DE69810681T2 - Verfahren und Vorrichtung zum Prüfen von Leiterplatten - Google Patents

Verfahren und Vorrichtung zum Prüfen von Leiterplatten

Info

Publication number
DE69810681T2
DE69810681T2 DE69810681T DE69810681T DE69810681T2 DE 69810681 T2 DE69810681 T2 DE 69810681T2 DE 69810681 T DE69810681 T DE 69810681T DE 69810681 T DE69810681 T DE 69810681T DE 69810681 T2 DE69810681 T2 DE 69810681T2
Authority
DE
Germany
Prior art keywords
printed circuit
circuit boards
testing printed
testing
boards
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69810681T
Other languages
English (en)
Other versions
DE69810681D1 (de
Inventor
Munehiro Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Read Corp
Original Assignee
Nidec Read Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Read Corp filed Critical Nidec Read Corp
Application granted granted Critical
Publication of DE69810681D1 publication Critical patent/DE69810681D1/de
Publication of DE69810681T2 publication Critical patent/DE69810681T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2805—Bare printed circuit boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/312—Contactless testing by capacitive methods
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
DE69810681T 1997-02-28 1998-02-27 Verfahren und Vorrichtung zum Prüfen von Leiterplatten Expired - Fee Related DE69810681T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04612797A JP3165056B2 (ja) 1997-02-28 1997-02-28 基板検査装置および基板検査方法

Publications (2)

Publication Number Publication Date
DE69810681D1 DE69810681D1 (de) 2003-02-20
DE69810681T2 true DE69810681T2 (de) 2003-08-14

Family

ID=12738329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69810681T Expired - Fee Related DE69810681T2 (de) 1997-02-28 1998-02-27 Verfahren und Vorrichtung zum Prüfen von Leiterplatten

Country Status (4)

Country Link
US (1) US5969530A (de)
EP (1) EP0862061B1 (de)
JP (1) JP3165056B2 (de)
DE (1) DE69810681T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6316949B1 (en) 1999-01-19 2001-11-13 Nidec-Read Corporation Apparatus and method for testing electric conductivity of circuit path ways on circuit board
JP2001194405A (ja) * 2000-01-07 2001-07-19 Oht Kk 基板検査用プローブおよび基板検査方法
US7049826B2 (en) * 2000-09-11 2006-05-23 Oht Inc. Inspection device and inspection method
JP2002156399A (ja) * 2000-11-17 2002-05-31 Oht Inc 回路基板の検査装置及び検査方法
JP2002156417A (ja) * 2000-11-17 2002-05-31 Oht Inc 回路基板の検査装置及び検査方法
WO2002086520A1 (fr) * 2001-04-19 2002-10-31 Oht Inc. Appareil d'inspection et procede d'inspection
US7250781B2 (en) * 2002-12-19 2007-07-31 Fuji Xerox Co., Ltd. Circuit board inspection device
KR100593647B1 (ko) * 2004-05-18 2006-06-28 삼성전자주식회사 프로브 센싱용 패드, 반도체 소자가 탑재된 기판 및 반도체 소자 검사 방법
KR100739629B1 (ko) * 2005-12-02 2007-07-16 삼성전자주식회사 프로브 센싱용 패드 및 이를 이용한 프로브 니들 접촉 위치검사 방법.
DE102005022884B4 (de) * 2005-05-18 2011-08-18 Siemens AG, 80333 Verfahren zur Inspektion einer Leiterbahnstruktur
US20080061812A1 (en) * 2006-09-13 2008-03-13 Sun Microsystems, Inc. Component-attach test vehicle
US7439751B2 (en) * 2006-09-27 2008-10-21 Taiwan Semiconductor Manufacturing Co, Ltd. Apparatus and method for testing conductive bumps
US7855567B2 (en) * 2008-04-01 2010-12-21 Test Research, Inc. Electronic device testing system and method
IT1402434B1 (it) 2010-06-10 2013-09-04 St Microelectronics Srl Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati
KR101149759B1 (ko) * 2011-03-14 2012-06-01 리노공업주식회사 반도체 디바이스의 검사장치
JP6221358B2 (ja) * 2013-06-04 2017-11-01 日本電産リード株式会社 基板検査方法、及び基板検査装置
TWI500945B (zh) * 2013-12-17 2015-09-21 Primax Electronics Ltd 電路板之測試系統
TWI531803B (zh) * 2013-12-17 2016-05-01 致伸科技股份有限公司 電路板之測試系統
JP6095735B2 (ja) * 2014-07-29 2017-03-15 ヤマハファインテック株式会社 プリント基板検査装置及び検査方法
TWI634339B (zh) * 2017-11-21 2018-09-01 興城科技股份有限公司 檢測薄膜電晶體基板之方法及裝置
US10641818B2 (en) * 2018-08-27 2020-05-05 Keysight Technologies, Inc. Shape conformable capacitive coupler

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5138266A (en) * 1989-10-20 1992-08-11 Digital Equipment Corporation Single-probe charge measurement testing method
JPH03154879A (ja) * 1989-11-10 1991-07-02 Nec Corp 基板検査装置
JPH04244976A (ja) * 1991-01-31 1992-09-01 Sony Chem Corp コネクタの導通検査方法
US5274336A (en) * 1992-01-14 1993-12-28 Hewlett-Packard Company Capacitively-coupled test probe
US5469064A (en) * 1992-01-14 1995-11-21 Hewlett-Packard Company Electrical assembly testing using robotic positioning of probes
US5696451A (en) * 1992-03-10 1997-12-09 Hewlett-Packard Co. Identification of pin-open faults by capacitive coupling
US5266901A (en) * 1992-05-29 1993-11-30 International Business Machines Corp. Apparatus and method for resistive detection and waveform analysis of interconenction networks
US5359291A (en) * 1993-04-01 1994-10-25 Alliedsignal Inc. Method and apparatus for detecting short circuits
IT1261074B (it) * 1993-07-05 1996-05-08 Luciano Bonaria Metodo e dispositivo di collaudo per schede elettroniche
US5426372A (en) * 1993-07-30 1995-06-20 Genrad, Inc. Probe for capacitive open-circuit tests
JPH07146323A (ja) * 1993-11-22 1995-06-06 Inter Tec:Kk 液晶表示器用ガラス基板の検査方法及び検査装置
JP3228631B2 (ja) * 1993-12-24 2001-11-12 東京エレクトロン株式会社 テスタ
JP3617013B2 (ja) * 1994-08-15 2005-02-02 オー・エイチ・ティー株式会社 電子回路基板の検査装置及び電子回路の検査方法
US5747999A (en) * 1994-08-15 1998-05-05 Okano Hitech Co., Ltd. Feed control element used in substrate inspection and method and apparatus for inspecting substrates
JP3558434B2 (ja) * 1995-11-30 2004-08-25 富士通オートメーション株式会社 電気的配線検査方法及び装置
US5570027A (en) * 1995-04-19 1996-10-29 Photocircuits Corporation Printed circuit board test apparatus and method
US5736862A (en) * 1995-06-22 1998-04-07 Genrad, Inc. System for detecting faults in connections between integrated circuits and circuit board traces

Also Published As

Publication number Publication date
JP3165056B2 (ja) 2001-05-14
US5969530A (en) 1999-10-19
JPH10239372A (ja) 1998-09-11
EP0862061A2 (de) 1998-09-02
EP0862061A3 (de) 2000-02-02
DE69810681D1 (de) 2003-02-20
EP0862061B1 (de) 2003-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication related to discontinuation of the patent is to be deleted
8339 Ceased/non-payment of the annual fee