JP2006515933A - フォトレジスト除去 - Google Patents
フォトレジスト除去 Download PDFInfo
- Publication number
- JP2006515933A JP2006515933A JP2005510014A JP2005510014A JP2006515933A JP 2006515933 A JP2006515933 A JP 2006515933A JP 2005510014 A JP2005510014 A JP 2005510014A JP 2005510014 A JP2005510014 A JP 2005510014A JP 2006515933 A JP2006515933 A JP 2006515933A
- Authority
- JP
- Japan
- Prior art keywords
- solution
- cleaning solution
- cleaning
- photoresist
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 62
- 238000004140 cleaning Methods 0.000 claims abstract description 35
- 239000007800 oxidant agent Substances 0.000 claims abstract description 28
- 239000002798 polar solvent Substances 0.000 claims abstract description 24
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 17
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 20
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 20
- 239000004094 surface-active agent Substances 0.000 claims description 13
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 12
- 239000002738 chelating agent Substances 0.000 claims description 12
- 239000006184 cosolvent Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 9
- -1 nitrogen-containing compound Chemical class 0.000 claims description 9
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 150000003852 triazoles Chemical class 0.000 claims description 6
- 150000001408 amides Chemical class 0.000 claims description 5
- 150000002978 peroxides Chemical class 0.000 claims description 5
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims description 4
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 claims description 4
- 125000005210 alkyl ammonium group Chemical group 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 4
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910019142 PO4 Inorganic materials 0.000 claims description 3
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 3
- 150000001413 amino acids Chemical class 0.000 claims description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 claims description 3
- 239000010452 phosphate Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 150000003536 tetrazoles Chemical class 0.000 claims description 3
- 150000003573 thiols Chemical class 0.000 claims description 3
- WBIQQQGBSDOWNP-UHFFFAOYSA-N 2-dodecylbenzenesulfonic acid Chemical compound CCCCCCCCCCCCC1=CC=CC=C1S(O)(=O)=O WBIQQQGBSDOWNP-UHFFFAOYSA-N 0.000 claims description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 2
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000908 ammonium hydroxide Substances 0.000 claims description 2
- 150000007942 carboxylates Chemical class 0.000 claims description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims description 2
- 150000002009 diols Chemical class 0.000 claims description 2
- 229940060296 dodecylbenzenesulfonic acid Drugs 0.000 claims description 2
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 2
- 229920000058 polyacrylate Polymers 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229920005573 silicon-containing polymer Polymers 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims 1
- 239000005977 Ethylene Substances 0.000 claims 1
- 150000003973 alkyl amines Chemical class 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- YRIUSKIDOIARQF-UHFFFAOYSA-N dodecyl benzenesulfonate Chemical compound CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 YRIUSKIDOIARQF-UHFFFAOYSA-N 0.000 claims 1
- 229940071161 dodecylbenzenesulfonate Drugs 0.000 claims 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- MWNQXXOSWHCCOZ-UHFFFAOYSA-L sodium;oxido carbonate Chemical compound [Na+].[O-]OC([O-])=O MWNQXXOSWHCCOZ-UHFFFAOYSA-L 0.000 claims 1
- 239000000203 mixture Substances 0.000 abstract description 73
- 238000012545 processing Methods 0.000 abstract description 5
- 238000005530 etching Methods 0.000 description 12
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Chemical class C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- 229920005591 polysilicon Polymers 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000007788 roughening Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 4
- 239000012964 benzotriazole Substances 0.000 description 4
- 238000001493 electron microscopy Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000000399 optical microscopy Methods 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- LFTLOKWAGJYHHR-UHFFFAOYSA-N N-methylmorpholine N-oxide Chemical compound CN1(=O)CCOCC1 LFTLOKWAGJYHHR-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 238000004380 ashing Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- RWZYAGGXGHYGMB-UHFFFAOYSA-N anthranilic acid Chemical compound NC1=CC=CC=C1C(O)=O RWZYAGGXGHYGMB-UHFFFAOYSA-N 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 238000003682 fluorination reaction Methods 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- UYTPUPDQBNUYGX-UHFFFAOYSA-N guanine Chemical compound O=C1NC(N)=NC2=C1N=CN2 UYTPUPDQBNUYGX-UHFFFAOYSA-N 0.000 description 2
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920001451 polypropylene glycol Polymers 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 125000003396 thiol group Chemical group [H]S* 0.000 description 2
- SSUJUUNLZQVZMO-UHFFFAOYSA-N 1,2,3,4,8,9,10,10a-octahydropyrimido[1,2-a]azepine Chemical compound C1CCC=CN2CCCNC21 SSUJUUNLZQVZMO-UHFFFAOYSA-N 0.000 description 1
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- WZRRRFSJFQTGGB-UHFFFAOYSA-N 1,3,5-triazinane-2,4,6-trithione Chemical compound S=C1NC(=S)NC(=S)N1 WZRRRFSJFQTGGB-UHFFFAOYSA-N 0.000 description 1
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- NXRIDTLKJCKPOG-UHFFFAOYSA-N 1,4-dihydroimidazole-5-thione Chemical compound S=C1CN=CN1 NXRIDTLKJCKPOG-UHFFFAOYSA-N 0.000 description 1
- CUVLMZNMSPJDON-UHFFFAOYSA-N 1-(1-butoxypropan-2-yloxy)propan-2-ol Chemical compound CCCCOCC(C)OCC(C)O CUVLMZNMSPJDON-UHFFFAOYSA-N 0.000 description 1
- WEZPLQKRXDBPEP-UHFFFAOYSA-N 1-(1-propoxypropan-2-yloxy)propan-2-ol Chemical compound CCCOCC(C)OCC(C)O WEZPLQKRXDBPEP-UHFFFAOYSA-N 0.000 description 1
- GGZHVNZHFYCSEV-UHFFFAOYSA-N 1-Phenyl-5-mercaptotetrazole Chemical compound SC1=NN=NN1C1=CC=CC=C1 GGZHVNZHFYCSEV-UHFFFAOYSA-N 0.000 description 1
- DXMNMEWATKSWOT-UHFFFAOYSA-N 1-[2,3-di(nonyl)phenoxy]-2,3-di(nonyl)benzene Chemical compound CCCCCCCCCC1=CC=CC(OC=2C(=C(CCCCCCCCC)C=CC=2)CCCCCCCCC)=C1CCCCCCCCC DXMNMEWATKSWOT-UHFFFAOYSA-N 0.000 description 1
- CKQAOGOZKZJUGA-UHFFFAOYSA-N 1-nonyl-4-(4-nonylphenoxy)benzene Chemical compound C1=CC(CCCCCCCCC)=CC=C1OC1=CC=C(CCCCCCCCC)C=C1 CKQAOGOZKZJUGA-UHFFFAOYSA-N 0.000 description 1
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 description 1
- AFBBKYQYNPNMAT-UHFFFAOYSA-N 1h-1,2,4-triazol-1-ium-3-thiolate Chemical compound SC=1N=CNN=1 AFBBKYQYNPNMAT-UHFFFAOYSA-N 0.000 description 1
- HMBHAQMOBKLWRX-UHFFFAOYSA-N 2,3-dihydro-1,4-benzodioxine-3-carboxylic acid Chemical compound C1=CC=C2OC(C(=O)O)COC2=C1 HMBHAQMOBKLWRX-UHFFFAOYSA-N 0.000 description 1
- GIAFURWZWWWBQT-UHFFFAOYSA-N 2-(2-aminoethoxy)ethanol Chemical compound NCCOCCO GIAFURWZWWWBQT-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- YSAANLSYLSUVHB-UHFFFAOYSA-N 2-[2-(dimethylamino)ethoxy]ethanol Chemical compound CN(C)CCOCCO YSAANLSYLSUVHB-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- JMTMSDXUXJISAY-UHFFFAOYSA-N 2H-benzotriazol-4-ol Chemical compound OC1=CC=CC2=C1N=NN2 JMTMSDXUXJISAY-UHFFFAOYSA-N 0.000 description 1
- YTZPUTADNGREHA-UHFFFAOYSA-N 2h-benzo[e]benzotriazole Chemical compound C1=CC2=CC=CC=C2C2=NNN=C21 YTZPUTADNGREHA-UHFFFAOYSA-N 0.000 description 1
- ULRPISSMEBPJLN-UHFFFAOYSA-N 2h-tetrazol-5-amine Chemical compound NC1=NN=NN1 ULRPISSMEBPJLN-UHFFFAOYSA-N 0.000 description 1
- UIKUBYKUYUSRSM-UHFFFAOYSA-N 3-morpholinopropylamine Chemical compound NCCCN1CCOCC1 UIKUBYKUYUSRSM-UHFFFAOYSA-N 0.000 description 1
- SHLSSLVZXJBVHE-UHFFFAOYSA-N 3-sulfanylpropan-1-ol Chemical compound OCCCS SHLSSLVZXJBVHE-UHFFFAOYSA-N 0.000 description 1
- AGWWTUWTOBEQFE-UHFFFAOYSA-N 4-methyl-1h-1,2,4-triazole-5-thione Chemical compound CN1C=NN=C1S AGWWTUWTOBEQFE-UHFFFAOYSA-N 0.000 description 1
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 description 1
- YZTYEGCWRPJWEE-UHFFFAOYSA-N 5-(benzotriazol-2-yl)pentan-1-amine Chemical compound C1=CC=CC2=NN(CCCCCN)N=C21 YZTYEGCWRPJWEE-UHFFFAOYSA-N 0.000 description 1
- GDGIVSREGUOIJZ-UHFFFAOYSA-N 5-amino-3h-1,3,4-thiadiazole-2-thione Chemical compound NC1=NN=C(S)S1 GDGIVSREGUOIJZ-UHFFFAOYSA-N 0.000 description 1
- XZGLNCKSNVGDNX-UHFFFAOYSA-N 5-methyl-2h-tetrazole Chemical compound CC=1N=NNN=1 XZGLNCKSNVGDNX-UHFFFAOYSA-N 0.000 description 1
