DE69021952D1 - Vorrichtung zur Handhabung von Halbleiterplättchen. - Google Patents
Vorrichtung zur Handhabung von Halbleiterplättchen.Info
- Publication number
- DE69021952D1 DE69021952D1 DE69021952T DE69021952T DE69021952D1 DE 69021952 D1 DE69021952 D1 DE 69021952D1 DE 69021952 T DE69021952 T DE 69021952T DE 69021952 T DE69021952 T DE 69021952T DE 69021952 D1 DE69021952 D1 DE 69021952D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor wafers
- handling semiconductor
- handling
- wafers
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging For Recording Disks (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37373489A | 1989-06-29 | 1989-06-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69021952D1 true DE69021952D1 (de) | 1995-10-05 |
DE69021952T2 DE69021952T2 (de) | 1996-05-15 |
Family
ID=23473651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990621952 Expired - Fee Related DE69021952T2 (de) | 1989-06-29 | 1990-06-19 | Vorrichtung zur Handhabung von Halbleiterplättchen. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0405301B1 (de) |
JP (1) | JP2826175B2 (de) |
DE (1) | DE69021952T2 (de) |
ES (1) | ES2078269T3 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2531113Y2 (ja) * | 1993-03-10 | 1997-04-02 | 東京部品工業株式会社 | オイルポンプ |
US6296553B1 (en) * | 1997-04-02 | 2001-10-02 | Nippei Toyama Corporation | Grinding method, surface grinder, workpiece support, mechanism and work rest |
US6215897B1 (en) * | 1998-05-20 | 2001-04-10 | Applied Komatsu Technology, Inc. | Automated substrate processing system |
NL1012004C2 (nl) | 1999-05-07 | 2000-11-13 | Asm Int | Werkwijze voor het verplaatsen van wafers alsmede ring. |
DE10140761B4 (de) | 2001-08-20 | 2004-08-26 | Infineon Technologies Ag | Wafer-Handhabungsvorrichtung |
US6835039B2 (en) | 2002-03-15 | 2004-12-28 | Asm International N.V. | Method and apparatus for batch processing of wafers in a furnace |
US7104578B2 (en) | 2002-03-15 | 2006-09-12 | Asm International N.V. | Two level end effector |
US7181132B2 (en) | 2003-08-20 | 2007-02-20 | Asm International N.V. | Method and system for loading substrate supports into a substrate holder |
DE10355679B4 (de) * | 2003-11-28 | 2008-08-14 | Singulus Technologies Ag | Substratträger, Vorrichtung und Verfahren zum Handhaben des Substratträgers und Verwendung in Beschichtungsprozessen |
US9130002B2 (en) * | 2010-05-07 | 2015-09-08 | Lam Research Ag | Device for holding wafer shaped articles |
JP6580544B2 (ja) * | 2016-10-20 | 2019-09-25 | エーエスエムエル ネザーランズ ビー.ブイ. | 基板支持ユニット上に基板を位置合わせする方法および装置 |
US10133186B2 (en) | 2016-10-20 | 2018-11-20 | Mapper Lithography Ip B.V. | Method and apparatus for aligning substrates on a substrate support unit |
CN112582310B (zh) * | 2020-12-28 | 2024-03-19 | 无锡中微腾芯电子有限公司 | 一种直插式封装集成电路管脚整形设备 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS584921Y2 (ja) * | 1978-09-18 | 1983-01-27 | 松下電器産業株式会社 | 蒸着におけるウエハ固定装置 |
JPS5790956A (en) * | 1980-11-28 | 1982-06-05 | Hitachi Ltd | Gripper for wafer |
JPS58115830A (ja) * | 1981-12-28 | 1983-07-09 | Nippon Telegr & Teleph Corp <Ntt> | ウエハ入れ換え装置 |
JPS60113442A (ja) * | 1983-11-24 | 1985-06-19 | Toshiba Mach Co Ltd | ウェハ搬出入装置 |
JPS60175411A (ja) * | 1984-02-22 | 1985-09-09 | Hitachi Ltd | 半導体薄膜の製造方法及びその製造装置 |
JPS60146343U (ja) * | 1984-03-12 | 1985-09-28 | 日本電気株式会社 | ウエハホルダ− |
JPS60167335U (ja) * | 1984-04-14 | 1985-11-06 | 大日本スクリ−ン製造株式会社 | 熱処理装置 |
JPS60238134A (ja) * | 1984-04-16 | 1985-11-27 | Tokuda Seisakusho Ltd | 真空処理装置 |
JPS61184841A (ja) * | 1985-02-13 | 1986-08-18 | Canon Inc | ウエハの位置決め方法および装置 |
JPS61247048A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 縦型拡散炉用ボ−ト |
JPS6247348U (de) * | 1985-09-13 | 1987-03-24 | ||
JPS62101045A (ja) * | 1985-10-28 | 1987-05-11 | Toshiba Corp | ウエ−ハの中心合せ装置 |
JPH0779121B2 (ja) * | 1986-01-17 | 1995-08-23 | 株式会社日立製作所 | ウェハ支持装置 |
JPH0518045Y2 (de) * | 1986-04-10 | 1993-05-13 | ||
JPS6362233A (ja) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | 反応性イオンエツチング装置 |
JPS63110745A (ja) * | 1986-10-29 | 1988-05-16 | Nissin Electric Co Ltd | ウエハ収納装置 |
US4817556A (en) * | 1987-05-04 | 1989-04-04 | Varian Associates, Inc. | Apparatus for retaining wafers |
JPH0638447B2 (ja) * | 1987-05-29 | 1994-05-18 | テラダイン株式会社 | ウエハ位置決め方法 |
JPS6410932A (en) * | 1987-07-02 | 1989-01-13 | Comany Kk | Mobile divider for flowerpot |
JPS649171U (de) * | 1987-07-06 | 1989-01-18 | ||
JP2560042B2 (ja) * | 1987-09-04 | 1996-12-04 | 日東電工株式会社 | 半導体ウエハのマウント装置 |
DE3919611A1 (de) * | 1989-06-15 | 1990-12-20 | Wacker Chemitronic | Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung |
-
1990
- 1990-06-19 ES ES90111561T patent/ES2078269T3/es not_active Expired - Lifetime
- 1990-06-19 EP EP90111561A patent/EP0405301B1/de not_active Expired - Lifetime
- 1990-06-19 DE DE1990621952 patent/DE69021952T2/de not_active Expired - Fee Related
- 1990-06-21 JP JP16398290A patent/JP2826175B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2078269T3 (es) | 1995-12-16 |
EP0405301A3 (en) | 1991-11-13 |
DE69021952T2 (de) | 1996-05-15 |
JPH0338051A (ja) | 1991-02-19 |
EP0405301A2 (de) | 1991-01-02 |
JP2826175B2 (ja) | 1998-11-18 |
EP0405301B1 (de) | 1995-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |