DE69227290D1 - Halbleiteranordnung und Verfahren zur Herstellung - Google Patents
Halbleiteranordnung und Verfahren zur HerstellungInfo
- Publication number
- DE69227290D1 DE69227290D1 DE69227290T DE69227290T DE69227290D1 DE 69227290 D1 DE69227290 D1 DE 69227290D1 DE 69227290 T DE69227290 T DE 69227290T DE 69227290 T DE69227290 T DE 69227290T DE 69227290 D1 DE69227290 D1 DE 69227290D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21903191A JPH0555575A (ja) | 1991-08-29 | 1991-08-29 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69227290D1 true DE69227290D1 (de) | 1998-11-19 |
DE69227290T2 DE69227290T2 (de) | 1999-05-12 |
Family
ID=16729173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69227290T Expired - Fee Related DE69227290T2 (de) | 1991-08-29 | 1992-08-28 | Halbleiteranordnung und Verfahren zur Herstellung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5594259A (de) |
EP (1) | EP0530051B1 (de) |
JP (1) | JPH0555575A (de) |
KR (1) | KR960006110B1 (de) |
DE (1) | DE69227290T2 (de) |
TW (1) | TW266309B (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR960002086B1 (ko) * | 1993-04-16 | 1996-02-10 | 엘지전자주식회사 | 박막 트랜지스터의 제조방법 |
US5831694A (en) * | 1995-06-14 | 1998-11-03 | Hitachi, Ltd. | TFT panel for high resolution- and large size- liquid crystal display |
JP3400918B2 (ja) * | 1996-11-14 | 2003-04-28 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
US6010923A (en) * | 1997-03-31 | 2000-01-04 | Sanyo Electric Co., Ltd. | Manufacturing method of semiconductor device utilizing annealed semiconductor layer as channel region |
TWI226470B (en) * | 1998-01-19 | 2005-01-11 | Hitachi Ltd | LCD device |
US6184960B1 (en) * | 1998-01-30 | 2001-02-06 | Sharp Kabushiki Kaisha | Method of making a reflective type LCD including providing a protective metal film over a connecting electrode during at least one portion of the manufacturing process |
US6528357B2 (en) * | 1998-03-13 | 2003-03-04 | Kabushiki Kaisha Toshiba | Method of manufacturing array substrate |
US6315184B1 (en) * | 1999-06-02 | 2001-11-13 | Powermed, Inc. | Stapling device for use with an electromechanical driver device for use with anastomosing, stapling, and resecting instruments |
US6620655B2 (en) * | 2000-11-01 | 2003-09-16 | Lg.Phillips Lcd Co., Ltd. | Array substrate for transflective LCD device and method of fabricating the same |
US6825106B1 (en) * | 2003-09-30 | 2004-11-30 | Sharp Laboratories Of America, Inc. | Method of depositing a conductive niobium monoxide film for MOSFET gates |
JP6332019B2 (ja) * | 2014-12-25 | 2018-05-30 | セイコーエプソン株式会社 | 電気光学装置及びその製造方法、電子機器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3754168A (en) * | 1970-03-09 | 1973-08-21 | Texas Instruments Inc | Metal contact and interconnection system for nonhermetic enclosed semiconductor devices |
FR2505070B1 (fr) * | 1981-01-16 | 1986-04-04 | Suwa Seikosha Kk | Dispositif non lineaire pour un panneau d'affichage a cristaux liquides et procede de fabrication d'un tel panneau d'affichage |
US4432134A (en) * | 1982-05-10 | 1984-02-21 | Rockwell International Corporation | Process for in-situ formation of niobium-insulator-niobium Josephson tunnel junction devices |
JPS59138390A (ja) * | 1983-01-28 | 1984-08-08 | Hitachi Ltd | 超電導スイツチング装置 |
US4589961A (en) * | 1984-08-31 | 1986-05-20 | Sperry Corporation | Aluminum mask anodization with lift-off for patterning Josephson junction devices |
US4954870A (en) * | 1984-12-28 | 1990-09-04 | Kabushiki Kaisha Toshiba | Semiconductor device |
US4673968A (en) * | 1985-07-02 | 1987-06-16 | Siemens Aktiengesellschaft | Integrated MOS transistors having a gate metallization composed of tantalum or niobium or their silicides |
JPS62205656A (ja) * | 1986-03-06 | 1987-09-10 | Toshiba Corp | 半導体装置 |
US4860067A (en) * | 1986-06-20 | 1989-08-22 | International Business Machines Corporation | Semiconductor heterostructure adapted for low temperature operation |
JPS63166236A (ja) * | 1986-12-26 | 1988-07-09 | Toshiba Corp | 電子装置 |
JPH02106723A (ja) * | 1988-10-17 | 1990-04-18 | Toppan Printing Co Ltd | 薄膜トランジスタアレイ |
JPH031572A (ja) * | 1989-05-29 | 1991-01-08 | Fujitsu Ltd | 薄膜トランジスタマトリクス及びその製造方法 |
US5264728A (en) * | 1989-11-30 | 1993-11-23 | Kabushiki Kaisha Toshiba | Line material, electronic device using the line material and liquid crystal display |
-
1991
- 1991-08-29 JP JP21903191A patent/JPH0555575A/ja active Pending
-
1992
- 1992-08-28 DE DE69227290T patent/DE69227290T2/de not_active Expired - Fee Related
- 1992-08-28 EP EP92307902A patent/EP0530051B1/de not_active Expired - Lifetime
- 1992-08-29 TW TW081106845A patent/TW266309B/zh active
- 1992-08-29 KR KR1019920015722A patent/KR960006110B1/ko not_active IP Right Cessation
-
1994
- 1994-11-09 US US08/338,195 patent/US5594259A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69227290T2 (de) | 1999-05-12 |
US5594259A (en) | 1997-01-14 |
EP0530051A3 (en) | 1993-09-22 |
EP0530051A2 (de) | 1993-03-03 |
KR960006110B1 (ko) | 1996-05-08 |
EP0530051B1 (de) | 1998-10-14 |
TW266309B (de) | 1995-12-21 |
JPH0555575A (ja) | 1993-03-05 |
KR930005251A (ko) | 1993-03-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |