DE3850609D1 - Methode zur Herstellung einer supraleitenden Schaltung. - Google Patents

Methode zur Herstellung einer supraleitenden Schaltung.

Info

Publication number
DE3850609D1
DE3850609D1 DE3850609T DE3850609T DE3850609D1 DE 3850609 D1 DE3850609 D1 DE 3850609D1 DE 3850609 T DE3850609 T DE 3850609T DE 3850609 T DE3850609 T DE 3850609T DE 3850609 D1 DE3850609 D1 DE 3850609D1
Authority
DE
Germany
Prior art keywords
making
superconducting circuit
superconducting
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3850609T
Other languages
English (en)
Other versions
DE3850609T2 (de
Inventor
Nobuhiko Itami Works Of Fujita
Hideo Itami Works Of S Itozaki
Saburo Itami Works Of S Tanaka
Naoji Itami Works Of Fujimori
Takahiro Itami Works Of S Imai
Keizo Itami Works Of Su Harada
Noriyuki Osaka Works O Yoshida
Satosho Osaka Works Of Takano
Kenji Osaka Works Of Miyazaki
Noriki Osaka Works Of Hayashi
Shuji Itami Works Of Sumi Yazu
Tetsuji Itami Works Of S Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE3850609D1 publication Critical patent/DE3850609D1/de
Application granted granted Critical
Publication of DE3850609T2 publication Critical patent/DE3850609T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0884—Treatment of superconductor layers by irradiation, e.g. ion-beam, electron-beam, laser beam or X-rays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE3850609T 1987-05-18 1988-05-18 Methode zur Herstellung einer supraleitenden Schaltung. Expired - Fee Related DE3850609T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP12081787 1987-05-18
JP12344987 1987-05-20
JP20993187 1987-08-24
JP20993087 1987-08-24

Publications (2)

Publication Number Publication Date
DE3850609D1 true DE3850609D1 (de) 1994-08-18
DE3850609T2 DE3850609T2 (de) 1995-02-23

Family

ID=27470725

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3850609T Expired - Fee Related DE3850609T2 (de) 1987-05-18 1988-05-18 Methode zur Herstellung einer supraleitenden Schaltung.

Country Status (8)

Country Link
US (1) US5169829A (de)
EP (1) EP0292387B1 (de)
JP (1) JP2671916B2 (de)
KR (1) KR970005160B1 (de)
CN (1) CN1035087C (de)
CA (1) CA1328242C (de)
DE (1) DE3850609T2 (de)
HK (1) HK131495A (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU599223B2 (en) * 1987-04-15 1990-07-12 Semiconductor Energy Laboratory Co. Ltd. Superconducting ceramic pattern and its manufacturing method
EP0292958B1 (de) * 1987-05-26 1993-12-29 Sumitomo Electric Industries Limited Verfahren zur Herstellung einer dünnen Schicht aus supraleitendem Mischoxid
CA1331951C (en) * 1987-06-22 1994-09-13 Takahiro Imai Method for producing a superconducting circuit
EP0310248B1 (de) * 1987-09-30 1992-03-25 General Motors Corporation Dünnschicht-Supraleiterstrukturierung durch fokussierte Strahlentechniken
EP0338084A4 (de) * 1987-09-30 1989-12-14 Mitsubishi Metal Corp Struktur einer supraleiterverdrahtung und verfahren zu ihrer herstellung.
JPH01111702A (ja) * 1987-10-24 1989-04-28 Hiroyuki Yoshida 複合酸化物から放射線照射を利用して室温超伝導体を製造する方法
US4952556A (en) * 1987-12-08 1990-08-28 General Motors Corporation Patterning thin film superconductors using focused beam techniques
US4956335A (en) * 1988-06-20 1990-09-11 Eastman Kodak Company Conductive articles and processes for their preparation
JPH0667152B2 (ja) * 1989-11-02 1994-08-24 株式会社安川電機 円板状電機子巻線の作成法
KR930004024B1 (ko) * 1990-04-27 1993-05-19 삼성전기 주식회사 초전도 집적회로소자의 제조방법
FR2678419B1 (fr) * 1991-06-27 1993-09-03 Alsthom Gec Piece en ceramique supraconductrice pour amenee de courant.
AU8070294A (en) * 1993-07-15 1995-02-13 President And Fellows Of Harvard College Extended nitride material comprising beta -c3n4
US20030236169A1 (en) * 2002-01-17 2003-12-25 Wolfgang Lang Method for producing a superconducting circuit
FR2838726B1 (fr) 2002-04-18 2004-07-09 Realisations Electr Et Mecaniq Convoyeur de stockage
JP4643522B2 (ja) * 2006-08-23 2011-03-02 財団法人国際超電導産業技術研究センター テープ状厚膜ｙｂｃｏ超電導体の製造方法
CN101540220B (zh) * 2008-03-20 2011-05-04 中国科学院物理研究所 一种铁基空穴型超导材料及其制备方法
JP2012032690A (ja) * 2010-08-02 2012-02-16 Seiko Epson Corp 光学物品およびその製造方法
CN102586740B (zh) * 2012-02-27 2013-09-04 浙江理工大学 一种双层膜超导整流器件的制备方法
EP3326447B1 (de) 2016-11-23 2019-06-12 Bucher Vaslin Transportfahrzeug für flüssige/feste ladung, und insbesondere gezogenes oder selbstfahrendes fahrzeug für den transport von lesegut

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3932315A (en) * 1974-09-24 1976-01-13 E. I. Du Pont De Nemours & Company Superconductive barium-lead-bismuth oxides
US4316785A (en) * 1979-11-05 1982-02-23 Nippon Telegraph & Telephone Public Corporation Oxide superconductor Josephson junction and fabrication method therefor
US4351712A (en) * 1980-12-10 1982-09-28 International Business Machines Corporation Low energy ion beam oxidation process
JPS60173885A (ja) * 1984-02-18 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導材料およびその製造方法
JPS61206279A (ja) * 1985-03-11 1986-09-12 Hitachi Ltd 超電導素子
US4888202A (en) * 1986-07-31 1989-12-19 Nippon Telegraph And Telephone Corporation Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film
DE3850580T2 (de) * 1987-01-30 1994-10-27 Hitachi Ltd Supraleiteranordnung.
CA1332324C (en) * 1987-03-30 1994-10-11 Jun Shioya Method for producing thin film of oxide superconductor
DE3854238T2 (de) * 1987-04-08 1996-03-21 Hitachi Ltd Verfahren zur Herstellung eines supraleitenden Elements.
JP2650910B2 (ja) * 1987-04-22 1997-09-10 株式会社日立製作所 酸化物超伝導体薄膜の形成方法
JPS63265473A (ja) * 1987-04-23 1988-11-01 Agency Of Ind Science & Technol 超伝導電子回路の作成法

Also Published As

Publication number Publication date
CA1328242C (en) 1994-04-05
KR880014592A (ko) 1988-12-24
US5169829A (en) 1992-12-08
EP0292387A3 (en) 1990-03-21
CN1035087C (zh) 1997-06-04
DE3850609T2 (de) 1995-02-23
JP2671916B2 (ja) 1997-11-05
EP0292387B1 (de) 1994-07-13
HK131495A (en) 1995-08-24
JPH01157579A (ja) 1989-06-20
CN1030158A (zh) 1989-01-04
KR970005160B1 (en) 1997-04-12
EP0292387A2 (de) 1988-11-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee