CN114826185B - Surface acoustic wave filter packaging method and structure - Google Patents
Surface acoustic wave filter packaging method and structure Download PDFInfo
- Publication number
- CN114826185B CN114826185B CN202210562498.5A CN202210562498A CN114826185B CN 114826185 B CN114826185 B CN 114826185B CN 202210562498 A CN202210562498 A CN 202210562498A CN 114826185 B CN114826185 B CN 114826185B
- Authority
- CN
- China
- Prior art keywords
- welding
- cover plate
- conical roller
- electrode
- conical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1064—Mounting in enclosures for surface acoustic wave [SAW] devices
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention relates to the technical field of electronic packaging, and provides a packaging method and a packaging structure of a surface acoustic wave filter, wherein the packaging structure of the surface acoustic wave filter comprises a tube seat, a built-in electrode, a welding ring, a metal cover plate, a piezoelectric substrate, sound absorption glue and a silicon aluminum wire; the tube seat is internally provided with a plurality of built-in electrodes, one ends of the built-in electrodes are exposed on the inner surface of the tube seat, the other ends of the built-in electrodes are exposed on the outer surface of the tube seat, and a plurality of arc-shaped grooves are formed in the four side surfaces of the tube seat; the tube seat is connected with a welding ring, and the top of the welding ring is connected with a metal cover plate. Through above-mentioned technical scheme, solved among the prior art at the surface acoustic wave filter in the encapsulation process, because there is the fillet region at tube, weld ring and metal covering plate corner position, the corner position is different with the angle of gyro wheel electrode contact and the angle of straight line region and gyro wheel electrode contact, leads to the corner to produce the problem of warping and damaging.
Description
Technical Field
The invention relates to the technical field of electronic packaging, in particular to a packaging method and a structure of a surface acoustic wave filter.
Background
In the prior art, in the process of packaging the surface acoustic wave filter, a fillet area exists at the corner positions of a tube shell, a welding ring and a metal cover plate, but in the welding process, the corner position and the linear area at the edge of the metal cover plate can be uniformly welded once, so that the contact angle between the corner position and a roller electrode is different from the contact angle between the linear area and the roller electrode, meanwhile, the contact area and the contact pressure at the corner position cannot reach the welding standard, the corner is deformed and damaged, and the welding seam is not firm;
in addition, in the process of rolling welding by using the roller electrode, the ring surface of the roller electrode is always kept at an acute angle with the horizontal plane, namely, a single inward pressure is applied to the edge of the metal cover plate, so that the molten part can be extruded and contracted inwards, and the weld joint at the lower side cannot be completely filled by the molten material, so that the welding is not firm.
Disclosure of Invention
The invention provides a packaging method and a structure of a surface acoustic wave filter, which solve the problems that in the prior art, in the packaging process of the surface acoustic wave filter, because a tube shell, a welding ring and a corner position of a metal cover plate have a fillet area, in the welding process, the corner position and a straight line area at the edge of the metal cover plate can be subjected to single unified welding, so that the contact angle between the corner position and a roller electrode is different from the contact angle between the straight line area and the roller electrode, and meanwhile, the contact area and the contact pressure at the corner position cannot reach the welding standard, so that the corner is deformed and damaged, and the welding line is not firm.
The technical scheme of the invention is as follows:
a method of surface acoustic wave filter packaging, comprising the steps of:
the method comprises the following steps: vacuumizing, baking and air washing a tube cavity of a device to be packaged;
step two: adjusting and controlling the dew point inside the seam welding equipment cavity to enable the water vapor content inside the equipment cavity to meet the seam welding requirement;
step three: filling high-purity nitrogen as protective gas into the cavity of the seam welding equipment;
step four: two conical roller electrodes are used for pressing a metal cover plate to be packaged and two sides of a metal frame on a tube shell, welding current flows through the tube shell from one end of a secondary coil of a transformer through one conical roller electrode and returns to the other end of the secondary coil of the transformer through the other conical roller electrode, two opposite sides of the cover plate are welded, only linear areas of the opposite sides are welded, corner areas of the two sides are reserved for not welding, and the side edges of the other two sides of the metal cover plate are blocked and limited;
step five: after two opposite sides of the cover plate are welded, rotating the shell for ninety degrees relative to the electrode, and then welding linear areas of the other two opposite sides in the vertical direction;
step six: the angle of adjustment metal covering plate and tube to the position of conical gyro wheel electrode is adjusted, makes the edge of corner position fillet perpendicular with the generating line of conical gyro wheel electrode, then controls conical gyro wheel electrode at the position roll welding on fillet limit, guarantees the edge of fillet constantly and the generating line of conical gyro wheel electrode is perpendicular, welds four corner positions in proper order, accomplishes the welding encapsulation of whole shell from this.
