JP4687577B2 - 慣性センサ - Google Patents
慣性センサ Download PDFInfo
- Publication number
- JP4687577B2 JP4687577B2 JP2006167760A JP2006167760A JP4687577B2 JP 4687577 B2 JP4687577 B2 JP 4687577B2 JP 2006167760 A JP2006167760 A JP 2006167760A JP 2006167760 A JP2006167760 A JP 2006167760A JP 4687577 B2 JP4687577 B2 JP 4687577B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- detection
- force detection
- force
- inertial sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Description
Claims (7)
- XY面内で一つの基準振動をする駆動構造体と、
前記駆動構造体のX軸上およびY軸上のそれぞれの原点に対して対称な位置に一組ずつ配置された複数の検出軸を持つ力検出構造体とを備え、
前記力検出構造体が少なくとも一つの基準振動に直交する方向の検出軸を含む複数の検出軸を有することで3軸の角速度および3軸の加速度を検出する
ことを特徴とする慣性センサ。 - 前記それぞれの一組の力検出構造体は、駆動振動が反位相である
ことを特徴とする請求項1記載の慣性センサ。 - 前記X軸上の力検出構造体が原点から遠ざかる向きに振動するとき、前記Y軸の力検出構造体は原点に近づく方向に振動し、
前記X軸上の力検出構造体が原点から近づく向きに振動するとき、前記Y軸の力検出構造体は原点から遠ざかる方向に振動する
ことを特徴とする請求項1記載の慣性センサ。 - 前記駆動構造体は前記X軸および前記Y軸の原点を中心とする回転方向に単振動する
ことを特徴とする請求項1記載の慣性センサ。 - 前記力検出構造体の駆動方式が静電駆動、圧電駆動または電磁駆動である
ことを特徴とする請求項1記載の慣性センサ。 - 前記力検出構造体の検出軸がZ軸方向の平行移動と駆動方向に直行する回転方向である
ことを特徴とする請求項1記載の慣性センサ。 - 前記力検出構造体の力検出が静電検出、圧電検出、ピエゾ検出または電磁検出である
ことを特徴とする請求項1記載の慣性センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006167760A JP4687577B2 (ja) | 2006-06-16 | 2006-06-16 | 慣性センサ |
US12/303,902 US8096181B2 (en) | 2006-06-16 | 2007-06-06 | Inertial sensor |
PCT/JP2007/061447 WO2007145113A1 (ja) | 2006-06-16 | 2007-06-06 | 慣性センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006167760A JP4687577B2 (ja) | 2006-06-16 | 2006-06-16 | 慣性センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007333643A JP2007333643A (ja) | 2007-12-27 |
JP4687577B2 true JP4687577B2 (ja) | 2011-05-25 |
Family
ID=38831630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006167760A Expired - Fee Related JP4687577B2 (ja) | 2006-06-16 | 2006-06-16 | 慣性センサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US8096181B2 (ja) |
JP (1) | JP4687577B2 (ja) |
WO (1) | WO2007145113A1 (ja) |
Families Citing this family (46)
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DE102007017209B4 (de) * | 2007-04-05 | 2014-02-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanischer Inertialsensor zur Messung von Drehraten |
US8042396B2 (en) | 2007-09-11 | 2011-10-25 | Stmicroelectronics S.R.L. | Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes |
US20110088469A1 (en) * | 2007-11-08 | 2011-04-21 | Reinhard Neul | Rotation-rate sensor having two sensitive axes |
JP4508230B2 (ja) | 2007-11-21 | 2010-07-21 | ソニー株式会社 | 慣性センサ及びその検出装置 |
US8695424B2 (en) * | 2008-03-11 | 2014-04-15 | Continental Teves Ag & Co. Ohg | Sensor device for detecting at least one rotation rate of a rotating motion |
ITTO20090489A1 (it) | 2008-11-26 | 2010-12-27 | St Microelectronics Srl | Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse |
IT1391973B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari |
IT1391972B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche |
IT1392741B1 (it) | 2008-12-23 | 2012-03-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione |
DE102009001244A1 (de) * | 2009-02-27 | 2010-09-02 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse |
DE102009002066A1 (de) | 2009-03-31 | 2010-10-07 | Sensordynamics Ag | Verfahren zum Erfassen von Beschleunigungen und Drehraten sowie MEMS-Sensor |
IT1394007B1 (it) | 2009-05-11 | 2012-05-17 | St Microelectronics Rousset | Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
ITTO20091042A1 (it) * | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
EP2392897B1 (en) | 2010-01-12 | 2014-06-11 | Sony Corporation | Angular velocity sensor, electronic device, and method for detecting angular velocity |
DE102010028005A1 (de) * | 2010-04-20 | 2011-10-20 | Sensordynamics Ag | Mikro-Gyroskop zur Ermittlung von Bewegungen |
JP5652112B2 (ja) * | 2010-10-18 | 2015-01-14 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
US9003882B1 (en) * | 2010-11-03 | 2015-04-14 | Georgia Tech Research Corporation | Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS device |
DE102010061755A1 (de) * | 2010-11-23 | 2012-05-24 | Robert Bosch Gmbh | Drehratensensor und Verfahren zum Betrieb eines Drehratensensors |
FR2974896B1 (fr) * | 2011-05-02 | 2013-11-22 | Commissariat Energie Atomique | Centrale inertielle a plusieurs axes de detection |
ITTO20110806A1 (it) | 2011-09-12 | 2013-03-13 | St Microelectronics Srl | Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro |
FR2985029B1 (fr) * | 2011-12-22 | 2014-10-24 | Commissariat Energie Atomique | Dispositif micro/nano capteur inertiel multiaxial de mouvements |
GB2505875A (en) | 2012-09-04 | 2014-03-19 | Cambridge Entpr Ltd | Dual and triple axis inertial sensors and methods of inertial sensing |
US9381647B2 (en) * | 2013-02-19 | 2016-07-05 | Seiko Epson Corporation | Force detection device, robot, and moving object |
US9360319B2 (en) * | 2013-09-05 | 2016-06-07 | Freescale Semiconductor, Inc. | Multiple sense axis MEMS gyroscope having a single drive mode |
US9404747B2 (en) | 2013-10-30 | 2016-08-02 | Stmicroelectroncs S.R.L. | Microelectromechanical gyroscope with compensation of quadrature error drift |
WO2015167066A1 (ko) * | 2014-04-28 | 2015-11-05 | 주식회사 티엘아이 | 링 스프링을 가지는 3축 마이크로 자이로스코프 |
KR101645940B1 (ko) * | 2014-04-28 | 2016-08-05 | 주식회사 티엘아이 | 링 스프링을 가지는 3축 마이크로 자이로스코프 |
JP6149910B2 (ja) * | 2015-10-08 | 2017-06-21 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
US10809061B2 (en) * | 2016-01-27 | 2020-10-20 | Hitachi, Ltd. | Vibratory gyroscope including a plurality of inertial bodies |
US10371521B2 (en) * | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
US10514259B2 (en) | 2016-08-31 | 2019-12-24 | Analog Devices, Inc. | Quad proof mass MEMS gyroscope with outer couplers and related methods |
US10627235B2 (en) * | 2016-12-19 | 2020-04-21 | Analog Devices, Inc. | Flexural couplers for microelectromechanical systems (MEMS) devices |
US10415968B2 (en) | 2016-12-19 | 2019-09-17 | Analog Devices, Inc. | Synchronized mass gyroscope |
US10697774B2 (en) | 2016-12-19 | 2020-06-30 | Analog Devices, Inc. | Balanced runners synchronizing motion of masses in micromachined devices |
US10948294B2 (en) | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
US11265656B2 (en) | 2019-12-10 | 2022-03-01 | Starkey Laboratories, Inc. | Pairing system and method for ear-worn devices |
US11193771B1 (en) | 2020-06-05 | 2021-12-07 | Analog Devices, Inc. | 3-axis gyroscope with rotational vibration rejection |
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CN115812153A (zh) | 2020-06-08 | 2023-03-17 | 美国亚德诺半导体公司 | 应力释放mems陀螺仪 |
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CN216791219U (zh) * | 2021-10-08 | 2022-06-21 | 瑞声开泰科技(武汉)有限公司 | 微机械陀螺仪 |
CN116660570A (zh) * | 2022-02-18 | 2023-08-29 | 华为技术有限公司 | 角速度传感器、惯性传感器和电子设备 |
CN117146789A (zh) * | 2022-05-23 | 2023-12-01 | 华为技术有限公司 | 一种用于检测角速度的装置、方法和*** |
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2006
- 2006-06-16 JP JP2006167760A patent/JP4687577B2/ja not_active Expired - Fee Related
-
2007
- 2007-06-06 US US12/303,902 patent/US8096181B2/en not_active Expired - Fee Related
- 2007-06-06 WO PCT/JP2007/061447 patent/WO2007145113A1/ja active Application Filing
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JP2006017538A (ja) * | 2004-06-30 | 2006-01-19 | Kyocera Kinseki Corp | 振動子及び角速度センサ |
Also Published As
Publication number | Publication date |
---|---|
JP2007333643A (ja) | 2007-12-27 |
WO2007145113A1 (ja) | 2007-12-21 |
US20100223996A1 (en) | 2010-09-09 |
US8096181B2 (en) | 2012-01-17 |
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