- HCEKEODXLSQFDV-UHFFFAOYSA-N 5-methyltriazol-1-amine Chemical compound CC1=CN=NN1N HCEKEODXLSQFDV-UHFFFAOYSA-N 0.000 description 1
- AOCDQWRMYHJTMY-UHFFFAOYSA-N 5-nitro-2h-benzotriazole Chemical compound C1=C([N+](=O)[O-])C=CC2=NNN=C21 AOCDQWRMYHJTMY-UHFFFAOYSA-N 0.000 description 1
- WXSBVEKBZGNSDY-UHFFFAOYSA-N 5-phenyl-2h-benzotriazole Chemical compound C1=CC=CC=C1C1=CC2=NNN=C2C=C1 WXSBVEKBZGNSDY-UHFFFAOYSA-N 0.000 description 1
- AJNQPSCMOSUVKK-UHFFFAOYSA-N 5-propan-2-yl-1h-1,2,4-triazole Chemical compound CC(C)C=1N=CNN=1 AJNQPSCMOSUVKK-UHFFFAOYSA-N 0.000 description 1
- GZVHEAJQGPRDLQ-UHFFFAOYSA-N 6-phenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=2C=CC=CC=2)=N1 GZVHEAJQGPRDLQ-UHFFFAOYSA-N 0.000 description 1
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- GFFGJBXGBJISGV-UHFFFAOYSA-N Adenine Chemical compound NC1=NC=NC2=C1N=CN2 GFFGJBXGBJISGV-UHFFFAOYSA-N 0.000 description 1
- 229930024421 Adenine Natural products 0.000 description 1
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- CWRVKFFCRWGWCS-UHFFFAOYSA-N Pentrazole Chemical compound C1CCCCC2=NN=NN21 CWRVKFFCRWGWCS-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- SKZKKFZAGNVIMN-UHFFFAOYSA-N Salicilamide Chemical compound NC(=O)C1=CC=CC=C1O SKZKKFZAGNVIMN-UHFFFAOYSA-N 0.000 description 1
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZUQAPLKKNAQJAU-UHFFFAOYSA-N acetylenediol Chemical class OC#CO ZUQAPLKKNAQJAU-UHFFFAOYSA-N 0.000 description 1
- 229960000643 adenine Drugs 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 229940111121 antirheumatic drug quinolines Drugs 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000005605 benzo group Chemical group 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 229940075419 choline hydroxide Drugs 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 229960005150 glycerol Drugs 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- NPZTUJOABDZTLV-UHFFFAOYSA-N hydroxybenzotriazole Substances O=C1C=CC=C2NNN=C12 NPZTUJOABDZTLV-UHFFFAOYSA-N 0.000 description 1
- 125000001841 imino group Chemical group [H]N=* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- PJUIMOJAAPLTRJ-UHFFFAOYSA-N monothioglycerol Chemical compound OCC(O)CS PJUIMOJAAPLTRJ-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 231100000956 nontoxicity Toxicity 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- 229960005152 pentetrazol Drugs 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L persulfate group Chemical group S(=O)(=O)([O-])OOS(=O)(=O)[O-] JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 150000003248 quinolines Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229960000581 salicylamide Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229940066769 systemic antihistamines substituted alkylamines Drugs 0.000 description 1
- 229940035024 thioglycerol Drugs 0.000 description 1
- LDGFRUUNCRYSQK-UHFFFAOYSA-N triazin-4-ylmethanediamine Chemical compound NC(N)C1=CC=NN=N1 LDGFRUUNCRYSQK-UHFFFAOYSA-N 0.000 description 1
- MPSUGQWRVNRJEE-UHFFFAOYSA-N triazol-1-amine Chemical compound NN1C=CN=N1 MPSUGQWRVNRJEE-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/30—Amines; Substituted amines ; Quaternized amines
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/39—Organic or inorganic per-compounds
- C11D3/3947—Liquid compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/395—Bleaching agents
- C11D3/3955—Organic bleaching agents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/395—Bleaching agents
- C11D3/3956—Liquid compositions
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/06—Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3281—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/34—Organic compounds containing sulfur
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
- C23G1/20—Other heavy metals
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/423—Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/906—Cleaning of wafer as interim step
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
本出願は、2002年12月20日に出願された米国仮特許出願第60/434,971号の優先権を主張する。
本発明は、半導体処理に関し、より詳細には、フォトレジスト除去に関する。
集積回路は、フォトレジストが基板上にコーティングされ、フォトレジスト層が照射および現像によってパターニングされ、パターンが基板に転写され、フォトレジストが除去される一般的な一連の工程によって製造される。この一連の工程は繰返されて、パターニングされた回路の多数の層を蓄積する。フォトレジスト除去工程については、特に、存在する他の材料を損傷することなく、ウェットクリーニングのみを用いて、エッチングされたフォトレジスト残留物を除去することが困難または不可能なことがあるので、プラズマアッシングが通常使用される。
ここに開示されるのは、半導体処理のための組成物および方法である。一の実施形態において、フォトレジストの除去のためのウェットクリーニング組成物を提供する。この組成物は、強塩基と、酸化剤と、極性溶媒と、を含む。別の実施形態において、フォトレジストを除去するための方法を提供する。この方法は、(i)約0.1から約30重量パーセントの強塩基と、約1から約30重量パーセントの酸化剤と、約20から約95重量パーセントの極性溶媒とを含むウェットクリーニング組成物を付与する工程と、(ii)フォトレジストを除去する工程とを含む。
ここに開示されるのは、半導体処理のための組成物および方法である。本発明の一態様によれば、フォトレジストの除去のためのウェットクリーニング組成物を提供する。この組成物は、強塩基を含む。たとえば、強塩基は、溶液の約3.5%以下を構成する場合でさえ、約11.5を超えるpHを有する溶液をもたらしてもよい。すなわち、強塩基は、溶液の約3.5重量パーセント以下であってもよい。しかし、ここでさらに説明されるように、より高い強塩基濃度が望ましいであろう。強塩基は、フォトレジスト、たとえば、未照射のポジティブフォトレジストの除去を助ける。組成物は、また、酸化剤と、極性溶媒とを含む。下記に示された式Iの強塩基を、本発明の教示に従って使用してもよい。
ここで、R1、R2、R3、およびR4は、各々、水素、アルキル基または置換アルキル基のうちの1つである。適切な強塩基としては、水酸化アンモニウム、水酸化テトラメチルアンモニウム(TMAH)、水酸化コリン(choline hydroxide)および上記強塩基の少なくとも1つを含む組合せが挙げられるが、これらに限定されない。例示的な実施形態において、強塩基は、水酸化テトラメチルアンモニウムを含む。
ここで、R1、R2、およびR3は、水素、メチル基またはさらには置換アルキル基もしくは非置換アルキル基であってもよい。R1およびR2は、アルキル鎖の2つの末端を形成してもよい。
組成物Aを次のように調製した。
各々が、13.5重量パーセントのN−メチルモルホリン−N−オキシドと、7.3重量パーセントのTMAHと、78.9重量パーセントの水と、下記に示されたような抑制剤2−メルカプトベンゾイミダゾール(2−MBI)0.3重量パーセントとを含有する組成物B、C、およびDを調製した。実施例3においてわかり得るように、溶液による銅または他の金属のエッチングを遅らせるために、2−MBIを配合物に含めた。
シリコンウェーハ上の銅(Cu)のブランケットコーティングのエッチ速度を、上で調製されたような組成物AからDを使用して測定した。銅層は、物理蒸着によって堆積させ、厚さが約1000オングストローム(Å)であった。サンプルを一定の時間組成物中に浸漬し、4点プローブ電気測定を用いる前および後の両方で厚さを測定した。エッチ速度を、厚さの差、すなわち、エッチング前の厚さ引くエッチング後の厚さを、分単位の時間で割ることによって計算した。組成物AからDのエッチ速度は、下記に示されている。
組成物Eを次のように調製した。
組成物Fを次のように調製した。
組成物Gを次のように調製した。
組成物Hを次のように調製した。
組成物Iを次のように調製した。
組成物Jを次のように調製した。
組成物Kを次のように調製した。
組成物Lを次のように調製した。
組成物Mを次のように調製した。
組成物Nを次のように調製した。
組成物Oを次のように調製した。
比較組成物Iは、10重量パーセントのヒドロキシルアミンと、10重量パーセントの水と、80重量パーセントのジグリコールアミンとからなった。エッチングされたフォトレジスト基板を、組成物中に、30、50、および60分間70℃で浸漬し、その後、水ですすいだ。光学および電子顕微鏡法による検査は、比較組成物Iが、フォトレジスト残留物の上層の下からフォトレジストを溶解したが、すべての領域で残留物の層を崩壊しサンプルに付着したままにしたことを示した。
Claims (23)
- クリーニング溶液であって、
極性溶媒と、
前記溶液の約3.5重量%以下を構成するとき、約11.5を超えるpHを前記溶液にもたらす塩基と、を含むクリーニング溶液。 - 前記極性溶媒は、水、アルコール、エチレン、アミド、プロピレン、炭酸塩およびグリコールのうちの1つである、請求項1に記載のクリーニング溶液。
- 前記塩基は、側鎖として、水素、アルキルおよび置換アルキルのうちの1つを有する窒素含有化合物である、請求項1に記載のクリーニング溶液。
- 前記極性溶媒は、前記溶液の約20重量%から約95重量%を構成する、請求項1に記載のクリーニング溶液。
- 前記塩基は、水酸化アンモニウムおよび水酸化テトラメチルアンモニウムのうちの1つである、請求項1に記載のクリーニング溶液。
- 前記塩基は、前記溶液の約0.1重量%から約30重量%を構成する、請求項1に記載のクリーニング溶液。
- 酸化剤、共溶媒およびキレート化剤のうちの1つをさらに含む、請求項1に記載のクリーニング溶液。
- 約11.5を超えるpHを有し、かつ、
極性溶媒と、
塩基と、
酸化剤、共溶媒、界面活性剤およびキレート化剤のうちの1つと、を含むクリーニング溶液。 - 前記酸化剤は、前記溶液の約1%から約30%を構成する、請求項8に記載のクリーニング溶液。
- 前記酸化剤は、アミン−N−オキシド、過ホウ酸塩、過炭酸塩および過酸化物のうちの1つである、請求項8に記載のクリーニング溶液。
- 前記酸化剤は、水素、メチル、およびアルキル側基のうちの1つを含む窒素含有化合物である、請求項8に記載のクリーニング溶液。
- 前記共溶媒は、前記溶液の約50重量%までを構成する、請求項8に記載のクリーニング溶液。
- 前記共溶媒は、アルキルアミン、アルダノールアミンおよびグリコールのうちの1つである、請求項8に記載のクリーニング溶液。
- 前記界面活性剤は、前記溶液の約20重量%までを構成する、請求項8に記載のクリーニング溶液。
- 前記界面活性剤は、フルオロアルキル、グリコール、カルボン酸塩、ドデシルベンゼンスルホン酸、ドデシルベンゼンスルホン酸塩、シリコーンポリマー、ポリアクリレートポリマー、アセチレンジオール、アルキルアンモニウムおよびアルキルアンモニウム塩のうちの1つである、請求項8に記載のクリーニング溶液。
- 前記キレート化剤は、前記溶液の約10重量%までを構成する、請求項8に記載のクリーニング溶液。
- 前記キレート化剤は、トリアゾール、チアゾール、テトラゾール、イミジゾール、リン酸塩、チオール、アジン、グリセロール、アミノ酸、カルボン酸、アルコール、アミド、およびキノリンのうちの1つである、請求項8に記載のクリーニング溶液。
- 中にトレンチがパターニングされた半導体基板と、
前記トレンチによって収容された金属線であって、前記トレンチが、溶液でクリーニングされて、前記金属線を収容し、前記溶液が、約11.5を超えるpHを有する、金属線と、を含む装置。 - 前記溶液は、極性溶媒、酸化剤、共溶媒、界面活性剤およびキレート化剤のうちの1つを含む、請求項18に記載の装置。
- フォトレジストを半導体基板上にパターニングする工程と、
約11.5を超えるpHを有するクリーニング溶液で、前記半導体基板をクリーニングする工程と、を含む方法。 - 前記クリーニング溶液は、極性溶媒、酸化剤、共溶媒、界面活性剤およびキレート化剤のうちの1つを含む、請求項20に記載の方法。
- 前記クリーニング工程は、前記半導体基板から前記フォトレジストを除去する工程を含む、請求項20に記載の方法。
- 前記パターニング工程後、前記半導体基板内にトレンチを形成する工程と、
前記クリーニング工程後、前記トレンチ内に金属線を堆積させる工程と、
前記半導体基板に化学的機械的平坦化を行う工程と、をさらに含む、請求項20に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US43497102P | 2002-12-20 | 2002-12-20 | |
US10/389,214 US8236485B2 (en) | 2002-12-20 | 2003-03-14 | Photoresist removal |
PCT/US2003/040439 WO2004059700A2 (en) | 2002-12-20 | 2003-12-17 | Photoresist removal |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006515933A true JP2006515933A (ja) | 2006-06-08 |
JP2006515933A5 JP2006515933A5 (ja) | 2007-02-08 |
Family
ID=32684764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005510014A Pending JP2006515933A (ja) | 2002-12-20 | 2003-12-17 | フォトレジスト除去 |
Country Status (7)
Country | Link |
---|---|
US (4) | US8236485B2 (ja) |
EP (1) | EP1583997A4 (ja) |
JP (1) | JP2006515933A (ja) |
KR (1) | KR101174911B1 (ja) |
AU (1) | AU2003297347A1 (ja) |
CA (1) | CA2550522A1 (ja) |
WO (1) | WO2004059700A2 (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009516360A (ja) * | 2005-10-13 | 2009-04-16 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 金属適合フォトレジスト及び/又は犠牲反射防止コーティング除去組成物 |
JP2011040722A (ja) * | 2009-07-07 | 2011-02-24 | Air Products & Chemicals Inc | Cmp後洗浄のための配合物及び方法 |
JP2012032757A (ja) * | 2010-07-06 | 2012-02-16 | Tosoh Corp | レジスト剥離剤及びそれを用いた剥離方法 |
WO2015072550A1 (ja) * | 2013-11-18 | 2015-05-21 | 富士フイルム株式会社 | 変性レジストの剥離液、これを用いた変性レジストの剥離方法および半導体基板製品の製造方法 |
WO2015072551A1 (ja) * | 2013-11-18 | 2015-05-21 | 富士フイルム株式会社 | 変性レジストの剥離方法、これに用いる変性レジストの剥離液および半導体基板製品の製造方法 |
KR20170101271A (ko) * | 2014-12-30 | 2017-09-05 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 반도체 기판으로부터 포토레지스트를 제거하기 위한 스트리핑 조성물 |
JP2020513440A (ja) * | 2016-11-25 | 2020-05-14 | インテグリス・インコーポレーテッド | エッチング後残留物を除去するための洗浄組成物 |
JP2021102773A (ja) * | 2013-12-06 | 2021-07-15 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 表面上の残渣を除去するための洗浄用製剤 |
JP2021531380A (ja) * | 2018-07-20 | 2021-11-18 | インテグリス・インコーポレーテッド | 腐食防止剤を含む洗浄組成物 |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8236485B2 (en) * | 2002-12-20 | 2012-08-07 | Advanced Technology Materials, Inc. | Photoresist removal |
KR20050017142A (ko) * | 2003-08-08 | 2005-02-22 | 삼성전자주식회사 | 린스 용액 및 이를 이용한 반도체 소자 세정 방법 |
EP1510861A1 (en) * | 2003-08-26 | 2005-03-02 | Sony International (Europe) GmbH | Method for patterning organic materials or combinations of organic and inorganic materials |
US8338087B2 (en) * | 2004-03-03 | 2012-12-25 | Advanced Technology Materials, Inc | Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate |
DE602005000732T2 (de) * | 2004-06-25 | 2007-12-06 | Jsr Corp. | Reinigungszusammensetzung für Halbleiterkomponente und Verfahren zur Herstellung eines Halbleitergeräts |
US9217929B2 (en) * | 2004-07-22 | 2015-12-22 | Air Products And Chemicals, Inc. | Composition for removing photoresist and/or etching residue from a substrate and use thereof |
KR101129433B1 (ko) * | 2004-08-30 | 2012-03-26 | 삼성전자주식회사 | 박막 트랜지스터 기판의 제조 방법 및 스트립핑 조성물 |
US20060063687A1 (en) * | 2004-09-17 | 2006-03-23 | Minsek David W | Composition and process for ashless removal of post-etch photoresist and/or bottom anti-reflective material on a substrate |
US20060116313A1 (en) * | 2004-11-30 | 2006-06-01 | Denise Geitz | Compositions comprising tannic acid as corrosion inhibitor |
US20060154186A1 (en) * | 2005-01-07 | 2006-07-13 | Advanced Technology Materials, Inc. | Composition useful for removal of post-etch photoresist and bottom anti-reflection coatings |
US7923423B2 (en) * | 2005-01-27 | 2011-04-12 | Advanced Technology Materials, Inc. | Compositions for processing of semiconductor substrates |
WO2006081406A1 (en) * | 2005-01-27 | 2006-08-03 | Advanced Technology Materials, Inc. | Compositions for processing of semiconductor substrates |
JP4988165B2 (ja) * | 2005-03-11 | 2012-08-01 | 関東化学株式会社 | フォトレジスト剥離液組成物及びフォトレジストの剥離方法 |
JP2008546036A (ja) * | 2005-06-07 | 2008-12-18 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 金属および誘電体相溶性の犠牲反射防止コーティング浄化および除去組成物 |
EP1894230A2 (en) * | 2005-06-13 | 2008-03-05 | Advanced Technology Materials, Inc. | Compositions and methods for selective removal of metal or metal alloy after metal silicide formation |
US20060292500A1 (en) * | 2005-06-24 | 2006-12-28 | Jeanette Roberts | Cure during rinse to prevent resist collapse |
KR101191402B1 (ko) * | 2005-07-25 | 2012-10-16 | 삼성디스플레이 주식회사 | 포토레지스트 스트리퍼 조성물, 이를 이용하는 배선 형성방법 및 박막 트랜지스터 기판의 제조 방법 |
KR101444468B1 (ko) * | 2005-10-05 | 2014-10-30 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 에칭후 잔류물을 제거하기 위한 산화성 수성 세정제 |
CN101356629B (zh) | 2005-11-09 | 2012-06-06 | 高级技术材料公司 | 用于将其上具有低k介电材料的半导体晶片再循环的组合物和方法 |
TW200734448A (en) * | 2006-02-03 | 2007-09-16 | Advanced Tech Materials | Low pH post-CMP residue removal composition and method of use |
US20080076688A1 (en) * | 2006-09-21 | 2008-03-27 | Barnes Jeffrey A | Copper passivating post-chemical mechanical polishing cleaning composition and method of use |
US8685909B2 (en) * | 2006-09-21 | 2014-04-01 | Advanced Technology Materials, Inc. | Antioxidants for post-CMP cleaning formulations |
US20100056410A1 (en) * | 2006-09-25 | 2010-03-04 | Advanced Technology Materials, Inc. | Compositions and methods for the removal of photoresist for a wafer rework application |
CN101169597A (zh) * | 2006-10-27 | 2008-04-30 | 安集微电子(上海)有限公司 | 一种光刻胶清洗剂 |
CN101169598A (zh) * | 2006-10-27 | 2008-04-30 | 安集微电子(上海)有限公司 | 一种光刻胶清洗剂 |
SG10201610631UA (en) * | 2006-12-21 | 2017-02-27 | Entegris Inc | Liquid cleaner for the removal of post-etch residues |
TWI516573B (zh) * | 2007-02-06 | 2016-01-11 | 安堤格里斯公司 | 選擇性移除TiSiN之組成物及方法 |
US20100112728A1 (en) * | 2007-03-31 | 2010-05-06 | Advanced Technology Materials, Inc. | Methods for stripping material for wafer reclamation |
TW200916571A (en) * | 2007-08-02 | 2009-04-16 | Advanced Tech Materials | Non-fluoride containing composition for the removal of residue from a microelectronic device |
WO2009025317A1 (ja) * | 2007-08-22 | 2009-02-26 | Daikin Industries, Ltd. | 半導体ドライプロセス後の残渣除去液及びそれを用いた残渣除去方法 |
WO2009072529A1 (ja) * | 2007-12-04 | 2009-06-11 | Mitsubishi Chemical Corporation | 半導体デバイス用基板の洗浄方法及び洗浄液 |
WO2009076233A1 (en) * | 2007-12-07 | 2009-06-18 | Fontana Technology | Particle removal cleaning method and composition |
US20090241988A1 (en) * | 2008-03-31 | 2009-10-01 | Intel Corporation | Photoresist and antireflective layer removal solution and method thereof |
US7825079B2 (en) * | 2008-05-12 | 2010-11-02 | Ekc Technology, Inc. | Cleaning composition comprising a chelant and quaternary ammonium hydroxide mixture |
KR101752684B1 (ko) | 2008-10-21 | 2017-07-04 | 엔테그리스, 아이엔씨. | 구리 세척 및 보호 조성물 |
SG187551A1 (en) | 2010-07-16 | 2013-03-28 | Advanced Tech Materials | Aqueous cleaner for the removal of post-etch residues |
JP6101421B2 (ja) | 2010-08-16 | 2017-03-22 | インテグリス・インコーポレーテッド | 銅または銅合金用エッチング液 |
CN105274338A (zh) | 2010-08-20 | 2016-01-27 | 安格斯公司 | 从电子垃圾回收贵金属和贱金属的可持续方法 |
SG189292A1 (en) | 2010-10-06 | 2013-05-31 | Advanced Tech Materials | Composition and process for selectively etching metal nitrides |
KR101891363B1 (ko) | 2010-10-13 | 2018-08-24 | 엔테그리스, 아이엔씨. | 티타늄 니트라이드 부식을 억제하기 위한 조성물 및 방법 |
KR101890425B1 (ko) * | 2011-07-14 | 2018-08-22 | 삼성디스플레이 주식회사 | 포토레지스트 박리용 조성물 및 이를 이용한 표시 기판의 제조 방법 |
JP5933950B2 (ja) | 2011-09-30 | 2016-06-15 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 銅または銅合金用エッチング液 |
JP6329909B2 (ja) | 2011-12-28 | 2018-05-23 | インテグリス・インコーポレーテッド | 窒化チタンを選択的にエッチングするための組成物および方法 |
WO2013123317A1 (en) | 2012-02-15 | 2013-08-22 | Advanced Technology Materials, Inc. | Post-cmp removal using compositions and method of use |
EP2850495A4 (en) | 2012-05-18 | 2016-01-20 | Entegris Inc | COMPOSITION AND METHOD FOR REMOVING PHOTOLACK FROM A SURFACE WITH TITANNITRIDE |
TWI561615B (en) * | 2012-07-24 | 2016-12-11 | Ltc Co Ltd | Composition for removal and prevention of formation of oxide on surface of metal wiring |
KR102118964B1 (ko) | 2012-12-05 | 2020-06-08 | 엔테그리스, 아이엔씨. | Iii-v 반도체 물질을 세척하기 위한 조성물 및 이를 사용하는 방법 |
CN105102584B (zh) | 2013-03-04 | 2018-09-21 | 恩特格里斯公司 | 用于选择性蚀刻氮化钛的组合物和方法 |
CN104102028A (zh) * | 2013-04-10 | 2014-10-15 | 第一毛织株式会社 | 表面处理氧化铟锌基板的有机溶液及显示基板制备方法 |
SG11201509933QA (en) | 2013-06-06 | 2016-01-28 | Advanced Tech Materials | Compositions and methods for selectively etching titanium nitride |
US10138117B2 (en) | 2013-07-31 | 2018-11-27 | Entegris, Inc. | Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility |
US10428271B2 (en) | 2013-08-30 | 2019-10-01 | Entegris, Inc. | Compositions and methods for selectively etching titanium nitride |
CN105849245B (zh) | 2013-10-21 | 2020-03-13 | 富士胶片电子材料美国有限公司 | 用于去除表面上残余物的清洗调配物 |
JP6200289B2 (ja) * | 2013-11-18 | 2017-09-20 | 富士フイルム株式会社 | 半導体基板の処理液、処理方法、これらを用いた半導体基板製品の製造方法 |
US10340150B2 (en) | 2013-12-16 | 2019-07-02 | Entegris, Inc. | Ni:NiGe:Ge selective etch formulations and method of using same |
JP6776125B2 (ja) | 2013-12-20 | 2020-10-28 | インテグリス・インコーポレーテッド | イオン注入レジストの除去のための非酸化性の強酸の使用 |
WO2015103146A1 (en) | 2013-12-31 | 2015-07-09 | Advanced Technology Materials, Inc. | Formulations to selectively etch silicon and germanium |
TWI659098B (zh) | 2014-01-29 | 2019-05-11 | 美商恩特葛瑞斯股份有限公司 | 化學機械研磨後配方及其使用方法 |
US11127587B2 (en) | 2014-02-05 | 2021-09-21 | Entegris, Inc. | Non-amine post-CMP compositions and method of use |
CN106232788B (zh) | 2014-05-20 | 2019-08-20 | 宝洁公司 | 具有改善的起泡特征的低表面活性剂、高碳酸盐液体衣物洗涤剂组合物 |
US20150344818A1 (en) * | 2014-05-30 | 2015-12-03 | The Procter & Gamble Company | Water cluster-dominant alkali surfactant compositions and their use |
CN104195576A (zh) * | 2014-09-10 | 2014-12-10 | 昆山欣谷微电子材料有限公司 | 干蚀刻清洗剥离防护液 |