As a further technical scheme, in the first step, the tube cavity of the device to be packaged is heated and baked, and meanwhile, the tube cavity of the device to be packaged is vacuumized and filled with nitrogen, so that the humidity and the oxygen content in the tube cavity are reduced.
And as a further technical scheme, controlling the dew point in the cavity of the seam welding equipment to be below-55 ℃ in the second step and the third step, and filling high-purity nitrogen as protective gas for seam welding.
As a further technical scheme, the secondary coil of the transformer, the two conical roller electrodes and the tube shell in the fourth step form a loop, the loop forms high resistance at the contact position of the electrodes and the cover plate, a large amount of heat is generated under the action of pulse current to enable the contact position to be in a molten state, and the two conical roller electrodes are controlled to roll in a reciprocating mode at the welding edge of the cover plate to form continuous welding points.
As a further technical scheme, in the process that the two conical roller electrodes roll in a reciprocating mode on the welding edge of the cover plate, the down pressure of the conical roller electrodes on the cover plate is detected, whether the pressure of the conical roller electrodes exceeds a standard value or not is detected, and after the pressure exceeds the standard value, the system can feed back to adjust and reduce the down pressure of the conical roller electrodes, so that the down pressure of the conical roller electrodes can meet the standard value.
As a further technical scheme, two conical roller electrodes roll in a reciprocating manner at the welding edge of the cover plate, and the edge of a fillet at the welding edge is kept to be vertical to a bus of the conical roller electrodes all the time; for the same edge, the number of times of the reciprocating rolling of the conical roller electrode is determined by the welding completion degree, when the rolling is odd, the central axis of the conical roller electrode is controlled to be parallel to the horizontal plane, and when the rolling is even, the generatrix of the conical roller electrode is controlled to be parallel to the horizontal plane.
As a further technical solution, the packaging structure of the surface acoustic wave filter comprises a fixing mechanism, wherein the fixing mechanism comprises a rotation control assembly, and the rotation control assembly is installed on a machine tool in a workshop;
a mounting base plate mounted on the rotating portion of the rotation control assembly,
a plurality of pressure sensors are arranged on the mounting base plate, the pressure sensors are equidistantly arranged on the upper surface of the mounting base plate,
a load-bearing bottom plate mounted on the plurality of pressure sensors,
four sliding components are arranged and are respectively arranged on four side edges of the mounting bottom plate,
four mounting plates are arranged and are respectively mounted on the moving parts of the four sliding components,
the four groups of arc supporting plates are respectively arranged on the four mounting plates, and the arc grooves on the side surfaces of each group of arc supporting plates corresponding to the tube seats are the same in number and matched in shape.
As a further technical scheme, still include the safety cover, the safety cover is the circular arc cover plate form, be provided with a plurality of arc recess on the surface of safety cover.
As a further technical scheme, the arrangement positions of the pressure sensors on the mounting base plate are the same as the welding edge path of the metal cover plate, and only two rows of the pressure sensors corresponding to the edges of the two metal cover plates welded by the two conical roller electrodes are in an open state in the same time period.
As a further technical proposal, the fixing mechanism also comprises,
and the limiting frame strips are four, the four limiting frame strips are respectively arranged on the upper sides of the four arc supporting plates, and the four limiting frame strips are matched with the four side edges of the metal cover plate and are provided with corresponding fillet areas.
