CN208351247U - A kind of double-station direct putting type litho machine - Google Patents
A kind of double-station direct putting type litho machine Download PDFInfo
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- CN208351247U CN208351247U CN201821138791.4U CN201821138791U CN208351247U CN 208351247 U CN208351247 U CN 208351247U CN 201821138791 U CN201821138791 U CN 201821138791U CN 208351247 U CN208351247 U CN 208351247U
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Abstract
The utility model discloses a kind of double-station direct putting type litho machines, including pedestal, conveyer belt, Y-direction linear guides, first driving gantry, second driving gantry, first X is to axis, 2nd X is to axis and lens barrel group, pedestal is equipped with conveyer belt, the first sucker and the second sucker are equipped in conveyer belt, it is located at conveyer belt side on pedestal and is equipped with Y-direction linear guides, first driving gantry and second driving gantry are connected on Y-direction linear guides, first driving gantry is equipped with the first X to axis, first X is equipped with contraposition camera A and contraposition camera B to axis, second driving gantry is equipped with the 2nd X to axis, 2nd X is equipped with secondary contraposition camera A and secondary contraposition camera B to axis, lens barrel group is equipped between secondary contraposition camera A and secondary contraposition camera B, the utility model uses double-station double drive form, separated it is pre- contraposition and it is secondary Contraposition, exposure and contraposition are completed on two stations, and stable structure, exposure efficiency is high, and production efficiency is greatly improved.
Description
Technical field:
The utility model belongs to light source direct putting type exposure machine technical field, specially a kind of double-station direct putting type litho machine.
Background technique:
Light source direct putting type photoetching machine equipment is also known as the direct device for projecting of image, can be applied to semiconductor and PCB and plane
Research and development, the production of imaging field.Direct putting type is to replace traditional mask technique using pattern generator, directly by the figure of computer
Graphic data is exposed on product, can effectively be saved cost and be improved efficiency.In order to further enhance the efficiency of direct putting type exposure machine,
The double-station exposure sources of innovation formula completely have gone up a biggish step again in efficiency.The CCD para-position of conventional exposure machine and
Exposure is first to align post-exposure on same station.Double-station separates CCD para-position and exposure to do, using conveying band forms,
Form pipelining.
Utility model content:
In view of the above-mentioned problems, the technical problem to be solved by the present invention is to provide a kind of double-station direct putting type litho machines.
A kind of double-station direct putting type litho machine of the utility model, including pedestal, conveyer belt, Y-direction linear guides, the first drive
To axis, the 2nd X to axis and lens barrel group, the pedestal is equipped with conveyer belt, the conveying by driven portal, second driving gantry, the first X
Band is interior to be equipped with the first sucker and the second sucker, is located at conveyer belt side on the pedestal and is equipped with Y-direction linear guides, the Y-direction line
Property guide rail on be connected with can along Y-direction linear guides Y-direction slide first driving gantry and second driving gantry, it is described first drive
Driven portal and second driving gantry are located on the outside of conveyer belt, and first driving gantry is equipped with the first X to axis, the first X
Being equipped with to axis can be along the contraposition camera A and contraposition camera B, the contraposition camera A and contraposition phase that the first X is slided to axis X-direction
Machine B can be slided along the first X to axis Z-direction, and second driving gantry is equipped with the 2nd X to axis, and the 2nd X is set on axis
Having can be along the 2nd X secondary contraposition camera A slided to axis X-direction and secondary contraposition camera B, the secondary contraposition camera A and two
The lens barrel group that can be slided along the 2nd X to axis X-direction, the secondary contraposition camera A, secondary contraposition are equipped between secondary contraposition camera B
Camera B and lens barrel group can be slided along the 2nd X to axis Z-direction.
Preferably, described first driving gantry and the second driving inverted u-shaped structure in gantry.
Preferably, the lens barrel group is connected to the 2nd X on axis by lens barrel group mounting plate.
The utility model has the beneficial effects that a kind of double-station direct putting type litho machine of the utility model, including conveying are linear
The transmitting device of formula, double-station double drive form have separated CCD and have aligned in advance and secondary contraposition, exposure and align in two stations
Production efficiency, stable structure, exposure efficiency height is greatly improved because the secondary contraposition time is less than 0.3S in upper completion.
Detailed description of the invention:
The utility model is described in detail by following specific embodiments and drawings for ease of explanation,.
Fig. 1 is the overall structure diagram of the utility model；
Fig. 2 is the overall flow schematic diagram of the utility model；
Fig. 3 be the utility model exposure method in align schematic diagram in advance；
Fig. 4 is secondary contraposition schematic diagram in the exposure method of the utility model.
In figure: 1- pedestal；2- conveyer belt；The first sucker of 3a-；The second sucker of 3b-；4-Y is to linear guides；5a- first drives
Driven portal；5b- second drives gantry；The first X of 6a- is to axis；The 2nd X of 6b- is to axis；7a- aligns camera A；7b- second aligns camera
B；7c- secondary contraposition camera A；7d- secondary contraposition camera B；8- lens barrel group；9- lens barrel group mounting plate；10a- product a；10b- is produced
Product b；10c- product c；10d- product d.
Specific embodiment:
To make the objectives, technical solutions and advantages of the present invention clearer, below by shown in the accompanying drawings
Specific embodiment describes the utility model.However, it should be understood that these descriptions are merely illustrative, and it is not intended to limit this reality
With novel range.In addition, in the following description, descriptions of well-known structures and technologies are omitted, to avoid unnecessarily mixing
Confuse the concept of the utility model.
As shown in Figs 1-4, a kind of double-station direct putting type litho machine of the present embodiment, including pedestal 1, conveyer belt 2, Y-direction line
Property guide rail 4, first drive gantry 5a, second driving gantry 5b, the first X to axis 6a, the 2nd X to axis 6b and lens barrel group 8, the bottom
Seat 1 is equipped with conveyer belt 2, and the first sucker 3a and the second sucker 3b is equipped in the conveyer belt 2, is located at conveying on the pedestal 1
2 side of band is equipped with Y-direction linear guides 4, and can slide along the Y-direction direction linear guides 4Y the is connected on the Y-direction linear guides 4
One driving gantry 5a and the second driving gantry 5b, first driving gantry 5a and the second inverted u-shaped structure of driving gantry 5b and
Positioned at 2 outside of conveyer belt, the first driving gantry 5a is equipped with the first X to axis 6a, and the first X is equipped with to axis 6a can edge
The contraposition camera A7a and contraposition camera B7b, the contraposition camera A7a and contraposition camera B7b that first X is slided to the direction axis 6aX are equal
It can be slided along the first X to the direction axis 6aZ, the second driving gantry 5b is equipped with the 2nd X to axis 6b, and the 2nd X is to axis 6b
Being equipped with can be along the 2nd X the secondary contraposition camera A7c slided to the direction axis 6bX and secondary contraposition camera B7d, the secondary contraposition
The lens barrel group 8 that can be slided along the 2nd X to the direction axis 6bX is equipped between camera A7c and secondary contraposition camera B7d, it is described secondary right
Position camera A7c, secondary contraposition camera B7d and lens barrel group 8 can be slided along the 2nd X to the direction axis 6bZ.
Specifically, X is plant width direction, and Y is device length direction (product direction of travel), and Z is device height direction
(upper and lower).Conveyer belt 2 is based on plant bottom case 1 and conveys station of all passing by each time along intermittent delivery product before Y-axis
Interval, the first sucker 3a and the second sucker 3b are set below conveyer belt 2, and vacuum suction during station works is stablized and is processed
Product.First driving gantry 5a and second driving gantry 5b can be moved forward and backward by Y-direction linear guides 4, be scanned pair
Position and exposure work.It aligns camera A7a and contraposition camera B7b can be with transverse shifting to axis 6a by the first X, it is pre- right to be scanned
Position work.Secondary contraposition camera A7c and secondary contraposition camera B7d can be scanned two to axis 6b by the 2nd X with transverse shifting
Secondary contraposition work.Lens barrel group 8 can also be exposed work to axis 6b by the 2nd X with transverse shifting.Align camera A7a, contraposition
Camera B7b, secondary contraposition camera A7c and secondary contraposition camera B7d have the function that Z-direction adjusts up and down, for adjusting focal length
Scanning contraposition.The function that lens barrel group 8 adjusts up and down with Z-direction, is exposed for adjusting focal length, and lens barrel group mounting plate 9 is used
Carry out fixed lens barrel group 8.Such as Fig. 2,10a is the product that upper complete material waits for pre- contraposition, 10b be in the product aligned in advance, 10c be in
The product of secondary contraposition and exposure, 10d are the product that exposure is completed, state to be taken away.
Specifically, a kind of double-station direct putting type litho machine of the present embodiment, exposure method the following steps are included:
(1) conveying products: first putting conveyer belt 2 for the product that need to be exposed, and conveyer belt 2 carries product and moves along the Y direction,
The corresponding position aligned in advance below intermittent delivery product to first driving gantry 5a forward；
(2) pre- contraposition: contraposition camera A7a and contraposition camera B7b or more automatic focus adjustable simultaneously carry out X-direction sliding, the
One driving gantry 5a carries out the sliding of Y-direction to scan four points of product corner, and then the size value of entire scan product, is counted
Calculate the space of a whole page of entire product and the positional relationship relative to four points；
(3) secondary contraposition: secondary contraposition camera A7c and secondary contraposition camera B7d scanning aligns scanned arbitrary point in advance,
According to this point, correlation data is obtained, Imagewise exposure position is quickly found out；
(4) expose: lens barrel group 8 according to the data of pre- contraposition and secondary contraposition, quickly adjust tri- directions X, Y, Z away from
From then second driving gantry 5b is moved along Y-direction, is carried out to product Imagewise exposure.
Specifically, conveyer belt 2 is to pull closed band loop using motor driven belt wheel, product is made to go ahead.Align camera
A7a and contraposition camera B7b or more automatic focus adjustable and the sliding for carrying out X-direction sliding, first driving gantry 5a progress Y-direction
Four points on product are scanned, if Fig. 3 tetra- points are respectively P01, P02, P03, P04, then L1, the L2 of entire scan product,
The size value of L3, L4, W1, W2 calculate the space of a whole page of entire product and the positional relationship relative to four points.It is quick when exposure
The distance in tri- directions X, Y, Z is adjusted, X-direction is adjusted from the 2nd X to axis 6b, and Y-direction is carried out by second driving gantry 5b
Adjustment, Z-direction are moved up and down to adjust by lens barrel group 8, and tri- direction adjustment of X, Y, Z can be combined according to the data of preceding scans
Come, is adjusted to required position.Pre- contraposition, it is certain that the first sucker 3a and second is needed to inhale when secondary contraposition and exposure operation
Disk 3b adsorbs product by taking out air generation negative pressure, makes product that cannot have the movement of any direction.First driving gantry
There is motor below the driving of 5a and second gantry 5b, as the source of driving power, Y-direction linear guides 4 play straight line walking process
The effect of middle guiding, first driving gantry 5a and second driving gantry 5b are moved along Y-direction.The running of lens barrel group 8 is light source handle
Image information projects product surface by certain multiplying power, completes exposure image.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed range is defined by the appending claims and its equivalent thereof.
Claims (3)
1. a kind of double-station direct putting type litho machine, it is characterised in that: including pedestal, conveyer belt, Y-direction linear guides, the first driving
To axis, the 2nd X to axis and lens barrel group, the pedestal is equipped with conveyer belt, the conveyer belt by gantry, second driving gantry, the first X
It is inside equipped with the first sucker and the second sucker, is located at conveyer belt side on the pedestal and is equipped with Y-direction linear guides, the Y-direction is linear
The first driving gantry that can be slided along Y-direction linear guides Y-direction and second driving gantry, first driving are connected on guide rail
Gantry and second driving gantry are located on the outside of conveyer belt, described first driving gantry equipped with the first X to axis, the first X to
Axis is equipped with can be along the contraposition camera A and contraposition camera B, the contraposition camera A and contraposition camera B that the first X is slided to axis X-direction
It can be slided along the first X to axis Z-direction, second driving gantry is equipped with the 2nd X to axis, and the 2nd X is equipped with to axis
It can be along the 2nd X secondary contraposition camera A slided to axis X-direction and secondary contraposition camera B, the secondary contraposition camera A and secondary
The lens barrel group that can be slided along the 2nd X to axis X-direction, the secondary contraposition camera A, secondary contraposition phase are equipped between contraposition camera B
Machine B and lens barrel group can be slided along the 2nd X to axis Z-direction.
2. a kind of double-station direct putting type litho machine according to claim 1, it is characterised in that: it is described first driving gantry and
The second driving inverted u-shaped structure in gantry.
3. a kind of double-station direct putting type litho machine according to claim 1, it is characterised in that: the lens barrel group passes through lens barrel
Group mounting plate is connected to the 2nd X on axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821138791.4U CN208351247U (en) | 2018-07-18 | 2018-07-18 | A kind of double-station direct putting type litho machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821138791.4U CN208351247U (en) | 2018-07-18 | 2018-07-18 | A kind of double-station direct putting type litho machine |
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| Publication Number | Publication Date |
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| CN208351247U true CN208351247U (en) | 2019-01-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821138791.4U Active CN208351247U (en) | 2018-07-18 | 2018-07-18 | A kind of double-station direct putting type litho machine |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108762009A (en) * | 2018-07-18 | 2018-11-06 | 苏州源卓光电科技有限公司 | A kind of double-station direct putting type litho machine and its exposure method |
| CN110297400A (en) * | 2019-06-19 | 2019-10-01 | 东莞市安达自动化设备有限公司 | A kind of Two In and Two Out double-station exposure machine |
| CN112083632A (en) * | 2020-09-22 | 2020-12-15 | 深圳市先地图像科技有限公司 | Digital projection maskless exposure device and method based on LED array |
-
2018
- 2018-07-18 CN CN201821138791.4U patent/CN208351247U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108762009A (en) * | 2018-07-18 | 2018-11-06 | 苏州源卓光电科技有限公司 | A kind of double-station direct putting type litho machine and its exposure method |
| CN110297400A (en) * | 2019-06-19 | 2019-10-01 | 东莞市安达自动化设备有限公司 | A kind of Two In and Two Out double-station exposure machine |
| CN112083632A (en) * | 2020-09-22 | 2020-12-15 | 深圳市先地图像科技有限公司 | Digital projection maskless exposure device and method based on LED array |
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Address after: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Patentee after: Yuanzhuo Micro Nano Technology (Suzhou) Co.,Ltd. Address before: 215000 Room 102, building C5, Ting LAN lane, Suzhou Industrial Park, Jiangsu, China, 192 Patentee before: ADVANCED MICRO OPTICS.INC |