JP4466349B2 - 多孔質静圧気体軸受 - Google Patents
多孔質静圧気体軸受 Download PDFInfo
- Publication number
- JP4466349B2 JP4466349B2 JP2004354638A JP2004354638A JP4466349B2 JP 4466349 B2 JP4466349 B2 JP 4466349B2 JP 2004354638 A JP2004354638 A JP 2004354638A JP 2004354638 A JP2004354638 A JP 2004354638A JP 4466349 B2 JP4466349 B2 JP 4466349B2
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- JP
- Japan
- Prior art keywords
- porous
- layer
- back metal
- annular
- annular groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003068 static effect Effects 0.000 title claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 90
- 239000002184 metal Substances 0.000 claims description 90
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 29
- 238000007747 plating Methods 0.000 claims description 16
- 230000002706 hydrostatic effect Effects 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 8
- 239000011574 phosphorus Substances 0.000 claims description 8
- 229910052698 phosphorus Inorganic materials 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 3
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 description 12
- 238000005245 sintering Methods 0.000 description 7
- 239000007791 liquid phase Substances 0.000 description 6
- 230000008602 contraction Effects 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Bearings For Parts Moving Linearly (AREA)
Description
21 裏金
22 面
23 凹部
24 円盤状面
25、26、27、28 環状凹溝
30 行き止り孔
31 環状立壁面
33 接合層
34 多孔質金属焼結層
35 閉塞栓
Claims (4)
- 裏金の一方の面には、裏金の環状立壁面で囲まれた円形の凹部が形成されており、該凹部の底面を規定する裏金の円盤状面には同心円状に少なくとも三個の環状凹溝が形成されていると共に、少なくとも三個の環状凹溝は該裏金の外周面からその中央部に向けて最内側に位置する環状凹溝にまで臨んで伸びて該裏金の内部に形成された行き止り孔に夫々連通しており、該凹部には、裏金の円盤状面及び環状立壁面に接合層を介して一体に接合されている多孔質金属焼結層が配されており、少なくとも三個の環状凹溝のうちの最外側に位置する環状凹溝が行き止り孔から多孔質金属焼結層への圧縮気体の供給源となるように、且つ、最外側に位置する環状凹溝に対して内側に位置する少なくとも二個の環状凹溝が行き止り孔からの直接的な圧縮気体の供給を受けない一方、多孔質金属焼結層からの圧縮気体を受容する半密閉チャンバーとなるように、最外側に位置する環状凹溝に対して中央部側に位置すると共に、該最外側に位置する環状凹溝に対して内側に位置する少なくとも二個の環状凹溝に対して外側に位置する行き止り孔の途中の部位に係止された閉塞栓を具備していることを特徴とする多孔質静圧気体軸受。
- 多孔質金属焼結層は、4重量%以上10重量%以下の錫と、10重量%以上40重量%以下のニッケルと、0.1重量%以上0.5重量%未満の燐と、2重量%以上10重量%以下の無機物質粒子と、残部が銅からなる請求項1に記載の多孔質静圧気体軸受。
- 無機物質粒子は、黒鉛、窒化ホウ素、フッ化黒鉛、フッ化カルシウム、酸化アルミニウム、酸化珪素及び炭化珪素のうちの少なくとも一つからなる請求項2に記載の多孔質静圧気体軸受。
- 接合層は、ニッケルメッキ層と銅メッキ層との二層のメッキ層を含んでおり、ニッケルメッキ層は裏金の円盤状面に接合されており、多孔質金属焼結層は、銅メッキ層に接合されている請求項1から3のいずれか一項に記載の多孔質静圧気体軸受。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004354638A JP4466349B2 (ja) | 2004-12-07 | 2004-12-07 | 多孔質静圧気体軸受 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2004354638A JP4466349B2 (ja) | 2004-12-07 | 2004-12-07 | 多孔質静圧気体軸受 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006161961A JP2006161961A (ja) | 2006-06-22 |
JP4466349B2 true JP4466349B2 (ja) | 2010-05-26 |
Family
ID=36664206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004354638A Active JP4466349B2 (ja) | 2004-12-07 | 2004-12-07 | 多孔質静圧気体軸受 |
Country Status (1)
Country | Link |
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JP (1) | JP4466349B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104454993B (zh) * | 2014-10-31 | 2017-02-01 | 湖南大学 | 气体静压推力轴承 |
CN109185339B (zh) * | 2018-09-06 | 2020-03-17 | 西安交通大学 | 一种分布式多节流域气体静压止推轴承 |
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