CN110297400A - A kind of Two In and Two Out double-station exposure machine - Google Patents
A kind of Two In and Two Out double-station exposure machine Download PDFInfo
- Publication number
- CN110297400A CN110297400A CN201910533238.3A CN201910533238A CN110297400A CN 110297400 A CN110297400 A CN 110297400A CN 201910533238 A CN201910533238 A CN 201910533238A CN 110297400 A CN110297400 A CN 110297400A
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- mould group
- barn door
- rack
- fixedly connected
- double
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000004809 Teflon Substances 0.000 claims abstract description 5
- 229920006362 Teflon® Polymers 0.000 claims abstract description 5
- 239000000969 carrier Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Accommodation For Nursing Or Treatment Tables (AREA)
Abstract
The invention discloses a kind of Two In and Two Out double-station exposure machines, including rack, loading and unloading manipulator, assembly line mechanism, double carrier platforms, three axis compensate mould group, carrier body, barn door CCD positioning module, barn door goes up and down mould group, exposure light source mould group and supplied materials CCD positioning module, four end of rack bottom surface is fixedly connected to foot prop, the beneficial effects of the present invention are: source of parallel light is after barn door, barn door will not need exposure place and cover, the light for not covering place can impinge upon on product, product is exposed using the energy item of light, by the way that double carrier platforms are arranged, multiple products can be exposed simultaneously, production efficiency greatly promotes, it is conveyed simultaneously using Teflon idler wheel, it can better ensure that cleanliness and protection product inside machine, a set of CCD matches an adjustment platform and the more convenient camera of graduated scale Adjustment, the Pingdu between light source and carrier and barn door can be adjusted freely, and exposure efficiency gets a promotion.
Description
Technical field
The present invention relates to a kind of exposure machine, in particular to a kind of Two In and Two Out double-station exposure machine belongs to exposure machine equipment
Technical field.
Background technique
Ultraviolet exposure machine refers to the ultraviolet light that UVA wavelength is issued by opening light, will be on film or other transparent bodies
Image information be transferred to the machinery equipment on the surface for being coated with photoactive substance, it is real that existing exposure machine is all made of single carrier platform
It now passes in and out, exposure efficiency is low, it is difficult to realize the mass production of product；And product is bright main using mechanical in disengaging exposure machine
Formula pushes positioning, so that exposure positioning accuracy is not high, error rate is larger, while conveying mechanism is not easily cleaned, and causes machine internal
Cleanliness is not high, is easy to influence product quality.
Summary of the invention
The purpose of the present invention is to provide a kind of Two In and Two Out double-station exposure machines, to solve to propose in above-mentioned background technique
The problem of.
To achieve the above object, the invention provides the following technical scheme: a kind of Two In and Two Out double-station exposure machine, including machine
Frame, loading and unloading manipulator, assembly line mechanism, double carrier platforms, three axis compensation mould group, carrier body, barn door CCD positioning module,
Barn door goes up and down mould group, exposure light source mould group and supplied materials CCD positioning module, and the two sides of the rack upper surface are equipped with charging & discharging machine
Tool hand, the loading and unloading manipulator are made of guide rail and robot drives slide plate, and the two sides of the rack upper surface are vertically solid
Surely it is connected with vertical plate, level is fixedly connected with guide rail, the table of two guide rail opposite sides between every two pairs of vertical plates
Face slidably connects robot drives slide plate, is respectively equipped on two telescopic rods of two robot drives slide plate bottom ends
For drawing the feeding sucker of product to be exposed and for drawing the blanking sucker for having exposed product, the rack upper surface and position
It is fixedly connected with assembly line mechanism between two loading and unloading manipulators, the assembly line mechanism is by going out slat production line and into plate stream
Ejecting plate flowing water is fixedly connected on waterline composition, the rack upper surface and the mounting plate being located between two loading and unloading manipulators
Line and into slat production line, it is described to go out slat production line and to be bonded to each other between slat production line.
