JP2011519730A - 超格子/量子井戸ナノワイヤ - Google Patents
超格子/量子井戸ナノワイヤ Download PDFInfo
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- 239000002070 nanowire Substances 0.000 title claims abstract description 97
- 239000000463 material Substances 0.000 claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 claims abstract description 5
- 239000013078 crystal Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 41
- 229910052710 silicon Inorganic materials 0.000 claims description 36
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 21
- 238000003486 chemical etching Methods 0.000 claims description 18
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 11
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 3
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000002074 nanoribbon Substances 0.000 claims description 2
- 229910001961 silver nitrate Inorganic materials 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 17
- 239000000758 substrate Substances 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 33
- 239000010703 silicon Substances 0.000 description 33
- 238000005530 etching Methods 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 101710134784 Agnoprotein Proteins 0.000 description 12
- 238000001878 scanning electron micrograph Methods 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002096 quantum dot Substances 0.000 description 3
- 239000012086 standard solution Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000013019 agitation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004581 coalescence Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000527 sonication Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
【解決手段】 セグメント化された半導体ナノワイヤは、テンプレートなしに、2つ又はそれ以上の半導体材料の層状構造体から材料を除去することによって製造する。除去は、層状構造体の表面上のいくつかの場所で起こり、優先的に結晶軸の方向に沿って進行するので、除去が殆どまたは全く生じなかった場所に、セグメント化された構造体を有するナノワイヤが残る。異なるセグメント間の界面は、ナノワイヤの長手方向に対して垂直であるか又はある角度をなしている。
【選択図】 図6
Description
Claims (20)
- セグメント化されたナノワイヤを得る方法であって、
第1の材料及び前記第1の材料と異なる第2の材料を、前記第1の材料及び前記第2の材料を含む層状構造体から部分的に除去し、それによって、前記第1の材料のセグメント及び前記第2の材料のセグメントを有するセグメント化されたナノワイヤを得るステップを含む方法。 - 前記部分的に除去するステップは化学エッチングを含む、請求項1に記載の方法。
- 前記化学エッチングは、フッ化水素/硝酸銀溶液を適用するステップを含む、請求項2に記載の方法。
- 前記化学エッチングは、主に前記第1の材料又は前記第2の材料の結晶軸の方向に沿って起る、請求項2に記載の方法。
- 前記化学エッチングは、主に[100]結晶軸の方向に沿って起る、請求項4に記載の方法。
- 前記第1の材料はn型ドープSiであり、前記第2の材料はp型ドープSiであり、又は、前記第1の材料はp型ドープSiであり、前記第2の材料はn型ドープSiである、請求項1に記載の方法。
- 前記層状構造体は、少なくとも2つの異なる材料の複数の層を含む、請求項1に記載の方法。
- 前記セグメント化されたナノワイヤは、セグメント化されたナノリボンである、請求項1に記載の方法。
- 前記セグメント化されたナノワイヤは、ファセット形成された表面を有する、請求項1に記載の方法。
- 前記第1の材料及び前記第2の材料は、Si、SiGe、GaP、GaAsP、ZnS、Ge、GeAs、GaInAs及びZnSeから成る群から選択される、請求項1に記載の方法。
- 請求項1に記載の方法によるセグメント化されたナノワイヤを得るステップを含む、電気的、光学的及び熱電気的デバイスを製造する方法。
- セグメント化されたナノワイヤを得る方法であって、
第1の材料の第1の層を形成するステップと、
前記第1の材料に隣接する、前記第1の材料とは異なる第2の材料の第2の層を形成するステップと、
前記第1の材料及び前記第2の材料を部分的に除去し、それによって前記第1の材料のセグメント及び前記第2の材料のセグメントを有するセグメント化されたナノワイヤを得るステップと、
を含む方法。 - 前記第1の層を前記形成するステップ又は前記第2の層を前記形成するステップは、エピタキシャル成長を含む、請求項12に記載の方法。
- 前記第1の層を前記形成するステップ又は前記第2の層を前記形成するステップは、多結晶材料を堆積させるステップを含む、請求項12に記載の方法。
- 前記部分的に除去するステップの前に、少なくとも2つの異なる材料の複数の層を形成するステップをさらに含む、請求項12に記載の方法。
- 前記第1の材料及び前記第2の材料は、Si、SiGe、GaP、GaAsP、ZnS、Ge、GeAs、GaInAs及びZnSeから成る群から選択される、請求項12に記載の方法。
- 請求項12に記載の方法によるセグメント化されたナノワイヤを得るステップを含む、電気的、光学的及び熱電気的デバイスを製造する方法。
- 第1の材料の第1のセグメント及び第2の材料の第2のセグメントを含むセグメント化されたナノワイヤであって、前記第1のセグメントと前記第2のセグメントとの間の界面は、前記セグメント化されたナノワイヤの長手方向に向かってある角度で配向する、前記セグメント化されたナノワイヤ。
- 請求項18による前記セグメント化されたナノワイヤを含む太陽電池。
- 請求項18による前記セグメント化されたナノワイヤを含む、垂直キャビティ面発光レーザー、発光ダイオード、又は光電子デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/054,886 | 2008-03-25 | ||
US12/054,886 US8273591B2 (en) | 2008-03-25 | 2008-03-25 | Super lattice/quantum well nanowires |
PCT/US2009/032339 WO2009120404A1 (en) | 2008-03-25 | 2009-01-29 | Super lattice/quantum well nanowires |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010260170A (ja) * | 2009-04-28 | 2010-11-18 | Commissariat A L'energie Atomique & Aux Energies Alternatives | シリコン及び/又はゲルマニウムナノワイヤの組立方法 |
US10381451B2 (en) | 2015-10-09 | 2019-08-13 | Unisantis Electronics Singapore Pte. Ltd. | Semiconductor device |
US10490681B2 (en) | 2015-10-15 | 2019-11-26 | Unisantis Electronics Singapore Pte. Ltd. | Semiconductor device |
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US8878259B2 (en) | 2014-11-04 |
TW201004863A (en) | 2010-02-01 |
EP2257968A4 (en) | 2014-05-07 |
US8273591B2 (en) | 2012-09-25 |
EP2257968A1 (en) | 2010-12-08 |
US20120286236A1 (en) | 2012-11-15 |
WO2009120404A1 (en) | 2009-10-01 |
KR20100127249A (ko) | 2010-12-03 |
US20090242869A1 (en) | 2009-10-01 |
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