JP5578973B2 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

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Publication number
JP5578973B2
JP5578973B2 JP2010161235A JP2010161235A JP5578973B2 JP 5578973 B2 JP5578973 B2 JP 5578973B2 JP 2010161235 A JP2010161235 A JP 2010161235A JP 2010161235 A JP2010161235 A JP 2010161235A JP 5578973 B2 JP5578973 B2 JP 5578973B2
Authority
JP
Japan
Prior art keywords
arm
base
turning
substrate
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010161235A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012020382A (ja
Inventor
隆之 矢澤
洋 荒川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to JP2010161235A priority Critical patent/JP5578973B2/ja
Priority to TW100123731A priority patent/TWI546172B/zh
Priority to CN201110206392.3A priority patent/CN102380872B/zh
Priority to KR1020110070355A priority patent/KR101606223B1/ko
Publication of JP2012020382A publication Critical patent/JP2012020382A/ja
Application granted granted Critical
Publication of JP5578973B2 publication Critical patent/JP5578973B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/08—Gripping heads and other end effectors having finger members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2010161235A 2010-07-16 2010-07-16 産業用ロボット Expired - Fee Related JP5578973B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010161235A JP5578973B2 (ja) 2010-07-16 2010-07-16 産業用ロボット
TW100123731A TWI546172B (zh) 2010-07-16 2011-07-05 Industrial robots
CN201110206392.3A CN102380872B (zh) 2010-07-16 2011-07-13 工业用机器人
KR1020110070355A KR101606223B1 (ko) 2010-07-16 2011-07-15 산업용 로보트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010161235A JP5578973B2 (ja) 2010-07-16 2010-07-16 産業用ロボット

Publications (2)

Publication Number Publication Date
JP2012020382A JP2012020382A (ja) 2012-02-02
JP5578973B2 true JP5578973B2 (ja) 2014-08-27

Family

ID=45613453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010161235A Expired - Fee Related JP5578973B2 (ja) 2010-07-16 2010-07-16 産業用ロボット

Country Status (4)

Country Link
JP (1) JP5578973B2 (zh)
KR (1) KR101606223B1 (zh)
CN (1) CN102380872B (zh)
TW (1) TWI546172B (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5990359B2 (ja) * 2012-10-04 2016-09-14 平田機工株式会社 搬入出ロボット
TW201507829A (zh) * 2013-08-23 2015-03-01 Chiuan Yan Technology Co Ltd 升降取送裝置
JP2015178161A (ja) * 2014-03-19 2015-10-08 株式会社安川電機 搬送ロボットおよび搬送システム
JP2018089765A (ja) * 2016-12-07 2018-06-14 日本電産サンキョー株式会社 産業用ロボット
JP6782180B2 (ja) * 2017-01-31 2020-11-11 川崎重工業株式会社 基板把持ハンド及び基板搬送装置
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
JP7149119B2 (ja) * 2018-07-03 2022-10-06 日本電産サンキョー株式会社 産業用ロボット
JP7503950B2 (ja) * 2020-07-17 2024-06-21 ニデックインスツルメンツ株式会社 産業用ロボット
JP2022083199A (ja) * 2020-11-24 2022-06-03 日本電産サンキョー株式会社 産業用ロボット

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311583U (zh) * 1989-06-14 1991-02-05
JPH03103182U (zh) * 1990-02-08 1991-10-25
JPH03284534A (ja) * 1990-03-30 1991-12-16 Matsushita Electric Works Ltd 移載装置
JPH03288910A (ja) * 1990-04-05 1991-12-19 Hitachi Metals Ltd 鋳仕上ロボットの教示方法
JPH0413595A (ja) * 1990-05-01 1992-01-17 Mitsubishi Electric Corp クリーンロボット
JP3514323B2 (ja) * 1993-10-20 2004-03-31 ヤンマー農機株式会社 真空式収穫機
JP3486947B2 (ja) * 1994-03-17 2004-01-13 株式会社タツノ・メカトロニクス 給油装置
JP3376275B2 (ja) * 1998-04-23 2003-02-10 三菱電機株式会社 産業用ロボット装置
CN2341778Y (zh) * 1998-12-02 1999-10-06 和椿事业股份有限公司 机械手臂
JP3973006B2 (ja) * 2000-03-23 2007-09-05 日本電産サンキョー株式会社 ダブルアーム型ロボット
JP3955499B2 (ja) * 2001-08-07 2007-08-08 日本電産サンキョー株式会社 ハンドの位置合わせ方法およびその装置
CN1895974A (zh) * 2005-07-15 2007-01-17 日本电产三协株式会社 基板搬出搬入方法及基板搬出搬入***
CN101456182B (zh) * 2007-12-12 2012-03-28 中国科学院自动化研究所 大型工件焊接智能机器人装置

Also Published As

Publication number Publication date
CN102380872B (zh) 2015-07-15
JP2012020382A (ja) 2012-02-02
CN102380872A (zh) 2012-03-21
KR101606223B1 (ko) 2016-03-24
TWI546172B (zh) 2016-08-21
TW201208835A (en) 2012-03-01
KR20120008466A (ko) 2012-01-30

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