JP2009131909A5 - - Google Patents
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- Publication number
- JP2009131909A5 JP2009131909A5 JP2007307730A JP2007307730A JP2009131909A5 JP 2009131909 A5 JP2009131909 A5 JP 2009131909A5 JP 2007307730 A JP2007307730 A JP 2007307730A JP 2007307730 A JP2007307730 A JP 2007307730A JP 2009131909 A5 JP2009131909 A5 JP 2009131909A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- producing
- temporary
- film
- sheet according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 14
- 238000005296 abrasive Methods 0.000 claims 13
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000002245 particle Substances 0.000 claims 7
- 239000006061 abrasive grain Substances 0.000 claims 6
- 239000000853 adhesive Substances 0.000 claims 5
- 230000001070 adhesive Effects 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 229920002472 Starch Polymers 0.000 claims 2
- 150000007524 organic acids Chemical class 0.000 claims 2
- 238000005507 spraying Methods 0.000 claims 2
- 239000008107 starch Substances 0.000 claims 2
- 235000019698 starch Nutrition 0.000 claims 2
- 229920002101 Chitin Polymers 0.000 claims 1
- DJHJJVWPFGHIPH-OODMECLYSA-N Chitin Chemical compound O[C@@H]1C(NC(=O)C)[C@H](O)OC(CO)[C@H]1COC[C@H]1C(NC(C)=O)[C@@H](O)[C@H](COC[C@H]2C([C@@H](O)[C@H](O)C(CO)O2)NC(C)=O)C(CO)O1 DJHJJVWPFGHIPH-OODMECLYSA-N 0.000 claims 1
- 229920001661 Chitosan Polymers 0.000 claims 1
- 229920002307 Dextran Polymers 0.000 claims 1
- 229920001353 Dextrin Polymers 0.000 claims 1
- 239000004375 Dextrin Substances 0.000 claims 1
- 229920002527 Glycogen Polymers 0.000 claims 1
- BYSGBSNPRWKUQH-UJDJLXLFSA-N Glycogen Chemical group O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@@H]1OC[C@@H]1[C@@H](O[C@@H]2[C@@H]([C@@H](O)[C@H](O)[C@@H](CO)O2)O)[C@H](O)[C@@H](O)[C@@H](O[C@@H]2[C@H](O[C@H](O)[C@H](O)[C@H]2O)CO)O1 BYSGBSNPRWKUQH-UJDJLXLFSA-N 0.000 claims 1
- 229940096919 Glycogen Drugs 0.000 claims 1
- 239000004372 Polyvinyl alcohol Substances 0.000 claims 1
- 229920002678 cellulose Polymers 0.000 claims 1
- 239000001913 cellulose Substances 0.000 claims 1
- 235000019425 dextrin Nutrition 0.000 claims 1
- 239000003292 glue Substances 0.000 claims 1
- 150000004676 glycans Polymers 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 229920001282 polysaccharide Polymers 0.000 claims 1
- 239000005017 polysaccharide Substances 0.000 claims 1
- 150000004804 polysaccharides Polymers 0.000 claims 1
- 229920002451 polyvinyl alcohol Polymers 0.000 claims 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 claims 1
- 239000002356 single layer Substances 0.000 claims 1
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007307730A JP5209284B2 (ja) | 2007-11-28 | 2007-11-28 | 研磨シートおよび研磨シートの製造方法 |
US12/744,551 US20100293865A1 (en) | 2007-11-28 | 2008-11-20 | Method of producing polishing sheet |
KR1020107011573A KR20100103473A (ko) | 2007-11-28 | 2008-11-20 | 연마 시트 및 연마 시트의 제조 방법 |
PCT/JP2008/071082 WO2009069526A1 (ja) | 2007-11-28 | 2008-11-20 | 研磨シートおよび研磨シートの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007307730A JP5209284B2 (ja) | 2007-11-28 | 2007-11-28 | 研磨シートおよび研磨シートの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009131909A JP2009131909A (ja) | 2009-06-18 |
JP2009131909A5 true JP2009131909A5 (es) | 2011-01-20 |
JP5209284B2 JP5209284B2 (ja) | 2013-06-12 |
Family
ID=40678428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007307730A Active JP5209284B2 (ja) | 2007-11-28 | 2007-11-28 | 研磨シートおよび研磨シートの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20100293865A1 (es) |
JP (1) | JP5209284B2 (es) |
KR (1) | KR20100103473A (es) |
WO (1) | WO2009069526A1 (es) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5781371B2 (ja) * | 2011-06-07 | 2015-09-24 | 三菱重工業株式会社 | 砥石工具の製造方法 |
GB201116305D0 (en) | 2011-09-21 | 2011-11-02 | Df & G Ltd | Composition |
GB201305217D0 (en) * | 2013-03-21 | 2013-05-01 | For Your Diamonds Only Ltd | Cleaning method |
