DE69221915D1 - Opto-lithographische Vorrichtung mit kraftkompensiertem Maschinengestell - Google Patents
Opto-lithographische Vorrichtung mit kraftkompensiertem MaschinengestellInfo
- Publication number
- DE69221915D1 DE69221915D1 DE69221915T DE69221915T DE69221915D1 DE 69221915 D1 DE69221915 D1 DE 69221915D1 DE 69221915 T DE69221915 T DE 69221915T DE 69221915 T DE69221915 T DE 69221915T DE 69221915 D1 DE69221915 D1 DE 69221915D1
- Authority
- DE
- Germany
- Prior art keywords
- opto
- force
- machine frame
- lithographic device
- compensated machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Vibration Prevention Devices (AREA)
- Transmission Devices (AREA)
- Control Of Linear Motors (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL9100407A NL9100407A (nl) | 1991-03-07 | 1991-03-07 | Optisch lithografische inrichting met een krachtgecompenseerd machinegestel. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69221915D1 true DE69221915D1 (de) | 1997-10-09 |
DE69221915T2 DE69221915T2 (de) | 1998-03-05 |
Family
ID=19858984
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69221915T Expired - Fee Related DE69221915T2 (de) | 1991-03-07 | 1992-02-28 | Opto-lithographische Vorrichtung mit kraftkompensiertem Maschinengestell |
Country Status (6)
Country | Link |
---|---|
US (1) | US5172160A (de) |
EP (1) | EP0502578B1 (de) |
JP (3) | JP3524107B2 (de) |
KR (1) | KR100249379B1 (de) |
DE (1) | DE69221915T2 (de) |
NL (1) | NL9100407A (de) |
Families Citing this family (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7656504B1 (en) | 1990-08-21 | 2010-02-02 | Nikon Corporation | Projection exposure apparatus with luminous flux distribution |
US5239340A (en) * | 1990-11-30 | 1993-08-24 | Sharp Kabushiki Kaisha | Linear motor device having vibration reduction unit |
US5504407A (en) * | 1992-02-21 | 1996-04-02 | Canon Kabushiki Kaisha | Stage driving system |
US5545962A (en) * | 1992-08-18 | 1996-08-13 | Canon Kabushiki Kaisha | Positioning system |
JP3265670B2 (ja) | 1993-01-21 | 2002-03-11 | 株式会社ニコン | ステージ装置、ステージ駆動方法、及び露光装置 |
JP3226704B2 (ja) * | 1994-03-15 | 2001-11-05 | キヤノン株式会社 | 露光装置 |
US7365513B1 (en) | 1994-04-01 | 2008-04-29 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
US5874820A (en) | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US5528118A (en) | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
US6989647B1 (en) | 1994-04-01 | 2006-01-24 | Nikon Corporation | Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device |
JP3363662B2 (ja) * | 1994-05-19 | 2003-01-08 | キヤノン株式会社 | 走査ステージ装置およびこれを用いた露光装置 |
US5850280A (en) * | 1994-06-16 | 1998-12-15 | Nikon Corporation | Stage unit, drive table, and scanning exposure and apparatus using same |
JP3800616B2 (ja) * | 1994-06-27 | 2006-07-26 | 株式会社ニコン | 目標物移動装置、位置決め装置及び可動ステージ装置 |
US6246204B1 (en) | 1994-06-27 | 2001-06-12 | Nikon Corporation | Electromagnetic alignment and scanning apparatus |
KR100399812B1 (ko) | 1994-10-11 | 2003-12-01 | 가부시키가이샤 니콘 | 스테이지용진동방지장치 |
TW318255B (de) | 1995-05-30 | 1997-10-21 | Philips Electronics Nv | |
TW316874B (de) * | 1995-05-30 | 1997-10-01 | Philips Electronics Nv | |
US5812420A (en) * | 1995-09-05 | 1998-09-22 | Nikon Corporation | Vibration-preventive apparatus and exposure apparatus |
