JP5209284B2 - 研磨シートおよび研磨シートの製造方法 - Google Patents

研磨シートおよび研磨シートの製造方法 Download PDF

Info

Publication number: JP5209284B2
Authority: JP; Japan
Prior art keywords: abrasive grains; abrasive; temporary; film; base material
Prior art date: 2007-11-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2007307730A

Other languages

English (en)

Japanese (ja)

Other versions

JP2009131909A (ja

JP2009131909A5 (es

Inventor

信義渡辺

和憲谷

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Nihon Micro Coating Co Ltd

Original Assignee

Nihon Micro Coating Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-11-28

Filing date

2007-11-28

Publication date

2013-06-12

2007-11-28 Application filed by Nihon Micro Coating Co Ltd filed Critical Nihon Micro Coating Co Ltd

2007-11-28 Priority to JP2007307730A priority Critical patent/JP5209284B2/ja

2008-11-20 Priority to KR1020107011573A priority patent/KR20100103473A/ko

2008-11-20 Priority to PCT/JP2008/071082 priority patent/WO2009069526A1/ja

2008-11-20 Priority to US12/744,551 priority patent/US20100293865A1/en

2009-06-18 Publication of JP2009131909A publication Critical patent/JP2009131909A/ja

2011-01-20 Publication of JP2009131909A5 publication Critical patent/JP2009131909A5/ja

