JP5137336B2 - 可動式プローブユニット機構及び電気検査装置 - Google Patents

可動式プローブユニット機構及び電気検査装置 Download PDF

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Publication number
JP5137336B2
JP5137336B2 JP2006148562A JP2006148562A JP5137336B2 JP 5137336 B2 JP5137336 B2 JP 5137336B2 JP 2006148562 A JP2006148562 A JP 2006148562A JP 2006148562 A JP2006148562 A JP 2006148562A JP 5137336 B2 JP5137336 B2 JP 5137336B2
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Japan
Prior art keywords
plate
axis
probe unit
moving
contact
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JP2006148562A
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English (en)
Japanese (ja)
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JP2007316022A (ja
Inventor
司 工藤
齋藤　　健
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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Priority to JP2006148562A priority Critical patent/JP5137336B2/ja
Priority to TW096110864A priority patent/TWI390223B/zh
Priority to KR1020070035576A priority patent/KR20070114628A/ko
Publication of JP2007316022A publication Critical patent/JP2007316022A/ja
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Publication of JP5137336B2 publication Critical patent/JP5137336B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2006148562A 2006-05-29 2006-05-29 可動式プローブユニット機構及び電気検査装置 Active JP5137336B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006148562A JP5137336B2 (ja) 2006-05-29 2006-05-29 可動式プローブユニット機構及び電気検査装置
TW096110864A TWI390223B (zh) 2006-05-29 2007-03-28 可動式探針組件機構及電氣檢查裝置
KR1020070035576A KR20070114628A (ko) 2006-05-29 2007-04-11 가동식 프로브 유닛 기구 및 전기 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006148562A JP5137336B2 (ja) 2006-05-29 2006-05-29 可動式プローブユニット機構及び電気検査装置

Publications (2)

Publication Number Publication Date
JP2007316022A JP2007316022A (ja) 2007-12-06
JP5137336B2 true JP5137336B2 (ja) 2013-02-06

Family

ID=38849998

Family Applications (1)

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JP2006148562A Active JP5137336B2 (ja) 2006-05-29 2006-05-29 可動式プローブユニット機構及び電気検査装置

Country Status (3)

Country Link
JP (1) JP5137336B2 (zh)
KR (1) KR20070114628A (zh)
TW (1) TWI390223B (zh)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5294195B2 (ja) * 2008-05-01 2013-09-18 株式会社 東京ウエルズ ワーク特性測定装置およびワーク特性測定方法
KR101129708B1 (ko) * 2010-05-28 2012-03-28 조영창 프로브 유닛의 블럭 베이스 검사장치, 및 이를 이용한 프로브 유닛의 블럭 베이스 검사방법
JP5470456B2 (ja) * 2010-06-17 2014-04-16 シャープ株式会社 点灯検査装置
KR101191343B1 (ko) * 2010-12-30 2012-10-16 주식회사 탑 엔지니어링 어레이 테스트 장치
CN105093012B (zh) * 2015-07-22 2018-04-10 京东方科技集团股份有限公司 一种点灯检测装置及点灯检测***
JP2017096949A (ja) * 2015-11-24 2017-06-01 フォトン・ダイナミクス・インコーポレーテッド セル接触プロービングパッドを使用して平面パネル型表示装置を電気的に検査するためのシステムおよび方法
CN106200051B (zh) * 2016-09-01 2019-11-29 京东方科技集团股份有限公司 对位组件及脱泡设备
CN108132553B (zh) * 2018-02-09 2024-02-23 旭东机械(昆山)有限公司 一种液晶面板尺寸自适应调整装置
CN108363226A (zh) * 2018-03-30 2018-08-03 蚌埠国显科技有限公司 一种ips屏贴片后测试用背光箱
CN108594493A (zh) * 2018-06-14 2018-09-28 广东速美达自动化股份有限公司 一种自动对位检测机构
CN108776400B (zh) * 2018-07-17 2024-04-05 武汉精测电子集团股份有限公司 一种角度可调的便携式电子屏幕测试治具
CN109029922B (zh) * 2018-08-08 2024-04-16 苏州精濑光电有限公司 一种显示面板压接装置
JP7182951B2 (ja) * 2018-08-27 2022-12-05 株式会社日本マイクロニクス 検査装置及び検査方法
CN109116253A (zh) * 2018-08-28 2019-01-01 东莞仕群智能科技有限公司 一种锂电池电压内阻自动检测机构
CN109360518B (zh) * 2018-09-06 2023-09-29 武汉精测电子集团股份有限公司 一种显示面板自动对位微调载具
KR102115179B1 (ko) * 2018-11-20 2020-06-08 주식회사 탑 엔지니어링 프로브장치 및 프로브 자세 보정 방법
CN110208690A (zh) * 2019-06-19 2019-09-06 中国人民解放军32181部队 一种断路器检测装置
US11307246B2 (en) 2019-09-24 2022-04-19 Star Technologies, Inc. Probing apparatus and method of operating the same
JP7458161B2 (ja) * 2019-09-24 2024-03-29 東京エレクトロン株式会社 検査装置の制御方法および検査装置
KR102112555B1 (ko) * 2019-11-21 2020-05-19 케이맥(주) 이종 사이즈 디스플레이 패널 검사 장치
KR102157070B1 (ko) * 2020-03-03 2020-09-17 주식회사 프로이천 오토 프로브장치
CN114018544B (zh) * 2021-07-13 2023-12-19 重庆康佳光电科技有限公司 点灯装置和点亮方法
CN114815339B (zh) * 2022-05-17 2023-09-26 厦门特仪科技有限公司 一种可适用于不同尺寸lcd屏的离线点亮设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08110363A (ja) * 1994-10-11 1996-04-30 Kobe Steel Ltd フラットパネルの検査装置
JPH08254677A (ja) * 1994-10-14 1996-10-01 Hitachi Electron Eng Co Ltd 液晶パネルの点灯試験用コンタクト装置
JP3545655B2 (ja) * 1999-09-08 2004-07-21 株式会社日本マイクロニクス 電気接続装置
JP3480925B2 (ja) * 2000-09-12 2003-12-22 株式会社双晶テック ディスプレイパネル又はプローブブロックの支持枠体
JP2002286754A (ja) * 2002-01-31 2002-10-03 Micronics Japan Co Ltd プローブユニット
JP3864201B2 (ja) * 2002-09-30 2006-12-27 日本電子材料株式会社 プローブカード
JP2005209895A (ja) * 2004-01-23 2005-08-04 Sharp Corp 可撓性を有する平型回路体の搭載装置
JP4786884B2 (ja) * 2004-06-17 2011-10-05 株式会社日本マイクロニクス 液晶パネル点灯検査装置のアライメント方法
JP4570930B2 (ja) * 2004-10-22 2010-10-27 株式会社日本マイクロニクス パネルの検査装置に用いられる電気的接続装置
JP2006133099A (ja) * 2004-11-08 2006-05-25 Micronics Japan Co Ltd 表示用パネルの検査装置

Also Published As

Publication number Publication date
JP2007316022A (ja) 2007-12-06
TWI390223B (zh) 2013-03-21
TW200743808A (en) 2007-12-01
KR20070114628A (ko) 2007-12-04

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