JP2014020815A - 基板検査装置および基板検査方法 - Google Patents
基板検査装置および基板検査方法 Download PDFInfo
- Publication number
- JP2014020815A JP2014020815A JP2012157313A JP2012157313A JP2014020815A JP 2014020815 A JP2014020815 A JP 2014020815A JP 2012157313 A JP2012157313 A JP 2012157313A JP 2012157313 A JP2012157313 A JP 2012157313A JP 2014020815 A JP2014020815 A JP 2014020815A
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- substrate
- point
- capacitive element
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Tests Of Electronic Circuits (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012157313A JP2014020815A (ja) | 2012-07-13 | 2012-07-13 | 基板検査装置および基板検査方法 |
KR1020130077629A KR20140009027A (ko) | 2012-07-13 | 2013-07-03 | 기판 검사 장치 및 기판 검사 방법 |
CN201310292022.5A CN103543374A (zh) | 2012-07-13 | 2013-07-12 | 基板检查装置及基板检查方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012157313A JP2014020815A (ja) | 2012-07-13 | 2012-07-13 | 基板検査装置および基板検査方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2014020815A true JP2014020815A (ja) | 2014-02-03 |
Family
ID=49967006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012157313A Pending JP2014020815A (ja) | 2012-07-13 | 2012-07-13 | 基板検査装置および基板検査方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2014020815A (zh) |
KR (1) | KR20140009027A (zh) |
CN (1) | CN103543374A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018186180A (ja) * | 2017-04-26 | 2018-11-22 | 株式会社パラット | 半田付け装置および半田付け方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6375661B2 (ja) * | 2014-03-26 | 2018-08-22 | 日本電産リード株式会社 | 抵抗測定装置、基板検査装置、検査方法、及び検査用治具のメンテナンス方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01143974A (ja) * | 1987-11-30 | 1989-06-06 | Toshiba Corp | インサーキットテスト装置 |
JPH03267763A (ja) * | 1990-03-16 | 1991-11-28 | Nippon Oil & Fats Co Ltd | ボード・テスタ |
JPH0499011A (ja) * | 1990-08-07 | 1992-03-31 | Nec Corp | チップ形固体電解コンデンサ |
JP2001004679A (ja) * | 1999-06-23 | 2001-01-12 | Mitsubishi Electric Building Techno Service Co Ltd | 絶縁監視システム |
JP2001183328A (ja) * | 1999-12-27 | 2001-07-06 | Railway Technical Res Inst | 塗膜交流インピーダンス測定装置、及び塗膜の交流インピーダンス測定方法 |
JP2003090855A (ja) * | 2001-09-17 | 2003-03-28 | Toshiba Corp | 電極検査装置及び電極検査方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03229178A (ja) * | 1990-02-01 | 1991-10-11 | Nec Corp | 基板検査装置 |
US6255827B1 (en) * | 1999-04-30 | 2001-07-03 | International Business Machines Corporation | Search routine for 2-point electrical tester |
JP2007178318A (ja) * | 2005-12-28 | 2007-07-12 | Nidec-Read Corp | 基板検査装置及び方法 |
JP2008002823A (ja) * | 2006-06-20 | 2008-01-10 | Nidec-Read Corp | 基板検査装置及び基板検査方法 |
JP4843071B2 (ja) * | 2009-06-04 | 2011-12-21 | マイクロクラフト株式会社 | プリント配線板の検査装置及び検査方法 |
JP5391869B2 (ja) * | 2009-06-26 | 2014-01-15 | 日本電産リード株式会社 | 基板検査方法 |
-
2012
- 2012-07-13 JP JP2012157313A patent/JP2014020815A/ja active Pending
-
2013
- 2013-07-03 KR KR1020130077629A patent/KR20140009027A/ko not_active Application Discontinuation
- 2013-07-12 CN CN201310292022.5A patent/CN103543374A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01143974A (ja) * | 1987-11-30 | 1989-06-06 | Toshiba Corp | インサーキットテスト装置 |
JPH03267763A (ja) * | 1990-03-16 | 1991-11-28 | Nippon Oil & Fats Co Ltd | ボード・テスタ |
JPH0499011A (ja) * | 1990-08-07 | 1992-03-31 | Nec Corp | チップ形固体電解コンデンサ |
JP2001004679A (ja) * | 1999-06-23 | 2001-01-12 | Mitsubishi Electric Building Techno Service Co Ltd | 絶縁監視システム |
JP2001183328A (ja) * | 1999-12-27 | 2001-07-06 | Railway Technical Res Inst | 塗膜交流インピーダンス測定装置、及び塗膜の交流インピーダンス測定方法 |
JP2003090855A (ja) * | 2001-09-17 | 2003-03-28 | Toshiba Corp | 電極検査装置及び電極検査方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018186180A (ja) * | 2017-04-26 | 2018-11-22 | 株式会社パラット | 半田付け装置および半田付け方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103543374A (zh) | 2014-01-29 |
KR20140009027A (ko) | 2014-01-22 |
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