DE69926971D1 - Gasversorgungseinrichtung mit druckabhängiger durchflussreglungsvorrichtung - Google Patents

Gasversorgungseinrichtung mit druckabhängiger durchflussreglungsvorrichtung

Info

Publication number
DE69926971D1
DE69926971D1 DE69926971T DE69926971T DE69926971D1 DE 69926971 D1 DE69926971 D1 DE 69926971D1 DE 69926971 T DE69926971 T DE 69926971T DE 69926971 T DE69926971 T DE 69926971T DE 69926971 D1 DE69926971 D1 DE 69926971D1
Authority
DE
Germany
Prior art keywords
pressure
gas supply
dependent flow
supply device
regulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69926971T
Other languages
English (en)
Other versions
DE69926971T2 (de
Inventor
Tadahiro Ohmi
Satoshi Kagatsume
Nobukazu Ikeda
Kouji Nishino
Kazuhiro Yoshikawa
Eiji Ideta
Ryousuke Dohi
Tomio Uno
Michio Yamaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69926971D1 publication Critical patent/DE69926971D1/de
Publication of DE69926971T2 publication Critical patent/DE69926971T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Control Of Fluid Pressure (AREA)
DE69926971T 1998-05-29 1999-05-27 Gasversorgungseinrichtung mit druckabhängiger durchflussreglungsvorrichtung Expired - Fee Related DE69926971T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP15004998A JP3522535B2 (ja) 1998-05-29 1998-05-29 圧力式流量制御装置を備えたガス供給設備
JP15004998 1998-05-29
PCT/JP1999/002836 WO1999063412A1 (fr) 1998-05-29 1999-05-27 Equipement d'alimentation de gaz a dispositif regulateur de debit du type a pression

Publications (2)

Publication Number Publication Date
DE69926971D1 true DE69926971D1 (de) 2005-10-06
DE69926971T2 DE69926971T2 (de) 2006-06-08

Family

ID=15488394

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69926971T Expired - Fee Related DE69926971T2 (de) 1998-05-29 1999-05-27 Gasversorgungseinrichtung mit druckabhängiger durchflussreglungsvorrichtung

Country Status (8)

Country Link
US (1) US6289923B1 (de)
EP (1) EP1001326B1 (de)
JP (1) JP3522535B2 (de)
KR (1) KR100327879B1 (de)
CN (1) CN1227572C (de)
DE (1) DE69926971T2 (de)
TW (1) TW381205B (de)
WO (1) WO1999063412A1 (de)