DE102022211522A1 (de) | 2022-10-31 | 2024-05-02 | Robert Bosch Gesellschaft mit beschränkter Haftung | Schleifelement, Schleifmittel und Verfahren zur Herstellung des Schleifelements und/oder des Schleifmittels |
Family Cites Families (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3260582A (en) * | 1961-08-10 | 1966-07-12 | Norton Co | Polishing and abrading materials |
US3537121A (en) * | 1968-01-17 | 1970-11-03 | Minnesota Mining & Mfg | Cleaning and buffing product |
US3713795A (en) * | 1971-06-04 | 1973-01-30 | Ferro Corp | Method of making diamond coated surface |
US4240807A (en) * | 1976-01-02 | 1980-12-23 | Kimberly-Clark Corporation | Substrate having a thermoplastic binder coating for use in fabricating abrasive sheets and abrasive sheets manufactured therewith |
US4345545A (en) * | 1980-07-28 | 1982-08-24 | The Carborundum Company | Apparatus for electron curing of resin coated webs |
JPS5732749A (en) * | 1980-08-06 | 1982-02-22 | Toyota Motor Corp | Rotary-atomizing electrostatic-coating device |
JPH02185375A (ja) * | 1989-01-07 | 1990-07-19 | Speedfam Co Ltd | 研磨テープの製造方法及び製造装置 |
JPH02232172A (ja) * | 1989-03-06 | 1990-09-14 | Speedfam Co Ltd | 研磨部材の製造方法 |
US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
JP3152968B2 (ja) * | 1991-08-29 | 2001-04-03 | 科学技術振興事業団 | 研磨テープとその製造方法及び装置 |
US5681612A (en) * | 1993-06-17 | 1997-10-28 | Minnesota Mining And Manufacturing Company | Coated abrasives and methods of preparation |
JPH08243931A (ja) * | 1995-03-07 | 1996-09-24 | Nippon Micro Coating Kk | 研磨シート及びその製造方法 |
US6007591A (en) * | 1995-03-07 | 1999-12-28 | Nihon Micro Coating Co., Ltd. | Abrasive sheet and method for producing same |
JPH09141547A (ja) * | 1995-11-21 | 1997-06-03 | Fuji Photo Film Co Ltd | 超低反射光コネクターフェルールの研磨体 |
WO1997020658A1 (fr) * | 1995-12-06 | 1997-06-12 | Idemitsu Kosan Co., Ltd. | Procede de lissage des surfaces de materiau en feuille, et procede de fabrication dudit materiau selon ledit procede |
JPH1158205A (ja) * | 1997-08-25 | 1999-03-02 | Unique Technol Internatl Pte Ltd | 電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ |
JP2001334473A (ja) * | 2000-05-30 | 2001-12-04 | Nihon Micro Coating Co Ltd | 研磨シート及びその製造方法 |
US20020016139A1 (en) * | 2000-07-25 | 2002-02-07 | Kazuto Hirokawa | Polishing tool and manufacturing method therefor |
US7632434B2 (en) * | 2000-11-17 | 2009-12-15 | Wayne O. Duescher | Abrasive agglomerate coated raised island articles |
US8545583B2 (en) * | 2000-11-17 | 2013-10-01 | Wayne O. Duescher | Method of forming a flexible abrasive sheet article |
JP2002172563A (ja) * | 2000-11-24 | 2002-06-18 | Three M Innovative Properties Co | 研磨テープ |
JP2003071731A (ja) * | 2001-09-03 | 2003-03-12 | Three M Innovative Properties Co | ディンプル構造の研磨材料 |
JP2003200353A (ja) * | 2001-12-27 | 2003-07-15 | Riken Diamond Industry Co Ltd | 固定砥粒式の切断用工具及びその製造方法 |
US6841480B2 (en) * | 2002-02-04 | 2005-01-11 | Infineon Technologies Ag | Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate |
JP2003340730A (ja) * | 2002-05-30 | 2003-12-02 | Nippon Parkerizing Co Ltd | 研磨布紙の製造方法及び装置 |
DE10261306B4 (de) * | 2002-12-27 | 2010-02-25 | Advanced Micro Devices, Inc., Sunnyvale | Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage und Polierkopf und CMP-Vorrichtung mit Haltering |
US7232364B2 (en) * | 2005-02-04 | 2007-06-19 | 3M Innovative Properties Company | Abrasive cleaning article and method of making |
EP2197972B1 (en) * | 2007-09-21 | 2020-04-01 | Cabot Microelectronics Corporation | Polishing composition and method utilizing abrasive particles treated with an aminosilane |
JP5207444B2 (ja) * | 2007-11-22 | 2013-06-12 | 日本ミクロコーティング株式会社 | 研磨シート及び研磨シートの製造方法 |
-
2007
- 2007-11-28 JP JP2007307730A patent/JP5209284B2/ja active Active
-
2008
- 2008-11-20 WO PCT/JP2008/071082 patent/WO2009069526A1/ja active Application Filing
- 2008-11-20 US US12/744,551 patent/US20100293865A1/en not_active Abandoned
- 2008-11-20 KR KR1020107011573A patent/KR20100103473A/ko not_active Application Discontinuation
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