JP6428568B2 (ja) * | 2014-11-27 | 2018-11-28 | 信越化学工業株式会社 | パターン形成用リンス溶液及びパターン形成方法 |
KR102397091B1 (ko) | 2015-06-22 | 2022-05-12 | 동우 화인켐 주식회사 | 레지스트 박리액 조성물 및 이를 이용한 레지스트의 박리방법 |
KR20230023820A (ko) | 2017-12-18 | 2023-02-17 | 엔테그리스, 아이엔씨. | 원자 층 증착에 의해 도포되는 내화학약품성 다층 코팅 |
US10752867B2 (en) | 2018-03-28 | 2020-08-25 | Fujifilm Electronic Materials U.S.A., Inc. | Cleaning compositions |
US11079681B2 (en) | 2018-11-21 | 2021-08-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Lithography method for positive tone development |
JP2023539628A (ja) * | 2020-08-26 | 2023-09-15 | ハンツマン ペトロケミカル エルエルシー | エッチング、剥離、及びクリーニング用途用のアミンオキシド |
TWI824299B (zh) * | 2020-09-22 | 2023-12-01 | 美商恩特葛瑞斯股份有限公司 | 蝕刻劑組合物 |
TWI809992B (zh) * | 2021-07-27 | 2023-07-21 | 元瀚材料股份有限公司 | 去光阻組成物及其使用方法 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3447939A (en) * | 1966-09-02 | 1969-06-03 | Eastman Kodak Co | Compounds dissolved in cyclic amine oxides |
NL7305520A (ja) * | 1972-05-13 | 1973-11-15 | ||
US4539286A (en) | 1983-06-06 | 1985-09-03 | Dynachem Corporation | Flexible, fast processing, photopolymerizable composition |
US4765835A (en) * | 1985-11-27 | 1988-08-23 | City Of Canton, Il | Filter process for silver recovery from polymeric films |
US6187730B1 (en) | 1990-11-05 | 2001-02-13 | Ekc Technology, Inc. | Hydroxylamine-gallic compound composition and process |
US5981454A (en) * | 1993-06-21 | 1999-11-09 | Ekc Technology, Inc. | Post clean treatment composition comprising an organic acid and hydroxylamine |
US6242400B1 (en) | 1990-11-05 | 2001-06-05 | Ekc Technology, Inc. | Method of stripping resists from substrates using hydroxylamine and alkanolamine |
US6110881A (en) | 1990-11-05 | 2000-08-29 | Ekc Technology, Inc. | Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
TW263531B (ja) | 1992-03-11 | 1995-11-21 | Mitsubishi Gas Chemical Co | |
US6326130B1 (en) | 1993-10-07 | 2001-12-04 | Mallinckrodt Baker, Inc. | Photoresist strippers containing reducing agents to reduce metal corrosion |
US5780406A (en) | 1996-09-06 | 1998-07-14 | Honda; Kenji | Non-corrosive cleaning composition for removing plasma etching residues |
US5709756A (en) | 1996-11-05 | 1998-01-20 | Ashland Inc. | Basic stripping and cleaning composition |
US6224785B1 (en) | 1997-08-29 | 2001-05-01 | Advanced Technology Materials, Inc. | Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates |
US5780363A (en) | 1997-04-04 | 1998-07-14 | International Business Machines Coporation | Etching composition and use thereof |
DK1105778T3 (da) | 1998-05-18 | 2009-10-19 | Mallinckrodt Baker Inc | Silikatholdige alkaliske sammensætninger til rensning af mikorelektroniske substrater |
KR20010025043A (ko) | 1998-05-18 | 2001-03-26 | 바누치 유진 지. | 반도체 기판용 스트립팅 조성물 |
JP2002528903A (ja) | 1998-10-23 | 2002-09-03 | アーチ・スペシャルティ・ケミカルズ・インコーポレイテッド | 活性剤溶液を含有し、化学機械的に磨くためのスラリーシステム |
TW467953B (en) | 1998-11-12 | 2001-12-11 | Mitsubishi Gas Chemical Co | New detergent and cleaning method of using it |
US6599370B2 (en) * | 2000-10-16 | 2003-07-29 | Mallinckrodt Inc. | Stabilized alkaline compositions for cleaning microelectronic substrates |
EP1211563B1 (en) * | 2000-11-30 | 2011-12-21 | Tosoh Corporation | Resist stripper composition |
US7029373B2 (en) * | 2001-08-14 | 2006-04-18 | Advanced Technology Materials, Inc. | Chemical mechanical polishing compositions for metal and associated materials and method of using same |
US6692546B2 (en) * | 2001-08-14 | 2004-02-17 | Advanced Technology Materials, Inc. | Chemical mechanical polishing compositions for metal and associated materials and method of using same |
US6800218B2 (en) * | 2001-08-23 | 2004-10-05 | Advanced Technology Materials, Inc. | Abrasive free formulations for chemical mechanical polishing of copper and associated materials and method of using same |
US6780810B2 (en) * | 2002-03-13 | 2004-08-24 | Council Of Scientific And Industrial Research | Multifunctional catalyst useful in the synthesis of chiral vicinal diols and process for the preparation thereof, and process for the preparation of chiral vicinal diols using said multifunctional catalysts |
US8236485B2 (en) * | 2002-12-20 | 2012-08-07 | Advanced Technology Materials, Inc. | Photoresist removal |
US20040255974A1 (en) * | 2003-06-23 | 2004-12-23 | Burress Jeffrey P. | Equipment cleaner |
-
2003
- 2003-03-14 US US10/389,214 patent/US8236485B2/en active Active