Families Citing this family (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6581623B1 (en) * 1999-07-16 2003-06-24 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6970245B2 (en) 2000-08-02 2005-11-29 Honeywell International Inc. Optical alignment detection system
US6597438B1 (en) 2000-08-02 2003-07-22 Honeywell International Inc. Portable flow cytometry
US8071051B2 (en) 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US7130046B2 (en) 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US7016022B2 (en) 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US7262838B2 (en) 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US7630063B2 (en) 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7283223B2 (en) 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US7471394B2 (en) 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US7242474B2 (en) 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US7215425B2 (en) 2000-08-02 2007-05-08 Honeywell International Inc. Optical alignment for flow cytometry
US8329118B2 (en) 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US7978329B2 (en) 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
EP1300619B1 (de) * 2000-06-05 2006-08-02 Fujikin Incorporated Ventil mit integrierten öffnung
US6382228B1 (en) * 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
JP2002143751A (ja) * 2000-10-17 2002-05-21 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 処理液分配装置及び方法
AU2002307547A1 (en) * 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
US9943847B2 (en) 2002-04-17 2018-04-17 Cytonome/St, Llc Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
JP3856730B2 (ja) * 2002-06-03 2006-12-13 東京エレクトロン株式会社 流量制御装置を備えたガス供給設備からのチャンバーへのガス分流供給方法。
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
WO2004018909A2 (en) * 2002-08-20 2004-03-04 Applied Materials, Inc. Electronically actuated valve
JP4085012B2 (ja) * 2003-02-13 2008-04-30 忠弘 大見 真空排気系用バルブ
JP3754678B2 (ja) 2003-04-16 2006-03-15 株式会社フジキン 耐食金属製熱式質量流量センサとこれを用いた流体供給機器
DE20314772U1 (de) * 2003-09-22 2003-12-04 Gce-Druva Gmbh & Co. Kg Gasentnahmeeinrichtung insbesondere für hochreine Gase
JP2005241279A (ja) 2004-02-24 2005-09-08 Fujikin Inc 耐食金属製流体用センサ及びこれを用いた流体供給機器
JP2005307233A (ja) * 2004-04-19 2005-11-04 Tokyo Electron Ltd 成膜装置及び成膜方法及びプロセスガスの供給方法
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7612871B2 (en) 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
US9260693B2 (en) 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
CA2588753C (en) 2004-12-03 2014-02-18 Cytonome, Inc. Unitary cartridge for particle processing
US7688427B2 (en) 2005-04-29 2010-03-30 Honeywell International Inc. Particle parameter determination system
JP4995197B2 (ja) 2005-07-01 2012-08-08 ハネウェル・インターナショナル・インコーポレーテッド ３ｄ流体力学的集束を有する成形カートリッジ
WO2007005973A2 (en) 2005-07-01 2007-01-11 Honeywell International, Inc. A microfluidic card for rbc analysis
WO2007005974A2 (en) 2005-07-01 2007-01-11 Honeywell International, Inc. A flow metered analyzer
US7843563B2 (en) 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
JP4911933B2 (ja) 2005-08-31 2012-04-04 サーパス工業株式会社 圧力計および圧力計組立体
EP3121601A1 (de) 2005-12-22 2017-01-25 Honeywell International Inc. Tragbares probenanalysesystem
EP1963819A2 (de) 2005-12-22 2008-09-03 Honeywell International, Inc. Tragbares probenanalysesystem
EP1963817A2 (de) 2005-12-22 2008-09-03 Honeywell International Inc. Kartusche für ein tragbares probenanalysegerät
JP5431732B2 (ja) 2005-12-29 2014-03-05 ハネウェル・インターナショナル・インコーポレーテッド マイクロ流体フォーマットにおけるアッセイ実装
US7603186B2 (en) * 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) * 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
JP5177864B2 (ja) * 2008-06-04 2013-04-10 株式会社フジキン 熱式質量流量調整器用自動圧力調整器
US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
CN102640070B (zh) * 2009-12-01 2015-04-22 株式会社富士金 压力式流量控制装置
JP5652960B2 (ja) * 2011-08-01 2015-01-14 株式会社フジキン 原料気化供給装置
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
JP5754853B2 (ja) * 2012-01-30 2015-07-29 株式会社フジキン 半導体製造装置のガス分流供給装置
JP5665793B2 (ja) 2012-04-26 2015-02-04 株式会社フジキン 可変オリフィス型圧力制御式流量制御器
JP5665794B2 (ja) * 2012-04-27 2015-02-04 株式会社フジキン 半導体製造装置のガス分流供給装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
WO2015045987A1 (ja) * 2013-09-30 2015-04-02 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
KR101887360B1 (ko) * 2013-10-31 2018-08-10 가부시키가이샤 후지킨 압력식 유량 제어 장치
TWI646278B (zh) * 2013-12-05 2019-01-01 Ｃｋｄ股份有限公司 Piping joint, fluid supply control device, and piping connection structure
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6346551B2 (ja) * 2013-12-05 2018-06-20 Ckd株式会社 流路ブロック及び流体供給制御装置
JP6416529B2 (ja) 2014-07-23 2018-10-31 株式会社フジキン 圧力式流量制御装置
CN104216424B (zh) * 2014-08-29 2019-04-09 湖南三德科技股份有限公司 用于便携设备的精密流量控制器
CN108780332B (zh) * 2016-02-29 2021-10-01 株式会社富士金 流量控制装置
US11137779B2 (en) * 2016-04-28 2021-10-05 Fujikin Incorporated Fluid control device, method for controlling fluid control device, and fluid control system
CN109477586B (zh) * 2016-07-29 2020-01-14 株式会社富士金 流孔内置阀以及压力式流量控制装置
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN107422754B (zh) * 2017-09-01 2023-11-14 中国人民解放军军事科学院军事医学研究院 一种微量气体流速控制装置及控制方法
JP7122102B2 (ja) * 2017-11-08 2022-08-19 東京エレクトロン株式会社 ガス供給システム及びガス供給方法
WO2019107123A1 (ja) * 2017-11-30 2019-06-06 株式会社フジキン バルブ装置、このバルブ装置を用いた流体制御装置および半導体製造装置
JP6606221B2 (ja) * 2018-04-27 2019-11-13 株式会社フジキン 圧力式流量制御装置
US11215374B2 (en) * 2018-05-31 2022-01-04 Fujikin Incorporated Fluid sealing device and pressure detector calibration device
WO2020218138A1 (ja) * 2019-04-25 2020-10-29 株式会社フジキン 流量制御装置
CN116490710A (zh) 2020-11-04 2023-07-25 斯瓦戈洛克公司 具有集成式孔口限制部的阀
US11796077B2 (en) 2020-11-06 2023-10-24 Swagelok Company Valve cavity cap arrangements
US12000723B2 (en) * 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1398799A (fr) * 1964-03-02 1965-05-14 Raffinage Cie Francaise Procédé et dispositif pour le réglage de la chauffe au gaz
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JP2517744Y2 (ja) * 1987-09-28 1996-11-20 株式会社ベン 定流量弁装置
US5025952A (en) * 1987-09-30 1991-06-25 Spectra-Physics, Inc. Gas resupply valve with microscopic aperture and with sealing member supported by valve body
JP2731080B2 (ja) * 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
JP3017398B2 (ja) * 1994-06-29 2000-03-06 株式会社本山製作所 ダイヤフラム弁構造及びガス配管系
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
JP3580645B2 (ja) * 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
JP3387777B2 (ja) * 1997-06-11 2003-03-17 株式会社フジキン 混合ガス供給装置
JPH11119835A (ja) * 1997-10-13 1999-04-30 Horiba Ltd マスフローコントローラおよび集積化流量制御装置
JP3932389B2 (ja) * 1998-01-19 2007-06-20 Ｓｍｃ株式会社 マスフローコントローラの自己診断方法