2013-06-12 Application granted granted Critical

2013-06-12 Publication of JP5209284B2 publication Critical patent/JP5209284B2/ja

Status Active legal-status Critical Current

2027-11-28 Anticipated expiration legal-status Critical

Links

238000004519 manufacturing process Methods 0.000 title claims description 16
239000006061 abrasive grain Substances 0.000 claims description 171
239000000463 material Substances 0.000 claims description 83
238000005498 polishing Methods 0.000 claims description 80
150000007524 organic acids Chemical class 0.000 claims description 38
239000000758 substrate Substances 0.000 claims description 35
238000000034 method Methods 0.000 claims description 24
239000002245 particle Substances 0.000 claims description 18
239000002356 single layer Substances 0.000 claims description 16
238000005507 spraying Methods 0.000 claims description 15
239000000853 adhesive Substances 0.000 claims description 14
230000001070 adhesive effect Effects 0.000 claims description 14
239000010410 layer Substances 0.000 claims description 13
239000004372 Polyvinyl alcohol Substances 0.000 claims description 7
229920002451 polyvinyl alcohol Polymers 0.000 claims description 7
229920001661 Chitosan Polymers 0.000 claims description 6
229920002472 Starch Polymers 0.000 claims description 6
239000008107 starch Substances 0.000 claims description 6
235000019698 starch Nutrition 0.000 claims description 6
239000012528 membrane Substances 0.000 claims description 5
229920002101 Chitin Polymers 0.000 claims description 4
239000003292 glue Substances 0.000 claims description 4
150000004676 glycans Chemical class 0.000 claims description 4
229920001282 polysaccharide Polymers 0.000 claims description 4
239000005017 polysaccharide Substances 0.000 claims description 4
229920002307 Dextran Polymers 0.000 claims description 2
229920001353 Dextrin Polymers 0.000 claims description 2
239000004375 Dextrin Substances 0.000 claims description 2
229920002527 Glycogen Polymers 0.000 claims description 2
229920002678 cellulose Polymers 0.000 claims description 2
239000001913 cellulose Substances 0.000 claims description 2
235000019425 dextrin Nutrition 0.000 claims description 2
229940096919 glycogen Drugs 0.000 claims description 2
235000019422 polyvinyl alcohol Nutrition 0.000 claims 1
239000010408 film Substances 0.000 description 69
239000011230 binding agent Substances 0.000 description 31
238000005520 cutting process Methods 0.000 description 27
239000004840 adhesive resin Substances 0.000 description 22
229920006223 adhesive resin Polymers 0.000 description 22
229920005989 resin Polymers 0.000 description 20
239000011347 resin Substances 0.000 description 20
-1 polyethylene terephthalate Polymers 0.000 description 14
238000012360 testing method Methods 0.000 description 12
239000007921 spray Substances 0.000 description 11
230000003746 surface roughness Effects 0.000 description 11
239000011248 coating agent Substances 0.000 description 10
238000000576 coating method Methods 0.000 description 10
229910003460 diamond Inorganic materials 0.000 description 10
239000010432 diamond Substances 0.000 description 10
238000012545 processing Methods 0.000 description 10
238000007590 electrostatic spraying Methods 0.000 description 9
229920000139 polyethylene terephthalate Polymers 0.000 description 8
239000005020 polyethylene terephthalate Substances 0.000 description 8
229910000831 Steel Inorganic materials 0.000 description 7
230000002776 aggregation Effects 0.000 description 7
239000010959 steel Substances 0.000 description 7
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
238000007600 charging Methods 0.000 description 5
238000009826 distribution Methods 0.000 description 5
239000010419 fine particle Substances 0.000 description 5
239000000203 mixture Substances 0.000 description 5
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
238000004220 aggregation Methods 0.000 description 4
230000000052 comparative effect Effects 0.000 description 4
238000007796 conventional method Methods 0.000 description 4
230000000694 effects Effects 0.000 description 4
239000007789 gas Substances 0.000 description 4
239000002195 soluble material Substances 0.000 description 4
239000004925 Acrylic resin Substances 0.000 description 3
229920000178 Acrylic resin Polymers 0.000 description 3
238000005054 agglomeration Methods 0.000 description 3
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
239000007864 aqueous solution Substances 0.000 description 3
238000011156 evaluation Methods 0.000 description 3
239000000243 solution Substances 0.000 description 3
235000021419 vinegar Nutrition 0.000 description 3
239000000052 vinegar Substances 0.000 description 3
BYDRTKVGBRTTIT-UHFFFAOYSA-N 2-methylprop-2-en-1-ol Chemical compound CC(=C)CO BYDRTKVGBRTTIT-UHFFFAOYSA-N 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229920002261 Corn starch Polymers 0.000 description 2
239000004593 Epoxy Substances 0.000 description 2
108010010803 Gelatin Proteins 0.000 description 2
239000004698 Polyethylene Substances 0.000 description 2
239000004743 Polypropylene Substances 0.000 description 2
239000004793 Polystyrene Substances 0.000 description 2
BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
239000002253 acid Substances 0.000 description 2
239000002131 composite material Substances 0.000 description 2
239000008120 corn starch Substances 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
238000007599 discharging Methods 0.000 description 2
238000001035 drying Methods 0.000 description 2
238000004070 electrodeposition Methods 0.000 description 2
239000012467 final product Substances 0.000 description 2
229920000159 gelatin Polymers 0.000 description 2
239000008273 gelatin Substances 0.000 description 2
235000019322 gelatine Nutrition 0.000 description 2
235000011852 gelatine desserts Nutrition 0.000 description 2
239000007788 liquid Substances 0.000 description 2
238000002156 mixing Methods 0.000 description 2
229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
239000004417 polycarbonate Substances 0.000 description 2
229920000515 polycarbonate Polymers 0.000 description 2
229920001225 polyester resin Polymers 0.000 description 2
239000004645 polyester resin Substances 0.000 description 2
229920000573 polyethylene Polymers 0.000 description 2
239000011112 polyethylene naphthalate Substances 0.000 description 2
238000006116 polymerization reaction Methods 0.000 description 2
229920005672 polyolefin resin Polymers 0.000 description 2
229920001155 polypropylene Polymers 0.000 description 2
229920002223 polystyrene Polymers 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
239000000047 product Substances 0.000 description 2
239000000377 silicon dioxide Substances 0.000 description 2
239000002002 slurry Substances 0.000 description 2
229920001187 thermosetting polymer Polymers 0.000 description 2
MSWZFWKMSRAUBD-IVMDWMLBSA-N 2-amino-2-deoxy-D-glucopyranose Chemical compound N[C@H]1C(O)O[C@H](CO)[C@@H](O)[C@@H]1O MSWZFWKMSRAUBD-IVMDWMLBSA-N 0.000 description 1
238000012935 Averaging Methods 0.000 description 1
229910052582 BN Inorganic materials 0.000 description 1
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
241000196324 Embryophyta Species 0.000 description 1
239000004640 Melamine resin Substances 0.000 description 1
229920000877 Melamine resin Polymers 0.000 description 1
229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
229920002125 Sokalan® Polymers 0.000 description 1
240000008042 Zea mays Species 0.000 description 1
235000005824 Zea mays ssp. parviglumis Nutrition 0.000 description 1
235000002017 Zea mays subsp mays Nutrition 0.000 description 1
125000002777 acetyl group Chemical group [H]C([H])([H])C(*)=O 0.000 description 1
230000002411 adverse Effects 0.000 description 1
235000021120 animal protein Nutrition 0.000 description 1
MSWZFWKMSRAUBD-UHFFFAOYSA-N beta-D-galactosamine Natural products NC1C(O)OC(CO)C(O)C1O MSWZFWKMSRAUBD-UHFFFAOYSA-N 0.000 description 1
239000012159 carrier gas Substances 0.000 description 1
235000005822 corn Nutrition 0.000 description 1
230000007423 decrease Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
239000006185 dispersion Substances 0.000 description 1
239000008151 electrolyte solution Substances 0.000 description 1
238000007786 electrostatic charging Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
229960002442 glucosamine Drugs 0.000 description 1
230000005484 gravity Effects 0.000 description 1
238000007373 indentation Methods 0.000 description 1
239000010954 inorganic particle Substances 0.000 description 1
230000001678 irradiating effect Effects 0.000 description 1
238000003754 machining Methods 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
239000004745 nonwoven fabric Substances 0.000 description 1
239000013307 optical fiber Substances 0.000 description 1
239000011146 organic particle Substances 0.000 description 1
238000011056 performance test Methods 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
229920005990 polystyrene resin Polymers 0.000 description 1
238000003825 pressing Methods 0.000 description 1
230000001737 promoting effect Effects 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
229910010271 silicon carbide Inorganic materials 0.000 description 1
239000010902 straw Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
239000008399 tap water Substances 0.000 description 1
235000020679 tap water Nutrition 0.000 description 1
239000010409 thin film Substances 0.000 description 1
238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
229920003169 water-soluble polymer Polymers 0.000 description 1
238000003466 welding Methods 0.000 description 1
239000002759 woven fabric Substances 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)

JP2007307730A 2007-11-28 2007-11-28 研磨シートおよび研磨シートの製造方法 Active JP5209284B2 (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP2007307730A JP5209284B2 (ja)	2007-11-28	2007-11-28	研磨シートおよび研磨シートの製造方法
KR1020107011573A KR20100103473A (ko)	2007-11-28	2008-11-20	연마 시트 및 연마 시트의 제조 방법
PCT/JP2008/071082 WO2009069526A1 (ja)	2007-11-28	2008-11-20	研磨シートおよび研磨シートの製造方法
US12/744,551 US20100293865A1 (en)	2007-11-28	2008-11-20	Method of producing polishing sheet

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2007307730A JP5209284B2 (ja)	2007-11-28	2007-11-28	研磨シートおよび研磨シートの製造方法

Publications (3)

Publication Number	Publication Date
JP2009131909A JP2009131909A (ja)	2009-06-18
JP2009131909A5 JP2009131909A5 (es)	2011-01-20
JP5209284B2 true JP5209284B2 (ja)	2013-06-12

Family

ID=40678428

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2007307730A Active JP5209284B2 (ja)	2007-11-28	2007-11-28	研磨シートおよび研磨シートの製造方法

Country Status (4)

Country	Link
US (1)	US20100293865A1 (es)
JP (1)	JP5209284B2 (es)
KR (1)	KR20100103473A (es)
WO (1)	WO2009069526A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5781371B2 (ja) *	2011-06-07	2015-09-24	三菱重工業株式会社	砥石工具の製造方法
GB201116305D0 (en)	2011-09-21	2011-11-02	Df & G Ltd	Composition
GB201305217D0 (en) *	2013-03-21	2013-05-01	For Your Diamonds Only Ltd	Cleaning method
DE102022211522A1 (de)	2022-10-31	2024-05-02	Robert Bosch Gesellschaft mit beschränkter Haftung	Schleifelement, Schleifmittel und Verfahren zur Herstellung des Schleifelements und/oder des Schleifmittels