- 2003-12-17 AU AU2003297347A patent/AU2003297347A1/en not_active Abandoned
- 2003-12-17 KR KR1020057011621A patent/KR101174911B1/ko active IP Right Grant
- 2003-12-17 WO PCT/US2003/040439 patent/WO2004059700A2/en active Application Filing
- 2003-12-17 JP JP2005510014A patent/JP2006515933A/ja active Pending
- 2003-12-17 CA CA002550522A patent/CA2550522A1/en not_active Abandoned
- 2003-12-17 EP EP03814181A patent/EP1583997A4/en not_active Withdrawn
-
2012
- 2012-08-07 US US13/568,790 patent/US8679734B2/en not_active Expired - Lifetime
-
2014
- 2014-03-25 US US14/224,656 patent/US9256134B2/en not_active Expired - Fee Related
-
2016
- 2016-02-08 US US15/018,113 patent/US20160152926A1/en not_active Abandoned
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009516360A (ja) * | 2005-10-13 | 2009-04-16 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 金属適合フォトレジスト及び/又は犠牲反射防止コーティング除去組成物 |
JP2011040722A (ja) * | 2009-07-07 | 2011-02-24 | Air Products & Chemicals Inc | Cmp後洗浄のための配合物及び方法 |
US8765653B2 (en) | 2009-07-07 | 2014-07-01 | Air Products And Chemicals, Inc. | Formulations and method for post-CMP cleaning |
JP2012032757A (ja) * | 2010-07-06 | 2012-02-16 | Tosoh Corp | レジスト剥離剤及びそれを用いた剥離方法 |
WO2015072550A1 (ja) * | 2013-11-18 | 2015-05-21 | 富士フイルム株式会社 | 変性レジストの剥離液、これを用いた変性レジストの剥離方法および半導体基板製品の製造方法 |
WO2015072551A1 (ja) * | 2013-11-18 | 2015-05-21 | 富士フイルム株式会社 | 変性レジストの剥離方法、これに用いる変性レジストの剥離液および半導体基板製品の製造方法 |
JP2015118125A (ja) * | 2013-11-18 | 2015-06-25 | 富士フイルム株式会社 | 変性レジストの剥離液、これを用いた変性レジストの剥離方法および半導体基板製品の製造方法 |
JP7171800B2 (ja) | 2013-12-06 | 2022-11-15 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 表面上の残渣を除去するための洗浄用製剤 |
US11639487B2 (en) | 2013-12-06 | 2023-05-02 | Fujifilm Electronic Materials U.S.A., Inc. | Cleaning formulation for removing residues on surfaces |
US11618867B2 (en) | 2013-12-06 | 2023-04-04 | Fujifilm Electronic Materials U.S.A., Inc. | Cleaning formulation for removing residues on surfaces |
JP2021102773A (ja) * | 2013-12-06 | 2021-07-15 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 表面上の残渣を除去するための洗浄用製剤 |
JP2018503127A (ja) * | 2014-12-30 | 2018-02-01 | フジフイルム エレクトロニック マテリアルズ ユー.エス.エー., インコーポレイテッド | 半導体基板からフォトレジストを除去するための剥離組成物 |
KR102503357B1 (ko) * | 2014-12-30 | 2023-02-23 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 반도체 기판으로부터 포토레지스트를 제거하기 위한 스트리핑 조성물 |
KR20170101271A (ko) * | 2014-12-30 | 2017-09-05 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 반도체 기판으로부터 포토레지스트를 제거하기 위한 스트리핑 조성물 |
JP2021181570A (ja) * | 2016-11-25 | 2021-11-25 | インテグリス・インコーポレーテッド | エッチング後残留物を除去するための洗浄組成物 |
JP2020513440A (ja) * | 2016-11-25 | 2020-05-14 | インテグリス・インコーポレーテッド | エッチング後残留物を除去するための洗浄組成物 |
JP2021531380A (ja) * | 2018-07-20 | 2021-11-18 | インテグリス・インコーポレーテッド | 腐食防止剤を含む洗浄組成物 |
JP7176089B2 (ja) | 2018-07-20 | 2022-11-21 | インテグリス・インコーポレーテッド | 腐食防止剤を含む洗浄組成物 |
Also Published As
Publication number | Publication date |
---|---|
CA2550522A1 (en) | 2004-07-15 |
AU2003297347A1 (en) | 2004-07-22 |
KR101174911B1 (ko) | 2012-08-17 |
US20040180300A1 (en) | 2004-09-16 |
US9256134B2 (en) | 2016-02-09 |
US20140213498A1 (en) | 2014-07-31 |
AU2003297347A8 (en) | 2004-07-22 |
EP1583997A4 (en) | 2010-03-24 |
WO2004059700A3 (en) | 2004-11-04 |
KR20050094409A (ko) | 2005-09-27 |
US8679734B2 (en) | 2014-03-25 |
US20160152926A1 (en) | 2016-06-02 |
EP1583997A2 (en) | 2005-10-12 |
US8236485B2 (en) | 2012-08-07 |
US20120302483A1 (en) | 2012-11-29 |
WO2004059700A2 (en) | 2004-07-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101174911B1 (ko) | 포토레지스트 제거 | |
JP4758982B2 (ja) | 基板上に付着したフォトレジスト及び/又は犠牲反射防止材料のエッチング後除去のための組成物並びにプロセス | |
US9771550B2 (en) | Cleaning formulation for removing residues on surfaces | |
CN110997643B (zh) | 清洁组合物 | |
CN114258424B (zh) | 蚀刻组合物 | |
JP2023133294A (ja) | 洗浄用組成物 | |
WO2010037263A1 (zh) | 一种光刻胶清洗剂 | |
WO2020223106A1 (en) | Etching compositions | |
CN1739064A (zh) | 光刻胶的去除 | |
CN114651317A (zh) | 蚀刻组合物 | |
EP3918110A1 (en) | Etching compositions | |
TW202208607A (zh) | 清潔組成物 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061215 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090625 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20090924 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20091001 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100104 |