CN1311302C - 在气体环境中执行曝光处理的基片处理*** - Google Patents
在气体环境中执行曝光处理的基片处理*** Download PDFInfo
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- CN1311302C CN1311302C CNB2004100712661A CN200410071266A CN1311302C CN 1311302 C CN1311302 C CN 1311302C CN B2004100712661 A CNB2004100712661 A CN B2004100712661A CN 200410071266 A CN200410071266 A CN 200410071266A CN 1311302 C CN1311302 C CN 1311302C
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- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
- Y02E10/47—Mountings or tracking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
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