JP2011089172A - ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 - Google Patents
ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 Download PDFInfo
- Publication number
- JP2011089172A JP2011089172A JP2009243565A JP2009243565A JP2011089172A JP 2011089172 A JP2011089172 A JP 2011089172A JP 2009243565 A JP2009243565 A JP 2009243565A JP 2009243565 A JP2009243565 A JP 2009243565A JP 2011089172 A JP2011089172 A JP 2011089172A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- base material
- intermediate layer
- carbon film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 62
- 239000002184 metal Substances 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 239000002131 composite material Substances 0.000 claims abstract description 6
- 230000003247 decreasing effect Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 75
- 125000004429 atom Chemical group 0.000 claims description 36
- 239000000470 constituent Substances 0.000 claims description 29
- 239000000203 mixture Substances 0.000 claims description 17
- 125000004432 carbon atom Chemical group C* 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 239000011777 magnesium Substances 0.000 claims description 10
- 229910052749 magnesium Inorganic materials 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- -1 hydrogen ions Chemical class 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- CAVCGVPGBKGDTG-UHFFFAOYSA-N alumanylidynemethyl(alumanylidynemethylalumanylidenemethylidene)alumane Chemical compound [Al]#C[Al]=C=[Al]C#[Al] CAVCGVPGBKGDTG-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
- C23C14/0611—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
【解決手段】基材12とDLC皮膜16との間に、中間層14を介在する。この中間層14は、前記基材12の構成金属原子と、ダイヤモンドライクカーボンとを含有する複合層からなる。このような構成の中間層14は、基材12に対して印加された負バイアスの絶対値を時間の経過とともに小さくすることで得ることができる。
【選択図】図1
Description
前記中間層が、前記基材由来の構成金属原子と、ダイヤモンドライクカーボンとを含有する複合層であることを特徴とする。なお、ここでいう「基材由来の構成金属原子」とは、基材を発生源とする金属原子のことを指称し、基材とは別のターゲット等を発生源として発生したものは含まれない。
プラズマ中で前記基材に対して負バイアスを印加することで、該基材の構成金属原子をプラズマ中に遊離させる工程と、
前記基材に対する負バイアスの印加を続行しながら、炭素源から炭素原子を発生させる工程と、
前記負バイアスの電圧の絶対値を減少させ、前記基材の構成金属原子及び前記炭素原子を前記基材の表面に堆積することで、前記基材由来の構成金属原子と、ダイヤモンドライクカーボンとを含有する複合層からなる中間層を形成する工程と、
前記負バイアスの電圧値を0とし、前記炭素原子のみを前記中間層上に堆積することで、ダイヤモンドライクカーボン皮膜を形成する工程と、
を有することを特徴とする。
14…中間層 16…DLC皮膜
20…皮膜形成装置 22…真空チャンバ
24…負バイアス電源 26…プラズマ生成電極
27…炭素ターゲット 30…動的バイアス制御機構
38…排気ポンプ
Claims (6)
- 基材の表面に中間層を介してダイヤモンドライクカーボン皮膜が形成されたダイヤモンドライクカーボン皮膜形成部材であって、
前記中間層が、前記基材由来の構成金属原子と、ダイヤモンドライクカーボンとを含有する複合層であることを特徴とするダイヤモンドライクカーボン皮膜形成部材。 - 請求項1記載の部材において、前記基材がアルミニウム、マグネシウム、シリコン、又はこれらの中の少なくとも1元素を含む合金からなることを特徴とするダイヤモンドライクカーボン皮膜形成部材。
- 請求項1又は2記載の部材において、前記中間層に含まれる前記基材の構成金属の組成比が、前記基材側から前記ダイヤモンドライクカーボン皮膜側に向かうにつれて減少することを特徴とするダイヤモンドライクカーボン皮膜形成部材。
- 基材の表面に中間層を介してダイヤモンドライクカーボン皮膜が形成されたダイヤモンドライクカーボン皮膜形成部材を得るダイヤモンドライクカーボン皮膜形成部材の製造方法であって、
プラズマ中で前記基材に対して負バイアスを印加することで、該基材の構成金属原子をプラズマ中に遊離させる工程と、
前記基材に対する負バイアスの印加を続行しながら、炭素源から炭素原子を発生させる工程と、
前記負バイアスの電圧の絶対値を減少させ、前記基材の構成金属原子及び前記炭素原子を前記基材の表面に堆積することで、前記基材由来の構成金属原子と、ダイヤモンドライクカーボンとを含有する複合層からなる中間層を形成する工程と、
前記負バイアスの電圧値を0とし、前記炭素原子のみを前記中間層上に堆積することで、ダイヤモンドライクカーボン皮膜を形成する工程と、
を有することを特徴とするダイヤモンドライクカーボン皮膜形成部材の製造方法。 - 請求項4記載の製造方法において、前記基材の構成金属原子をプラズマ中に遊離させるための初期バイアスとして、−100〜−1000Vの負バイアスを印加することを特徴とするダイヤモンドライクカーボン皮膜形成部材の製造方法。
- 請求項4又は5記載の製造方法において、前記基材の構成金属原子をプラズマ中に遊離させるための初期バイアスの値から、ダイヤモンドライクカーボン皮膜を形成するために0とするまで、前記負バイアスの電圧の絶対値を段階的又は漸次的に減少させることを特徴とするダイヤモンドライクカーボン皮膜形成部材の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009243565A JP5433897B2 (ja) | 2009-10-22 | 2009-10-22 | ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 |
US12/892,132 US9598762B2 (en) | 2009-10-22 | 2010-09-28 | Diamond-like carbon film-formed material and method for producing the same |
TW099132971A TWI504766B (zh) | 2009-10-22 | 2010-09-29 | 具有類鑽碳膜之材料及其製造方法 |
KR1020100101779A KR101699774B1 (ko) | 2009-10-22 | 2010-10-19 | 다이아몬드 라이크 카본 피막 형성 부재 및 그 제조 방법 |
DE102010048947A DE102010048947A1 (de) | 2009-10-22 | 2010-10-19 | Diamantähnliches Kohlenstofffilmmaterial und Verfahren zu dessen Herstellung |
CN201010533692.8A CN102041473B (zh) | 2009-10-22 | 2010-10-22 | 形成有类金刚石碳薄膜的材料及用于制造该材料的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009243565A JP5433897B2 (ja) | 2009-10-22 | 2009-10-22 | ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011089172A true JP2011089172A (ja) | 2011-05-06 |
JP5433897B2 JP5433897B2 (ja) | 2014-03-05 |
Family
ID=43797007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009243565A Active JP5433897B2 (ja) | 2009-10-22 | 2009-10-22 | ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9598762B2 (ja) |
JP (1) | JP5433897B2 (ja) |
KR (1) | KR101699774B1 (ja) |
CN (1) | CN102041473B (ja) |
DE (1) | DE102010048947A1 (ja) |
TW (1) | TWI504766B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016056923A (ja) * | 2014-09-12 | 2016-04-21 | Smc株式会社 | 流体圧シリンダ |
WO2018116532A1 (ja) * | 2016-12-19 | 2018-06-28 | Smc株式会社 | 耐食部材 |
WO2022054365A1 (ja) * | 2020-09-10 | 2022-03-17 | パナソニックIpマネジメント株式会社 | 摺動部材およびそれを用いた圧縮機および冷凍装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013002911A1 (de) * | 2013-02-21 | 2014-08-21 | Oerlikon Trading Ag, Trübbach | Dekorative, tiefschwarze Beschichtung |
KR101632345B1 (ko) | 2013-03-22 | 2016-06-21 | 니탄 밸브 가부시키가이샤 | Dlc 피복막 및 피복 밸브 리프터 |
EP3022327A2 (en) * | 2013-07-19 | 2016-05-25 | Oerlikon Surface Solutions AG, Trübbach | Coatings for forming tools |
US10006116B2 (en) * | 2013-11-06 | 2018-06-26 | Dowa Thermotech Co., Ltd. | Forming method of intermediate layer formed between base material and DLC film, DLC film forming method, and intermediate layer formed between base material and DLC film |
US10370613B2 (en) * | 2014-10-24 | 2019-08-06 | Parag Gupta | Grey cast iron-doped diamond-like carbon coatings and methods for depositing same |
US10249495B2 (en) * | 2016-06-28 | 2019-04-02 | Applied Materials, Inc. | Diamond like carbon layer formed by an electron beam plasma process |
US11156033B1 (en) * | 2018-09-20 | 2021-10-26 | National Technology & Engineering Solutions Of Sandia, Llc | Multilayer solid lubricant architecture for use in drilling tool applications |
CN109267029B (zh) * | 2018-12-06 | 2020-12-11 | 大连大学 | 一种高平整性、高耐磨性、高耐蚀性镁合金表面涂层的制备方法 |
