JP2004260718A - Tuning fork type vibration pieces, manufacturing method of tuning fork type vibration pieces, and piezoelectric device - Google Patents

Tuning fork type vibration pieces, manufacturing method of tuning fork type vibration pieces, and piezoelectric device Download PDF

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JP2004260718A
JP2004260718A JP2003051350A JP2003051350A JP2004260718A JP 2004260718 A JP2004260718 A JP 2004260718A JP 2003051350 A JP2003051350 A JP 2003051350A JP 2003051350 A JP2003051350 A JP 2003051350A JP 2004260718 A JP2004260718 A JP 2004260718A
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Prior art keywords
base
tuning fork
vibrating
tuning
fork type
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JP2003051350A
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Japanese (ja)
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Hideo Tanaya
英雄 棚谷
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning fork type vibration pieces which can be miniaturized and the characteristic of which can be stabilized. <P>SOLUTION: In the tuning fork type vibration pieces 10 comprising: a base 11; vibration arms 12, 13 formed to the base 11 and projected therefrom; and grooves 14, 15 formed on the front side and the rear side of the vibration arms 12, 13, and a cut groove 16 with a prescribed area and a prescribed depth is provided to the base 11. Even when a vibration with a vertical component is caused in the case of a vibrating state of the vibration arms 12, 13, the cut groove 16 can relax leakage of the vibration of the vibration arms 12, 13 to the base 11, and since part of the base 11 is left in the cut groove 16 to configure a rib 17, the rigidity is increased so as to furthermore reduce the leakage of the vibration with the vertical component. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は、例えば圧電結晶等からなる音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイスに関する。
【０００２】
【従来技術】
圧電結晶振動子、特に音叉型振動子は、正確なクロック周波数を簡易に得ることができるものとして知られている。図７は従来の音叉型振動子に用いられる音叉型振動片の一例を示す概略図である。図８は同音叉型振動片の振動状態を説明するための図であって、図８（ａ）は振動腕部を、図８（ｂ）は振動方向をそれぞれ説明するための図である。従来の音叉型振動片１００は、図７に示すように、基部１１０と、この基部１１０から突出して形成されている振動腕部１２１、１２２とを備えた音叉型振動片であって、前記振動腕部１２１、１２２の表面部及び裏面部に溝部１２３、１２４が形成されているとともに、前記基部１１０に切込み部１２５、１２５が形成されているものが提案されている（特許文献１）。
【０００３】
前記音叉型振動片１００は、一般的に略３０ｋＨｚないし４０ｋＨｚで発振し、水晶などの圧電材料で形成したものである。また、前記振動腕部１２１、１２２はそれぞれ矩形であり、その前記振動腕部１２１、１２２の表面部の短辺である腕部幅ｗ（図８（ａ）参照）が５０μｍ以上１５０μｍ以下のものを使用している。さらに、前記振動腕部１２１、１２２の表面部及び裏面部に設けられた溝部１２３、１２４の深さは、前記振動腕部１２１、１２２の厚みｄ（図８（ａ）参照）に対して３０％以上５０％以下に形成されている。また、前記振動腕部１２１、１２２の表面部及び裏面部に設けられた溝部１２３、１２４の幅は、前記振動腕部１２１、１２２の幅の４０％以上７０％以下に形成されている。この音叉型振動片１００がパッケージ内に収容されて音叉型振動子が構成されることになる。
【０００４】
上記従来の音叉型振動片１００は、切込み部１２５、１２５を設けたことにより、振動エネルギーの閉じ込め効果を高めてＣＩ値（クリスタルインピーダンス値）を小さくするようにしており、かつ、基部１１０を短くしても製造された振動片間のＣＩ値のバラツキが安定するとともに、振動片全体も小型化できるという利点があった。
【０００５】
【特許文献１】特開２００２−２６１５７５号公報（図１ないし図４、段落番号００４５以降）
【０００６】
【発明が解決しようとする課題】
上記従来の音叉型振動片１００を備えた音叉型振動子では、振動は振動腕部１２１、１２２の付け根部分を含めて振動している。しかし、音叉型振動片１００は、前記基部１１０に切込み部１２５、１２５を設けたことにより振動漏れ（振動子の基部から逃げていくエネルギー）の改善が図られＣＩ値が安定する傾向にはなるが充分振動漏れを低減できない。さらに切込み部１２５を入れたことで基部１１０の剛性が不足するため、図８（ａ）に示す振動腕部１２１（１２２）が、図８（ｂ）に示すように水平振動成分だけでなく、垂直振動成分も大きくなり、充分に振動漏れを抑制できない。したがって、この従来の音叉型振動片１００のドライブ特性は、図５の特性Ａのように、０．５μＷから３．０μＷで周波数変化率Δｆ（ｐｐｍ）がマイナスになる特性を示すことになり、ドライブ特性が著しく悪化したものとなっている。また、この充分抑制できない垂直振動成分による振動漏れにより、ＣＩ値のバラツキなどの特性にも悪影響を与えるという問題があった。
本発明は上記問題に鑑み、小型化できるとともに特性の安定化ができるようにすることを目的としている。
【０００７】
【課題を解決しようとする手段】
本発明に係る音叉信号片は、基部と、この基部から突出して形成されている振動腕部と、前記振動腕部の表面部及び裏面部に形成してなる溝部とからなる音叉型振動片であって、前記基部の表面部及び裏面部から所定深さの切込み溝を設けたことを特徴としている。
【０００８】
その構成によれば、前記基部に所定深さの切込み溝を設けたので、切込み溝部の基部の厚さ方向中央部に板状部が残り、剛性が向上する。このため、振動腕部が振動する際に、垂直方向成分によって生じる、振動腕部の振動の基部側への漏れを、この切込み溝で緩和でき、さらに、剛性を上げることにより垂直方向成分による振動漏れを低減できる。したがって、基部を小型化しながら、ＣＩ値の振動片の間におけるバラツキを小さくでき、かつ、ドライブ特性も向上することができる。
【０００９】
また、前記切込み溝は、好ましくは、前記基部の両側面であって前記振動腕部側に偏らせて設けたものである。さらに、前記切込み溝は、深さが前記基部の厚さに対して前記基部の表面側と裏面側とから３０％以上５０％以下に構成されたものであることが好ましい。
【００１０】
上記の音叉型振動片を製造する方法は、基部と、この基部から突出して形成されている振動腕部と、前記振動腕部の表面部及び裏面部に形成した溝部とからなる音叉型振動片を製造する方法において、振動腕部に溝をエッチングする工程と同時に、前記基部の両側部に所定の深さを有した切込み溝を形成することを特徴としている。