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US3260582A (en) *	1961-08-10	1966-07-12	Norton Co	Polishing and abrading materials
US3537121A (en) *	1968-01-17	1970-11-03	Minnesota Mining & Mfg	Cleaning and buffing product
US3713795A (en) *	1971-06-04	1973-01-30	Ferro Corp	Method of making diamond coated surface
US4240807A (en) *	1976-01-02	1980-12-23	Kimberly-Clark Corporation	Substrate having a thermoplastic binder coating for use in fabricating abrasive sheets and abrasive sheets manufactured therewith
US4345545A (en) *	1980-07-28	1982-08-24	The Carborundum Company	Apparatus for electron curing of resin coated webs
JPS5732749A (en) *	1980-08-06	1982-02-22	Toyota Motor Corp	Rotary-atomizing electrostatic-coating device
JPH02185375A (ja) *	1989-01-07	1990-07-19	Speedfam Co Ltd	研磨テープの製造方法及び製造装置
JPH02232172A (ja) *	1989-03-06	1990-09-14	Speedfam Co Ltd	研磨部材の製造方法
US5152917B1 (en) *	1991-02-06	1998-01-13	Minnesota Mining & Mfg	Structured abrasive article
JP3152968B2 (ja) *	1991-08-29	2001-04-03	科学技術振興事業団	研磨テープとその製造方法及び装置
US5681612A (en) *	1993-06-17	1997-10-28	Minnesota Mining And Manufacturing Company	Coated abrasives and methods of preparation
US6007591A (en) *	1995-03-07	1999-12-28	Nihon Micro Coating Co., Ltd.	Abrasive sheet and method for producing same
JPH08243931A (ja) *	1995-03-07	1996-09-24	Nippon Micro Coating Kk	研磨シート及びその製造方法
JPH09141547A (ja) *	1995-11-21	1997-06-03	Fuji Photo Film Co Ltd	超低反射光コネクターフェルールの研磨体
KR19990071956A (ko) *	1995-12-06	1999-09-27	이데미쓰 유지	시트상 재료의 표면의 평탄화법 및 그에 기초하는시트상 재료의 제조 방법
JPH1158205A (ja) *	1997-08-25	1999-03-02	Unique Technol Internatl Pte Ltd	電解研磨併用ポリシング・テクスチャー加工装置および加工方法ならびにそれに使用する電解研磨併用ポリシング・テクスチャーテープ
JP2001334473A (ja) *	2000-05-30	2001-12-04	Nihon Micro Coating Co Ltd	研磨シート及びその製造方法
US20020016139A1 (en) *	2000-07-25	2002-02-07	Kazuto Hirokawa	Polishing tool and manufacturing method therefor
US7632434B2 (en) *	2000-11-17	2009-12-15	Wayne O. Duescher	Abrasive agglomerate coated raised island articles
US8545583B2 (en) *	2000-11-17	2013-10-01	Wayne O. Duescher	Method of forming a flexible abrasive sheet article
JP2002172563A (ja) *	2000-11-24	2002-06-18	Three M Innovative Properties Co	研磨テープ
JP2003071731A (ja) *	2001-09-03	2003-03-12	Three M Innovative Properties Co	ディンプル構造の研磨材料
JP2003200353A (ja) *	2001-12-27	2003-07-15	Riken Diamond Industry Co Ltd	固定砥粒式の切断用工具及びその製造方法
US6841480B2 (en) *	2002-02-04	2005-01-11	Infineon Technologies Ag	Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
JP2003340730A (ja) *	2002-05-30	2003-12-02	Nippon Parkerizing Co Ltd	研磨布紙の製造方法及び装置
DE10261306B4 (de) *	2002-12-27	2010-02-25	Advanced Micro Devices, Inc., Sunnyvale	Haltering mit reduzierter Abnutzungs- und Kontaminationsrate für einen Polierkopf einer CMP-Anlage und Polierkopf und CMP-Vorrichtung mit Haltering
US7232364B2 (en) *	2005-02-04	2007-06-19	3M Innovative Properties Company	Abrasive cleaning article and method of making
JP5519507B2 (ja) *	2007-09-21	2014-06-11	キャボットマイクロエレクトロニクスコーポレイション	アミノシランを用いて処理した研磨剤粒子を利用する研磨組成物および研磨方法
JP5207444B2 (ja) *	2007-11-22	2013-06-12	日本ミクロコーティング株式会社	研磨シート及び研磨シートの製造方法

2007
- 2007-11-28 JP JP2007307730A patent/JP5209284B2/ja active Active
2008
- 2008-11-20 KR KR1020107011573A patent/KR20100103473A/ko not_active Application Discontinuation
- 2008-11-20 WO PCT/JP2008/071082 patent/WO2009069526A1/ja active Application Filing
- 2008-11-20 US US12/744,551 patent/US20100293865A1/en not_active Abandoned

Also Published As

Publication number	Publication date
JP2009131909A (ja)	2009-06-18
KR20100103473A (ko)	2010-09-27
US20100293865A1 (en)	2010-11-25
WO2009069526A1 (ja)	2009-06-04

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