DE20023051U1 - Piezoelektrisches Bauelement - Google Patents
Piezoelektrisches BauelementInfo
- Publication number
- DE20023051U1 DE20023051U1 DE20023051U DE20023051U DE20023051U1 DE 20023051 U1 DE20023051 U1 DE 20023051U1 DE 20023051 U DE20023051 U DE 20023051U DE 20023051 U DE20023051 U DE 20023051U DE 20023051 U1 DE20023051 U1 DE 20023051U1
- Authority
- DE
- Germany
- Prior art keywords
- component according
- ceramic
- cations
- places
- ceramic layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title claims abstract 20
- 239000010949 copper Substances 0.000 title claims abstract 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract 5
- 229910052802 copper Inorganic materials 0.000 title claims abstract 5
- 239000011230 binding agent Substances 0.000 claims abstract 4
- 239000011888 foil Substances 0.000 claims abstract 2
- 150000001768 cations Chemical class 0.000 claims 14
- 229910052751 metal Inorganic materials 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 7
- 229910052758 niobium Inorganic materials 0.000 claims 3
- 229910052715 tantalum Inorganic materials 0.000 claims 3
- 229910052738 indium Inorganic materials 0.000 claims 2
- 229910052742 iron Inorganic materials 0.000 claims 2
- 229910052747 lanthanoid Inorganic materials 0.000 claims 2
- 150000002602 lanthanoids Chemical class 0.000 claims 2
- 229910052749 magnesium Inorganic materials 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052700 potassium Inorganic materials 0.000 claims 2
- 229910052706 scandium Inorganic materials 0.000 claims 2
- 229910052708 sodium Inorganic materials 0.000 claims 2
- 239000011734 sodium Substances 0.000 claims 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052788 barium Inorganic materials 0.000 claims 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 229910052791 calcium Inorganic materials 0.000 claims 1
- 239000011575 calcium Substances 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- 229920003009 polyurethane dispersion Polymers 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 229910052761 rare earth metal Inorganic materials 0.000 claims 1
- 150000002910 rare earth metals Chemical class 0.000 claims 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052712 strontium Inorganic materials 0.000 claims 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
- 238000006467 substitution reaction Methods 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 238000005247 gettering Methods 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
- C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
- C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
- C04B35/493—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT containing also other lead compounds
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
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- Y10T29/42—Piezoelectric device making
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/125—Deflectable by temperature change [e.g., thermostat element]
- Y10T428/12507—More than two components
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Composite Materials (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Laminated Bodies (AREA)
- Electrodes Of Semiconductors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
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Der Beschreibungstext wurde nicht elektronisch erfaßt
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Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
Der Beschreibungstext wurde nicht elektronisch erfaßt
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Claims (18)
1. Piezoelektrisches Bauelement in monolithischer Viel
schichtbauweise mit einem Stapel aus mindestens zwei Keramik
schichten und einer zwischen zwei Keramikschichten angeordne
ten Elektrodenschicht, bei dem die Elektrodenschicht Kupfer
enthält.
2. Bauelement nach Anspruch 1,
das aus keramischen Grünfolien hergestellt ist, welche einen
thermohydrolitisch abbaubaren Binder enthalten.
3. Baueleraent nach Anspruch 2,
bei dem der Binder eine Polyurethandispersion ist.
4. Bauelement nach einem der Ansprüche 1 bis 3,
bei dem die Dichte der Keramikschichten mindestens 96% der
theoretisch erreichbaren Dichte aufweist.
5. Bauelement nach einem der Ansprüche 1 bis 4,
bei dem die Keramikschichten Körner mit einer Korngröße zwi
schen 0,8 und 5 µm enthalten.
6. Bauelement nach einem der Ansprüche 1 bis 5,
das mindestens 10 übereinander angeordnete Elektrodenschich
ten umfaßt.
7. Bauelement nach einem der Ansprüche 1 bis 6,
bei dem die Keramikschichten eine ferroelektrische Perowskit
keramik mit der allgemeinen Zusammensetzung ABO3 umfassen.
8. Bauelement nach Anspruch 7,
bei dem die Perowskit-Keramik vom PZT-Typ Pb(ZrxTi1-x)O3 ist.