【００１１】
そして、本発明に係る圧電デバイスは、上記の音叉型振動片を有することを特徴としている。これにより、上記の効果を有する圧電デバイスが得られる。
【００１２】
【発明の実施の形態】
本発明に係る音叉型振動片及びその製造方法並びに圧電デバイスの実施の形態を、添付図面に基づいて詳細に説明する。
図１は、本発明の実施の形態に係る音叉型振動片を示す図である。図２は、本発明の実施の形態に係る音叉型振動片の一部を拡大して示す斜視図である。図３は、図１のＦ−Ｆ線断面図である。
【００１３】
本発明の実施の形態に係る音叉型振動片１０は、図１ないし図３に示すように、基部１１と、この基部１１から突出して形成されている振動腕部１２、１３と、前記振動腕部１２、１３の表面部及び裏面部に形成された溝部１４、１５とを備えている。溝部１４、１５は、基部１１の表面部及び裏面部から所定の面積Ｓ（＝Ｌ×Ｈ）及び深さＺの切込み溝１６を設けたものである。前記切込み溝１６、１６は、基部１１の両側面に２ヶ所設けられ、かつ、基部１１の長さ方向（図１の上下方向）中心から振動腕部１２、１３側に偏らせて設けられている。
【００１４】
さらに説明すると、前記音叉型振動片１０は、実施形態の場合、略３０ｋＨｚないし４０ｋＨｚで発振し、水晶などの圧電材料により形成したものである。また、音叉型振動片１０の基部１１の長さは例えば０．５６ｍｍに形成されている。また、音叉型振動片１０の振動腕部１２、１３の長さは例えば１．６４４ｍｍに形成されている。また、切込み溝１６は振動腕部１２、１３の付け根から例えば０．１１３ｍｍの部分から振動腕部１２、１３とは反対側に所定の面積Ｓで深さＺの有底形状に形成されている。また、前記振動腕部１２、１３はそれぞれ矩形状であり、その振動腕部１２、１３の表面部の短辺である腕部幅ｗが５０μｍ以上１５０μｍ以下のものを使用している。さらに、前記振動腕部１２、１３の表面部及び裏面部に設けられた溝部１４、１５の深さは、前記振動腕部１２、１３の各深さ方向の全長である厚みに対して３０％以上５０％以下に形成されたものである。また、振動腕部１２、１３の表面部及び裏面部に設けられた溝部１４、１５の幅は、前記振動腕部１２、１３の幅ｗの４０％以上７０％以下に形成されたものである。
【００１５】
また、基部１１の幅は例えば５００μｍで、前記切込み溝１６の面積Ｓは、図２に示すように、例えば横長さＬ（＝１００μｍ）×例えば縦長さＨ（＝１００μｍ）に形成されている。また、前記切込み溝１６の深さＺは、前記基部１１の厚さに対して前記基部１１の表面側と裏面側とから３０％以上５０％以下に構成されている。したがって、前記切込み溝１６には、図２に示すように、前記基部１１の一部が基部１１の厚さに対して４０％以下の厚さＤのリブ１７として残った状態に形成されることになる。
【００１６】
図４は、本発明の実施の形態に係る音叉型振動片を備えた圧電デバイスである音叉型振動子を示す断面図である。この図４において、音叉型振動子２０は、上記音叉型振動片１０を用いている。この音叉型振動子２０は、上記音叉型振動片１０と、この音叉型振動片１０を収容したパッケージ２１とからなる。パッケージ２１は、図４に示すように、例えばアルミナなどのセラミックス等で構成されたベース部２２と、ガラスからなる蓋体２３と、低融点ガラスなどの封止部２４とから構成されており、箱状の形状をとる。ベース部２２内の段部上は、マウント部となっている。マウント部には、パッケージ側電極２５が設けられている。このパッケージ側電極２５の上には、上記音叉型振動片１０の基部１１に設けた電極（図示せず）が導電性接着剤によって固定されている。
【００１７】
以上説明したような構造の音叉型振動片１０を備えた音叉型振動子２０を、ドライブパワーを変化させられる発振回路で発振させ、それの周波数変化率Δｆを測定すると、図５の特性Ｂに示すような特性が得られた。
【００１８】
図５は、本発明の実施の形態に係る音叉型振動片を備えた音叉型振動子のドライブ特性を、従来の音叉型振動片を備えた音叉型振動子のドライブ特性と合わせて示す特性図であり、横軸にドライブパワーμＷを、縦軸に周波数変化率Δｆ（ｐｐｍ）を、それぞれ示したものである。従来の音叉型振動子では、図５のＡのようにドライブパワーを０．５μＷから３．０μＷに増加させると、それに伴って周波数変化率Δｆがマイナスにシフトしたのに対し、この図５の特性Ｂからわかるように、本発明の実施の形態に係る音叉型振動片１０を用いた音叉型振動子２０では、周波数変化率Δｆがプラスにシフトするようになった。一般に、音叉型振動子２０は、このようにドライブパワーを増加させると、プラスに推移する特性が望ましいので、本発明の実施の形態に係る音叉型振動片１０のような構造にすると、音叉型振動片１０の基部１１の切込み溝１６部分の剛性が保たれて、振動漏れを低減できて望ましい特性となる。
【００１９】
この音叉型振動子２０は、音叉型振動片１０の前記基部１１に、所定の幅及び深さの切込み溝１６を設けたことにより、振動腕部１２、１３が振動する際に、垂直方向成分を有した振動が生じても、振動腕部１２、１３の振動が基部１１側に漏れるのを、この切込み溝１６で緩和できる。また、この切込み溝１６には、基部１１の厚さ方向中央部にリブ１７が設けてあるため、剛性が増して振動漏れをさらに低減できる。したがって、基部１１を小型化しながら、製造された音叉型振動片１０の間におけるＣＩ値のバラツキを小さくでき、かつ、ドライブ特性も安定化し、向上させることができる。
【００２０】
なお、本発明の実施の形態に係る音叉型振動片１０は、デジタル携帯電話、携帯情報端末、パーソナルコンピュータ、テレビジョン受像機、ビデオ機器などの各種の電子機器や、時計、時計内蔵機器に使用できる。
【００２１】
本発明の実施の形態に係る音叉型振動片１０は、以上のような構造となっているが、以下、その製造方法などについて説明する。この音叉型振動片１０は、エッチングにより製造される。まず、図６のステップＳ１０に示したように、水晶等の圧電結晶板の両面にフォトレジストを塗布し、これを露光、現像して音叉形状のレジストマスクを形成する。次に、圧電結晶板をフッ酸等のエッチング液でエッチングし、音叉型振動片１０の外形形状を形成し（ステップＳ１２）、レジストマスクを除去する。
【００２２】
さらに、音叉型振動片の振動腕１２、１３の溝部１４、１５に対応した部分と、基部１１の切込み溝１６とに対応した部分を露出させたレジストマスクを形成する。その後、振動片の露出した部分をフッ酸などによってハーフエッチングし、溝部１４、１５及び切込み溝１６を形成し、レジストマスクを除去する。次に、音叉型振動片１０の表面に電極用の金属膜をスパッタリングなどによって堆積し、これをエッチングして励振電極、接続電極などを形成する。これにより、前記振動腕部１２、１３に溝部１４、１５をエッチングする工程において、リブ１７を有する切込み溝１６が溝部１４、１５と同時に形成される。
【００２３】
以上説明したように、本発明の実施の形態に係る音叉型振動片１０は、上述したような構造になっているので、振動腕部１２、１３が振動する際に、垂直方向成分を有した振動が生じても、振動腕部１２、１３の振動が基部１１側に漏れるのを、この切込み溝１６で緩和でき、また、この切込み溝１６には基部１１の一部が残ってリブ１７を構成しているので剛性が増し、振動漏れをさらに低減できる。
【００２４】
なお、上述した実施の形態は、本発明の好適な具体例であり、技術的に好ましい種々の限定が付されているが、これらの形態に限られるものではない。
【図面の簡単な説明】
【図１】本発明の実施の形態に係る音叉型振動片を示す図である。
【図２】本発明の実施の形態に係る音叉型振動片の一部を拡大して示す斜視図である。
【図３】図１のＦ−Ｆ線断面図である。
【図４】本発明の実施の形態に係る音叉型振動片を備えた音叉型振動子を示す断面図である。
【図５】本発明の実施の形態に係る音叉型振動片を備えた音叉型振動子のドライブ特性を、従来の音叉型振動片を備えた音叉型振動子のドライブ特性と合わせて示す特性図である。
【図６】実施形態に係る音叉型振動片の製造方法のフローチャートである。
【図７】従来の音叉型振動子に用いられる音叉型振動片の一例を示す概略図である。
【図８】同音叉型振動片の振動状態を説明するための図である。
【符号の説明】
１０………音叉型振動片、１１………基部、１２、１３………振動腕部、１４、１５………溝部、１６………切込み溝、１７………リブ、２０………音叉型振動子、２１………パッケージ、２２………ベース部、２３………蓋体、２４………封止部。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a tuning fork vibrating piece made of, for example, a piezoelectric crystal, a method for manufacturing the tuning fork vibrating piece, and a piezoelectric device.
