導電層は、前記第2のトランジスタの、第3のゲート電極として機能する領域を有し、
前記第2の基板は、第2の導電層と、第3の導電層とを有し、
前記第2の導電層は、前記駆動回路部と重なる領域を有し、
前記第3の導電層は、前記画素部と重なる領域を有することを特徴とする半導体装置。 - 請求項1において、
前記第2の導電層は、開口部を有することを特徴とする半導体装置。 - 請求項1又は2において、
前記第3のゲート電極として機能する第1の導電層は、前記第2のゲート電極と同電位が印加されることを特徴とする半導体装置。
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TW201135335A (en) | 2011-10-16 |
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