JP4483430B2 - 静圧気体軸受パッドと隙間調節部材との組み合わせ構造及びこれを用いた静圧気体軸受機構 - Google Patents
静圧気体軸受パッドと隙間調節部材との組み合わせ構造及びこれを用いた静圧気体軸受機構 Download PDFInfo
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- JP4483430B2 JP4483430B2 JP2004188738A JP2004188738A JP4483430B2 JP 4483430 B2 JP4483430 B2 JP 4483430B2 JP 2004188738 A JP2004188738 A JP 2004188738A JP 2004188738 A JP2004188738 A JP 2004188738A JP 4483430 B2 JP4483430 B2 JP 4483430B2
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- Prior art keywords
- gas bearing
- bearing pad
- cylindrical portion
- static pressure
- diameter cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000002706 hydrostatic effect Effects 0.000 title claims description 21
- 230000003068 static effect Effects 0.000 claims description 43
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000000843 powder Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
2 固定体
3 静圧気体軸受パッド
4 隙間
5 隙間調節部材
6 組み合わせ構造
7 リング装着溝
8 凹所
9 リング
10 凹所規定面
11 受容溝
Claims (5)
- 可動体を固定体に対して移動自在に保持すベく可動体と固定体との間に介在させる静圧気体軸受パッドと、この静圧気体軸受パッドと可動体との間の隙間を調節する隙間調節部材との組み合わせ構造であって、静圧気体軸受パッドに設けられていると共に環状のリング装着溝を有する凹所と、リング装着溝に装着された拡径自在な弾性Oリングからなるリングと、隙間調節部材に設けられていると共に凹所を規定する静圧気体軸受パッドの凹所規定面から部分的に突出するリングを受容する環状の受容溝とを具備しており、凹所規定面は、円筒凹面と円錐凹面とを具備しており、リング装着溝は、円筒凹面と円錐凹面との間に設けられており、隙間調節部材は、外面にねじ部を有していると共に当該ねじ部を介して固定体に螺合されるようになっている大径円柱部と、大径円柱部に一体的に連接されていると共に大径円柱部よりも小径の小径円柱部と、小径円柱部に一体的に連接されていると共に小径円柱部よりも大径の半球部とを具備しており、受容溝は、大径円柱部と半球部との間に設けられており、半球部の半球凸面は、凹所規定面の円錐凹面に摺動自在に接触している静圧気体軸受パッドと隙間調節部材との組み合わせ構造。
- 半球部は、大径円柱部の径よりも小さな径を有している請求項1に記載の組み合わせ構造。
- 静圧気体軸受パッドは、可動体に対面する多孔面と、固定体に対面する無孔面とを有しており、凹所は、無孔面において開口している請求項1又は2に記載の組み合わせ構造。
- 静圧気体軸受パッドは多孔質金属焼結層を具備しており、多孔質金属焼結層の一方の面が可動体に対面する多孔面となっている請求項3に記載の組み合わせ構造。
- 請求項1から4のいずれか一項に記載の組み合わせ構造を具備した静圧気体軸受機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004188738A JP4483430B2 (ja) | 2004-06-25 | 2004-06-25 | 静圧気体軸受パッドと隙間調節部材との組み合わせ構造及びこれを用いた静圧気体軸受機構 |
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JP2004188738A JP4483430B2 (ja) | 2004-06-25 | 2004-06-25 | 静圧気体軸受パッドと隙間調節部材との組み合わせ構造及びこれを用いた静圧気体軸受機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006009968A JP2006009968A (ja) | 2006-01-12 |
JP4483430B2 true JP4483430B2 (ja) | 2010-06-16 |
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JP2004188738A Expired - Lifetime JP4483430B2 (ja) | 2004-06-25 | 2004-06-25 | 静圧気体軸受パッドと隙間調節部材との組み合わせ構造及びこれを用いた静圧気体軸受機構 |
Country Status (1)
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JP (1) | JP4483430B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5016232B2 (ja) * | 2006-02-20 | 2012-09-05 | 株式会社ミツトヨ | スライダ装置 |
JP5406507B2 (ja) * | 2008-11-06 | 2014-02-05 | オイレス工業株式会社 | 平面移動ステージ装置 |
WO2014002060A1 (en) | 2012-06-28 | 2014-01-03 | Outotec Oyj | Improvements in fluid bearings |
CN104454985A (zh) * | 2013-09-24 | 2015-03-25 | 大银微***股份有限公司 | 空气轴承与调整件间的保持构造 |
CN110094419B (zh) * | 2019-05-20 | 2020-06-23 | 珠海格力电器股份有限公司 | 轴向磁悬浮轴承、电机、压缩机、空调器 |
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2004
- 2004-06-25 JP JP2004188738A patent/JP4483430B2/ja not_active Expired - Lifetime
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JP2006009968A (ja) | 2006-01-12 |
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