9. Bauelement nach Anspruch 7 oder 8,
bei dem auf A-Plätzen der Keramik Kationen eingebaut sind und
bei dem Kationen auf B-Plätzen durch geeignete andere Katio
nen oder Kombinationen von Kationen ersetzt sind.
10. Bauelement nach Anspruch 9,
bei dem auf A-Plätzen der Keramik zweiwertige Metallkationen
MII eingebaut sind.
11. Bauelement nach Anspruch 10,
bei dem die zweiwertigen Metallkationen MII aus einer Gruppe
von Elementen ausgewählt sind, die Barium, Strontium, Kalzium
und Kupfer enthält.
12. Bauelement nach Anspruch 10,
bei dem auf A-Plätzen der Keramik partiell dreiwertige Me
tallkationen MIII eingebaut sind, die aus einer Gruppe von
Elementen enthaltend Scandium, Yttrium, Wismut und Lanthan
oder aus der Gruppe der Lanthaniden ausgewählt sind.
13. Bauelement nach Anspruch 10,
bei dem auf A-Plätzen der Keramik einwertige Kationen einge
baut sind.
14. Bauelement nach Anspruch 13,
bei dem die einwertigen Kationen ausgewählt sind aus einer
Gruppe von Elementen, die Silber, Kupfer, Natrium und Kalium
enthält.
15. Bauelement nach Anspruch 10 und 14,
bei dem Kombinationen von zweiwertigen Metallkationen MII und
einwertigen Kationen auf A-Plätzen der Keramik eingebaut
sind.
16. Bauelement nach Anspruch 8,
bei dem zur partiellen Substituion der vierwertigen Kationen
Zr und Ti auf den B-Plätzen der ferroelektrischen Perowskit
-Keramik Kombinationen ein- und fünfwertiger Metallkationen
MI 1/4MV 3/4 mit MI = Na, K und MV = Nb, Ta oder zwei- und
fünfwertiger Metallkationen MII 1/3MV 2/3 mit MII = Mg, Zn,
Ni, Co und MV = Nb, Ta oder drei- und fünfwertiger Metallka
tionen MIII 1/2MV 2/3 mit MIII = Fe, In, Sc, schwerere Lantha
niden - Elemente und MV = Nb, Ta oder Kombinationen
MIII 2/3MVI 1/3 mit MIII = Fe, In, Sc, schwerere Lanthaniden-
Elemente und MVI = W oder MII 1/2MVi 1/2 mit MII = Mg, Co, Ni
und MVI = W eingesetzt sind.
17. Bauelement nach Anspruch 9,
bei dem die Zusammensetzung der allgemeinen Formel
Pb1-x-ySExCuyV'''x/2 (Zr0,54-zTi0,46+z)O3 entspricht mit 0,01 <
x < 0,05 und -0,15 < z < +0,15 sowie 0 < y < 0,06, wobei SE
ein Seltenerdmetall und V eine Vakanz ist, und wobei ein PbO
-Überschuß von 1 bis maximal 5 mol-% eingestellt ist.
18. Bauelement nach einem der Ansprüche 9 bis 16,
bei dem die Keramik einen Zusatz an CuO enthält.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE20023051U DE20023051U1 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19960849 | 1999-12-16 | ||
DE10062672A DE10062672B9 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
DE20023051U DE20023051U1 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
Publications (1)
Publication Number | Publication Date |
---|---|
DE20023051U1 true DE20023051U1 (de) | 2003-01-09 |
Family
ID=7932991
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10062672A Expired - Lifetime DE10062672B9 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
DE50015994T Expired - Lifetime DE50015994D1 (en) | 1999-12-16 | 2000-12-15 | Nt |
DE20023051U Expired - Lifetime DE20023051U1 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE10062672A Expired - Lifetime DE10062672B9 (de) | 1999-12-16 | 2000-12-15 | Piezoelektrisches Bauelement |
DE50015994T Expired - Lifetime DE50015994D1 (en) | 1999-12-16 | 2000-12-15 | Nt |
Country Status (9)
Country | Link |
---|---|
US (3) | US20020098333A1 (de) |
EP (2) | EP2278634A3 (de) |
JP (2) | JP4744052B2 (de) |
CN (1) | CN1246914C (de) |
AT (1) | ATE481743T1 (de) |
AU (1) | AU2830701A (de) |
BR (1) | BR0016390A (de) |
DE (3) | DE10062672B9 (de) |
WO (1) | WO2001045138A2 (de) |
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-
2000
- 2000-12-15 DE DE10062672A patent/DE10062672B9/de not_active Expired - Lifetime
- 2000-12-15 EP EP10176030A patent/EP2278634A3/de not_active Withdrawn
- 2000-12-15 BR BR0016390-2A patent/BR0016390A/pt not_active Application Discontinuation
- 2000-12-15 JP JP2001545341A patent/JP4744052B2/ja not_active Expired - Lifetime
- 2000-12-15 US US09/736,266 patent/US20020098333A1/en not_active Abandoned
- 2000-12-15 AT AT00993455T patent/ATE481743T1/de active
- 2000-12-15 DE DE50015994T patent/DE50015994D1/de not_active Expired - Lifetime
- 2000-12-15 CN CN00817221.8A patent/CN1246914C/zh not_active Expired - Lifetime
- 2000-12-15 EP EP00993455A patent/EP1240675B1/de not_active Expired - Lifetime
- 2000-12-15 AU AU28307/01A patent/AU2830701A/en not_active Abandoned
- 2000-12-15 WO PCT/DE2000/004484 patent/WO2001045138A2/de active Application Filing
- 2000-12-15 DE DE20023051U patent/DE20023051U1/de not_active Expired - Lifetime
-
2006
- 2006-04-19 US US11/406,587 patent/US7855488B2/en not_active Expired - Fee Related
-
2007
- 2007-02-09 JP JP2007030992A patent/JP4248581B2/ja not_active Expired - Lifetime
-
2010
- 2010-05-21 US US12/785,081 patent/US8209828B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1863104A2 (de) | 2003-09-30 | 2007-12-05 | Epcos Ag | Verfahren zur Herstellung eines keramischen Vielschicht-Bauelements |
US7408292B2 (en) | 2003-09-30 | 2008-08-05 | Epcos Ag | Piezoelectric ceramic material multi-layered component and method for the production of a ceramic material |
US7525241B2 (en) | 2003-09-30 | 2009-04-28 | Epcos Ag | Ceramic multi-layer component and method for the production thereof |
EP2264800A2 (de) | 2003-09-30 | 2010-12-22 | Epcos Ag | Keramisches Vielschicht-Bauelement |
US8776364B2 (en) | 2003-09-30 | 2014-07-15 | Epcos Ag | Method for producing a multilayer ceramic component |
US9186870B2 (en) | 2003-09-30 | 2015-11-17 | Epcos Ag | Ceramic multi-layer component and method for the production thereof |
Also Published As
Publication number | Publication date |
---|---|
JP4744052B2 (ja) | 2011-08-10 |
JP2007150350A (ja) | 2007-06-14 |
BR0016390A (pt) | 2002-08-20 |
CN1246914C (zh) | 2006-03-22 |
US20020098333A1 (en) | 2002-07-25 |
DE10062672A1 (de) | 2001-08-02 |
US8209828B2 (en) | 2012-07-03 |
EP1240675B1 (de) | 2010-09-15 |
US20060251911A1 (en) | 2006-11-09 |
JP2003529917A (ja) | 2003-10-07 |
DE10062672B9 (de) | 2012-07-12 |
ATE481743T1 (de) | 2010-10-15 |
US20100294419A1 (en) | 2010-11-25 |
DE10062672B4 (de) | 2010-01-21 |
EP2278634A3 (de) | 2012-09-05 |
CN1409876A (zh) | 2003-04-09 |
WO2001045138A3 (de) | 2002-03-14 |
US7855488B2 (en) | 2010-12-21 |
AU2830701A (en) | 2001-06-25 |
EP2278634A2 (de) | 2011-01-26 |
JP4248581B2 (ja) | 2009-04-02 |
DE50015994D1 (en) | 2010-10-28 |
WO2001045138A2 (de) | 2001-06-21 |
EP1240675A2 (de) | 2002-09-18 |
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