CN109609920B (zh) * | 2019-01-09 | 2021-01-05 | 福建工程学院 | 一种抗塞网丝网印刷网版及其制备方法 |
CN109735796B (zh) * | 2019-03-15 | 2020-11-03 | 哈尔滨工业大学 | 一种抑制高铬高钴渗碳钢网状碳化物组织并提高渗碳速度的渗碳方法 |
CN112501584A (zh) * | 2020-11-13 | 2021-03-16 | 南昌大学 | 一种基于石墨基底的复合涂层及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03219079A (ja) * | 1990-01-24 | 1991-09-26 | Mitsubishi Materials Corp | ダイヤモンド被覆炭化タングステン基超硬合金切削工具の製造法 |
JPH0474797A (ja) * | 1990-07-06 | 1992-03-10 | Seiko Instr Inc | 高密着性硬質炭素膜のコーティング方法 |
JPH05186870A (ja) * | 1992-01-10 | 1993-07-27 | Seiko Instr Inc | 高密着性硬質炭素膜被覆超硬合金部材およびその製造方法 |
JPH1082390A (ja) * | 1996-07-18 | 1998-03-31 | Sanyo Electric Co Ltd | 摺動部材、圧縮機及び回転圧縮機 |
JP2007162099A (ja) * | 2005-12-15 | 2007-06-28 | Toyota Motor Corp | 硬質炭素膜及びその製造方法並びに摺動部材 |
JP2008069372A (ja) * | 2006-09-12 | 2008-03-27 | Hitachi Ltd | 硬質炭素被膜を有する部材 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5411797A (en) * | 1988-04-18 | 1995-05-02 | Board Of Regents, The University Of Texas System | Nanophase diamond films |
US5897942A (en) | 1993-10-29 | 1999-04-27 | Balzers Aktiengesellschaft | Coated body, method for its manufacturing as well as its use |
JP3216994B2 (ja) | 1996-06-26 | 2001-10-09 | 三井金属鉱業株式会社 | 車両用ドアキーシリンダ取付装置 |
JPH1087397A (ja) * | 1996-09-06 | 1998-04-07 | Sanyo Electric Co Ltd | 硬質炭素被膜、及び該被膜を用いた電気シェーバー刃 |
JPH10203897A (ja) | 1997-01-17 | 1998-08-04 | Mitsubishi Electric Corp | 薄膜形成における前処理方法および薄膜形成装置 |
JPH10203896A (ja) | 1997-01-17 | 1998-08-04 | Mitsubishi Electric Corp | ダイヤモンドライクカーボン薄膜が形成された部材およびその形成方法 |
JP2000140470A (ja) * | 1998-09-11 | 2000-05-23 | Yamato Sewing Mach Co Ltd | ミシン及びミシン部品の製造方法 |
US6994474B2 (en) * | 2001-05-29 | 2006-02-07 | Nsk Ltd. | Rolling sliding member and rolling apparatus |
JP2006521204A (ja) * | 2003-03-03 | 2006-09-21 | ザ ティムケン カンパニー | エアフォイルへの着氷を軽減する耐摩耗被覆 |
JP4696823B2 (ja) | 2005-10-06 | 2011-06-08 | トヨタ自動車株式会社 | 金属複合ダイヤモンドライクカーボン(dlc)皮膜、その形成方法、及び摺動部材 |
JP2008024996A (ja) | 2006-07-21 | 2008-02-07 | Ohashi Technica Inc | ダイヤモンドライクカーボン積層皮膜部材及びその製造方法 |
CN101444985B (zh) * | 2007-12-19 | 2011-09-14 | 中国人民解放军装甲兵工程学院 | 一种非晶碳涂层及其制备方法和用途 |
-
2009
- 2009-10-22 JP JP2009243565A patent/JP5433897B2/ja active Active
-
2010
- 2010-09-28 US US12/892,132 patent/US9598762B2/en not_active Expired - Fee Related
- 2010-09-29 TW TW099132971A patent/TWI504766B/zh active
- 2010-10-19 DE DE102010048947A patent/DE102010048947A1/de active Pending
- 2010-10-19 KR KR1020100101779A patent/KR101699774B1/ko active IP Right Grant
- 2010-10-22 CN CN201010533692.8A patent/CN102041473B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03219079A (ja) * | 1990-01-24 | 1991-09-26 | Mitsubishi Materials Corp | ダイヤモンド被覆炭化タングステン基超硬合金切削工具の製造法 |
JPH0474797A (ja) * | 1990-07-06 | 1992-03-10 | Seiko Instr Inc | 高密着性硬質炭素膜のコーティング方法 |
JPH05186870A (ja) * | 1992-01-10 | 1993-07-27 | Seiko Instr Inc | 高密着性硬質炭素膜被覆超硬合金部材およびその製造方法 |
JPH1082390A (ja) * | 1996-07-18 | 1998-03-31 | Sanyo Electric Co Ltd | 摺動部材、圧縮機及び回転圧縮機 |
JP2007162099A (ja) * | 2005-12-15 | 2007-06-28 | Toyota Motor Corp | 硬質炭素膜及びその製造方法並びに摺動部材 |