Preferably, the rack upper surface and it is located at assembly line mechanism two sides and is fixedly connected to double carrier platforms, two
The both ends of double carrier platform upper surfaces are equipped with three axis compensation mould group, and three axis compensation mould group upper end is equipped with carrier
Body, and the carrier body on the three axis compensation mould group top at two double carrier platform upper surfaces both ends is respectively No.1 carrier and two
Number carrier, the rack upper surface and is located at two double carrier platform middles and is equipped with barn door lifting mould group, the shading
Plate goes up and down mould group and passes through by connecting plate and barn door ontology, the rack upper surface and positioned at two double carrier platform middles
Four struts are fixedly connected with a pair of of connecting plate, are fixedly connected to barn door ontology inside two connecting plates of bottom end,
Four corners of two connecting plates of upper end are fixedly connected to the double drive structures of high rigidity, two connections of upper end
Plate middle is vertically fixedly connected with exposure light source mould group, and two barn doors go up and down below mould groups and are located at table in rack
Face is equipped with barn door CCD positioning module, the rack upper surface and is located at two barn doors lifting mould group both ends and is equipped with
Expect that CCD positioning module, the supplied materials CCD positioning module are made of panel and barn door mould group of taking pictures, the rack upper surface and
Pass through three support levels positioned at two barn door lifting mould group both ends and is fixedly connected with panel, four panel upper surfaces
Inside be equipped with installation and take pictures mould group there are four barn door.
Preferably, the machine frame inside is fixedly connected to expansion bend while being located at the corresponding top of four foot props.
Preferably, the lower end of four three axis compensation mould groups is equipped with scaling board.
Preferably, it is equipped with inside the connecting plate of two barn door lifting mould group bottom ends and positioned at barn door ontology side
Barn door clinching, equal activity is cased with high rigidity die bushing between each strut bottom end and rack, and connects described in every two
Adjusting horizontal screw is threaded between fishplate bar.
Preferably, each barn door mould group side of taking pictures is equipped with adjustment platform, and two panel upper surfaces
And it is located at below each adjustment platform and is equipped with graduated scale.
Preferably, it is described go out slat production line and into slat production line be all made of Teflon idler wheel conveying.
Preferably, four end of rack bottom surface is fixedly connected to foot prop, the rack bottom surface and is located at each foot prop one
Side is fixedly connected to universal wheel.
Compared with prior art, the beneficial effects of the present invention are: by setting loading and unloading manipulator and going out into slat production line,
In the case where two carriers act on, hand-set lid is delivered to immediately below exposure light source mould group, barn door mould group of taking pictures is taken pictures, then
It is positioned by barn door CDD positioning module, so that precision is higher, for source of parallel light after barn door, barn door will not
It needs to expose place to cover, the light for not covering place can impinge upon on product, expose product using the energy item of light, entirely
The exposure work of product can be realized in a set of circulation process after getting off, can be simultaneously to multiple products by the way that double carrier platforms are arranged
It is exposed, production efficiency greatly promotes, while can eliminate big rotating platform error, while being conveyed using Teflon idler wheel, can
Better ensure that cleanliness and protection product, a set of CCD are more convenient with an adjustment platform and graduated scale inside machine
Camera adjustment, the Pingdu between light source and carrier and barn door can be adjusted freely, and exposure efficiency gets a promotion.
Detailed description of the invention
Fig. 1 is perspective view of the invention；
Fig. 2 is main view of the invention；
Fig. 3 is loading and unloading manipulator structural schematic diagram of the invention；
Fig. 4 is assembly line mechanism structural schematic diagram of the invention；
Fig. 5 is double carrier platform structure schematic diagrames of the invention；
Fig. 6 is that carrier body of the invention and three axis compensate modular structure schematic diagram；
Fig. 7 is that barn door of the invention goes up and down modular structure schematic diagram；
Fig. 8 is that exposure light source mould group and connecting plate of the invention cooperate structural schematic diagram；
Fig. 9 is supplied materials CCD positioning module structural schematic diagram of the invention；
Figure 10 is exposure schematic illustration of the invention；
Figure 11 is workflow schematic diagram of the invention.
