JP2009131909A5 - - Google Patents

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Publication number
JP2009131909A5
JP2009131909A5 JP2007307730A JP2007307730A JP2009131909A5 JP 2009131909 A5 JP2009131909 A5 JP 2009131909A5 JP 2007307730 A JP2007307730 A JP 2007307730A JP 2007307730 A JP2007307730 A JP 2007307730A JP 2009131909 A5 JP2009131909 A5 JP 2009131909A5
Authority
JP
Japan
Prior art keywords
abrasive
producing
temporary
film
sheet according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007307730A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009131909A (ja
JP5209284B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007307730A priority Critical patent/JP5209284B2/ja
Priority claimed from JP2007307730A external-priority patent/JP5209284B2/ja
Priority to US12/744,551 priority patent/US20100293865A1/en
Priority to KR1020107011573A priority patent/KR20100103473A/ko
Priority to PCT/JP2008/071082 priority patent/WO2009069526A1/ja
Publication of JP2009131909A publication Critical patent/JP2009131909A/ja
Publication of JP2009131909A5 publication Critical patent/JP2009131909A5/ja
Application granted granted Critical
Publication of JP5209284B2 publication Critical patent/JP5209284B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007307730A 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法 Active JP5209284B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007307730A JP5209284B2 (ja) 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法
US12/744,551 US20100293865A1 (en) 2007-11-28 2008-11-20 Method of producing polishing sheet
KR1020107011573A KR20100103473A (ko) 2007-11-28 2008-11-20 연마 시트 및 연마 시트의 제조 방법
PCT/JP2008/071082 WO2009069526A1 (ja) 2007-11-28 2008-11-20 研磨シートおよび研磨シートの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007307730A JP5209284B2 (ja) 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法

Publications (3)

Publication Number Publication Date
JP2009131909A JP2009131909A (ja) 2009-06-18
JP2009131909A5 true JP2009131909A5 (es) 2011-01-20
JP5209284B2 JP5209284B2 (ja) 2013-06-12

Family

ID=40678428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007307730A Active JP5209284B2 (ja) 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法

Country Status (4)

Country Link
US (1) US20100293865A1 (es)
JP (1) JP5209284B2 (es)
KR (1) KR20100103473A (es)
WO (1) WO2009069526A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5781371B2 (ja) * 2011-06-07 2015-09-24 三菱重工業株式会社 砥石工具の製造方法
GB201116305D0 (en) 2011-09-21 2011-11-02 Df & G Ltd Composition
GB201305217D0 (en) * 2013-03-21 2013-05-01 For Your Diamonds Only Ltd Cleaning method
DE102022211522A1 (de) 2022-10-31 2024-05-02 Robert Bosch Gesellschaft mit beschränkter Haftung Schleifelement, Schleifmittel und Verfahren zur Herstellung des Schleifelements und/oder des Schleifmittels

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3260582A (en) * 1961-08-10 1966-07-12 Norton Co Polishing and abrading materials
US3537121A (en) * 1968-01-17 1970-11-03 Minnesota Mining & Mfg Cleaning and buffing product
US3713795A (en) * 1971-06-04 1973-01-30 Ferro Corp Method of making diamond coated surface
US4240807A (en) * 1976-01-02 1980-12-23 Kimberly-Clark Corporation Substrate having a thermoplastic binder coating for use in fabricating abrasive sheets and abrasive sheets manufactured therewith
US4345545A (en) * 1980-07-28 1982-08-24 The Carborundum Company Apparatus for electron curing of resin coated webs
JPS5732749A (en) * 1980-08-06 1982-02-22 Toyota Motor Corp Rotary-atomizing electrostatic-coating device
JPH02185375A (ja) * 1989-01-07 1990-07-19 Speedfam Co Ltd 研磨テープの製造方法及び製造装置
JPH02232172A (ja) * 1989-03-06 1990-09-14 Speedfam Co Ltd 研磨部材の製造方法
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
JP3152968B2 (ja) * 1991-08-29 2001-04-03 科学技術振興事業団 研磨テープとその製造方法及び装置
US5681612A (en) * 1993-06-17 1997-10-28 Minnesota Mining And Manufacturing Company Coated abrasives and methods of preparation
JPH08243931A (ja) * 1995-03-07 1996-09-24 Nippon Micro Coating Kk 研磨シート及びその製造方法
US6007591A (en) * 1995-03-07 1999-12-28 Nihon Micro Coating Co., Ltd. Abrasive sheet and method for producing same
JPH09141547A (ja) * 1995-11-21 1997-06-03 Fuji Photo Film Co Ltd 超低反射光コネクターフェルールの研磨体
WO1997020658A1 (fr) * 1995-12-06 1997-06-12 Idemitsu Kosan Co., Ltd. Procede de lissage des surfaces de materiau en feuille, et procede de fabrication dudit materiau selon ledit procede
JPH1158205A (ja) * 1997-08-25 1999-03-02 Unique Technol Internatl Pte Ltd 電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ
JP2001334473A (ja) * 2000-05-30 2001-12-04 Nihon Micro Coating Co Ltd 研磨シート及びその製造方法
US20020016139A1 (en) * 2000-07-25 2002-02-07 Kazuto Hirokawa Polishing tool and manufacturing method therefor
US7632434B2 (en) * 2000-11-17 2009-12-15 Wayne O. Duescher Abrasive agglomerate coated raised island articles
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
JP2002172563A (ja) * 2000-11-24 2002-06-18 Three M Innovative Properties Co 研磨テープ
JP2003071731A (ja) * 2001-09-03 2003-03-12 Three M Innovative Properties Co ディンプル構造の研磨材料
JP2003200353A (ja) * 2001-12-27 2003-07-15 Riken Diamond Industry Co Ltd 固定砥粒式の切断用工具及びその製造方法
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
JP2003340730A (ja) * 2002-05-30 2003-12-02 Nippon Parkerizing Co Ltd 研磨布紙の製造方法及び装置
DE10261306B4 (de) * 2002-12-27 2010-02-25 Advanced Micro Devices, Inc., Sunnyvale Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage und Polierkopf und CMP-Vorrichtung mit Haltering
US7232364B2 (en) * 2005-02-04 2007-06-19 3M Innovative Properties Company Abrasive cleaning article and method of making
EP2197972B1 (en) * 2007-09-21 2020-04-01 Cabot Microelectronics Corporation Polishing composition and method utilizing abrasive particles treated with an aminosilane
JP5207444B2 (ja) * 2007-11-22 2013-06-12 日本ミクロコーティング株式会社 研磨シート及び研磨シートの製造方法

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