JP4825510B2 - リソグラフィ装置 - Google Patents
リソグラフィ装置 Download PDFInfo
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- JP4825510B2 JP4825510B2 JP2005364310A JP2005364310A JP4825510B2 JP 4825510 B2 JP4825510 B2 JP 4825510B2 JP 2005364310 A JP2005364310 A JP 2005364310A JP 2005364310 A JP2005364310 A JP 2005364310A JP 4825510 B2 JP4825510 B2 JP 4825510B2
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- liquid
- cleaning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- Plasma & Fusion (AREA)
- Environmental & Geological Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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Description
基板を保持するように構成された基板テーブルと、
基板の上にパターン化された放射光ビームを投影するように構成され、基板に隣接して最終素子を含む投影システムと、
投影システムと基板テーブルとの間の空間に液体を供給するように構成された液体供給システムと、
最終光学素子、基板テーブル、又は前記液体に曝される構成部分又は構造の表面の少なくとも1つを洗浄するように構成された洗浄デバイスと
を含むリソグラフィ装置が提供される。
基板を保持するように構成された基板テーブルと、
基板の上にパターン化された放射光ビームを投影するように構成され、基板に隣接して最終素子を含む投影システムと、
投影システムと基板テーブルとの間の空間に液体を供給するように構成された液体供給システムと、
最終光学素子、基板テーブル、又は前記液体に曝される構成部分又は構造の表面の少なくとも1つを被覆するように構成されたコータと
を含むリソグラフィ装置が提供される。
放射光ビームB(例えばUV線又はDUV線)を調節するように構成された照射システム(照射器)ILと、
パターン化デバイス(例えばマスク)MAを支持するように作られて、ある一定のパラメータにしたがってパターン化デバイスを正確に位置付けるように構成された第1位置決め装置PMに連結された支持構造(例えばマスク・テーブル)MTと、
基板(例えばレジスト被覆ウェハ)Wを保持するために作られて、ある一定のパラメータにしたがって基板を正確に位置付けるように構成された第2位置決め装置PWに連結された基板テーブル(例えばウェハ・テーブル)と、
パターン化デバイスMAによって放射光ビームBに分与されたパターンを、基板Wの(例えば1つ又は複数の金型を含む)目標部分Cの上に投影するように構成された投影システム(例えば屈折投影レンズ・システム)PSと
を含む。
1.ステップ・モードにおいて、支持構造MTと基板テーブルWTを本質的に定置させて、放射光ビームに分与されたパターン全体を一度に目標部分の上に投影する(すなわち単一静的露光)。次に基板テーブルWTをX及び/又はY方向にずらして、異なる目標部分Cを露光できるようにする。ステップ・モードでは、露光域の最大サイズが、単一静的露光において結像される目標部分Cのサイズを制限する。
BD ビーム分配システム
C 目標部分
IF 位置センサ
IL 照射システム(照射器)
IN 入口
M1、M2 パターン化デバイス位置合せマーク
MA パターン化デバイス
MT 支持構造
OUT 出口
P1、P2 基板位置合せマーク
PM 第1位置決め装置
PS 投影システム
PW 第2位置決め装置
SO 放射光源
W 基板
WT 基板テーブル
10 リザーバ
11 液体、浸液
12 液体閉じ込め構造
13 出口
14 出口
15 入口
16 ガス・シール
20 洗浄ステーション
30 超音波エミッタ
110 洗浄流体、洗浄液
Claims (17)
- 基板を保持するように構成された基板テーブルと、
前記基板の上にパターン化された放射光ビームを投影するように構成され、前記基板に隣接する最終光学素子を含む投影システムと、
前記パターン化されたビームの投影のために前記投影システムと前記基板テーブルとの間の空間に液体を供給するように構成された出口を有する液体供給システムと、
前記最終光学素子、前記基板テーブル、又は前記液体に曝される構成部分又は構造の表面の少なくとも1つを洗浄するように構成された洗浄デバイスとを含み、
前記洗浄デバイスは、
前記液体供給システムの液体閉じ込め構造であって、前記パターン化されたビームの投影中に前記空間に前記液体を閉じ込め、且つ前記洗浄デバイスを使った洗浄中に前記空間に洗浄流体を閉じ込めるように構成された液体閉じ込め構造と、
前記パターン化されたビームの投影のために前記空間に前記液体を供給する前記出口とは異なる、洗浄のために前記空間に前記洗浄流体を供給する出口とを含む、
リソグラフィ装置。 - 前記洗浄デバイスが、リソグラフィ装置に直列に並ぶ前記最終光学素子を洗浄するように構成されている、請求項1に記載の装置。
- 前記洗浄デバイスが、前記空間内の液体をそれぞれ超音波洗浄液体、又はメガ音波洗浄液体に変えるように構成された、超音波トランスミッタ及びメガ音波トランスミッタの群から選択された音波トランスミッタを含む、請求項1又は2に記載の装置。
- 前記洗浄デバイスが、低波長紫外線を供給するように構成された光学素子を含む、請求項1ないし3のいずれか一項に記載の装置。
- 前記液体供給システムが、低波長紫外線を透過する表面を含む、請求項4に記載の装置。
- 低波長紫外線が193nmの波長を有する、請求項4又は5に記載の装置。
- 前記洗浄流体が、溶剤、洗浄剤、又は溶存ガスを含む、請求項1ないし6のいずれか一項に記載の装置。
- 前記溶存ガスが酸素、オゾン、又は窒素から選択される、請求項7に記載の装置。
- 前記洗浄デバイスが基板テーブルの中にある、請求項1ないし8のいずれか一項に記載の装置。
- 前記洗浄デバイスが噴霧ユニットを含む、請求項1ないし9のいずれか一項に記載の装置。
- 前記噴霧ユニットが光学素子、基板テーブル、又はその両方の上に洗浄流体を噴霧するように構成されている、請求項10に記載の装置。
- 前記洗浄流体が、オゾン、プラズマ、液体二酸化炭素、無極性有機溶剤、又は有極性有機溶剤を含む、請求項11に記載の装置。
- 前記洗浄デバイスが、前記最終光学素子のみを洗浄するため、又は前記基板テーブルのみを洗浄するように構成されている、請求項1ないし12のいずれか一項に記載の装置。
- 前記最終光学素子、前記基板テーブル、又は前記液体に曝される構成部分又は構造の表面の少なくとも1つを被覆するように構成されたコータをさらに含む、請求項1ないし13のいずれか一項に記載のリソグラフィ装置。
- 前記コータが前記基板テーブルの中に噴霧ユニットを含む、請求項14に記載の装置。
- 前記コータが、前記液体閉じ込め構造を含み、リソグラフィ装置に直列に並ぶ前記最終光学素子を被覆するように構成されている、請求項14又は15に記載の装置。
- 前記コータが、前記最終光学素子のみを被覆するため、又は前記基板テーブルのみを洗浄するように構成されている、請求項14ないし16のいずれか一項に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/015,767 US7880860B2 (en) | 2004-12-20 | 2004-12-20 | Lithographic apparatus and device manufacturing method |
US11/015,767 | 2004-12-20 |
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---|---|---|---|
JP2008161741A Division JP2008227547A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161719A Division JP2008263221A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161756A Division JP2008227548A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161707A Division JP2008277854A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
Publications (3)
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JP2006179909A JP2006179909A (ja) | 2006-07-06 |
JP2006179909A5 JP2006179909A5 (ja) | 2008-08-07 |
JP4825510B2 true JP4825510B2 (ja) | 2011-11-30 |
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JP2005364310A Expired - Fee Related JP4825510B2 (ja) | 2004-12-20 | 2005-12-19 | リソグラフィ装置 |
JP2008161756A Pending JP2008227548A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161707A Pending JP2008277854A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161719A Pending JP2008263221A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161741A Pending JP2008227547A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2011260597A Pending JP2012044227A (ja) | 2004-12-20 | 2011-11-29 | リソグラフィ装置 |
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JP2008161756A Pending JP2008227548A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161707A Pending JP2008277854A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161719A Pending JP2008263221A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2008161741A Pending JP2008227547A (ja) | 2004-12-20 | 2008-06-20 | リソグラフィ装置とデバイス製造方法 |
JP2011260597A Pending JP2012044227A (ja) | 2004-12-20 | 2011-11-29 | リソグラフィ装置 |
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US7880860B2 (en) | 2011-02-01 |
US20170285488A1 (en) | 2017-10-05 |
JP2008263221A (ja) | 2008-10-30 |
JP2008227548A (ja) | 2008-09-25 |
JP2008227547A (ja) | 2008-09-25 |
US20120008119A1 (en) | 2012-01-12 |
US20060132731A1 (en) | 2006-06-22 |
JP2008277854A (ja) | 2008-11-13 |
JP2012044227A (ja) | 2012-03-01 |
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