JP2005524962A - 複数の放射供給源を有したプラズマ発生装置およびその方法 - Google Patents
複数の放射供給源を有したプラズマ発生装置およびその方法 Download PDFInfo
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Abstract
Description
図1Aに、本発明の一態様に適合する放射装置の例の概略図を示す。典型的な放射装置は、(例えばアプリケータとして知られた)マイクロ波のチャンバ内に配置された容器を形成するキャビティ12を含んでいる。(図示しない)別の実施形態では、容器12と放射チャンバ14は同じであり、そのため、2つの別々のコンポーネントが不要になる。キャビティ12が形成される容器は、放射からキャビティ12を大幅に遮蔽することなくその熱絶縁特性を改善するために、1つまたは複数の放射透過性絶縁層を含み得る。
図1Bに、ともにプラズマ形成領域内に放射を送るように配置された少なくとも第1および第2の放射供給源を使用する方法を示す。この方法は、プラズマ形成領域内にガスを導入すること(ステップ45)を含み得る。一実施形態では、これは、図1Aの弁22を回すことによって実施し得る。このプラズマ形成領域は、完全に閉じた状態または部分的に開いた状態にし得るキャビティとすることができるはずであることが当業者には理解されよう。例えば、プラズマ支援炉などのある種の応用例では、キャビティを完全に閉じることができるはずである。例えば、本願と同じ権利者が所有する同時出願の米国特許出願第10/ , (弁理士整理番号1837.0020)を参照されたい。この特許出願全体を参照により本明細書に組み込む。ただし、他の応用例では、キャビティを通してガスを流すのが望ましいことがあり、したがって、このキャビティはある程度開いた状態にしなければならない。こうすると、流れるガスの流量、タイプ、および圧力を経時的に変化させることができる。これが望ましいことがあるのは、イオン化電位が比較的低いアルゴンなどのある種のガスは比較的容易に点火されるが、このようなガスは後続のプラズマ処理中に他の望ましくない特性を有することがあるからである。
本発明に適合する1つのプラズマ形成方法は、受動型プラズマ触媒の存在下で、キャビティ内のガスに約333GHz未満の周波数の電磁放射を当てることを含み得る。本発明に適合する受動型プラズマ触媒は、電圧を印加して火花を発生させることなどによってこの触媒を介して必ずしも追加のエネルギーを付加することなく、本発明に適合して局所的な電界(例えば、電磁界)を歪ませることによってプラズマを誘導し得る任意の物体を含み得る。
本発明に適合するプラズマを形成する別の方法は、少なくとも1種類のイオン化粒子(電離粒子:ionizing particle)を生成する能動型プラズマ触媒、または少なくとも1種類のイオン化粒子を含む能動型プラズマ触媒の存在下で、キャビティ内のガスに約333GHz未満の周波数の電磁放射を当てることを含む。
放射導波管、キャビティ、またはチャンバは、少なくとも1つの電磁放射モードの伝播に対応またはそれを促進するように設計し得る。本明細書では、「モード」という用語は、マックスウェルの式および適用可能な(例えば、キャビティの)境界条件を満足する任意の定在電磁波または伝播電磁波の特定のパターンを指す。導波管またはキャビティでは、このモードは、伝播電磁界または定在電磁界の様々な可能なパターンのいずれか1つとし得る。各モードは、その周波数ならびに電界ベクトルおよび/または磁界ベクトルの偏光によって特徴づけられる。モードの電磁界パターンは、周波数、屈折率または誘電率、および導波管またはキャビティの幾何形状によって決まる。
多くの応用例では、均一なプラズマを含むキャビティが望ましい。しかし、マイクロ波放射の波長は比較的長く(例えば、数十センチメートル)なり得るので、均一な分布を実現するのが難しいことがある。そのため、本発明の一態様に適合して、長期間にわたってマルチモード・キャビティ内の放射モードを混合し、また分布し直すことができる。このキャビティ内の場の分布は、このキャビティの内面によって設定される境界条件をすべて満足しなければならないので、この内面の任意の部分の位置を変更することによってこれらの場の分布を変更することができる。
異なる位置で複数のプラズマ触媒を使用してプラズマを点火することができる。一実施形態では、複数のファイバを使用して、キャビティ内の異なるポイントでプラズマを点火し得る。このような複数ポイントでの点火は、均一なプラズマ点火が望まれるときに特に有益なことがある。例えば、高周波数(すなわち、数十ヘルツ以上)でプラズマを調節するか、または比較的大きなボリューム内でプラズマを点火するとき、あるいはその両方の場合、プラズマの瞬間的な点火および再点火の実質的な均一性を改善し得る。あるいは、プラズマ触媒を複数のポイントで使用すると、触媒を異なるポイントで選択的に導入することによって、これらの触媒を使用してプラズマ・チャンバ内のこれらの異なるポイントでプラズマを順次点火することができる。こうすると、所望の場合には、キャビティ内でプラズマ点火勾配を制御可能な形で形成することができる。
複式キャビティ構成を利用して、本発明に適合してプラズマを点火し維持することができる。一実施形態では、システムは、少なくとも第1点火キャビティと、この第1キャビティに流体連通する第2キャビティとを含む。プラズマに点火するために、任意選択でプラズマ触媒の存在下で、第1点火キャビティ内のガスに約333GHz未満の周波数の電磁放射を当てることができる。こうすると、第1キャビティと第2キャビティが近くにあることにより、第1キャビティ内で形成されたプラズマにより、第2キャビティ内のプラズマを点火することができ、これを追加の電磁放射で維持することができる。
Claims (59)
- 放射キャビティと、
前記キャビティ内でのプラズマの形成が容易になるように、前記キャビティ内に約333GHz未満の周波数の電磁放射を送る第1放射供給源と、
前記キャビティ内に放射を送る第2放射供給源と、
前記第1放射供給源を起動させた後で、連続して前記第2放射供給源を起動させるコントローラと、を備える、ことを特徴とする放射装置。 - 少なくとも1つの追加の放射供給源をさらに備え、前記コントローラが、前記第1および第2の放射供給源の少なくとも1つを起動させた後でのみ、前記追加の放射供給源を起動させるように構成される、ことを特徴とする請求項1に記載の装置。
- 複数の追加の放射供給源をさらに備え、前記コントローラが、前記第1および第2の放射供給源の少なくとも1つを起動させた後でのみ、前記複数の追加の放射供給源をそれぞれ起動させるように構成される、ことを特徴とする請求項1に記載の装置。
- 前記コントローラが、前記第1放射供給源の起動後、前記第2放射供給源の起動を所定の時間遅らせる、ことを特徴とする請求項1に記載の装置。
- 放射吸収の指度を提供する検出器をさらに備え、前記コントローラは、所定の吸収レベルに到達したことを示す信号を前記コントローラが前記検出器から受け取るまで、前記第2放射供給源の起動を遅らせる、ことを特徴とする請求項1に記載の装置。
- 前記第1放射供給源が、前記第2放射供給源によって生成される放射に対して直交偏光した放射を生成するように構成される、ことを特徴とする請求項1に記載の装置。
- 前記第1放射供給源および前記第2放射供給源がそれぞれ、マグネトロン、クライストロン、ジャイロトロン、進行波チューブ増幅器、および任意の他の放射供給源の少なくとも1つを備える、ことを特徴とする請求項1に記載の装置。
- 前記放射と協働して前記ガスからプラズマを形成し得るように、前記キャビティに近接して配置された触媒をさらに備える、ことを特徴とする請求項1に記載の装置。
- 前記触媒が、能動型触媒および受動型触媒の少なくとも1つである、ことを特徴とする請求項8に記載の装置。
- 前記触媒が、金属、無機材料、炭素、炭素系合金、炭素系複合物、導電性ポリマー、導電性シリコン・エラストマ、ポリマー・ナノコンポジット、および有機-無機複合物の少なくとも1つを含む、ことを特徴とする請求項9に記載の方法。
- 前記触媒が、ナノ粒子、ナノチューブ、粉体、粉塵、フレーク、ファイバ、シート、針、糸、撚り糸、フィラメント、織り糸、縫い糸、削りくず、スライバ、チップ、織布、テープ、およびウィスカの少なくとも1つの形態をとる、ことを特徴とする請求項10に記載の方法。
- 前記触媒が炭素繊維を含む、ことを特徴とする請求項11に記載の方法。
- 前記触媒が、ナノ粒子、ナノチューブ、粉体、粉塵、フレーク、ファイバ、シート、針、糸、撚り糸、フィラメント、織り糸、縫い糸、削りくず、スライバ、チップ、織布、テープ、およびウィスカの少なくとも1つの形態をとる、ことを特徴とする請求項9に記載の方法。
- 前記第1放射供給源から前記第2放射供給源を分離して保護するアイソレータをさらに備える、ことを特徴とする請求項1に記載の装置。
- チャンバと、
前記チャンバにガスを供給する導管と、
前記チャンバ内に放射を放射するように配置された複数の放射供給源と、
第1放射供給源を除いたすべての前記複数の放射供給源の起動を、前記第1放射供給源が起動されるまで遅らせるコントローラと、を備える、ことを特徴とするプラズマ装置。 - 前記コントローラが、前記第1放射供給源の起動後、前記複数の放射供給源の少なくとも1つの起動を所定の時間遅らせ、残りの複数の放射供給源をそれぞれ所定の時間間隔で順次起動させる、ことを特徴とする請求項15に記載のプラズマ装置。
- 放射吸収の指度を提供する検出器をさらに備え、前記コントローラは、所定の吸収レベルに到達したことを示す信号を前記コントローラが前記検出器から受け取るまで、前記複数の放射供給源のそれぞれの起動を遅らせる、ことを特徴とする請求項15に記載のプラズマ装置。
- 前記第1放射供給源が、前記複数の放射供給源の少なくとも1つによって生成される放射に対して直交偏光した放射を生成するように構成される、ことを特徴とする請求項15に記載のプラズマ装置。
- 前記第1放射供給源および前記複数の放射供給源がそれぞれ、マグネトロン、クライストロン、ジャイロトロン、進行波チューブ増幅器/発振器、および任意の他の放射供給源の少なくとも1つを備える、ことを特徴とする請求項15に記載のプラズマ装置。
- 前記放射と協働して前記ガスからプラズマを形成し得るように、前記キャビティに近接して配置された触媒をさらに備える、ことを特徴とする請求項15に記載のプラズマ装置。
- 前記触媒が、能動型触媒および受動型触媒の少なくとも1つである、ことを特徴とする請求項20に記載のプラズマ装置。
- 前記触媒が、金属、無機材料、炭素、炭素系合金、炭素系複合物、導電性ポリマー、導電性シリコン・エラストマ、ポリマー・ナノコンポジット、および有機-無機複合物の少なくとも1つを含む、ことを特徴とする請求項21に記載のプラズマ装置。
- 前記触媒が、ナノ粒子、ナノチューブ、粉体、粉塵、フレーク、ファイバ、シート、針、糸、撚り糸、フィラメント、織り糸、縫い糸、削りくず、スライバ、チップ、織布、テープ、およびウィスカの少なくとも1つの形態をとる、ことを特徴とする請求項22に記載のプラズマ装置。
- 前記触媒が炭素繊維を含む、ことを特徴とする請求項23に記載のプラズマ装置。
- 前記触媒が、ナノ粒子、ナノチューブ、粉体、粉塵、フレーク、ファイバ、シート、針、糸、撚り糸、フィラメント、織り糸、縫い糸、削りくず、スライバ、チップ、織布、テープ、およびウィスカの少なくとも1つの形態をとる、ことを特徴とする請求項21に記載のプラズマ装置。
- 前記プラズマ触媒が、少なくとも1種類のイオン化粒子を含む能動型プラズマ触媒を含む、ことを特徴とする請求項21に記載のプラズマ装置。
- 前記少なくとも1種類のイオン化粒子が粒子ビームを含む、ことを特徴とする請求項26に記載のプラズマ装置。
- 前記粒子が、X線粒子、ガンマ線粒子、アルファ粒子、ベータ粒子、中性子、および陽子の少なくとも1つである、ことを特徴とする請求項26に記載のプラズマ装置。
- 前記少なくとも1種類のイオン化粒子が荷電粒子である、ことを特徴とする請求項26に記載のプラズマ装置。
- 前記イオン化粒子が放射性核***生成物を含む、ことを特徴とする請求項26に記載のプラズマ装置。
- 前記複数の放射供給源をそれぞれ互いに、かつ前記第1放射供給源から分離して保護する複数のアイソレータをさらに備える、ことを特徴とする請求項15に記載のプラズマ装置。
- 前記チャンバが導波管である、ことを特徴とする請求項15に記載のプラズマ装置。
- ともに放射をプラズマ領域内に送るように配置された少なくとも第1および第2の放射供給源を使用する方法であって、
前記プラズマ領域内にガスを導入することと、
前記プラズマ領域内でのプラズマの形成が容易になるように前記第1放射供給源を起動させることと、
前記プラズマが形成された後で前記第2放射供給源を起動させること、とを含む、ことを特徴とする方法。 - とがった金属の先端、火花発生器、炭素、ファイバ状の材料、粉体状の材料、およびプラズマを点火し得る任意の他の触媒の少なくとも1つを使用してプラズマの形成を容易にする、ことを特徴とする請求項33に記載の方法。
- 前記第1および第2の供給源の少なくとも1つを起動させた後で、少なくとも1つの追加の放射供給源を起動させることをさらに含む、ことを特徴とする請求項33に記載の方法。
- 前記第1および第2の放射供給源をともに起動させるまで、少なくとも1つの追加の放射供給源の起動を遅らせることをさらに含む、ことを特徴とする請求項33に記載の方法。
- 前記第1放射供給源からのマイクロ波放射が、前記第2放射供給源からの放射に対して直交偏光している、ことを特徴とする請求項33に記載の方法。
- 複数の放射供給源を起動させることをさらに含み、前記複数の放射供給源をそれぞれ所定の時間間隔で順次起動させる、ことを特徴とする請求項33に記載の方法。
- 前記第1放射供給源および前記第2放射供給源がそれぞれ、マグネトロン、クライストロン、ジャイロトロン、進行波チューブ増幅器、および任意の他の放射供給源の少なくとも1つを備える、ことを特徴とする請求項33に記載の方法。
- 加熱領域がプラズマ触媒を含む、ことを特徴とする請求項33に記載の方法。
- 前記第1マイクロ波供給源を起動させることが、
少なくとも電気的に半伝導性の材料を含む少なくとも1種類の受動型プラズマ触媒の存在下で、前記領域内の前記ガスに前記第1供給源によって生成された約333GHz未満の周波数の電磁放射を当てることによって前記プラズマを点火することを含む、ことを特徴とする請求項33に記載の方法。 - 前記材料が、金属、無機材料、炭素、炭素系合金、炭素系複合物、導電性ポリマー、導電性シリコン・エラストマ、ポリマー・ナノコンポジット、有機-無機複合物、およびこれらの任意の組合せの少なくとも1つを含む、ことを特徴とする請求項41に記載の方法。
- 前記材料が、ナノ粒子、ナノチューブ、粉体、粉塵、フレーク、ファイバ、シート、針、糸、撚り糸、フィラメント、織り糸、縫い糸、削りくず、スライバ、チップ、織布、テープ、ウィスカ、およびこれらの任意の組合せの少なくとも1つの形態をとる、ことを特徴とする請求項41に記載の方法。
- 前記少なくとも1種類の受動型プラズマ触媒が、前記キャビティ内で異なる位置に分布した複数の細長い導電性の要素を含む、ことを特徴とする請求項41に記載の方法。
- 前記領域が、前記電磁放射の少なくとも第1モードおよび第2モードに対応するように構成されたキャビティ内に配置され、前記各モードが、前記キャビティ内で最大電界ベクトルを有し、前記各ベクトルがある大きさを有し、前記第1モードの大きさと前記第2モードの大きさの比が約1:10未満である、ことを特徴とする請求項41に記載の方法。
- 前記比が約1:5未満である、ことを特徴とする請求項45に記載の方法。
- 前記比が約1:2未満である、ことを特徴とする請求項45に記載の方法。
- 前記第1放射供給源を起動させることが、
少なくとも1種類のイオン化粒子を含む能動型プラズマ触媒の存在下で、キャビティ内のガスに約333GHz未満の周波数の電磁放射を当てることを含む、ことを特徴とする請求項33に記載の方法。 - 前記少なくとも1種類のイオン化粒子が粒子ビームを含む、ことを特徴とする請求項48に記載の方法。
- 前記粒子が、X線粒子、ガンマ線粒子、アルファ粒子、ベータ粒子、中性子、および陽子の少なくとも1つである、ことを特徴とする請求項48に記載の方法。
- 前記少なくとも1種類のイオン化粒子が荷電粒子である、ことを特徴とする請求項48に記載の方法。
- 前記イオン化粒子が放射性核***生成物を含む、ことを特徴とする請求項48に記載の方法。
- 前記生成物に対して少なくとも部分的に透過性の容器内にキャビティが形成され、前記方法が、放射性核***源から前記容器を貫通して前記キャビティ内に前記核***生成物が送られるように、前記キャビティの外側に前記供給源を配置することをさらに含む、ことを特徴とする請求項52に記載の方法。
- 前記容器および前記放射性核***源が放射チャンバ内部にあり、前記チャンバが、前記チャンバから前記生成物が漏れることを実質的に妨げる材料を含む、ことを特徴とする請求項52に記載の方法。
- キャビティ内に放射性核***源を配置することをさらに含み、前記供給源が前記少なくとも1種類の核***生成物を生成する、ことを特徴とする請求項52に記載の方法。
- 前記イオン化粒子が自由電子であり、電子供給源を励起することによって前記電子を生成することをさらに含む、ことを特徴とする請求項48に記載の方法。
- 前記電子供給源を励起することが、前記電子供給源を加熱することを含む、ことを特徴とする請求項56に記載の方法。
- 前記粒子が自由陽子を含み、水素をイオン化することによって前記自由陽子を生成することをさらに含む、ことを特徴とする請求項48に記載の方法。
- 前記キャビティが少なくとも部分的に開いており、それによって前記ガスが前記キャビティ内を流れることができる、ことを特徴とする請求項48に記載の方法。
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