JP3221823B2 (ja) * | 1995-11-24 | 2001-10-22 | キヤノン株式会社 | 投影露光装置およびこれを用いた露光方法ならびに半導体製造方法 |
JPH09289155A (ja) * | 1996-04-19 | 1997-11-04 | Nikon Corp | 走査型露光装置 |
JP3659529B2 (ja) * | 1996-06-06 | 2005-06-15 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
KR100483982B1 (ko) * | 1996-06-07 | 2005-08-10 | 가부시키가이샤 니콘 | 진동절연장치및노광장치 |
US6151185A (en) * | 1996-09-05 | 2000-11-21 | Canon Kabushiki Kaisha | Position detecting apparatus, positioning apparatus, and information recording apparatus using the same |
JPH10112433A (ja) * | 1996-10-04 | 1998-04-28 | Nikon Corp | 除振装置及び露光装置 |
US6462927B2 (en) * | 1997-02-28 | 2002-10-08 | Bae Systems Electronics Limited | Apparatus and method for spatially coupling an electro-magnet to a support armature |
US6490025B1 (en) | 1997-03-17 | 2002-12-03 | Nikon Corporation | Exposure apparatus |
US20010003028A1 (en) | 1997-09-19 | 2001-06-07 | Nikon Corporation | Scanning Exposure Method |
AU9095798A (en) * | 1997-09-19 | 1999-04-12 | Nikon Corporation | Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby |
US6089525A (en) * | 1997-10-07 | 2000-07-18 | Ultratech Stepper, Inc. | Six axis active vibration isolation and payload reaction force compensation system |
JP3535749B2 (ja) * | 1997-12-10 | 2004-06-07 | キヤノン株式会社 | ステージ装置、露光装置、並びにデバイス製造方法 |
JPH11189332A (ja) | 1997-12-26 | 1999-07-13 | Canon Inc | ステージ装置およびこれを用いた露光装置ならびにデバイス製造方法 |
JP3548411B2 (ja) | 1997-12-26 | 2004-07-28 | キヤノン株式会社 | ステージ装置、およびこれを用いた露光装置、ならびにデバイス製造方法 |
US6130517A (en) * | 1998-02-12 | 2000-10-10 | Nikon Corporation | Magnetic actuator producing large acceleration on fine stage and low RMS power gain |
JP3554186B2 (ja) | 1998-04-08 | 2004-08-18 | キヤノン株式会社 | 露光装置、デバイス製造方法および反力受け方法 |
JPH11294520A (ja) | 1998-04-08 | 1999-10-29 | Canon Inc | 除振装置、これを用いた露光装置およびデバイス製造方法、ならびに除振方法 |
JP2000021702A (ja) | 1998-06-30 | 2000-01-21 | Canon Inc | 露光装置ならびにデバイス製造方法 |
US6198580B1 (en) | 1998-08-17 | 2001-03-06 | Newport Corporation | Gimballed optical mount |
US6472777B1 (en) | 1998-08-25 | 2002-10-29 | Nikon Corporation | Capacitive sensor calibration method and apparatus for opposing electro-magnetic actuators |
US6144118A (en) * | 1998-09-18 | 2000-11-07 | General Scanning, Inc. | High-speed precision positioning apparatus |
WO2000033318A1 (fr) | 1998-11-30 | 2000-06-08 | Nikon Corporation | Dispositif d'etagement se son procede de fabrication; dispositif d'alignement et son procede de fabrication |
TW468090B (en) * | 1998-12-17 | 2001-12-11 | Asm Lithography Bv | Servo control method, and its application in a lithographic projection apparatus |
JP2002534783A (ja) * | 1998-12-29 | 2002-10-15 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 素子配置機械 |
US6516130B1 (en) | 1998-12-30 | 2003-02-04 | Newport Corporation | Clip that aligns a fiber optic cable with a laser diode within a fiber optic module |
FR2790115B1 (fr) | 1999-02-23 | 2001-05-04 | Micro Controle | Procede et dispositif pour deplacer un mobile sur une base montee elastiquement par rapport au sol |
US6511035B1 (en) | 1999-08-03 | 2003-01-28 | Newport Corporation | Active vibration isolation systems with nonlinear compensation to account for actuator saturation |
JP2001148341A (ja) | 1999-11-19 | 2001-05-29 | Nikon Corp | 露光装置 |
TW546551B (en) * | 1999-12-21 | 2003-08-11 | Asml Netherlands Bv | Balanced positioning system for use in lithographic apparatus |
JP4474020B2 (ja) | 2000-06-23 | 2010-06-02 | キヤノン株式会社 | 移動装置及び露光装置 |
US6958808B2 (en) * | 2000-11-16 | 2005-10-25 | Nikon Corporation | System and method for resetting a reaction mass assembly of a stage assembly |
US6885430B2 (en) * | 2000-11-16 | 2005-04-26 | Nikon Corporation | System and method for resetting a reaction mass assembly of a stage assembly |
US6551045B2 (en) * | 2000-11-17 | 2003-04-22 | Nikon Corporation | Wafer stage chamber |
US6655840B2 (en) | 2001-02-13 | 2003-12-02 | Newport Corporation | Stiff cross roller bearing configuration |
EP1243969A1 (de) * | 2001-03-20 | 2002-09-25 | Asm Lithography B.V. | Lithographischer Projektionsapparat und zugehöriges Positionierungssystem |
US6601524B2 (en) | 2001-03-28 | 2003-08-05 | Newport Corporation | Translation table with a spring biased dovetail bearing |
US6791058B2 (en) | 2001-04-25 | 2004-09-14 | Newport Corporation | Automatic laser weld machine for assembling photonic components |
US6568666B2 (en) | 2001-06-13 | 2003-05-27 | Newport Corporation | Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload |
US6788385B2 (en) * | 2001-06-21 | 2004-09-07 | Nikon Corporation | Stage device, exposure apparatus and method |
US6619611B2 (en) | 2001-07-02 | 2003-09-16 | Newport Corporation | Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration |
US6815699B2 (en) | 2001-12-11 | 2004-11-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1319986B1 (de) * | 2001-12-11 | 2008-02-27 | ASML Netherlands B.V. | Lithographischer Projektionsapparat und Verfahren zur Herstellung einer Vorrichtung |
JP4011919B2 (ja) * | 2002-01-16 | 2007-11-21 | キヤノン株式会社 | 移動装置及び露光装置並びに半導体デバイスの製造方法 |
JP3977086B2 (ja) * | 2002-01-18 | 2007-09-19 | キヤノン株式会社 | ステージシステム |
JP3679776B2 (ja) * | 2002-04-22 | 2005-08-03 | キヤノン株式会社 | 駆動装置、露光装置及びデバイス製造方法 |
EP1357434A1 (de) * | 2002-04-23 | 2003-10-29 | ASML Netherlands B.V. | Lithographisches Gerät und Verfahren zur Herstellung einer Vorrichtung |
EP1357429A1 (de) * | 2002-04-23 | 2003-10-29 | ASML Netherlands B.V. | Lithographisches Gerät und Verfahren zur Herstellung einer Vorrichtung |
TWI230844B (en) | 2002-06-07 | 2005-04-11 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
EP1369745B1 (de) * | 2002-06-07 | 2013-02-27 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
JP3962669B2 (ja) * | 2002-10-08 | 2007-08-22 | キヤノン株式会社 | 移動装置及び露光装置並びにデバイスの製造方法 |
US6983703B2 (en) * | 2002-11-05 | 2006-01-10 | Asm Technology Singapore Pte Ltd | Driving means to position a load |
EP1457834A3 (de) * | 2003-03-14 | 2008-10-29 | Canon Kabushiki Kaisha | Vorrichtung zur Positionierung, Belichtungsapparat und Verfahren zur Herstellung eines Artikels |
KR20060009957A (ko) * | 2003-05-27 | 2006-02-01 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스의 제조 방법 |
US6914351B2 (en) * | 2003-07-02 | 2005-07-05 | Tiax Llc | Linear electrical machine for electric power generation or motive drive |
US7248339B2 (en) | 2003-07-04 | 2007-07-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4323409B2 (ja) | 2003-10-21 | 2009-09-02 | エーエスエムエル ネザーランズ ビー.ブイ. | 位置決めシステム及び位置決め方法 |
JP2005203567A (ja) * | 2004-01-15 | 2005-07-28 | Canon Inc | 駆動装置、露光装置及びデバイス製造方法 |
