JP2019111628A - 切削装置 - Google Patents
切削装置 Download PDFInfo
- Publication number
- JP2019111628A JP2019111628A JP2017248292A JP2017248292A JP2019111628A JP 2019111628 A JP2019111628 A JP 2019111628A JP 2017248292 A JP2017248292 A JP 2017248292A JP 2017248292 A JP2017248292 A JP 2017248292A JP 2019111628 A JP2019111628 A JP 2019111628A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- unit
- cutting
- moving
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005520 cutting process Methods 0.000 title claims abstract description 161
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000001035 drying Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 11
- 238000003754 machining Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 abstract description 6
- 230000032258 transport Effects 0.000 description 28
- 239000002173 cutting fluid Substances 0.000 description 11
- 230000007723 transport mechanism Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Confectionery (AREA)
Abstract
Description
3 切削溝
2 切削装置
4 装置基台
6 チャックテーブル
6a 保持面
8 切削ユニット
8a 切削ブレード
8b ノズル
10 カメラユニット
16 開口
18 X軸移動テーブル
20 防塵防滴カバー
22 支持構造
24,32 ガイドレール
26,34 移動プレート
28,36 ボールねじ
30,38 パルスモータ
40 載置領域
42 アーム
44 搬送パッド
46 被係合部
48 係合部
50 搬出ユニット
52 搬出テーブル
54 洗浄ノズル
56 乾燥ノズル
58 待機領域
60 搬入出領域
62 加工領域
64,66,68 吸引路
70 搬出領域
Claims (5)
- チャックテーブルの保持面に保持された被加工物をスピンドルに装着した切削ブレードで切削する切削ユニットと、
被加工物が切削される加工領域と、被加工物が搬入出される搬入出領域と、の間で該チャックテーブルを該保持面に平行な加工送り方向へ移動させる加工送りユニットと、
該切削ユニットを該保持面に平行で該加工送り方向に垂直な割り出し送り方向と、該保持面に垂直な方向と、に移動させる移動ユニットと、
該搬入出領域に隣接し切削前の被加工物が載せられる載置領域と、
切削後の被加工物を搬出する搬出ユニットと、
該載置領域に載せられた切削前の被加工物を該搬入出領域に位置する該チャックテーブルに搬送し、該チャックテーブルに載る切削後の被加工物を該搬出ユニットに搬送する搬送パッドと、を備え、
該搬送パッドは、該搬入出領域に隣接する待機領域で該移動ユニットに着脱され、該移動ユニットに装着された状態で被加工物を吸引保持し、被加工物を吸引保持したまま該移動ユニットにより移動されることで被加工物を搬送することを特徴とする切削装置。 - 該搬送パッドは、上部に被係合部を備え、
該移動ユニットは、該切削ユニットが固定される移動プレートと、該移動プレートから該加工送り方向に伸長し該被係合部に係合される係合部を備えるアームと、を有し、
該移動プレートを該保持面に垂直な方向に移動させることで該待機領域に置かれた該搬送パッドの該被係合部に該アームの係合部を係合させ該移動プレートに該搬送パッドを連結することを特徴とする請求項1記載の切削装置。 - 該搬出ユニットは、該被加工物が載せられる搬出テーブルを備え、
該搬出テーブルは、該搬入出領域の直上の領域と、該加工送りユニットの側方の搬出領域と、の間を移動でき、
該搬出ユニットは、該直上の領域に位置付けられているときに該搬送パッドにより被加工物が載せられた該搬出テーブルを該搬出領域に移動させることで該被加工物を搬出することを特徴とする請求項1又は2記載の切削装置。 - 該搬出テーブルの移動経路上に設置され、該搬出テーブルに載置された該被加工物の表面に気体を噴射し、切削中に付着した液体を該被加工物から除去する乾燥ノズルを備えることを特徴とする請求項3記載の切削装置。
- 該加工送りユニットにより移動する該チャックテーブルの移動経路上に設置され、該チャックテーブルの該保持面又は該チャックテーブルに保持された被加工物に液体を噴射して該保持面又は該被加工物を洗浄する洗浄ノズルを備えることを特徴とする請求項1乃至4のいずれか一に記載の切削装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017248292A JP6973931B2 (ja) | 2017-12-25 | 2017-12-25 | 切削装置 |
CN201811566974.0A CN109986461B (zh) | 2017-12-25 | 2018-12-20 | 切削装置 |
TW107146770A TWI806950B (zh) | 2017-12-25 | 2018-12-24 | 切削裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017248292A JP6973931B2 (ja) | 2017-12-25 | 2017-12-25 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019111628A true JP2019111628A (ja) | 2019-07-11 |
JP6973931B2 JP6973931B2 (ja) | 2021-12-01 |
Family
ID=67128434
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017248292A Active JP6973931B2 (ja) | 2017-12-25 | 2017-12-25 | 切削装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6973931B2 (ja) |
CN (1) | CN109986461B (ja) |
TW (1) | TWI806950B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113017241A (zh) * | 2021-03-17 | 2021-06-25 | 安徽三和刷业有限公司 | 一种刷板自动分切打磨一体化装置 |
JP2021122882A (ja) * | 2020-02-04 | 2021-08-30 | 株式会社ディスコ | 切削装置 |
KR20230119599A (ko) | 2022-02-07 | 2023-08-16 | 가부시기가이샤 디스코 | 절삭 장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040083868A1 (en) * | 2002-01-18 | 2004-05-06 | Naoki Ohmiya | Cutting device |
JP2010045196A (ja) * | 2008-08-13 | 2010-02-25 | Disco Abrasive Syst Ltd | 板状物の搬送機構 |
JP2017084950A (ja) * | 2015-10-27 | 2017-05-18 | 株式会社ディスコ | 加工装置の搬送機構 |
JP2017098471A (ja) * | 2015-11-27 | 2017-06-01 | 株式会社ディスコ | 加工装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6478136B2 (en) * | 2001-01-08 | 2002-11-12 | Nikon Corporation | Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations |
JP4869864B2 (ja) * | 2006-10-20 | 2012-02-08 | 株式会社ディスコ | ウエーハの加工方法 |
JP2013023401A (ja) * | 2011-07-20 | 2013-02-04 | Mitsuboshi Diamond Industrial Co Ltd | 分断装置 |
CN104444364A (zh) * | 2014-10-29 | 2015-03-25 | 京东方科技集团股份有限公司 | 一种基板搬运装置 |
JP6695102B2 (ja) * | 2015-05-26 | 2020-05-20 | 株式会社ディスコ | 加工システム |
CN206123689U (zh) * | 2016-09-07 | 2017-04-26 | 广州瑞松智能科技股份有限公司 | 一种多功能抓手 |
-
2017
- 2017-12-25 JP JP2017248292A patent/JP6973931B2/ja active Active
-
2018
- 2018-12-20 CN CN201811566974.0A patent/CN109986461B/zh active Active
- 2018-12-24 TW TW107146770A patent/TWI806950B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040083868A1 (en) * | 2002-01-18 | 2004-05-06 | Naoki Ohmiya | Cutting device |
JP2010045196A (ja) * | 2008-08-13 | 2010-02-25 | Disco Abrasive Syst Ltd | 板状物の搬送機構 |
JP2017084950A (ja) * | 2015-10-27 | 2017-05-18 | 株式会社ディスコ | 加工装置の搬送機構 |
JP2017098471A (ja) * | 2015-11-27 | 2017-06-01 | 株式会社ディスコ | 加工装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021122882A (ja) * | 2020-02-04 | 2021-08-30 | 株式会社ディスコ | 切削装置 |
US11404303B2 (en) | 2020-02-04 | 2022-08-02 | Disco Corporation | Cutting apparatus for cutting workpiece with cutting blade |
JP7412855B2 (ja) | 2020-02-04 | 2024-01-15 | 株式会社ディスコ | 切削装置 |
CN113017241A (zh) * | 2021-03-17 | 2021-06-25 | 安徽三和刷业有限公司 | 一种刷板自动分切打磨一体化装置 |
CN113017241B (zh) * | 2021-03-17 | 2023-08-25 | 安徽三和刷业股份有限公司 | 一种刷板自动分切打磨一体化装置 |
KR20230119599A (ko) | 2022-02-07 | 2023-08-16 | 가부시기가이샤 디스코 | 절삭 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN109986461B (zh) | 2022-08-02 |
TW201929134A (zh) | 2019-07-16 |
TWI806950B (zh) | 2023-07-01 |
JP6973931B2 (ja) | 2021-12-01 |
CN109986461A (zh) | 2019-07-09 |
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