[0002]
[Prior art]
Piezoelectric crystal vibrators, particularly tuning-fork type vibrators, are known as those capable of easily obtaining an accurate clock frequency. FIG. 7 is a schematic view showing an example of a tuning fork vibrating piece used in a conventional tuning fork vibrator. 8A and 8B are diagrams for explaining a vibration state of the tuning-fork type vibrating piece. FIG. 8A is a diagram for explaining a vibrating arm portion, and FIG. 8B is a diagram for explaining a vibration direction. As shown in FIG. 7, a conventional tuning-fork type vibrating reed 100 is a tuning fork-type vibrating reed having a base 110 and vibrating arms 121 and 122 protruding from the base 110. There has been proposed a structure in which grooves 123 and 124 are formed on the front and back surfaces of the arms 121 and 122, and cuts 125 and 125 are formed in the base 110 (Patent Document 1).
[0003]
The tuning-fork type vibrating piece 100 generally oscillates at about 30 kHz to 40 kHz and is formed of a piezoelectric material such as quartz. Each of the vibrating arms 121 and 122 has a rectangular shape, and an arm width w (see FIG. 8A), which is a short side of the surface of the vibrating arms 121 and 122, is 50 μm or more and 150 μm or less. You are using Further, the depth of the grooves 123 and 124 provided on the front surface and the rear surface of the vibrating arms 121 and 122 is set to 30 with respect to the thickness d of the vibrating arms 121 and 122 (see FIG. 8A). % To 50% or less. Also, the width of the grooves 123 and 124 provided on the front surface and the back surface of the vibrating arms 121 and 122 is formed to be 40% or more and 70% or less of the width of the vibrating arms 121 and 122. The tuning-fork type vibrating piece 100 is housed in a package to form a tuning-fork type vibrator.
[0004]
In the conventional tuning-fork type vibrating piece 100 described above, by providing the cut portions 125, 125, the effect of confining vibration energy is enhanced to reduce the CI value (crystal impedance value), and the base 110 is shortened. However, there is an advantage that the variation of the CI value between the manufactured resonator elements is stabilized and the entire resonator element can be reduced in size.
[0005]
[Patent Document 1] Japanese Patent Application Laid-Open No. 2002-261575 (FIGS. 1 to 4, paragraph 0045 and thereafter)
[0006]
[Problems to be solved by the invention]
In the tuning fork vibrator provided with the above-described conventional tuning fork vibrating piece 100, the vibration vibrates including the base portions of the vibrating arms 121 and 122. However, in the tuning-fork type vibrating reed 100, the provision of the cut portions 125, 125 in the base portion 110 improves vibration leakage (energy escaping from the base portion of the vibrator) and tends to stabilize the CI value. However, vibration leakage cannot be sufficiently reduced. Further, since the rigidity of the base portion 110 is insufficient due to the notch 125, the vibrating arm portions 121 (122) shown in FIG. 8A not only have horizontal vibration components as shown in FIG. The vertical vibration component also increases, and vibration leakage cannot be sufficiently suppressed. Therefore, the drive characteristics of the conventional tuning-fork type vibrating piece 100 show a characteristic in which the frequency change rate Δf (ppm) becomes negative from 0.5 μW to 3.0 μW as shown in the characteristic A of FIG. The drive characteristics are significantly deteriorated. In addition, there is a problem that characteristics such as variation in CI value are adversely affected by vibration leakage due to the vertical vibration component that cannot be sufficiently suppressed.
SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to reduce the size and stabilize characteristics.
[0007]
[Means to solve the problem]
The tuning fork signal piece according to the present invention is a tuning fork type vibration piece comprising a base, a vibrating arm projecting from the base, and a groove formed on the front surface and the back surface of the vibrating arm. In addition, a notch groove having a predetermined depth from the front surface portion and the back surface portion of the base portion is provided.
[0008]
According to this configuration, since the cut groove having a predetermined depth is provided in the base, a plate-shaped portion remains at the center in the thickness direction of the base of the cut groove, and the rigidity is improved. For this reason, when the vibrating arm vibrates, leakage of the vibration of the vibrating arm to the base side caused by the vertical component can be reduced by the notch groove, and the vibration due to the vertical component can be reduced by increasing the rigidity. Leakage can be reduced. Therefore, the variation in the CI value between the resonator elements can be reduced and the drive characteristics can be improved while the base portion is downsized.
[0009]
Preferably, the cut grooves are provided on both sides of the base portion and are biased toward the vibrating arm. Furthermore, it is preferable that the depth of the cut groove is 30% or more and 50% or less from the front side and the back side of the base with respect to the thickness of the base.
[0010]
The method of manufacturing the above-described tuning fork vibrating reed includes a tuning fork vibrating reed comprising a base, a vibrating arm protruding from the base, and grooves formed on the front surface and the back surface of the vibrating arm. Is characterized in that, at the same time as the step of etching a groove in the vibrating arm, a notch groove having a predetermined depth is formed on both sides of the base.
[0011]
Further, a piezoelectric device according to the present invention is characterized by having the above-described tuning-fork type vibrating reed. As a result, a piezoelectric device having the above effects can be obtained.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiments of a tuning fork vibrating piece, a method for manufacturing the same, and a piezoelectric device according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a diagram showing a tuning-fork type resonator element according to an embodiment of the present invention. FIG. 2 is an enlarged perspective view showing a part of the tuning-fork type resonator element according to the embodiment of the present invention. FIG. 3 is a sectional view taken along line FF of FIG.
[0013]
As shown in FIGS. 1 to 3, a tuning-fork vibrating reed 10 according to an embodiment of the present invention includes a base 11, vibrating arms 12 and 13 protruding from the base 11, and the vibrating arm. Grooves 14 and 15 are formed on the front and rear portions of the portions 12 and 13. The grooves 14 and 15 are provided with cut grooves 16 having a predetermined area S (= L × H) and a depth Z from the front surface and the back surface of the base 11. The cut grooves 16, 16 are provided at two places on both side surfaces of the base 11, and are provided so as to be deviated from the center of the base 11 in the longitudinal direction (vertical direction in FIG. 1) toward the vibrating arms 12, 13. I have.
[0014]
More specifically, in the case of the embodiment, the tuning-fork type vibrating piece 10 oscillates at approximately 30 kHz to 40 kHz and is formed of a piezoelectric material such as quartz. The length of the base 11 of the tuning-fork vibrating piece 10 is, for example, 0.56 mm. The length of the vibrating arms 12 and 13 of the tuning-fork type vibrating reed 10 is, for example, 1.644 mm. Further, the cut groove 16 is formed in a bottomed shape having a predetermined area S and a depth Z from a portion of, for example, 0.113 mm from the base of the vibrating arms 12 and 13 to a side opposite to the vibrating arms 12 and 13. . Each of the vibrating arms 12 and 13 has a rectangular shape, and has a width w of 50 μm or more and 150 μm or less, which is a short side of the surface of the vibrating arms 12 and 13. Further, the depth of the grooves 14 and 15 provided on the front surface and the rear surface of the vibrating arms 12 and 13 is 30% of the total thickness of the vibrating arms 12 and 13 in the depth direction. More than 50% or less. Further, the width of the grooves 14 and 15 provided on the front surface and the back surface of the vibrating arms 12 and 13 is formed to be 40% or more and 70% or less of the width w of the vibrating arms 12 and 13. .
[0015]
The width of the base 11 is, for example, 500 μm, and the area S of the cut groove 16 is, for example, a horizontal length L (= 100 μm) × a vertical length H (= 100 μm), as shown in FIG. The depth Z of the cut groove 16 is 30% or more and 50% or less of the thickness of the base 11 from the front side and the back side of the base 11. Therefore, as shown in FIG. 2, a part of the base 11 is formed in the notch 16 as a rib 17 having a thickness D of 40% or less of the thickness of the base 11. become.
[0016]
FIG. 4 is a cross-sectional view illustrating a tuning fork vibrator that is a piezoelectric device including the tuning fork vibrating piece according to the embodiment of the present invention. In FIG. 4, a tuning fork vibrator 20 uses the above-described tuning fork vibrating piece 10. The tuning fork vibrator 20 includes the tuning fork vibrating reed 10 and a package 21 that accommodates the tuning fork vibrating reed 10. As shown in FIG. 4, the package 21 includes a base portion 22 made of ceramics such as alumina, a lid 23 made of glass, and a sealing portion 24 made of low-melting glass. Take the shape of a box. The upper part of the step in the base part 22 is a mount part. The mounting portion is provided with a package-side electrode 25. An electrode (not shown) provided on the base 11 of the tuning-fork type vibrating piece 10 is fixed on the package-side electrode 25 by a conductive adhesive.
[0017]
When the tuning fork vibrator 20 having the tuning fork vibrating piece 10 having the structure described above is oscillated by an oscillation circuit capable of changing the drive power, and its frequency change rate Δf is measured, the characteristic B in FIG. The characteristics shown were obtained.
[0018]
FIG. 5 is a characteristic diagram showing the drive characteristics of the tuning fork vibrator provided with the tuning fork vibrating piece according to the embodiment of the present invention, together with the drive characteristics of the tuning fork vibrator provided with the conventional tuning fork vibrating piece. The drive power μW is plotted on the horizontal axis, and the frequency change rate Δf (ppm) is plotted on the vertical axis. In the conventional tuning-fork type vibrator, when the drive power was increased from 0.5 μW to 3.0 μW as shown in FIG. 5A, the frequency change rate Δf was accordingly shifted to a negative value. As can be seen from the characteristic B, in the tuning fork vibrator 20 using the tuning fork vibrating piece 10 according to the embodiment of the present invention, the frequency change rate Δf shifts to plus. In general, the tuning fork vibrator 20 desirably has a characteristic that changes to a positive value when the drive power is increased in this manner. Therefore, when the tuning fork vibrating piece 10 according to the embodiment of the present invention has a structure like the tuning fork vibrating piece 10, The rigidity of the cut groove 16 portion of the base 11 of the resonator element 10 is maintained, and vibration leakage can be reduced, which is a desirable characteristic.
[0019]
The tuning fork type vibrator 20 is provided with a notch 16 having a predetermined width and depth in the base portion 11 of the tuning fork type vibrating piece 10, so that when the vibrating arms 12 and 13 vibrate, a vertical component Even if a vibration having the following is generated, leakage of the vibration of the vibrating arms 12 and 13 toward the base 11 can be mitigated by the cut groove 16. Further, since the cut groove 16 is provided with the rib 17 at the center in the thickness direction of the base 11, the rigidity is increased and the vibration leakage can be further reduced. Therefore, it is possible to reduce the variation in the CI value between the manufactured tuning fork-type vibrating pieces 10 while miniaturizing the base portion 11, and to stabilize and improve the drive characteristics.
[0020]
The tuning-fork type vibrating piece 10 according to the embodiment of the present invention is used for various electronic devices such as a digital mobile phone, a portable information terminal, a personal computer, a television receiver, and a video device, a clock, and a device with a built-in clock. it can.
[0021]
The tuning fork vibrating piece 10 according to the embodiment of the present invention has the above-described structure. Hereinafter, a method of manufacturing the same will be described. The tuning-fork type vibrating piece 10 is manufactured by etching. First, as shown in step S10 of FIG. 6, a photoresist is applied to both surfaces of a piezoelectric crystal plate such as a crystal, and the photoresist is exposed and developed to form a tuning fork-shaped resist mask. Next, the piezoelectric crystal plate is etched with an etching solution such as hydrofluoric acid to form the outer shape of the tuning-fork vibrating piece 10 (step S12), and the resist mask is removed.
[0022]
Further, a resist mask is formed by exposing portions corresponding to the grooves 14 and 15 of the vibrating arms 12 and 13 of the tuning fork vibrating piece and portions corresponding to the cut grooves 16 of the base 11. Thereafter, the exposed portion of the resonator element is half-etched with hydrofluoric acid or the like to form the grooves 14, 15 and the cut groove 16, and the resist mask is removed. Next, a metal film for an electrode is deposited on the surface of the tuning-fork vibrating piece 10 by sputtering or the like, and this is etched to form an excitation electrode, a connection electrode, and the like. Thereby, in the step of etching the grooves 14 and 15 in the vibrating arms 12 and 13, the cut grooves 16 having the ribs 17 are formed simultaneously with the grooves 14 and 15.
[0023]
As described above, since the tuning-fork vibrating piece 10 according to the embodiment of the present invention has the above-described structure, it has a vertical component when the vibrating arms 12 and 13 vibrate. Even if vibration occurs, leakage of the vibrations of the vibrating arms 12 and 13 to the base 11 side can be reduced by the cut groove 16, and a part of the base 11 remains in the cut groove 16 and the rib 17 With the configuration, rigidity is increased, and vibration leakage can be further reduced.
[0024]
The above-described embodiment is a preferred specific example of the present invention, and various technically preferable limitations are added thereto, but the present invention is not limited to these embodiments.
[Brief description of the drawings]
FIG. 1 is a diagram showing a tuning-fork type resonator element according to an embodiment of the present invention.
FIG. 2 is an enlarged perspective view showing a part of a tuning fork vibrating piece according to the embodiment of the present invention.
FIG. 3 is a sectional view taken along line FF of FIG. 1;
FIG. 4 is a cross-sectional view showing a tuning fork vibrator provided with a tuning fork vibrating piece according to an embodiment of the present invention.
FIG. 5 is a characteristic diagram showing the drive characteristics of a tuning fork vibrator provided with a tuning fork vibrator element according to an embodiment of the present invention, together with the drive characteristics of a conventional tuning fork vibrator provided with a tuning fork vibrator element. It is.
FIG. 6 is a flowchart of a method for manufacturing a tuning-fork type vibrating reed according to the embodiment.
FIG. 7 is a schematic view showing an example of a tuning fork vibrating piece used in a conventional tuning fork vibrator.
FIG. 8 is a diagram for explaining a vibration state of the tuning-fork type vibrating piece.
[Explanation of symbols]
10 Tuning fork type vibrating piece, 11 Base, 12, 13 Vibrating arm, 14, 15 Groove, 16 Cut groove, 17 Rib, 20 Tuning fork type vibrator, 21 package, 22 base part, 23 lid, 24 sealing part.

Claims (5)

基部と、この基部から突出して形成されている振動腕部と、前記振動腕部の表面部及び裏面部に形成してなる溝部とからなる音叉型振動片であって、前記基部の表面部及び裏面部から所定深さの切込み溝を設けてなることを特徴とする音叉型振動片。A tuning fork-type vibrating reed comprising a base, a vibrating arm formed so as to protrude from the base, and a groove formed on the front surface and the back surface of the vibrating arm; A tuning fork type vibrating reed comprising a notch groove having a predetermined depth from a back surface portion. 前記切込み溝は、前記基部の両側面であって長手方向において前記振動腕部側に偏らせて設けたものであることを特徴とする請求項１記載の音叉型振動片。2. The tuning-fork vibrating piece according to claim 1, wherein the cut groove is provided on both sides of the base portion and is deviated in the longitudinal direction toward the vibrating arm portion. 3. 前記切込み溝は、前記基部の厚さに対して前記基部の表面側と裏面側とから、３０％以上５０％以下の深さを有していることを特徴とする請求項１または２記載の音叉型振動片。The said cut groove has a depth of 30% or more and 50% or less from the front surface side and the back surface side of the base with respect to the thickness of the base. Tuning fork vibrating piece. 基部と、この基部から突出して形成されている振動腕部と、前記振動腕部の表面部及び裏面部に形成した溝部とからなる音叉型振動片を製造する方法において、前記振動腕部に溝をエッチングする工程と同時に、前記基部の両側部に所定の深さを有した切込み溝を形成することを特徴とする音叉型振動片の製造方法。A method for manufacturing a tuning fork vibrating reed comprising a base, a vibrating arm formed so as to protrude from the base, and a groove formed on a front surface and a back surface of the vibrating arm, wherein a groove is formed on the vibrating arm. Forming a notch having a predetermined depth on both sides of the base at the same time as the step of etching the base. 請求項１ないし３のいずれかに記載の音叉型振動片を有することを特徴とする圧電デバイス。A piezoelectric device comprising the tuning-fork type vibrating reed according to claim 1.
JP2003051350A 2003-02-27 2003-02-27 Tuning fork type vibration pieces, manufacturing method of tuning fork type vibration pieces, and piezoelectric device Pending JP2004260718A (en)

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