US8231098B2 (en) | 2004-12-07 | 2012-07-31 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
KR101346957B1 (ko) * | 2005-06-02 | 2014-01-02 | 칼 짜이스 에스엠테 게엠베하 | 광학 결상 장치 |
JP2007027331A (ja) * | 2005-07-14 | 2007-02-01 | Canon Inc | 駆動装置及びこれを用いた露光装置並びにデバイス製造方法 |
WO2007061920A2 (en) * | 2005-11-17 | 2007-05-31 | Tiax Llc | Linear electrical machine for electric power generation or motive drive |
EP1803967B1 (de) * | 2005-12-30 | 2016-08-03 | Integrated Dynamics Engineering GmbH | Schwingungsisolationssystem mit Störgrössenaufschaltung von vorhersehbaren Kraftstörungen |
JP4834439B2 (ja) * | 2006-03-30 | 2011-12-14 | キヤノン株式会社 | ステージ装置及びその制御方法、露光装置及びデバイス製造方法 |
DE102007030202A1 (de) * | 2007-06-27 | 2009-01-22 | Vistec Semiconductor Systems Gmbh | Koordinaten-Messmaschine mit Schwingungsentkopplung und Verfahren zur Schwingungsentkopplung einer Koordinaten-Messmaschine |
US8267388B2 (en) * | 2007-09-12 | 2012-09-18 | Xradia, Inc. | Alignment assembly |
US8857585B2 (en) | 2010-12-29 | 2014-10-14 | Newport Corporation | Tunable vibration dampers and methods of manufacture and tuning |
NL2009902A (en) * | 2011-12-27 | 2013-07-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
EP4382764A1 (de) | 2022-12-09 | 2024-06-12 | Etel S.A. | Bewegungssystem mit konfigurierbarer vorwärtssteuerung |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6032050A (ja) * | 1983-08-02 | 1985-02-19 | Canon Inc | 露光装置 |
US4724466A (en) * | 1986-01-17 | 1988-02-09 | Matsushita Electric Industrial Co., Ltd. | Exposure apparatus |
US4805000A (en) * | 1986-01-17 | 1989-02-14 | Matsushita Electric Industrial Co., Ltd. | Exposure apparatus |
NL8601547A (nl) * | 1986-06-16 | 1988-01-18 | Philips Nv | Optisch litografische inrichting met verplaatsbaar lenzenstelsel en werkwijze voor het regelen van de afbeeldingseigenschappen van een lenzenstelsel in een dergelijke inrichting. |
EP0393994B1 (de) * | 1989-04-17 | 1994-06-15 | SHARP Corporation | Linearantriebsgerät |
-
1991
- 1991-03-07 NL NL9100407A patent/NL9100407A/nl not_active Application Discontinuation
- 1991-10-29 US US07/784,286 patent/US5172160A/en not_active Expired - Lifetime
-
1992
- 1992-02-28 EP EP92200576A patent/EP0502578B1/de not_active Expired - Lifetime
- 1992-02-28 DE DE69221915T patent/DE69221915T2/de not_active Expired - Fee Related
- 1992-03-03 JP JP08168792A patent/JP3524107B2/ja not_active Expired - Fee Related
- 1992-03-04 KR KR1019920003523A patent/KR100249379B1/ko not_active IP Right Cessation
-
2001
- 2001-12-17 JP JP2001383399A patent/JP3491204B2/ja not_active Expired - Fee Related
-
2003
- 2003-12-24 JP JP2003427623A patent/JP3889395B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2004140401A (ja) | 2004-05-13 |
NL9100407A (nl) | 1992-10-01 |
DE69221915T2 (de) | 1998-03-05 |
JP3491204B2 (ja) | 2004-01-26 |
JP3889395B2 (ja) | 2007-03-07 |
EP0502578A1 (de) | 1992-09-09 |
JPH05121294A (ja) | 1993-05-18 |
EP0502578B1 (de) | 1997-09-03 |
JP2002319535A (ja) | 2002-10-31 |
KR920018868A (ko) | 1992-10-22 |
KR100249379B1 (ko) | 2000-06-01 |
JP3524107B2 (ja) | 2004-05-10 |
US5172160A (en) | 1992-12-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: ASM LITHOGRAPHY B.V., VELDHOVEN, NL |
|
8339 | Ceased/non-payment of the annual fee |