In figure: 1, rack；2, foot prop；3, universal wheel；4, loading and unloading manipulator；41, vertical plate；42, guide rail；43, manipulator
Drive slide plate；5, assembly line mechanism；51, go out slat production line；52, into slat production line；6, double carrier platforms；7, three axis compensate mould
Group；71, scaling board；8, carrier body；81, No.1 carrier；82, No. two carriers；9, barn door CCD positioning module；10, barn door liter
Mould group drops；101, connecting plate；102, barn door ontology；103, barn door clinching；104, high rigidity is double drives structure；105, high rigidity
Die bushing；106, strut；107, horizontal screw is adjusted；11, exposure light source mould group；12, supplied materials CCD positioning module；121, it props up
Frame；122, panel；123, platform is adjusted；124, barn door is taken pictures mould group；13, expansion bend；14, feeding sucker is drawn；15, it draws
Blanking sucker.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-11 is please referred to, the present invention provides a kind of technical solution: a kind of Two In and Two Out double-station exposure machine, including rack
1, loading and unloading manipulator 4, assembly line mechanism 5, double carrier platforms 6, three axis compensate mould group 7, carrier body 8, barn door CCD positioning mould
Group 9, barn door lifting mould group 10, exposure light source mould group 11 and supplied materials CCD positioning module 12,1 bottom surface of rack, four end is fixed to be connected
It is connected to foot prop 2,1 bottom surface of rack and is located at each 2 side of foot prop and is fixedly connected to universal wheel 3, the two sides of 1 upper surface of rack are set
There is loading and unloading manipulator 4, loading and unloading manipulator 4 is made of guide rail 42 and robot drives slide plate 43, the two sides of 1 upper surface of rack
It is vertically fixedly connected with vertical plate 41, level is fixedly connected with guide rail 42 between every two pairs of vertical plates 41, and two guide rails 42 are opposite
The surface of side slidably connects robot drives slide plate 43, on two telescopic rods of two 43 bottom ends of robot drives slide plate
It is respectively provided with the feeding sucker 14 for drawing product to be exposed and for drawing the blanking sucker 15 for having exposed product, rack 1
Upper surface and it is fixedly connected with assembly line mechanism 5 between two loading and unloading manipulators 4, assembly line mechanism 5 is by ejecting plate flowing water
It line 51 and is formed into slat production line 52, it is fixed on 1 upper surface of rack and the mounting plate being located between two loading and unloading manipulators 4 to connect
It is connected to out slat production line 51 and into slat production line 52, slat production line 51 and is bonded to each other out between slat production line 52.
Wherein, 1 upper surface of rack and it is located at 5 two sides of assembly line mechanism and is fixedly connected to double carrier platforms 6, two double carries
The both ends of tool 6 upper surface of platform are equipped with three axis compensation mould group 7, and three axis compensation, 7 upper end of mould group is equipped with carrier body 8, and two
The carrier body 8 on three axis compensation, 7 top of mould group at double 6 upper surface both ends of carrier platform is respectively No.1 carrier 81 and No. two carriers
82,1 upper surface of rack and it is located at two double 6 middles of carrier platform and is equipped with barn door lifting mould group 10, barn door goes up and down mould
Group 10 passes through four by connecting plate 101 and barn door ontology 102,1 upper surface of rack and positioned at two double 6 middles of carrier platform
A strut 106 is fixedly connected with a pair of of connecting plate 101, is fixedly connected to barn door sheet inside two connecting plates 101 of bottom end
Body 102, four corners of two connecting plates 101 of upper end are fixedly connected to that high rigidity is double to drive structures 104, and two of upper end
101 middle of connecting plate is vertically fixedly connected with exposure light source mould group 11, and two barn doors go up and down 10 lower section of mould groups and are located at
1 upper surface of rack is equipped with barn door CCD positioning module 9,1 upper surface of rack and is located at two barn doors and goes up and down 10 both ends of mould group
It is equipped with supplied materials CCD positioning module 12, supplied materials CCD positioning module 12 is made of panel 122 and barn door mould group 124 of taking pictures, machine
1 upper surface of frame and it is located at two barn doors lifting, 10 both ends of mould group and passes through three 121 levels of bracket and be fixedly connected with panel
122, the inside of four 122 upper surfaces of panel is equipped with installation and takes pictures mould group 124 there are four barn door.
Wherein, 1 inside of rack is fixedly connected to expansion bend 13 while being located at four corresponding tops of foot prop 2, is convenient for foot
The rotation of frame 2 and universal wheel 3 uses.
Wherein, the lower end of four three axis compensation mould groups 7 is equipped with scaling board 71, convenient for barn door is taken pictures 124 He of mould group
Two coordinates that supplied materials CCD positioning module 12 marks associate.
Wherein, it is set inside the connecting plate 101 of two barn door lifting 10 bottom ends of mould group and positioned at 102 side of barn door ontology
There is barn door clinching 103, equal activity is cased with high rigidity die bushing 105, and every two between each 106 bottom end of strut and rack 1
It is threaded between a connecting plate 101 and adjusts horizontal screw 107, be conveniently adjusted light source and barn door ontology 102, carrier body 8
Between Pingdu.
Wherein, each barn door take pictures 124 side of mould group be equipped with adjustment platform 123, and two 122 upper surfaces of panel and
Graduated scale, the adjustment of more convenient camera are equipped with below each adjustment platform 123.
Wherein, out slat production line 51 and into slat production line 52 be all made of Teflon idler wheel conveying, better ensure that in machine
Portion's cleanliness and protection product.
Specifically, the present invention is in use, under working condition, loading and unloading manipulator 4 passes through robot drives slide plate 43 for hand
From the No.1 carrier 81 for getting double carrier platforms 6 into slat production line 52, the hand-set lid on No.1 carrier 81 passes through cover plate
Barn door mould group 124 of taking pictures is taken pictures, while positioning, the hand after positioning are realized under the action of positioning module 9 barn door CCD
Cover plate enters exposure position and is exposed, and is taken out again by loading and unloading manipulator 4 from slat production line 51 out after the completion of exposure.
In the description of the present invention, it is to be understood that, term " coaxial ", " bottom ", " one end ", " top ", " middle part ",
The orientation or positional relationship of the instructions such as " other end ", "upper", " side ", " top ", "inner", " front ", " center ", " both ends " is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
Limitation of the invention.
In addition, term " first ", " second ", " third ", " the 4th " are used for description purposes only, and should not be understood as instruction or
It implies relative importance or implicitly indicates the quantity of indicated technical characteristic, define " first ", " second ", " the as a result,
Three ", the feature of " the 4th " can explicitly or implicitly include at least one of the features.
In the present invention unless specifically defined or limited otherwise, term " installation ", " setting ", " connection ", " fixation ",
Terms such as " being screwed on " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be with
It is mechanical connection, is also possible to be electrically connected；It can be directly connected, two can also be can be indirectly connected through an intermediary
The interaction relationship of connection or two elements inside a element, unless otherwise restricted clearly, for the common of this field
For technical staff, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (8)
1. a kind of Two In and Two Out double-station exposure machine, which is characterized in that including rack (1), loading and unloading manipulator (4), assembly line
Mechanism (5), double carrier platforms (6), three axis compensate mould group (7), carrier body (8), barn door CCD positioning module (9), barn door liter
Drop mould group (10), exposure light source mould group (11) and supplied materials CCD positioning module (12), the two sides of rack (1) upper surface are equipped with
Loading and unloading manipulator (4), the loading and unloading manipulator (4) are made of guide rail (42) and robot drives slide plate (43), the machine
The two sides of frame (1) upper surface are vertically fixedly connected with vertical plate (41), horizontal fixed company between every two pairs of vertical plates (41)
It being connected to guide rail (42), the surface of two guide rail (42) opposite sides slidably connects robot drives slide plate (43), and two
The feeding suction for drawing product to be exposed is respectively provided on two telescopic rods of a robot drives slide plate (43) bottom end
Disk (14) and for drawing the blanking sucker (15) for having exposed product, rack (1) upper surface and is located at two charging & discharging machines
It is fixedly connected between tool hand (4) assembly line mechanism (5), the assembly line mechanism (5) is by going out slat production line (51) and into plate stream
It is fixedly connected on waterline (52) composition, rack (1) upper surface and the mounting plate being located between two loading and unloading manipulators (4)
There is slat production line (51) out and into slat production line (52), slat production line (51) out and is mutually pasted between slat production line (52)
It closes.
2. a kind of Two In and Two Out double-station exposure machine according to claim 1, it is characterised in that: table on the rack (1)
Face and it is located at assembly line mechanism (5) two sides and is fixedly connected to double carrier platforms (6), table on two double carrier platforms (6)
The both ends in face are equipped with three axis compensation mould group (7), and three axis compensation mould group (7) upper end is equipped with carrier body (8), and two institutes
State three axis compensation mould group (7) top at double carrier platform (6) upper surface both ends carrier body (8) be respectively No.1 carrier (81) and
No. two carriers (82), rack (1) upper surface and are located at two double carrier platform (6) middles and are equipped with barn door lifting mould
Group (10), barn door lifting mould group (10) is by connecting plate (101) and barn door ontology (102), rack (1) upper surface
And passes through four struts (106) positioned at two double carrier platform (6) middles and be fixedly connected with a pair of of connecting plate (101), bottom
It is fixedly connected to barn door ontology (102) inside the connecting plate (101) of two of end, two connecting plates of upper end
(101) four corners are fixedly connected to double drives structure (104) of high rigidity, and the connecting plate (101) of two of upper end is just
Centre is vertically fixedly connected with exposure light source mould group (11), and two barn doors go up and down below mould group (10) and are located at rack
(1) upper surface is equipped with barn door CCD positioning module (9), rack (1) upper surface and is located at two barn doors and goes up and down mould groups
(10) both ends are equipped with supplied materials CCD positioning module (12), and the supplied materials CCD positioning module (12) is by panel (122) and barn door
Mould group of taking pictures (124) composition, rack (1) upper surface and is located at two barn doors lifting mould group (10) both ends and passes through three
Bracket (121) level is fixedly connected with panel (122), and the inside of four panel (122) upper surfaces, which is equipped with, is equipped with four
A barn door takes pictures mould group (124).
3. a kind of Two In and Two Out double-station exposure machine according to claim 1, it is characterised in that: the rack (1) is internal
While being located at the corresponding top of four foot props (2) is fixedly connected to expansion bend (13).
4. a kind of Two In and Two Out double-station exposure machine according to claim 2, it is characterised in that: four three axis compensation
The lower end of mould group (7) is equipped with scaling board (71).
5. a kind of Two In and Two Out double-station exposure machine according to claim 2, it is characterised in that: two barn door liters
It drops connecting plate (101) inside of mould group (10) bottom end and is located at barn door ontology (102) side and be equipped with barn door clinching (103),
Equal activity is cased with high rigidity die bushing (105) between each strut (106) bottom end and rack (1), and described in every two
It is threaded between connecting plate (101) and adjusts horizontal screw (107).
6. a kind of Two In and Two Out double-station exposure machine according to claim 2, it is characterised in that: each barn door is clapped
Adjustment platform (123) is equipped with according to mould group (124) side, and two panel (122) upper surfaces and to be located at each adjustment flat
Graduated scale is equipped with below platform (123).
7. a kind of Two In and Two Out double-station exposure machine according to claim 1, it is characterised in that: the slat production line out
(51) and into slat production line (52) it is all made of the conveying of Teflon idler wheel.
8. a kind of Two In and Two Out double-station exposure machine according to claim 1, it is characterised in that: rack (1) bottom surface
Four ends are fixedly connected to foot prop (2), rack (1) bottom surface and be located at each foot prop (2) side be fixedly connected to it is universal
It takes turns (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910533238.3A CN110297400A (en) | 2019-06-19 | 2019-06-19 | A kind of Two In and Two Out double-station exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910533238.3A CN110297400A (en) | 2019-06-19 | 2019-06-19 | A kind of Two In and Two Out double-station exposure machine |
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| CN110297400A true CN110297400A (en) | 2019-10-01 |
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| CN201910533238.3A Pending CN110297400A (en) | 2019-06-19 | 2019-06-19 | A kind of Two In and Two Out double-station exposure machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111256968A (en) * | 2020-02-12 | 2020-06-09 | 浙江康信汽车电器有限公司 | Full-automatic detection line of switch |
| CN111977387A (en) * | 2020-08-17 | 2020-11-24 | 辰星(苏州)自动化设备有限公司 | Frame separating mechanism |
| CN112099320A (en) * | 2020-09-29 | 2020-12-18 | 广东华恒智能科技有限公司 | Double-station exposure equipment |
| CN116974152A (en) * | 2023-07-31 | 2023-10-31 | 苏州天准科技股份有限公司 | Material conveying device with multiple degrees of freedom leveling and non-contact exposure equipment |
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| CN112099320A (en) * | 2020-09-29 | 2020-12-18 | 广东华恒智能科技有限公司 | Double-station exposure equipment |
| CN116974152A (en) * | 2023-07-31 | 2023-10-31 | 苏州天准科技股份有限公司 | Material conveying device with multiple degrees of freedom leveling and non-contact exposure equipment |
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Address after: No.17, xiangxidong District Road, Liaobu Town, Dongguan City, Guangdong Province 523000 Applicant after: Guangdong anda Intelligent Equipment Co., Ltd Address before: 523000, No. 6, pine West Road, Southern China industrial town, Liaobu Town, Guangdong, Dongguan Applicant before: ANDA AUTOMATIC EQUIPMENT (DONGGUAN) Co.,Ltd. |