DE69736636D1 - Verarbeitungsvorrichtung - Google Patents

Verarbeitungsvorrichtung

Info

Publication number
DE69736636D1
DE69736636D1 DE69736636T DE69736636T DE69736636D1 DE 69736636 D1 DE69736636 D1 DE 69736636D1 DE 69736636 T DE69736636 T DE 69736636T DE 69736636 T DE69736636 T DE 69736636T DE 69736636 D1 DE69736636 D1 DE 69736636D1
Authority
DE
Germany
Prior art keywords
processing device
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69736636T
Other languages
English (en)
Other versions
DE69736636T2 (de
Inventor
Hisaaki Miyasako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Application granted granted Critical
Publication of DE69736636D1 publication Critical patent/DE69736636D1/de
Publication of DE69736636T2 publication Critical patent/DE69736636T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Cleaning In General (AREA)
DE69736636T 1996-10-30 1997-10-23 Verarbeitungsvorrichtung Expired - Fee Related DE69736636T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28837696A JP3360001B2 (ja) 1996-10-30 1996-10-30 処理装置
JP28837696 1996-10-30
PCT/JP1997/003832 WO1998019333A1 (fr) 1996-10-30 1997-10-23 Processeur et procede de traitement, et robot associe

Publications (2)

Publication Number Publication Date
DE69736636D1 true DE69736636D1 (de) 2006-10-19
DE69736636T2 DE69736636T2 (de) 2007-09-20

Family

ID=17729406

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69736636T Expired - Fee Related DE69736636T2 (de) 1996-10-30 1997-10-23 Verarbeitungsvorrichtung

Country Status (8)

Country Link
US (1) US6230721B1 (de)
EP (1) EP0957510B1 (de)
JP (1) JP3360001B2 (de)
KR (2) KR100477013B1 (de)
CN (1) CN1163947C (de)
DE (1) DE69736636T2 (de)
TW (1) TW349238B (de)
WO (1) WO1998019333A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7278812B2 (en) 1999-01-27 2007-10-09 Shinko Electric Co., Ltd. Conveyance system
JP2000286318A (ja) * 1999-01-27 2000-10-13 Shinko Electric Co Ltd 搬送システム
JP4248695B2 (ja) * 1999-07-26 2009-04-02 東京エレクトロン株式会社 ウェハ移載装置の緊急停止装置
KR100766247B1 (ko) * 1999-12-30 2007-10-15 엘지.필립스 엘시디 주식회사 일체형 스트립 및 세정 장치
US6634686B2 (en) * 2001-10-03 2003-10-21 Applied Materials, Inc. End effector assembly
KR100500169B1 (ko) * 2003-07-02 2005-07-07 주식회사 디엠에스 도킹형 기판 이송 및 처리 시스템과, 그를 이용한 이송 및 처리 방법
JP4647228B2 (ja) * 2004-04-01 2011-03-09 株式会社ディスコ ウェーハの加工方法
US7725976B1 (en) 2004-08-26 2010-06-01 The Sherwin-Williams Company Apparatus and method for the automated cleaning of articles
JP4463081B2 (ja) 2004-11-10 2010-05-12 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
US20070020067A1 (en) * 2005-07-22 2007-01-25 Au Optronics Corporation Storage cassette for large panel glass substrates
KR101003580B1 (ko) * 2005-12-29 2010-12-22 엘지디스플레이 주식회사 기판공급장치
KR100945912B1 (ko) * 2008-01-10 2010-03-05 주식회사 비아트론 반도체 소자의 열처리 장치
CN101383313B (zh) * 2008-10-24 2010-06-16 陈百捷 一种取送硅片的机械手
JP6239893B2 (ja) 2013-08-07 2017-11-29 株式会社荏原製作所 ウェット処理装置及びこれを備えた基板処理装置
CN104971914B (zh) * 2014-04-02 2017-02-15 洛阳理工学院 一种精密零件的清洗装置
JP2015207602A (ja) * 2014-04-17 2015-11-19 株式会社荏原製作所 排水機構、及びこれを備えた基板処理装置
KR20220063721A (ko) * 2020-11-10 2022-05-17 가부시키가이샤 스기노 마신 처리시스템

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084819A (ja) * 1983-10-14 1985-05-14 Mitsubishi Electric Corp 半導体製造装置
JPS62203786A (ja) * 1986-03-03 1987-09-08 株式会社東芝 産業用ロボツト
US4728252A (en) * 1986-08-22 1988-03-01 Lam Research Corporation Wafer transport mechanism
JPH0261588U (de) * 1988-10-24 1990-05-08
JPH04144811A (ja) * 1990-10-03 1992-05-19 Toshiba Corp 基板挿入装置
JPH0529289A (ja) 1991-07-24 1993-02-05 Nec Kyushu Ltd 半導体基板薬液処理装置
FR2697004B1 (fr) * 1992-10-16 1994-11-18 Commissariat Energie Atomique Système de stockage et de transport d'objets plats tels que des boîtes extra-plates et son ratelier portatif.
KR970011065B1 (ko) * 1992-12-21 1997-07-05 다이닛뽕 스크린 세이조오 가부시키가이샤 기판처리장치와 기판처리장치에 있어서 기판교환장치 및 기판교환방법
JP3042576B2 (ja) * 1992-12-21 2000-05-15 大日本スクリーン製造株式会社 基板処理装置
US5565034A (en) * 1993-10-29 1996-10-15 Tokyo Electron Limited Apparatus for processing substrates having a film formed on a surface of the substrate
JPH07193113A (ja) 1993-12-27 1995-07-28 Dainippon Screen Mfg Co Ltd 基板昇降装置
US5587637A (en) * 1994-01-10 1996-12-24 Tatsumo Kabushiki Kaisha Robot arm device capable of conveying an article in circumferential and radial directions
SE515119C2 (sv) * 1995-03-30 2001-06-11 Abb Ab Industrirobot

Also Published As

Publication number Publication date
CN1235697A (zh) 1999-11-17
US6230721B1 (en) 2001-05-15
TW349238B (en) 1999-01-01
KR20050004226A (ko) 2005-01-12
WO1998019333A1 (fr) 1998-05-07
DE69736636T2 (de) 2007-09-20
EP0957510A1 (de) 1999-11-17
EP0957510B1 (de) 2006-09-06
KR100488388B1 (ko) 2005-05-10
JPH10135304A (ja) 1998-05-22
KR20000052935A (ko) 2000-08-25
CN1163947C (zh) 2004-08-25
JP3360001B2 (ja) 2002-12-24
EP0957510A4 (de) 2004-09-15
KR100477013B1 (ko) 2005-03-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee