JP2020092143A - 加工装置 - Google Patents
加工装置 Download PDFInfo
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- JP2020092143A JP2020092143A JP2018227441A JP2018227441A JP2020092143A JP 2020092143 A JP2020092143 A JP 2020092143A JP 2018227441 A JP2018227441 A JP 2018227441A JP 2018227441 A JP2018227441 A JP 2018227441A JP 2020092143 A JP2020092143 A JP 2020092143A
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- 230000002093 peripheral effect Effects 0.000 claims abstract description 22
- 230000032258 transport Effects 0.000 claims abstract description 21
- 238000003860 storage Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 description 32
- 238000005520 cutting process Methods 0.000 description 18
- 239000011347 resin Substances 0.000 description 18
- 229920005989 resin Polymers 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
11a デバイス領域
11b 中央領域
11c 外周領域
13 基板
13a 表面
13b 裏面
15 樹脂層(モールド樹脂)
17 分割予定ライン(ストリート)
19 マーカー
21 電極
2 切削装置
4 基台
4a 開口
4b 開口
6 カセット載置部
8 カセット
8a 底部
8b 第1側壁
8c 第2側壁
8d 第3側壁
8e 上壁
8f 開口部
10 テーブルカバー
12 防塵防滴カバー
14 チャックテーブル
14a 保持面
16 仮置き部
18 第1ガイドレール
20 第2ガイドレール
18a,20a 支持面
18b,20b 挟持面
22a,22b 加工ユニット
24 第1支持構造
26a,26b 移動ユニット(移動機構)
28a,28a ハウジング
30 切削ブレード
32 第2支持構造
34 ガイドレール
36 搬送ユニット(搬送機構)
38 移動部
40 昇降機構
42 吸引部
44 挟持部
46 挟持部
50 支持部
52 第1ガイドレール
52a 支持面
54 第2ガイドレール
54a 支持面
56 隙間
60 支持部
62a 第1挟持部材(上部挟持部材)
62b 第2挟持部材(下部挟持部材)
64a,66a 第1接触部
64b,66b 第2接触部
Claims (1)
- 板状の被加工物を保持するチャックテーブルと、
該チャックテーブルによって保持された被加工物を加工する加工ユニットと、
複数の該被加工物を収容可能なカセットが載置されるカセット載置部と、
該カセットから搬出された該被加工物、又は該カセットに搬入される該被加工物が仮置きされる仮置き部と、
該カセットと該仮置き部との間で該被加工物を搬送する搬送ユニットと、を備え、
該カセットは、
底部と、
該底部と接続され互いに対面する第1側壁及び第2側壁と、
該第1側壁から該第2側壁側に突出するように配置され、該被加工物の外周領域を支持する第1ガイドレールと、
該第2側壁から該第1側壁側に突出するように配置され、該被加工物の外周領域を支持する第2ガイドレールと、を備え、
該搬送ユニットは、
該被加工物の外周領域を上下から挟持する挟持部と、
該挟持部を該カセットと該仮置き部との間で移動させる移動部と、を備え、
該挟持部は、
該移動部の移動方向と垂直な方向に沿って該被加工物の上面側と複数の点又は線状に接触する第1接触部と、
該移動部の移動方向と垂直な方向に沿って該被加工物の下面側と複数の点又は線状に接触する第2接触部と、を備えることを特徴とする加工装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018227441A JP7233813B2 (ja) | 2018-12-04 | 2018-12-04 | 加工装置 |
KR1020190151532A KR20200067747A (ko) | 2018-12-04 | 2019-11-22 | 가공 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018227441A JP7233813B2 (ja) | 2018-12-04 | 2018-12-04 | 加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020092143A true JP2020092143A (ja) | 2020-06-11 |
JP7233813B2 JP7233813B2 (ja) | 2023-03-07 |
Family
ID=71013136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018227441A Active JP7233813B2 (ja) | 2018-12-04 | 2018-12-04 | 加工装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7233813B2 (ja) |
KR (1) | KR20200067747A (ja) |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000232080A (ja) * | 1999-02-10 | 2000-08-22 | Disco Abrasive Syst Ltd | 被加工物の分割システム及びペレットの移し替え装置 |
JP2002231801A (ja) * | 2001-01-30 | 2002-08-16 | Kondo Seisakusho:Kk | 半導体基板搬送用フィンガ |
JP2007321242A (ja) * | 2006-06-05 | 2007-12-13 | Marunaka Kogyo Kk | 電気メッキ装置におけるクリップ式のワークハンガー |
JP2011192781A (ja) * | 2010-03-15 | 2011-09-29 | Disco Corp | パッケージ基板の加工方法 |
JP2013026270A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | フレーム供給装置およびフレーム供給方法 |
JP2013033882A (ja) * | 2011-08-03 | 2013-02-14 | Disco Abrasive Syst Ltd | パッケージ基板分割装置 |
JP2013222953A (ja) * | 2012-04-19 | 2013-10-28 | Seiko Epson Corp | 基板搬送装置及び基板処理装置 |
JP2015095515A (ja) * | 2013-11-11 | 2015-05-18 | 株式会社ディスコ | 切削装置及び切削方法 |
JP2016207987A (ja) * | 2015-04-28 | 2016-12-08 | 株式会社ディスコ | 切削装置 |
JP2017008346A (ja) * | 2015-06-18 | 2017-01-12 | 大日本印刷株式会社 | 基板搬送装置および保持部 |
JP2017112228A (ja) * | 2015-12-16 | 2017-06-22 | 株式会社ディスコ | 加工装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014204020A (ja) | 2013-04-08 | 2014-10-27 | 株式会社ディスコ | 加工装置 |
-
2018
- 2018-12-04 JP JP2018227441A patent/JP7233813B2/ja active Active
-
2019
- 2019-11-22 KR KR1020190151532A patent/KR20200067747A/ko not_active Application Discontinuation
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000232080A (ja) * | 1999-02-10 | 2000-08-22 | Disco Abrasive Syst Ltd | 被加工物の分割システム及びペレットの移し替え装置 |
JP2002231801A (ja) * | 2001-01-30 | 2002-08-16 | Kondo Seisakusho:Kk | 半導体基板搬送用フィンガ |
JP2007321242A (ja) * | 2006-06-05 | 2007-12-13 | Marunaka Kogyo Kk | 電気メッキ装置におけるクリップ式のワークハンガー |
JP2011192781A (ja) * | 2010-03-15 | 2011-09-29 | Disco Corp | パッケージ基板の加工方法 |
JP2013026270A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | フレーム供給装置およびフレーム供給方法 |
JP2013033882A (ja) * | 2011-08-03 | 2013-02-14 | Disco Abrasive Syst Ltd | パッケージ基板分割装置 |
JP2013222953A (ja) * | 2012-04-19 | 2013-10-28 | Seiko Epson Corp | 基板搬送装置及び基板処理装置 |
JP2015095515A (ja) * | 2013-11-11 | 2015-05-18 | 株式会社ディスコ | 切削装置及び切削方法 |
JP2016207987A (ja) * | 2015-04-28 | 2016-12-08 | 株式会社ディスコ | 切削装置 |
JP2017008346A (ja) * | 2015-06-18 | 2017-01-12 | 大日本印刷株式会社 | 基板搬送装置および保持部 |
JP2017112228A (ja) * | 2015-12-16 | 2017-06-22 | 株式会社ディスコ | 加工装置 |
Also Published As
Publication number | Publication date |
---|---|
JP7233813B2 (ja) | 2023-03-07 |
KR20200067747A (ko) | 2020-06-12 |
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