CN112083632A - Digital projection maskless exposure device and method based on LED array - Google Patents
Digital projection maskless exposure device and method based on LED array Download PDFInfo
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- CN112083632A CN112083632A CN202011003373.6A CN202011003373A CN112083632A CN 112083632 A CN112083632 A CN 112083632A CN 202011003373 A CN202011003373 A CN 202011003373A CN 112083632 A CN112083632 A CN 112083632A
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- led array
- optical
- digital projection
- maskless exposure
- guide rail
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
- G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
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- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention relates to the technical field of maskless optical manufacturing, in particular to a digital projection maskless exposure device and a method based on an LED array, wherein the digital projection maskless exposure device based on the LED array comprises: an LED array including a driver and light emitting diodes, a plurality of the light emitting diode arrays forming an LED array, the driver controlling each light emitting diode respectively; and the optical assembly focuses emergent light of the LED array on an imaging surface, so that exposure of the surface of the photosensitive material on the imaging surface is realized, and an image is formed. The invention has the beneficial effects that: an LED array shares an optical component, has higher projected pixel density, more uniform image quality and extremely low pixel cost; the LED array has self-luminous property, no external light source is needed, and a reflecting component is eliminated, so that the light path is simple, and the utilization rate of light energy is higher.
Description
Technical Field
The invention relates to the technical field of maskless optical manufacturing, in particular to a digital projection maskless exposure device and method based on an LED array.
Background
The mainstream photo-fabrication methods in the fields of screen printing screen-printing, PCB (printed circuit board) maskless fabrication, LCD (liquid crystal display) maskless lithography and semiconductor maskless lithography are still conventional mask replication and photo-etching techniques. The technique has the disadvantages of high mask and exposure equipment and maintenance cost, long production period of the mask and low efficiency. The maskless optical manufacturing is a leading-edge technical concept, and aims to shorten the process flow, improve the efficiency and reduce the cost.
The current major maskless optical fabrication methods include: laser direct scanning imaging technology, DMD (digital micromirror device) digital mask scanning imaging technology.
In the laser direct scanning imaging technology, lasers with independent focusing lenses are used for forming a laser linear array, so that the pixel cost is high; in the DMD digital mask technology, a micro reflector array needs an external light source and a reflecting component, and adopts mechanical swing to adjust phase difference, so that the light path is complex, the light energy utilization rate is low, and the exposure speed and efficiency are not high.
Disclosure of Invention
The present invention is directed to a digital projection maskless exposure apparatus and method based on LED array, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the invention provides the following technical scheme:
an LED array based digital projection maskless exposure device, comprising: an LED array including a driver and light emitting diodes, a plurality of the light emitting diode arrays forming an LED array, the driver controlling each light emitting diode respectively; and the optical assembly focuses emergent light of the LED array on an imaging surface, so that exposure of the surface of the photosensitive material on the imaging surface is realized, and an image is formed.
As a further scheme of the invention: the optical assembly comprises an imaging lens and an optical lens barrel, and the LED array and the imaging lens are respectively arranged at two ends of the optical lens barrel.
As a still further scheme of the invention: the optical module is arranged on the guide rail assembly, and the guide rail assembly drives the optical module to move in multiple directions.
As a still further scheme of the invention: the guide rail assembly includes a first guide member on which the optical assembly is mounted and a second guide member on which the first guide member is mounted.
As a still further scheme of the invention: the first guide piece comprises a sliding plate and a guide rail, the sliding plate drives the optical assembly to move on the guide rail, and the guide rail is installed on the second guide piece.
As a still further scheme of the invention: the second guide piece comprises a sliding block and a scanning guide rail, and two ends of the guide rail are respectively installed on the scanning guide rail which is arranged oppositely in a sliding mode through the sliding block.
The invention provides another technical scheme that: a digital projection maskless exposure method based on an LED array, which uses the digital projection maskless exposure device based on the LED array as described in any one of the above, comprising the following steps: the driver controls the LED array to emit light to form a projection image, the projection image is focused on an imaging surface through the optical assembly, the surface of the photosensitive material is exposed, the guide rail assembly is arranged to drive the optical assembly to move in multiple directions, and meanwhile, the LED array continuously exposes the surface of the photosensitive material to form an exposure image.
As a further scheme of the invention: the guide rail component drives the optical component to move in a plurality of directions and is set as follows: the guide rail component drives the optical component to reciprocate in a first direction; then driving the optical component to move for a set distance in a second direction perpendicular to the first direction; the guide rail component drives the optical component to reciprocate in the first direction, and the steps are circulated until a complete exposure image is formed.
As a still further scheme of the invention: the set distance is the same as the width of the exposure image.
Compared with the prior art, the invention has the beneficial effects that: an LED array shares an optical component, has higher projected pixel density, more uniform image quality and extremely low pixel cost; the LED array has self-luminous characteristic, does not need an external light source, and eliminates a key reflecting component of the DMD, so that the light path is simple, the light energy utilization rate is higher, the projected image contrast is higher, and the exposure image with higher resolution can be obtained.
Drawings
Fig. 1 is a schematic structural diagram of a digital projection maskless exposure apparatus based on an LED array according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of an LED array in an embodiment of the invention.
Fig. 3 is a schematic structural diagram of an optical lens barrel according to an embodiment of the present invention.
In the drawings: the system comprises a light emitting diode support plate 1, an optical lens barrel 2, an imaging lens 3, a projection image 4, an exposure image 5, a photosensitive material 6, a scanning traveling crane in the 7-X direction, a guide rail in the 8-Y direction, a movable sliding plate in the 9-Y direction, a scanning guide rail in the 10-X direction, a light emitting diode array (LED array) 11 and a light beam 12.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
Referring to fig. 1, in an embodiment of the present invention, an LED array-based digital projection maskless exposure apparatus includes: an LED array 11 including a driver and Light Emitting Diodes (LEDs), a plurality of which form the LED array 11, the driver controlling each of the LEDs, respectively; and the optical assembly focuses the emergent light of the LED array 11 on an imaging surface, realizes the exposure of the surface of the photosensitive material on the imaging surface, and forms an image.
Specifically, as shown in fig. 2 and 3, a plurality of LEDs are closely arranged into a plurality of linear LED arrays on an LED carrier 1; the optical assembly comprises an imaging lens 3 and an optical lens barrel 2, and the LED array 11 and the imaging lens 3 are respectively arranged at two ends of the optical lens barrel 2. Controlling part of LEDs in the LED array to emit light by a driver to form a projected image 4, focusing the projected image 4 into a light beam 12 through an imaging lens 3, and projecting the light beam 12 on the surface of the photosensitive material 6 for exposure, wherein the light energy of the emergent light exposes the surface of the photosensitive material 6 to form an exposure image 5; an LED array shares an optical component, has higher projected pixel density, more uniform image quality and extremely low pixel cost; the LED array has self-luminous characteristic, does not need an external light source, and eliminates a key reflecting component of the DMD, so that the light path is simple, the light energy utilization rate is higher, the projected image contrast is higher, and the exposure image with higher resolution can be obtained.
Referring to fig. 1, in another embodiment of the present invention, the optical module further includes a guide rail assembly, and one or more optical modules are mounted on the guide rail assembly, and the guide rail assembly drives the optical modules to move in multiple directions.
Specifically, the guide rail assembly comprises a first guide part and a second guide part, the optical assembly is installed on the first guide part, and the first guide part is installed on the second guide part. The first guide piece comprises an X-direction scanning travelling crane 7 and an X-direction scanning guide rail 10, and the second guide piece comprises a Y-direction guide rail 8 and a Y-direction movable sliding plate 9. Namely, the optical lens barrels 2 of the two optical components are arranged on a Y-direction movable sliding plate 9 in parallel, and the Y-direction movable sliding plate 9 drives the optical components to move under the guidance of a Y-direction guide rail 8; the Y-direction guide rail 8 is fixedly laid on the top of the X-direction scanning travelling crane 7, and the X-direction scanning travelling crane 7 moves under the guidance of the X-direction scanning guide rail 10.
Referring to fig. 1, in a preferred embodiment of the present invention, the first guiding element includes a sliding plate and a guiding rail, the sliding plate drives the optical assembly to move on the guiding rail, and the guiding rail is installed on the second guiding element; the second guide piece comprises a sliding block and a scanning guide rail, and two ends of the guide rail are respectively installed on the scanning guide rail which is arranged oppositely in a sliding mode through the sliding block.
The optical assembly is fixedly arranged on the sliding plate, and the movement of the sliding plate on the guide rail and the movement of the sliding block on the scanning guide rail are relatively independent or synchronous; when the movement of the sliding plate on the guide rail and the movement of the sliding block on the scanning guide rail are synchronous movement, the moving path of the focus of the light beam focused by the optical assembly on the surface of the photosensitive material is the composite direction of the movement direction of the sliding plate and the movement direction of the sliding block. The method is suitable for scenes with different motion directions of the exposed image and the optical assembly.
Referring to fig. 1, in another embodiment of the present invention, a digital projection maskless exposure method based on an LED array, which uses any one of the above-mentioned digital projection maskless exposure apparatuses based on an LED array, includes the following steps: the driver controls the LED array to emit light to form a projection image, the projection image is focused on an imaging surface through the optical assembly, the surface of the photosensitive material is exposed, the guide rail assembly is arranged to drive the optical assembly to move in multiple directions, and meanwhile, the LED array continuously exposes the surface of the photosensitive material to form an exposure image.
Specifically, the driver is obtained according to the characteristics of the required exposure image to control the light emitting sequence and the number of the LEDs in the LED array, the driver controls the LED array to emit light to form a projection image 4, and the projection image 4 is focused into a light beam 12 through an imaging lens 3 of the optical assembly to be projected on the surface of the exposure material. The guide rail component drives the optical component to move, and meanwhile, the LED array continuously exposes the surface of the photosensitive material; meanwhile, the driver controls part of the LEDs in the LED array to emit light to form a new projection image 4, the new projection image is focused into a light beam 12 through the imaging lens 3 to be projected on the surface of the exposure material, and the surface of the photosensitive material is continuously exposed to form an exposure image.
Compared with the prior art, the LED array has the self-luminous characteristic, does not need an external light source, and eliminates a key reflecting component of the DMD, so that the light path is simple, the light energy utilization rate is higher, the projected image contrast is higher, and the higher-resolution exposure image can be obtained.
Referring to fig. 1, in the embodiment of the present invention, the guiding rail assembly drives the optical assembly to move in multiple directions: the guide rail component drives the optical component to reciprocate in a first direction; then driving the optical component to move for a set distance in a second direction perpendicular to the first direction; the guide rail component drives the optical component to reciprocate in the first direction, and the steps are circulated until a complete exposure image is formed. The set distance is the same as the width of the exposure image.
The first direction can be defined as the same direction as the array direction of the LEDs in the LED array, the second direction is perpendicular to the first direction, when the optical assembly completes the set exposure through the reciprocating motion of the guide rail assembly in the zero point of the second direction and the first direction, the guide rail assembly drives the optical assembly to move for a set distance in the zero point of the second direction, and then the reciprocating motion is continuously performed in the first direction to complete the set exposure; and circulating the steps until a complete exposure image is formed.
The working principle of the invention is as follows: a plurality of light emitting diodes are closely arranged into a plurality of linear LED arrays on a light emitting diode carrier plate 1; the optical assembly comprises an imaging lens 3 and an optical lens barrel 2, and the LED array 11 and the imaging lens 3 are respectively arranged at two ends of the optical lens barrel 2. The driver controls part of the LEDs in the LED array to emit light to form a projection image 4, the projection image 4 is focused through the imaging lens 3 into light beams 12 to be projected on the surface of the photosensitive material 6 for exposure, and the light energy of the emergent light exposes the surface of the photosensitive material 6 to form an exposure image 5.
It should be noted that the driver used in the present invention is an application of the prior art, and those skilled in the art can implement the intended function according to the related description, or implement the technical features required to be accomplished by the similar technology, and will not be described in detail herein.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
It will be understood that the present disclosure is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.
Claims (9)
1. An LED array-based digital projection maskless exposure device, comprising:
an LED array including a driver and light emitting diodes, a plurality of the light emitting diode arrays forming an LED array, the driver controlling each light emitting diode respectively;
and the optical assembly focuses emergent light of the LED array on an imaging surface, so that exposure of the surface of the photosensitive material on the imaging surface is realized, and an image is formed.
2. The LED array-based digital projection maskless exposure apparatus of claim 1, wherein the optical assembly comprises an imaging lens and an optical lens barrel, the LED array and the imaging lens are respectively disposed at two ends of the optical lens barrel.
3. The LED array based digital projection maskless exposure system of claim 1, further comprising a rail assembly, one or more of said optical assemblies being mounted on the rail assembly, said rail assembly moving the optical assemblies in a plurality of directions.
4. The LED array based digital projection maskless exposure system of claim 3, wherein said guide rail assembly comprises a first guide member and a second guide member, said optical assembly being mounted on said first guide member, said first guide member being mounted on said second guide member.
5. The LED array-based digital projection maskless exposure apparatus of claim 4, wherein said first guide member comprises a slide plate and a guide rail, said slide plate moving said optical assembly on said guide rail, said guide rail being mounted on said second guide member.
6. The LED array-based digital projection maskless exposure apparatus of claim 5, wherein the second guide member comprises a slider and a scanning rail, and both ends of the rail are slidably mounted on the oppositely disposed scanning rails through the slider, respectively.
7. A LED array based digital projection maskless exposure method, characterized in that the LED array based digital projection maskless exposure apparatus according to any of claims 1 to 6 is used, comprising the steps of:
the driver controls the LED array to emit light to form a projection image, the projection image is focused on an imaging surface through the optical assembly, the surface of the photosensitive material is exposed, the guide rail assembly is arranged to drive the optical assembly to move in multiple directions, and meanwhile, the LED array continuously exposes the surface of the photosensitive material to form an exposure image.
8. The LED array-based digital projection maskless exposure method of claim 7, wherein said guiding assembly is configured to move the optical assembly in multiple directions: the guide rail component drives the optical component to reciprocate in a first direction; then driving the optical component to move for a set distance in a second direction perpendicular to the first direction; the guide rail component drives the optical component to reciprocate in the first direction, and the steps are circulated until a complete exposure image is formed.
9. The LED array based digital projection maskless exposure method of claim 8, wherein said set distance is the same as the width of the exposed image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011003373.6A CN112083632A (en) | 2020-09-22 | 2020-09-22 | Digital projection maskless exposure device and method based on LED array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011003373.6A CN112083632A (en) | 2020-09-22 | 2020-09-22 | Digital projection maskless exposure device and method based on LED array |
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| CN112083632A true CN112083632A (en) | 2020-12-15 |
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| CN202011003373.6A Pending CN112083632A (en) | 2020-09-22 | 2020-09-22 | Digital projection maskless exposure device and method based on LED array |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0790132A2 (en) * | 1996-02-13 | 1997-08-20 | Oki Data Corporation | Optical print head |
| EP1243971A2 (en) * | 2001-03-22 | 2002-09-25 | Fuji Photo Film Co., Ltd. | Exposure device |
| JP2005041091A (en) * | 2003-07-22 | 2005-02-17 | Fuji Xerox Co Ltd | Printing head and light emitting element circuit board |
| KR20060130980A (en) * | 2005-06-14 | 2006-12-20 | 삼성전자주식회사 | Image forming apparatus and light emitting apparatus |
| CN204790310U (en) * | 2015-05-27 | 2015-11-18 | 中山新诺科技股份有限公司 | Crane span structure formula does not have mask digital laser printing device |
| CN208351247U (en) * | 2018-07-18 | 2019-01-08 | 苏州源卓光电科技有限公司 | A kind of double-station direct putting type litho machine |
| CN109521645A (en) * | 2017-09-18 | 2019-03-26 | 北京德瑞工贸有限公司 | One kind being based on Micro-LED maskless projection scanning formula ultraviolet exposure machine |
| CN109521646A (en) * | 2017-09-18 | 2019-03-26 | 北京德瑞工贸有限公司 | One kind projecting fixed ultraviolet exposure machine based on Micro-LED maskless |
| CN111025858A (en) * | 2019-12-27 | 2020-04-17 | 合肥众群光电科技有限公司 | Equipment for realizing ultra-high-speed exposure |
-
2020
- 2020-09-22 CN CN202011003373.6A patent/CN112083632A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0790132A2 (en) * | 1996-02-13 | 1997-08-20 | Oki Data Corporation | Optical print head |
| EP1243971A2 (en) * | 2001-03-22 | 2002-09-25 | Fuji Photo Film Co., Ltd. | Exposure device |
| JP2005041091A (en) * | 2003-07-22 | 2005-02-17 | Fuji Xerox Co Ltd | Printing head and light emitting element circuit board |
| KR20060130980A (en) * | 2005-06-14 | 2006-12-20 | 삼성전자주식회사 | Image forming apparatus and light emitting apparatus |
| CN204790310U (en) * | 2015-05-27 | 2015-11-18 | 中山新诺科技股份有限公司 | Crane span structure formula does not have mask digital laser printing device |
| CN109521645A (en) * | 2017-09-18 | 2019-03-26 | 北京德瑞工贸有限公司 | One kind being based on Micro-LED maskless projection scanning formula ultraviolet exposure machine |
| CN109521646A (en) * | 2017-09-18 | 2019-03-26 | 北京德瑞工贸有限公司 | One kind projecting fixed ultraviolet exposure machine based on Micro-LED maskless |
| CN208351247U (en) * | 2018-07-18 | 2019-01-08 | 苏州源卓光电科技有限公司 | A kind of double-station direct putting type litho machine |
| CN111025858A (en) * | 2019-12-27 | 2020-04-17 | 合肥众群光电科技有限公司 | Equipment for realizing ultra-high-speed exposure |
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