JP5295645B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP5295645B2 JP5295645B2 JP2008146710A JP2008146710A JP5295645B2 JP 5295645 B2 JP5295645 B2 JP 5295645B2 JP 2008146710 A JP2008146710 A JP 2008146710A JP 2008146710 A JP2008146710 A JP 2008146710A JP 5295645 B2 JP5295645 B2 JP 5295645B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- cutting blade
- end wall
- detecting
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 22
- 238000005192 partition Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Images
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Dicing (AREA)
Description
18 チャックテーブル
24 切削手段
26 スピンドル
28 切削ブレード
29 切削ブレード収納庫
31 シグナルタワー
78 収容ケース
96 レーザー測距計
110 光センサー
Claims (1)
- 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物を切削する切削ブレードが回転可能に装着された切削手段とを備えた切削装置であって、
交換用の切削ブレードを複数収納可能な切削ブレード収納庫と、
該切削ブレード収納庫に収納されている切削ブレード数を検知する検知手段と、
該検知手段によって検知された切削ブレードの数が予め設定された所定数量を下回った際に報知信号を発生する報知手段と、を具備し、
該切削ブレード収納庫は、第1端部壁と、該第1端部壁の反対側の第2端部壁と、該切削ブレード収納庫中に配設され該切削ブレード収納庫の内部を切削ブレードを収容する該第1端部壁側の第1の部屋と該第2端部壁側の第2の部屋に仕切るプレートと、該第2端部壁と該プレートとの間に介装されたコイルスプリングと、を含み、
該検知手段は、該プレートに固定された検知片と、発光素子と該発光素子に対向する受光素子を含み、該検知片を検知可能な光センサとから構成され、
該検知片が該光センサの光信号を遮断した際に該報知手段を作動させて報知信号を発生することを特徴とする切削装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008146710A JP5295645B2 (ja) | 2008-06-04 | 2008-06-04 | 切削装置 |
CN2009101427338A CN101596609B (zh) | 2008-06-04 | 2009-06-02 | 切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008146710A JP5295645B2 (ja) | 2008-06-04 | 2008-06-04 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009295727A JP2009295727A (ja) | 2009-12-17 |
JP5295645B2 true JP5295645B2 (ja) | 2013-09-18 |
Family
ID=41418301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008146710A Active JP5295645B2 (ja) | 2008-06-04 | 2008-06-04 | 切削装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5295645B2 (ja) |
CN (1) | CN101596609B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102950230B (zh) * | 2012-11-19 | 2015-08-05 | 江苏高博智融科技有限公司 | 一种可调节式三极管模切定位板 |
JP6851688B2 (ja) * | 2017-04-21 | 2021-03-31 | 株式会社ディスコ | 加工工具の管理方法 |
CN112317784B (zh) * | 2020-10-21 | 2023-03-14 | 长春理工大学 | 激光辅助倍频快速刀具伺服车削功能表面的方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07276227A (ja) * | 1994-04-06 | 1995-10-24 | Disco Abrasive Syst Ltd | オートブレードチェンジャー |
JP2904414B1 (ja) * | 1998-05-22 | 1999-06-14 | 株式会社東京精密 | ブレード自動交換システム |
JP3801325B2 (ja) * | 1997-10-31 | 2006-07-26 | 株式会社荏原製作所 | 研磨装置及び半導体ウエハの研磨方法 |
JP4387010B2 (ja) * | 1999-11-10 | 2009-12-16 | 株式会社ディスコ | 切削装置 |
JP2002337042A (ja) * | 2001-05-11 | 2002-11-26 | Olympus Optical Co Ltd | 刃物欠損検出方法 |
JP4580846B2 (ja) * | 2005-08-26 | 2010-11-17 | ヤマザキマザック株式会社 | Nc工作機械 |
-
2008
- 2008-06-04 JP JP2008146710A patent/JP5295645B2/ja active Active
-
2009
- 2009-06-02 CN CN2009101427338A patent/CN101596609B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN101596609B (zh) | 2012-11-28 |
JP2009295727A (ja) | 2009-12-17 |
CN101596609A (zh) | 2009-12-09 |
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