JP2008069372A (ja) * | 2006-09-12 | 2008-03-27 | Hitachi Ltd | 硬質炭素被膜を有する部材 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016056923A (ja) * | 2014-09-12 | 2016-04-21 | Smc株式会社 | 流体圧シリンダ |
US10480546B2 (en) | 2014-09-12 | 2019-11-19 | Smc Corporation | Hydraulic cylinder |
WO2018116532A1 (ja) * | 2016-12-19 | 2018-06-28 | Smc株式会社 | 耐食部材 |
CN110121569A (zh) * | 2016-12-19 | 2019-08-13 | Smc 株式会社 | 耐腐蚀部件 |
KR20190096407A (ko) * | 2016-12-19 | 2019-08-19 | 에스엠시 가부시키가이샤 | 내부식성 부재 |
JPWO2018116532A1 (ja) * | 2016-12-19 | 2019-10-24 | Smc株式会社 | 耐食部材 |
RU2743353C2 (ru) * | 2016-12-19 | 2021-02-17 | СМСи КОРПОРЕЙШН | Коррозионностойкий элемент конструкции |
RU2743353C9 (ru) * | 2016-12-19 | 2022-01-12 | СМСи КОРПОРЕЙШН | Коррозионностойкий элемент конструкции |
KR102397701B1 (ko) | 2016-12-19 | 2022-05-13 | 에스엠시 가부시키가이샤 | 내부식성 부재 |
US11457766B2 (en) | 2016-12-19 | 2022-10-04 | Smc Corporation | Corrosion-resistant member |
WO2022054365A1 (ja) * | 2020-09-10 | 2022-03-17 | パナソニックIpマネジメント株式会社 | 摺動部材およびそれを用いた圧縮機および冷凍装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102041473B (zh) | 2014-10-08 |
TWI504766B (zh) | 2015-10-21 |
CN102041473A (zh) | 2011-05-04 |
US20110094628A1 (en) | 2011-04-28 |
KR101699774B1 (ko) | 2017-01-25 |
JP5433897B2 (ja) | 2014-03-05 |
US9598762B2 (en) | 2017-03-21 |
TW201125992A (en) | 2011-08-01 |
DE102010048947A1 (de) | 2011-04-28 |
KR20110044146A (ko) | 2011-04-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5433897B2 (ja) | ダイヤモンドライクカーボン皮膜形成部材及びその製造方法 | |
JP4918656B2 (ja) | 非晶質硬質炭素皮膜 | |
JP5393108B2 (ja) | 硬質多層膜成形体の製造方法 | |
JP4696823B2 (ja) | 金属複合ダイヤモンドライクカーボン(dlc)皮膜、その形成方法、及び摺動部材 | |
JP2007070667A (ja) | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 | |
JP2004010923A (ja) | 摺動部材及びその製造方法 | |
JP5592625B2 (ja) | 硬質膜の成膜方法および硬質膜 | |
CN101469402B (zh) | 类富勒烯碳膜的制备方法 | |
JP2018536765A (ja) | ダイヤモンド層及び硬質材料層を有するボデーのコーティング | |
JP3980053B2 (ja) | 硬質物質層の製造方法 | |
JP5074836B2 (ja) | 複合硬質炭素膜及びその製造方法並びに摺動部材 | |
JP5126867B2 (ja) | 炭素膜の製造方法 | |
CN109023264B (zh) | 一种高硬TiCN纳米复合薄膜及其制备方法、模具 | |
JP5226826B2 (ja) | ダイヤモンドライクカーボン硬質多層膜成形体の製造方法 | |
JP2007277663A (ja) | 摺動材 | |
JPH10237627A (ja) | 硬質炭素膜被覆部材 | |
JP5592626B2 (ja) | 硬質膜の成膜方法および硬質膜 | |
CN109722637A (zh) | 润滑涂层及其制备方法 | |
WO2016111288A1 (ja) | ダイヤモンドライクカーボン層積層体およびその製造方法 | |
JP4720052B2 (ja) | 非晶質炭素被膜の形成装置及び形成方法 | |
JP2004269991A (ja) | 異なる環境において耐摩耗性に優れたダイアモンドライクカーボン多層膜 | |
JP2004316850A (ja) | 摺動部材およびその製造方法 | |
JP2018053307A (ja) | 摺動部材およびその製造方法 | |
JPH10226874A (ja) | 硬質炭素膜及びその被覆部材 | |
JP4380377B2 (ja) | カーボン系膜形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120829 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130731 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130806 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130926 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131003 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131022 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131121 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5433897 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |