JPH06291590A - Piezoelectric vibrator and manufacture of the same - Google Patents
Piezoelectric vibrator and manufacture of the sameInfo
- Publication number
- JPH06291590A JPH06291590A JP5097299A JP9729993A JPH06291590A JP H06291590 A JPH06291590 A JP H06291590A JP 5097299 A JP5097299 A JP 5097299A JP 9729993 A JP9729993 A JP 9729993A JP H06291590 A JPH06291590 A JP H06291590A
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- vibrator
- groove
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電振動子の構造およ
び製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure and a manufacturing method of a piezoelectric vibrator.
【０００２】[0002]
【従来技術とその課題】発振周波数が１０ＭＨｚ以下の
ＡＴ板ではクリスタル・インピーダンス（以下本文では
ＣＩ値と記す）の低下や、主振動である厚みすべり振動
以外に発生するた副振動を抑制するため、ベベルを設け
ることによって、エネルギー閉じ込めを行う。2. Description of the Related Art In an AT plate with an oscillating frequency of 10 MHz or less, a crystal impedance (hereinafter referred to as a CI value) is reduced to suppress a sub-vibration other than the main-thickness-shear vibration. , Energy is confined by providing a bevel.
【０００３】従来の振動子の形状、およびその構造を図
９の斜視図に示す。図９に示すように、振動子９０の厚
さは、振動子９０の両端に沿って薄くなりベベル９１を
形成している。The shape and structure of a conventional vibrator is shown in the perspective view of FIG. As shown in FIG. 9, the thickness of the vibrator 90 becomes thinner along both ends of the vibrator 90 to form a bevel 91.
【０００４】図９に示す振動子のベベル加工は、通常パ
イピング法を用いる。そのパイピング法によるベベル加
工を図１０に示す。The beveling of the vibrator shown in FIG. 9 usually uses a piping method. The bevel processing by the piping method is shown in FIG.
【０００５】図１０に示すように、パイピング法は直径
１００ｍｍ程度の金属からなる円筒１０１の中に、振動
子１０２と＃８００程度の砥粒１０３とを同時にいれ、
その円筒１０１をローラー１０４を用いて回転させる。As shown in FIG. 10, in the piping method, a vibrator 102 and abrasive grains 103 of about # 800 are simultaneously put in a cylinder 101 made of metal having a diameter of about 100 mm,
The cylinder 101 is rotated using a roller 104.
【０００６】円筒１０１の内壁に付着した砥粒１０３が
振動子１０２を削ることによって、振動子１０２の両面
の両端部に円筒１０１と同じ曲率のベベルを加工するこ
とができる。By grinding the oscillator 102 by the abrasive grains 103 attached to the inner wall of the cylinder 101, bevels having the same curvature as that of the cylinder 101 can be formed on both ends of the oscillator 102.
【０００７】この図１０を用いて説明したベベル加工に
おけるベベルの加工量は、加工時間に依存し、長時間円
筒１０１を回転させれば、ベベルの加工量は増大する。
しかしながら、パイピング法は加工速度が遅く、加工に
要する時間は１２０時間程度と非常に長い。The bevel machining amount in the bevel machining described with reference to FIG. 10 depends on the machining time, and if the cylinder 101 is rotated for a long time, the bevel machining amount increases.
However, the piping method has a low processing speed, and the time required for the processing is very long, about 120 hours.
【０００８】さらに、砥粒１０３は湿度の影響を受けや
すく、わずかの湿気で砥粒１０３が固まりやすく、ベベ
ル加工のばらつきが生じやすい。Further, the abrasive grains 103 are easily affected by humidity, and the abrasive grains 103 are easily hardened by a small amount of moisture, so that the beveling process tends to vary.
【０００９】さらにまた、振動子１０２が小型化にする
に従い、振動子１０２の重量が小さくなり、砥粒１０３
により加工しにくくなる。したがって、パイピング法に
よるベベル加工は、現状では困難な状況にある。Furthermore, as the vibrator 102 becomes smaller, the weight of the vibrator 102 becomes smaller and the abrasive grains 103 become smaller.
Makes it difficult to process. Therefore, beveling by the piping method is currently in a difficult situation.
【００１０】図１１はパイピング法を用いて加工したと
きの振動子を示す斜視図である。図１１に示すように、
直方体状形状の振動子１０２は、頂点周辺のみが加工さ
れるだけで、振動子１０２の稜線付近を加工することは
できず、所望のベベルの形状を得ることができないとい
った問題がある。FIG. 11 is a perspective view showing a vibrator when processed by the piping method. As shown in FIG.
The rectangular parallelepiped oscillator 102 has a problem that only the periphery of the apex is processed, the vicinity of the ridgeline of the oscillator 102 cannot be processed, and a desired bevel shape cannot be obtained.
【００１１】そこで、従来のベベル形状に代わり、エネ
ルギー閉じ込めが可能な新しい形状で、かつ加工の容易
な振動子の開発が望まれるところである。Therefore, in place of the conventional bevel shape, it is desired to develop a vibrator which has a new shape capable of trapping energy and is easily processed.