Also Published As

Publication number Publication date
EP1001326B1 (de) 2005-08-31
JPH11345027A (ja) 1999-12-14
WO1999063412A1 (fr) 1999-12-09
CN1272186A (zh) 2000-11-01
DE69926971T2 (de) 2006-06-08
EP1001326A1 (de) 2000-05-17
EP1001326A4 (de) 2004-11-17
CN1227572C (zh) 2005-11-16
KR20010022203A (ko) 2001-03-15
JP3522535B2 (ja) 2004-04-26
US6289923B1 (en) 2001-09-18
TW381205B (en) 2000-02-01
KR100327879B1 (ko) 2002-03-09

Similar Documents

Publication Publication Date Title
DE69926971D1 (de) Gasversorgungseinrichtung mit druckabhängiger durchflussreglungsvorrichtung
DE69837088D1 (de) Luftzufuhrvorrichtung
DE69729888D1 (de) Brennstoffzufuhrvorrichtung
DE69808508T2 (de) Kraftstoff-abgabevorrichtung
DE69911088D1 (de) Kraftstoffzufuhreinrichtung
DE69812876D1 (de) Brennstoffzufuhrvorrichtung
DE69601413D1 (de) Brennstoffzuführvorrichtung
DE69532097D1 (de) Erweiterungsvorrichtung mit Halte/Fortsetzungsfunktion
DE19581421T1 (de) Kraftstoffzufuhrgerät
DE69814296D1 (de) Ventilvorrichtung
DE69933173D1 (de) Kraftstoffzufuhreinrichtung
DE69707097D1 (de) Entwicklungsflüssigkeitsversorgungsvorrichtung
DE59807965D1 (de) Kraftstoffzuleitungseinrichtung
DE69926450D1 (de) Kraftstoffzufuhreinrichtung
DE69939665D1 (de) Zuführventil
DE59811669D1 (de) Kraftstoffzuleitungseinrichtung
DE60019882D1 (de) Brennstoffversorgungsvorrichtung
DE69826577D1 (de) Ozonzufuhrvorrichtung
DE59903256D1 (de) Gassackanordnung mit gesteuertem aufblasverhalten
DE29802278U1 (de) Arbeitsplatz-Versorgungsvorrichtung
FI102108B (fi) Tuloilmalaite
KR970062311U (ko) 약품 공급장치
DE69937151D1 (de) Fluidführendes versorgungsrohr
DE19681465T1 (de) Gasversorgung
DE69722561D1 (de) Bauteilzufuhreinrichtung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee