DE69431023T2 - Halbleiteraufbau und Verfahren zur Herstellung - Google Patents
Halbleiteraufbau und Verfahren zur HerstellungInfo
- Publication number
- DE69431023T2 DE69431023T2 DE69431023T DE69431023T DE69431023T2 DE 69431023 T2 DE69431023 T2 DE 69431023T2 DE 69431023 T DE69431023 T DE 69431023T DE 69431023 T DE69431023 T DE 69431023T DE 69431023 T2 DE69431023 T2 DE 69431023T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- semiconductor structure
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21750393A JP3234062B2 (ja) | 1993-09-01 | 1993-09-01 | 半導体パッケージおよびその製造方法 |
JP31863393 | 1993-12-17 | ||
JP5075794A JP3332555B2 (ja) | 1993-12-17 | 1994-03-22 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69431023D1 DE69431023D1 (de) | 2002-08-29 |
DE69431023T2 true DE69431023T2 (de) | 2003-02-06 |
Family
ID=27294064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69431023T Expired - Lifetime DE69431023T2 (de) | 1993-09-01 | 1994-08-23 | Halbleiteraufbau und Verfahren zur Herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5866950A (de) |
EP (1) | EP0644587B1 (de) |
KR (1) | KR0172203B1 (de) |
DE (1) | DE69431023T2 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07302858A (ja) * | 1994-04-28 | 1995-11-14 | Toshiba Corp | 半導体パッケージ |
US6329711B1 (en) * | 1995-11-08 | 2001-12-11 | Fujitsu Limited | Semiconductor device and mounting structure |
JPH10303252A (ja) * | 1997-04-28 | 1998-11-13 | Nec Kansai Ltd | 半導体装置 |
CN1106036C (zh) * | 1997-05-15 | 2003-04-16 | 日本电气株式会社 | 芯片型半导体装置的制造方法 |
TW407364B (en) * | 1998-03-26 | 2000-10-01 | Toshiba Corp | Memory apparatus, card type memory apparatus, and electronic apparatus |
JP2000036520A (ja) * | 1998-05-15 | 2000-02-02 | Nec Corp | フリップチップ実装方法及び装置 |
US6078103A (en) * | 1998-10-29 | 2000-06-20 | Mcdonnell Douglas Corporation | Dimpled contacts for metal-to-semiconductor connections, and methods for fabricating same |
TW569424B (en) * | 2000-03-17 | 2004-01-01 | Matsushita Electric Ind Co Ltd | Module with embedded electric elements and the manufacturing method thereof |
US6433285B2 (en) * | 2000-03-30 | 2002-08-13 | Matsushita Electronics Corporation | Printed wiring board, IC card module using the same, and method for producing IC card module |
JP2001308145A (ja) * | 2000-04-25 | 2001-11-02 | Fujitsu Ltd | 半導体チップの実装方法 |
JP3922338B2 (ja) * | 2000-09-20 | 2007-05-30 | セイコーエプソン株式会社 | 基板の製造方法及び製造装置 |
DE10063907A1 (de) * | 2000-12-21 | 2002-07-04 | Philips Corp Intellectual Pty | Detektor zum Detektieren von elektromagnetischer Strahlung |
DE10125025A1 (de) * | 2001-05-22 | 2002-12-12 | Infineon Technologies Ag | Schaltungsplantine für Speicherbauelemente |
KR100488412B1 (ko) * | 2001-06-13 | 2005-05-11 | 가부시키가이샤 덴소 | 내장된 전기소자를 갖는 인쇄 배선 기판 및 그 제조 방법 |
US7213738B2 (en) * | 2002-09-30 | 2007-05-08 | Speedline Technologies, Inc. | Selective wave solder system |
JP3866178B2 (ja) * | 2002-10-08 | 2007-01-10 | 株式会社ルネサステクノロジ | Icカード |
CA2518677A1 (en) * | 2003-03-03 | 2004-12-09 | Nagaoka & Co., Ltd. | Methods and apparatus for use in detection and quantitation of various cell types and use of optical bio-disc for performing same |
US7011987B2 (en) * | 2003-07-01 | 2006-03-14 | Ritdisplay Corporation | Method of fabricating organic electroluminescence panel package |
JP2006216720A (ja) * | 2005-02-02 | 2006-08-17 | Sharp Corp | 半導体装置及びその製造方法 |
US7355283B2 (en) * | 2005-04-14 | 2008-04-08 | Sandisk Corporation | Rigid wave pattern design on chip carrier substrate and printed circuit board for semiconductor and electronic sub-system packaging |
JP4722690B2 (ja) * | 2005-12-12 | 2011-07-13 | 富士通セミコンダクター株式会社 | 半導体装置およびその製造方法 |
US9082644B2 (en) * | 2013-01-18 | 2015-07-14 | Infineon Technologies Ag | Method of manufacturing and testing a chip package |
USD758372S1 (en) | 2013-03-13 | 2016-06-07 | Nagrastar Llc | Smart card interface |
USD759022S1 (en) * | 2013-03-13 | 2016-06-14 | Nagrastar Llc | Smart card interface |
EP3046717B1 (de) * | 2013-09-17 | 2019-12-11 | ABB Schweiz AG | Ultraschallschweissverfahren mit partikelauffang |
USD864968S1 (en) * | 2015-04-30 | 2019-10-29 | Echostar Technologies L.L.C. | Smart card interface |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3495133A (en) * | 1965-06-18 | 1970-02-10 | Ibm | Circuit structure including semiconductive chip devices joined to a substrate by solder contacts |
GB1416671A (en) * | 1973-02-14 | 1975-12-03 | Siemens Ag | Layer circuits |
US3923231A (en) * | 1975-04-11 | 1975-12-02 | Us Energy | Diffusion bonding of gold to gold |
DE3029667A1 (de) * | 1980-08-05 | 1982-03-11 | GAO Gesellschaft für Automation und Organisation mbH, 8000 München | Traegerelement fuer einen ic-baustein |
JPS61123990A (ja) * | 1984-11-05 | 1986-06-11 | Casio Comput Co Ltd | Icカ−ド |
JP2502511B2 (ja) * | 1986-02-06 | 1996-05-29 | 日立マクセル株式会社 | 半導体装置の製造方法 |
JPS63149191A (ja) * | 1986-12-15 | 1988-06-21 | 日立マクセル株式会社 | Icカ−ド |
JPH01160029A (ja) * | 1987-12-17 | 1989-06-22 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JPH027180A (ja) * | 1988-06-27 | 1990-01-11 | Hitachi Ltd | 命令一斉発火方式 |
US5071787A (en) * | 1989-03-14 | 1991-12-10 | Kabushiki Kaisha Toshiba | Semiconductor device utilizing a face-down bonding and a method for manufacturing the same |
JPH032099A (ja) * | 1989-05-31 | 1991-01-08 | Toshiba Corp | Icカードの製造方法 |
JPH0451532A (ja) * | 1990-06-20 | 1992-02-20 | Nec Kyushu Ltd | ワイヤボンディング装置 |
JPH04352439A (ja) * | 1991-05-30 | 1992-12-07 | Toshiba Corp | 半導体装置の製造方法 |
US5350947A (en) * | 1991-11-12 | 1994-09-27 | Nec Corporation | Film carrier semiconductor device |
US5203076A (en) * | 1991-12-23 | 1993-04-20 | Motorola, Inc. | Vacuum infiltration of underfill material for flip-chip devices |
KR950012658B1 (ko) * | 1992-07-24 | 1995-10-19 | 삼성전자주식회사 | 반도체 칩 실장방법 및 기판 구조체 |
-
1994
- 1994-08-23 DE DE69431023T patent/DE69431023T2/de not_active Expired - Lifetime
- 1994-08-23 EP EP94306204A patent/EP0644587B1/de not_active Expired - Lifetime
- 1994-08-31 KR KR1019940021753A patent/KR0172203B1/ko not_active IP Right Cessation
-
1996
- 1996-11-14 US US08/749,028 patent/US5866950A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0644587A1 (de) | 1995-03-22 |
KR0172203B1 (ko) | 1999-02-01 |
US5866950A (en) | 1999-02-02 |
KR950010035A (ko) | 1995-04-26 |
EP0644587B1 (de) | 2002-07-24 |
DE69431023D1 (de) | 2002-08-29 |
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