【００１２】一方、振動子の支持構造に関しては、発振
周波数２０ＭＨｚ以上の振動子の支持方法は、剛支持が
一般的である。この剛支持による振動子の支持構造を図
１２に示す。On the other hand, regarding the support structure of the vibrator, a rigid support is generally used as a method of supporting the vibrator having an oscillation frequency of 20 MHz or more. FIG. 12 shows a structure for supporting the vibrator by this rigid support.
【００１３】図１２に示すように、剛支持は導電性接着
剤１２３を、電極１２２を有する振動子１２１の支持部
の電極引き出し線１２６と、容器１２５の容器内電極１
２４とのそれぞれ２カ所に塗布し、振動子１２１を容器
１２５に固定している。As shown in FIG. 12, for rigid support, the conductive adhesive 123 is used, the electrode lead wire 126 of the support portion of the vibrator 121 having the electrode 122, and the in-container electrode 1 of the container 125.
24 is applied to each of two places, and the vibrator 121 is fixed to the container 125.
【００１４】ところが振動子１２１の小型化に伴い、振
動子１２１の幅寸法が１ｍｍ程度になると、自動機で導
電性接着剤１２３を塗布しても、振動子１２１の幅寸法
が小さいため、２箇所に塗布したはずの導電性接着剤１
２３が流れ出す。However, when the width of the vibrator 121 becomes about 1 mm as the vibrator 121 becomes smaller, the width of the vibrator 121 is small even if the conductive adhesive 123 is applied by an automatic machine. Conductive adhesive that should have been applied to the area 1
23 flows out.
【００１５】この結果、電極引き出し線１２６と容器内
電極１２４とのそれぞれ２箇所別々に導電性接着剤１２
３を塗布することができず、電極引き出し線１２６が短
絡するといった問題がある。As a result, the conductive adhesive 12 is separately provided at each of the electrode lead wire 126 and the in-container electrode 124 at two locations.
3 cannot be applied and the electrode lead wire 126 is short-circuited.
【００１６】また、振動子１２１の振動部分に導電性接
着剤１２３が流れだし、ＣＩ値の上昇といった振動子基
本特性の劣化を引き起こす。Further, the conductive adhesive 123 begins to flow into the vibrating portion of the vibrator 121, causing deterioration of the vibrator basic characteristics such as an increase in the CI value.
【００１７】本発明の目的は、上記の課題を解決して、
振動エネルギーを閉じこめ、ＣＩ値を低下させて、副振
動を抑制し、かつ導電性接着剤が流れ出して電極引き出
し線が短絡することが生じないような構造の支持部を有
する小型の圧電振動子の構造と、その製造方法とを提供
することにある。The object of the present invention is to solve the above problems,
A small piezoelectric vibrator having a support portion having a structure that traps vibration energy, lowers the CI value, suppresses secondary vibration, and prevents the conductive adhesive from flowing out and shorting the electrode lead wire. It is to provide a structure and a manufacturing method thereof.
【００１８】[0018]
【課題を解決するための手段】上記目的を達成するため
本考案の圧電振動子の構造およびその製造方法は下記記
載の構造および製造方法を採用する。In order to achieve the above object, the structure and manufacturing method of the piezoelectric vibrator of the present invention adopt the structure and manufacturing method described below.
【００１９】本発明の圧電振動子の構造は、振動子の少
なくとも一方の面の振動部分と支持部の境界部に溝を有
することを特徴とする。The structure of the piezoelectric vibrator of the invention is characterized in that a groove is provided at the boundary between the vibrating portion of at least one surface of the vibrator and the supporting portion.
【００２０】本発明の圧電振動子の構造は、振動子の少
なくとも一方の面の少なくとも一方の支持部に溝を有す
ることを特徴とする。The structure of the piezoelectric vibrator of the present invention is characterized in that a groove is provided in at least one support portion of at least one surface of the vibrator.
【００２１】本発明の圧電振動子の構造は、振動子の少
なくとも一方の面の振動部分と支持部の境界部に溝を有
し、かつ支持部に溝を有することを特徴とする。The structure of the piezoelectric vibrator of the present invention is characterized in that a groove is provided at the boundary between the vibrating portion of at least one surface of the vibrator and the supporting portion, and the supporting portion is provided with a groove.
【００２２】本発明の圧電振動子の製造方法は、スリッ
トを有するメタルマスクを複数の水晶片上に設置し、メ
タルマスクを介して水晶片に対して噴射加工を行い、ス
リットの開口部と接する水晶片に溝を形成することを特
徴とする。According to the method of manufacturing a piezoelectric vibrator of the present invention, a metal mask having a slit is set on a plurality of crystal pieces, and the crystal piece is jetted through the metal mask to make contact with the slit opening. It is characterized in that a groove is formed in one piece.
【００２３】[0023]
【実施例】以下図面により本発明の実施例を説明する。
まず本発明の第１の実施例における圧電振動子の構造を
図１を用いて説明する。図１は本発明の第１の実施例に
おける振動子を示す斜視図である。Embodiments of the present invention will be described below with reference to the drawings.
First, the structure of the piezoelectric vibrator according to the first embodiment of the present invention will be described with reference to FIG. 1 is a perspective view showing a vibrator according to a first embodiment of the present invention.
【００２４】図１に示すように、振動子１０は、一方の
面の支持部１２と振動部分１３との境界に溝１１を設け
る。As shown in FIG. 1, the vibrator 10 is provided with a groove 11 at the boundary between the supporting portion 12 and the vibrating portion 13 on one surface.
【００２５】振動子１０の外形寸法は、５ｍｍ×１ｍｍ
×０．１３ｍｍの小型のＡＴカット水晶振動子で、発振
周波数は約１２．８ＭＨｚである。The external dimensions of the vibrator 10 are 5 mm × 1 mm
It is a small AT-cut crystal unit with a size of 0.13 mm and an oscillation frequency of about 12.8 MHz.
【００２６】そして振動子１０の長手方向の両端から
０．６ｍｍの位置に、幅０．３ｍｍ、深さ０．０６ｍｍ
の溝１１を設ける。この溝１１の断面形状は楕円であ
る。A width of 0.3 mm and a depth of 0.06 mm are provided at positions of 0.6 mm from both ends of the vibrator 10 in the longitudinal direction.
The groove 11 is provided. The cross-sectional shape of this groove 11 is elliptical.
【００２７】振動子１０の両端から溝１１までを支持部
１２とし、２本の溝１１の間を振動部分１３とする。A support portion 12 extends from both ends of the vibrator 10 to the groove 11, and a vibrating portion 13 extends between the two grooves 11.
【００２８】従来のベベル加工を行った場合の振動子の
ＣＩ値は３０Ωと大きい値であるのに対して、図１に示
す本発明の溝１１を設けた振動子１０のＣＩ値は１０Ω
と非常に低い。While the CI value of the vibrator when the conventional bevel processing is performed is as large as 30Ω, the CI value of the vibrator 10 provided with the groove 11 of the present invention shown in FIG. 1 is 10Ω.
And very low.
【００２９】またさらに、本発明の振動子１０は主振動
より１００ＫＨｚ以内に副振動は生じず、主振動と副振
動の利得差は数十ｄＢと大きく有効である。Furthermore, the vibrator 10 of the present invention does not generate any sub-vibration within 100 KHz of the main vibration, and the gain difference between the main vibration and the sub-vibration is several tens of dB, which is effective.
【００３０】図２は本発明の圧電振動子の第２の実施例
を示す斜視図である。FIG. 2 is a perspective view showing a second embodiment of the piezoelectric vibrator of the present invention.
【００３１】図２に示すように、振動子１０の支持部１
２と振動部分１３との境界部で、かつ振動子１０の両面
に合計４本の溝１１を設ける。As shown in FIG. 2, a supporting portion 1 of the vibrator 10 is provided.
A total of four grooves 11 are provided at the boundary between 2 and the vibrating portion 13 and on both sides of the vibrator 10.
【００３２】振動子１０の外形寸法は、５ｍｍ×１ｍｍ
×０．１３ｍｍの小型のＡＴカット水晶振動子で、発振
周波数は約１２．８ＭＨｚである。The external dimensions of the vibrator 10 are 5 mm × 1 mm
It is a small AT-cut crystal unit with a size of 0.13 mm and an oscillation frequency of about 12.8 MHz.
【００３３】そして振動子１０の長手方向の両端より
０．６ｍｍの位置に、幅０．３ｍｍ、深さ０．０６ｍｍ
の溝１１を振動子１０の両面に２本づつ合計４本設け
る。この溝１１の断面形状は楕円である。A width of 0.3 mm and a depth of 0.06 mm are provided at positions 0.6 mm from both ends of the vibrator 10 in the longitudinal direction.
The grooves 11 are provided on each side of the vibrator 10 in total of four grooves. The cross-sectional shape of this groove 11 is elliptical.
【００３４】図２に示す本発明の振動子のＣＩ値は１０
Ωと低く、主振動より１００ＫＨｚ以内に副振動を生じ
ない。The CI value of the vibrator of the present invention shown in FIG. 2 is 10
It is as low as Ω and no secondary vibration occurs within 100 KHz of the main vibration.
【００３５】図３は本発明の圧電振動子の第３の実施例
を示す斜視図である。FIG. 3 is a perspective view showing a third embodiment of the piezoelectric vibrator of the present invention.
【００３６】図３に示すように、振動子１０の支持部１
２と振動部分１３との境界部で振動子１０の両面に溝１
１を設ける。そしてこの溝１１は、振動子１０の上面と
下面とで位置が異なるように設ける。As shown in FIG. 3, the support portion 1 of the vibrator 10 is provided.
The groove 1 is formed on both sides of the vibrator 10 at the boundary between the vibration part 2 and the vibration part 13.
1 is set. The groove 11 is provided so that the upper surface and the lower surface of the vibrator 10 have different positions.
【００３７】振動子１０の外形寸法は、５ｍｍ×１ｍｍ
×０．１３ｍｍの小型のＡＴカット水晶振動子で、発振
周波数は約１２．８ＭＨｚである。The external dimensions of the vibrator 10 are 5 mm × 1 mm
It is a small AT-cut crystal unit with a size of 0.13 mm and an oscillation frequency of about 12.8 MHz.
【００３８】振動子１０の一方の面の長手方向の両端よ
り０．３ｍｍの位置に、幅が０．３ｍｍ、深さが０．０
６ｍｍの溝１１を振動子１０の一方の面に２本設け、さ
らに振動子１０の他方の面の長手方向の両端より０．８
ｍｍの位置に幅０．３ｍｍ、深さ０．０６ｍｍの溝１１
を２本設ける。この４本の溝１１の断面形状は、いずれ
も楕円である。A width of 0.3 mm and a depth of 0.0 are provided at positions 0.3 mm from both ends in the longitudinal direction of one surface of the vibrator 10.
Two 6 mm grooves 11 are provided on one surface of the vibrator 10, and 0.8 mm from both ends in the longitudinal direction of the other surface of the vibrator 10.
Groove 11 having a width of 0.3 mm and a depth of 0.06 mm at a position of mm
Two are provided. The cross-sectional shape of each of the four grooves 11 is an ellipse.
【００３９】図３に示す本発明の振動子１０のＣＩ値は
１０Ωから１５Ωと非常に低く、主振動より１００ＫＨ
ｚ以内に副振動を生じない。The CI value of the vibrator 10 of the present invention shown in FIG. 3 is very low, from 10Ω to 15Ω, which is 100 KH higher than the main vibration.
No secondary vibration occurs within z.
【００４０】図４（ａ）、（ｂ）はそれぞれ本発明の圧
電振動子の第４と第５の実施例を示す斜視図である。FIGS. 4A and 4B are perspective views showing the fourth and fifth embodiments of the piezoelectric vibrator of the present invention, respectively.
【００４１】図４（ａ）に示すように、振動子１０は支
持部１２と振動部分１３との境界部に断面形状が三角形
の形状を有する溝１１を２本設ける。As shown in FIG. 4A, the vibrator 10 is provided with two grooves 11 having a triangular cross section at the boundary between the supporting portion 12 and the vibrating portion 13.
【００４２】図４（ｂ）に示すように、振動子１０は支
持部１２と振動部分１３との境界部に断面形状が矩形状
の溝１１を２本設ける。As shown in FIG. 4B, the vibrator 10 is provided with two grooves 11 having a rectangular cross section at the boundary between the supporting portion 12 and the vibrating portion 13.
【００４３】図４（ａ）、（ｂ）に示す振動子１０の外
形寸法は５ｍｍ×１ｍｍ×０．１３ｍｍの小型のＡＴカ
ット水晶振動子で、発振周波数は約１２．８ＭＨｚであ
る。The oscillator 10 shown in FIGS. 4 (a) and 4 (b) is a small AT-cut crystal oscillator having outer dimensions of 5 mm × 1 mm × 0.13 mm and an oscillation frequency of about 12.8 MHz.
【００４４】そして振動子１０の長手方向の両端より
０．６ｍｍの位置に、幅０．３ｍｍ、深さ０．０６ｍｍ
の溝１１を一方の面に２本設ける。A width of 0.3 mm and a depth of 0.06 mm are provided at positions 0.6 mm from both ends of the vibrator 10 in the longitudinal direction.
Two grooves 11 are provided on one surface.
【００４５】振動子１０の溝１１の断面形状は、図４
（ａ）では三角形、図４（ｂ）では矩形である。The cross-sectional shape of the groove 11 of the vibrator 10 is shown in FIG.
It is a triangle in (a) and a rectangle in FIG. 4 (b).
【００４６】図４に示す本発明の振動子１０のＣＩ値は
１０Ωから１５Ωと非常に低く、主振動より１００ＫＨ
ｚ以内に副振動を生じない。The CI value of the vibrator 10 of the present invention shown in FIG. 4 is very low, from 10Ω to 15Ω, which is 100 KH higher than the main vibration.
No secondary vibration occurs within z.
【００４７】図５は本発明の圧電振動子の第６の実施例
を示す斜視図である。FIG. 5 is a perspective view showing a sixth embodiment of the piezoelectric vibrator of the present invention.
【００４８】図５に示すように、振動子１０の一方の面
の短辺方向と長辺方向とにそれぞれ２本ずつ溝１１を設
ける。As shown in FIG. 5, two grooves 11 are provided in each of the short side direction and the long side direction of one surface of the vibrator 10.
【００４９】振動子１０の外形寸法は５ｍｍ×１ｍｍ×
０．１３ｍｍの小型のＡＴカット水晶振動子で、発振周
波数は約１２．８ＭＨｚである。The external dimensions of the vibrator 10 are 5 mm × 1 mm ×
It is a small AT-cut crystal unit with a size of 0.13 mm, and the oscillation frequency is about 12.8 MHz.
【００５０】そして振動子１０の長辺方向の両端より
０．６ｍｍの位置に、幅０．３ｍｍ、深さ０．０６ｍｍ
の溝１１を一方の面に２本設ける。さらにまた、振動子
１０の短辺方向の両端より０．３ｍｍの位置に、幅０．
３ｍｍ、深さ０．０６ｍｍの溝１１を一方の面に２本設
ける。そして、振動部分１３の周囲を囲むように形成す
る溝１１の深さは０．１２ｍｍであり、溝１１の断面形
状は楕円である。A width of 0.3 mm and a depth of 0.06 mm are arranged at a position of 0.6 mm from both ends of the vibrator 10 in the long side direction.
Two grooves 11 are provided on one surface. Furthermore, at a position 0.3 mm from both ends of the vibrator 10 in the short side direction, a width of 0.
Two grooves 11 having a depth of 3 mm and a depth of 0.06 mm are provided on one surface. The depth of the groove 11 formed so as to surround the vibrating portion 13 is 0.12 mm, and the cross-sectional shape of the groove 11 is elliptical.
【００５１】図４に示す振動子１０は、振動子の振動部
分１３の周囲は溝１１で囲まれているため、ＣＩ値は１
０Ωと非常に低く、主振動より１２０ＫＨｚ以内に副振
動を生じない。In the vibrator 10 shown in FIG. 4, the vibrating portion 13 of the vibrator is surrounded by the groove 11, so that the CI value is 1.
It is very low at 0Ω and does not generate secondary vibration within 120 KHz of the main vibration.
【００５２】図６（ａ）、（ｂ）はいずれも本発明の圧
電振動子の第７と第８の実施例を示す斜視図である。6A and 6B are perspective views showing the seventh and eighth embodiments of the piezoelectric vibrator of the present invention.
【００５３】図６（ａ）に示すように、振動子１０は片
持ちの支持構造の振動子を示し、振動子１０の一方の支
持部１２と振動部分１３との境界部に非連続の溝６１を
設ける。As shown in FIG. 6 (a), the vibrator 10 is a cantilever type support structure, and a discontinuous groove is formed at the boundary between one supporting portion 12 and the vibrating portion 13 of the vibrator 10. 61 is provided.
【００５４】図６（ｂ）に示す振動子１０は両端支持の
振動子を示し、振動子１０の支持部１２に、振動子１０
の長辺方向と平行に非連続の溝６１を設ける。The vibrator 10 shown in FIG. 6 (b) is a vibrator having both ends supported, and the support portion 12 of the vibrator 10 has a vibrator 10
The discontinuous groove 61 is provided in parallel with the long side direction.
【００５５】図６（ａ）に示す振動子１０の外形寸法は
５ｍｍ×１ｍｍ×０．０８４ｍｍの小型のＡＴカット水
晶振動子で、発振周波数は約２０ＭＨｚである。The vibrator 10 shown in FIG. 6 (a) is a small AT-cut crystal vibrator having an outer size of 5 mm × 1 mm × 0.084 mm and an oscillation frequency of about 20 MHz.
【００５６】そしてこの振動子１０は片持ちの支持構造
を有し、振動子１０の支持部１２の一方の端から１．０
ｍｍの位置に、長さが０．４ｍｍ、幅が０．９ｍｍ、深
さが０．０４ｍｍの溝６１を、振動子１０の一方の面に
２本設ける。The vibrator 10 has a cantilevered support structure, and is 1.0
Two grooves 61 having a length of 0.4 mm, a width of 0.9 mm, and a depth of 0.04 mm are provided at a position of mm on one surface of the vibrator 10.
【００５７】この２本の溝６１に導電性接着剤を注入す
ることによって、接着箇所は溝６１のみに限られるた
め、振動子１０を容器に支持する際、導電性接着剤が振
動部分１３に広がることはない。By injecting the conductive adhesive into the two grooves 61, the bonding position is limited to only the groove 61. Therefore, when the vibrator 10 is supported on the container, the conductive adhesive is applied to the vibrating portion 13. It does not spread.
【００５８】またさらに、導電性接着剤が溝６１から広
がらないため、振動子１０を支持する際に振動子１０の
両面に形成した電極引き出し線（図示せず）が導電性接
着剤によって短絡することはない。Furthermore, since the conductive adhesive does not spread from the groove 61, the electrode lead lines (not shown) formed on both sides of the vibrator 10 are short-circuited by the conductive adhesive when supporting the vibrator 10. There is no such thing.
【００５９】図６（ｂ）に示す振動子１０の外形寸法は
５ｍｍ×１ｍｍ×０．０８４ｍｍの小型のＡＴカット水
晶振動子で、発振周波数は約２０ＭＨｚである。The external dimensions of the vibrator 10 shown in FIG. 6 (b) are small AT-cut crystal vibrators of 5 mm × 1 mm × 0.084 mm, and the oscillation frequency is about 20 MHz.
【００６０】そして振動子１０の長辺方向の両端部の支
持部１２に、長さ１ｍｍ、幅０．５ｍｍ、深さ０．０４
ｍｍの溝６１を有し、振動子１０の支持構造は両端支持
である。Then, on the supporting portions 12 at both ends in the long side direction of the vibrator 10, the length is 1 mm, the width is 0.5 mm, and the depth is 0.04.
It has a groove 61 of mm and the support structure of the vibrator 10 is both-ends support.
【００６１】この２本の溝部６１に導電性接着剤を注入
することにより、接着箇所は溝６１のみに限られるた
め、振動子１０を容器に支持する際、導電性接着剤が振
動部分１３に広がることはない。By injecting the conductive adhesive into the two groove portions 61, the bonding position is limited to only the groove 61. Therefore, when the vibrator 10 is supported on the container, the conductive adhesive is applied to the vibrating portion 13. It does not spread.
【００６２】図７は本発明の圧電振動子における第９の
実施例を示す斜視図である。FIG. 7 is a perspective view showing a ninth embodiment of the piezoelectric vibrator of the present invention.
【００６３】図７に示す振動子１０は、振動子１０の短
辺方向で連続する２本の溝１１と、短辺方向で非連続の
溝６１とを設ける。The vibrator 10 shown in FIG. 7 is provided with two grooves 11 continuous in the short side direction of the vibrator 10 and a groove 61 which is discontinuous in the short side direction.
【００６４】図７に示す振動子１０の外形寸法は５ｍｍ
×１ｍｍ×０．０８４ｍｍの小型のＡＴカット水晶振動
子で、発振周波数は約２０ＭＨｚである。The external dimensions of the vibrator 10 shown in FIG. 7 are 5 mm.
It is a small AT-cut crystal unit having a size of × 1 mm × 0.084 mm and an oscillation frequency of about 20 MHz.
【００６５】そして振動子１０の短辺の一端より０．６
ｍｍと、３．６ｍｍとの位置に、それぞれ幅０．３ｍ
ｍ、深さ０．０６ｍｍの溝１１を有し、さらに振動子１
０の短辺より４．４ｍｍの位置に幅０．３ｍｍ、深さ
０．０６ｍｍ、長さ０．４ｍｍの２本の溝６１を有す。Then, from one end of the short side of the vibrator 10, 0.6
width 0.3m at the positions of mm and 3.6mm
m, a groove 11 having a depth of 0.06 mm, and further the vibrator 1
Two grooves 61 having a width of 0.3 mm, a depth of 0.06 mm, and a length of 0.4 mm are provided at a position 4.4 mm from the short side of 0.
【００６６】振動子１０の短辺より０．６ｍｍ、３．６
ｍｍの位置にある溝１１は、エネルギー閉じ込めを行う
ための溝１１である。0.6 mm from the short side of the vibrator 10, 3.6
The groove 11 at the position of mm is a groove 11 for confining energy.
【００６７】また、振動子１０の短辺より４．４ｍｍの
位置にある支持部１２に設けた２本の溝６１は、導電性
接着剤が漏洩しないようにするために設けた溝６１であ
る。Further, the two grooves 61 provided in the support portion 12 at a position 4.4 mm from the short side of the vibrator 10 are grooves 61 provided to prevent the conductive adhesive from leaking. .
【００６８】図７に示すような構造を有する振動子１０
はＣＩ値が１０Ωと低く、副振動も主振動より１００Ｋ
Ｈｚ以内に生じず、基本特性は優れている。そのうえ、
剛支持をする際に導電性接着剤が振動部分１３に流れ出
すこともなく、また、電極引き出し線（図示せず）が短
絡することもない。A vibrator 10 having a structure as shown in FIG.
Has a low CI value of 10Ω and the secondary vibration is 100K higher than the main vibration.
It does not occur within Hz and the basic characteristics are excellent. Besides,
The conductive adhesive does not flow out to the vibrating portion 13 during rigid support, and the electrode lead wire (not shown) does not short-circuit.
【００６９】図８は以上説明した本発明の圧電振動子の
製造方法を示す図面である。なお図８は図７に示す振動
子の製造方法を工程順に示す平面図および断面図であ
る。図８（ａ）におけるＡ−Ａ線における断面を、図８
（ｂ）、（ｃ）、（ｄ）の断面図に示す。FIG. 8 is a drawing showing the method of manufacturing the piezoelectric vibrator of the present invention described above. 8A and 8B are a plan view and a cross-sectional view showing the method of manufacturing the vibrator shown in FIG. 7 in process order. The cross section taken along the line AA in FIG.
Shown in the sectional views of (b), (c), and (d).
【００７０】まず図８（ａ）に示すように、５ｍｍ×１
ｍｍ×０．０８４ｍｍの外形寸法を有する複数の水晶片
８１を縦横に整列させ、その水晶片８１上に厚さ１ｍｍ
のステンレス材料からなるメタルマスク８２を設置す
る。なおメタルマスク８２に設けるスリット８３の開口
幅は０．３ｍｍである。このときの図８（ａ）のＡ−Ａ
線における断面状態を図８（ｂ）に示す。First, as shown in FIG. 8A, 5 mm × 1
A plurality of crystal pieces 81 having an outer dimension of mm × 0.084 mm are aligned vertically and horizontally, and the crystal piece 81 has a thickness of 1 mm.
The metal mask 82 made of the stainless steel material is installed. The opening width of the slit 83 provided in the metal mask 82 is 0.3 mm. A-A of FIG. 8A at this time
The cross-sectional state along the line is shown in FIG.
【００７１】つぎに図８（ｃ）に示すように、メタルマ
スク８２の上から噴射加工装置を用いて、噴射ノズル８
４から粒径数μｍの砥粒を、メタルマスク８２を介して
水晶片８１に噴射する。Next, as shown in FIG. 8C, the spray nozzle 8 is sprayed from above the metal mask 82 using a spray processing apparatus.
Abrasive grains having a grain size of several μm are sprayed onto the crystal piece 81 through the metal mask 82.
【００７２】メタルマスク８２も噴射加工によって加工
され、メタルマスク８２の厚さが減少するが、水晶片８
１も噴射ノズル８４から噴射する砥粒によって同時に加
工されて、水晶片８１に溝８６を形成することができ
る。The metal mask 82 is also processed by the jet processing, and the thickness of the metal mask 82 is reduced.
No. 1 can also be processed at the same time by the abrasive grains sprayed from the spray nozzle 84 to form the groove 86 in the crystal piece 81.
【００７３】つぎに図８（ｄ）に示すように、所定の深
さの溝８６を形成した後にメタルマスク８２を除去する
と、振動子８５を得ることができる。Next, as shown in FIG. 8D, the vibrator 85 can be obtained by removing the metal mask 82 after forming the groove 86 having a predetermined depth.
【００７４】加工終了後の振動子８５の溝８６の深さ
は、０．０３ｍｍである。The depth of the groove 86 of the vibrator 85 after processing is 0.03 mm.
【００７５】図８を用いて説明した製造方法を用いれ
ば、従来のパイピング法と比較して製造に要する時間を
大幅に短縮することができる。When the manufacturing method described with reference to FIG. 8 is used, the time required for manufacturing can be greatly reduced as compared with the conventional piping method.
【００７６】なお噴射加工においては、噴射ノズル８４
の移動速度や、噴射ノズル８４の形状を調整することに
よて、溝８６の断面形状が楕円や三角形や矩形状の溝を
形成することができる。In the jet processing, the jet nozzle 84
It is possible to form a groove whose cross-sectional shape is elliptical, triangular, or rectangular by adjusting the moving speed of the nozzle and the shape of the injection nozzle 84.
【００７７】[0077]
【発明の効果】上記の説明のように本発明の圧電振動子
においては、振動部分と支持部の境界部に溝を設けてい
る。As described above, in the piezoelectric vibrator of the present invention, the groove is provided at the boundary between the vibrating portion and the supporting portion.
【００７８】このことにより、振動エネルギーを閉じ込
め、ＣＩ値を低下させて、副振動を抑制することが可能
である。As a result, the vibration energy can be trapped, the CI value can be lowered, and the secondary vibration can be suppressed.
【００７９】また、振動子の支持部に溝を設けることに
より、導電性接着剤が振動部分に流れ出すことを防ぐこ
とが可能である。よってＣＩ値の上昇といった基本特性
の劣化を防ぐことが可能であり、また、主振動の近傍に
副振動が生じるという現象も防ぐことが可能である。Further, by providing a groove in the support portion of the vibrator, it is possible to prevent the conductive adhesive from flowing out to the vibrating portion. Therefore, it is possible to prevent the deterioration of the basic characteristics such as the increase of the CI value, and it is also possible to prevent the phenomenon that the sub-vibration occurs near the main vibration.
【００８０】さらに、振動子の支持部に溝を設けること
により、振動子を容器に支持するとき、導電性接着剤が
流れ出して、電極引き出し線が短絡するという問題も防
ぐことができる。Furthermore, by providing a groove in the supporting portion of the vibrator, when the vibrator is supported in the container, the problem that the conductive adhesive flows out and the electrode lead wire is short-circuited can be prevented.
【００８１】そして本発明の製造方法を用いれば、従来
のベベル加工のためのパイピング法と比較して、ベベル
加工に要する時間を大幅に短縮することができる。When the manufacturing method of the present invention is used, the time required for beveling can be significantly shortened as compared with the conventional piping method for beveling.
【図１】本発明の第１の実施例における振動子の構造を
示す斜視図である。FIG. 1 is a perspective view showing a structure of a vibrator according to a first embodiment of the present invention.
【図２】本発明の第２の実施例における振動子の構造を
示す斜視図である。FIG. 2 is a perspective view showing a structure of a vibrator according to a second embodiment of the present invention.
【図３】本発明の第３の実施例における振動子の構造を
示す斜視図である。FIG. 3 is a perspective view showing a structure of a vibrator according to a third embodiment of the present invention.
【図４】本発明の第４と第５の実施例における振動子の
構造を示す斜視図である。FIG. 4 is a perspective view showing a structure of a vibrator according to fourth and fifth embodiments of the present invention.
【図５】本発明の第６の実施例における振動子の構造を
示す斜視図である。FIG. 5 is a perspective view showing a structure of a vibrator according to a sixth embodiment of the present invention.
【図６】本発明の第７と第８の実施例における振動子の
構造を示す斜視図である。FIG. 6 is a perspective view showing a structure of a vibrator in seventh and eighth embodiments of the present invention.
【図７】本発明の第９の実施例における振動子の構造を
示す斜視図である。FIG. 7 is a perspective view showing the structure of a vibrator according to a ninth embodiment of the present invention.
【図８】本発明の実施例における振動子の製造方法を工
程順に示す平面図および断面図である。FIG. 8A is a plan view and FIG. 8B is a cross-sectional view showing a method of manufacturing a vibrator in a process order according to an embodiment of the present invention.
【図９】従来の振動子の構造を示す斜視図である。FIG. 9 is a perspective view showing a structure of a conventional vibrator.
【図１０】パイピング法によるベベル加工方法を示す断
面図である。FIG. 10 is a cross-sectional view showing a bevel processing method by a piping method.
【図１１】パイピング法を用いて得た振動子の構造を示
す斜視図である。FIG. 11 is a perspective view showing a structure of a vibrator obtained by using a piping method.
【図１２】振動子の支持構造を示す平面図である。FIG. 12 is a plan view showing a support structure for a vibrator.
１０ 振動子 １１ 溝 １２ 支持部 １３ 振動部分 ６１ 溝 ８１ 水晶片 ８２ メタルマスク ８３ スリット ８４ 噴射ノズル 10 Vibrator 11 Groove 12 Supporting part 13 Vibrating part 61 Groove 81 Crystal piece 82 Metal mask 83 Slit 84 Injection nozzle
Claims (4)
と支持部の境界部に溝を有することを特徴とする圧電振
動子。1. A piezoelectric vibrator, wherein a groove is provided at a boundary between a vibrating portion on at least one surface of the vibrator and a supporting portion.
も一方の支持部に溝を有することを特徴とする圧電振動
子。2. A piezoelectric vibrator having a groove on at least one support portion of at least one surface of the vibrator.
と支持部の境界部に溝を有し、かつ支持部に溝を有する
ことを特徴とする圧電振動子。3. A piezoelectric vibrator, wherein a groove is provided at a boundary between a vibrating portion of at least one surface of the vibrator and a supporting portion, and the supporting portion has a groove.
を複数の水晶片上に設置し、メタルマスクを介して水晶
片に対して噴射加工を行い、スリットの開口部と接する
水晶片に溝を形成することを特徴とする圧電振動子の製
造方法。4. A metal mask having a slit opening is provided on a plurality of crystal pieces, and the crystal piece is jetted through the metal mask to form a groove on the crystal piece in contact with the slit opening. A method of manufacturing a piezoelectric vibrator, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5097299A JPH06291590A (en) | 1993-03-31 | 1993-03-31 | Piezoelectric vibrator and manufacture of the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5097299A JPH06291590A (en) | 1993-03-31 | 1993-03-31 | Piezoelectric vibrator and manufacture of the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06291590A true JPH06291590A (en) | 1994-10-18 |
Family
ID=14188622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5097299A Pending JPH06291590A (en) | 1993-03-31 | 1993-03-31 | Piezoelectric vibrator and manufacture of the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06291590A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000052821A1 (en) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| US6408496B1 (en) * | 1997-07-09 | 2002-06-25 | Ronald S. Maynard | Method of manufacturing a vibrational transducer |
| JP2002314162A (en) * | 2001-04-12 | 2002-10-25 | Toyo Commun Equip Co Ltd | Crystal substrate and its manufacturing method |
| JP2004260718A (en) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | Tuning fork type vibration pieces, manufacturing method of tuning fork type vibration pieces, and piezoelectric device |
| JP2010035176A (en) * | 2009-08-21 | 2010-02-12 | Seiko Epson Corp | Piezoelectric element piece, and method of manufacturing piezoelectric vibrating piece |
| JP2011035546A (en) * | 2009-07-30 | 2011-02-17 | Kyocera Kinseki Corp | Piezoelectric vibrating element |
| JP2011151667A (en) * | 2010-01-22 | 2011-08-04 | Murata Mfg Co Ltd | Piezoelectric resonator |
| WO2014104110A1 (en) * | 2012-12-27 | 2014-07-03 | 京セラ株式会社 | Piezoelectric component |
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1993
- 1993-03-31 JP JP5097299A patent/JPH06291590A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6408496B1 (en) * | 1997-07-09 | 2002-06-25 | Ronald S. Maynard | Method of manufacturing a vibrational transducer |
| WO2000052821A1 (en) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| US6518688B1 (en) | 1999-03-01 | 2003-02-11 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibration device |
| JP2002314162A (en) * | 2001-04-12 | 2002-10-25 | Toyo Commun Equip Co Ltd | Crystal substrate and its manufacturing method |
| JP2004260718A (en) * | 2003-02-27 | 2004-09-16 | Seiko Epson Corp | Tuning fork type vibration pieces, manufacturing method of tuning fork type vibration pieces, and piezoelectric device |
| JP2011035546A (en) * | 2009-07-30 | 2011-02-17 | Kyocera Kinseki Corp | Piezoelectric vibrating element |
| JP2010035176A (en) * | 2009-08-21 | 2010-02-12 | Seiko Epson Corp | Piezoelectric element piece, and method of manufacturing piezoelectric vibrating piece |
| JP2011151667A (en) * | 2010-01-22 | 2011-08-04 | Murata Mfg Co Ltd | Piezoelectric resonator |
| WO2014104110A1 (en) * | 2012-12-27 | 2014-07-03 | 京セラ株式会社 | Piezoelectric component |
| JP5941162B2 (en) * | 2012-12-27 | 2016-06-29 | 京セラ株式会社 | Piezoelectric parts |
| EP2940864A4 (en) * | 2012-12-27 | 2016-07-27 | Kyocera Corp | Piezoelectric component |
| JPWO2014104110A1 (en) * | 2012-12-27 | 2017-01-12 | 京セラ株式会社 | Piezoelectric parts |
| US9837978B2 (en) | 2012-12-27 | 2017-12-05 | Kyocera Corporation | Piezoelectric component |
| WO2016111037A1 (en) * | 2015-01-09 | 2016-07-14 | 株式会社村田製作所 | Crystal oscillator and crystal oscillation device |
| JP6179838B2 (en) * | 2015-01-09 | 2017-08-16 | 株式会社村田製作所 | Quartz crystal resonator and crystal oscillation device |
| JPWO2016111037A1 (en) * | 2015-01-09 | 2017-08-17 | 株式会社村田製作所 | Quartz crystal resonator and crystal oscillation device |
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