The working principle and the beneficial effects of the invention are as follows:
according to the invention, the humidity and the oxygen content in the tube cavity are reduced, and the chip in the tube cavity is not easily oxidized after being packaged and is not influenced by external factors, so that the chip is protected; when the conical roller electrode is used for welding, the downward pressure of the conical roller electrode on the cover plate is detected in real time, whether the pressure exceeds a standard value or not is detected, and after the pressure exceeds the standard value, the system can perform feedback to adjust and reduce the downward pressure of the conical roller electrode, so that the downward pressure of the conical roller electrode is always in a reasonable range, and the cover plate is ensured to be smoothly welded; the angle adjustment in the rolling welding process of the conical roller electrode presses the melt at the edge part downwards, so that the melt plugs the gap at the edge of the cover plate, after plugging, the generatrix of the conical roller electrode is parallel to the horizontal plane, namely, the ring surface of the conical roller electrode is completely contacted with the edge of the cover plate, and the conical roller electrode compacts the plugged melt through the ring surface of the conical roller electrode, thereby improving the welding strength.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Fig. 1 is a partial structural sectional view of a saw filter applied to a package structure according to the present invention;
FIG. 2 is a schematic three-dimensional structure of the protective cover of the present invention;
FIG. 3 is a schematic three-dimensional structure of the fixing mechanism of the present invention;
FIG. 4 is a schematic three-dimensional view of a portion of the fastening assembly of the present invention;
in the figure: 1. tube socket, 2, electrode, 3, welding ring, 4, metal cover plate, 5, piezoelectric substrate, 6, sound absorption glue, 7, silicon aluminum wire, 8, protective cover, 9, mounting base plate, 10, pressure sensor, 11, bearing base plate, 12, sliding assembly, 13, mounting plate, 14, arc fagging, 15 and limiting frame strip.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any inventive step, are intended to be within the scope of the present invention.
The embodiment provides a method for packaging a surface acoustic wave filter, which is characterized by comprising the following steps:
the method comprises the following steps: vacuumizing, baking and air washing a tube cavity of a device to be packaged;
step two: adjusting and controlling the dew point inside the seam welding equipment cavity to enable the water vapor content inside the equipment cavity to meet the seam welding requirement;
step three: filling high-purity nitrogen as a protective gas into the cavity of the seam welding equipment;
step four: two conical roller electrodes are used for pressing a metal cover plate to be packaged and two sides of a metal frame on a tube shell, welding current flows through the tube shell from one end of a secondary coil of a transformer through one conical roller electrode and returns to the other end of the secondary coil of the transformer through the other conical roller electrode, two opposite sides of the cover plate are welded, only linear areas of the opposite sides are welded, corner areas of the two sides are reserved for not welding, and the side edges of the other two sides of the metal cover plate are blocked and limited;
step five: after two opposite sides of the cover plate are welded, rotating the shell for ninety degrees relative to the electrode, and then welding linear areas of the other two opposite sides in the vertical direction;
step six: the angle of adjustment metal covering plate and tube to the position of conical gyro wheel electrode is adjusted, makes the edge of corner position fillet perpendicular with the generating line of conical gyro wheel electrode, then controls conical gyro wheel electrode at the position roll welding on fillet limit, guarantees the edge of fillet constantly and the generating line of conical gyro wheel electrode is perpendicular, welds four corner positions in proper order, accomplishes the welding encapsulation of whole shell from this.
In the first step, the tube cavity of the device to be packaged is heated and baked, and is vacuumized and filled with nitrogen gas, so that the humidity and oxygen content in the tube cavity are reduced.
In this embodiment, reduce the inside humidity of lumen and oxygen content, make the inside chip of lumen difficult for the oxidation after the encapsulation, do not receive external factors's influence to play the guard action to the chip.
And in the second step and the third step, the dew point in the cavity of the seam welding equipment is controlled to be below minus 55 ℃, and high-purity nitrogen is filled as protective gas for seam welding.
In the embodiment, the water vapor content and the air tightness of the cavity of the device and the seam welding equipment can meet the optimal external physical conditions of seam welding.
And in the fourth step, a secondary coil of the transformer, two conical roller electrodes and a tube shell form a loop, the loop forms high resistance at the contact part of the electrodes and the cover plate, a large amount of heat is generated under the action of pulse current to enable the contact part to be in a molten state, and the two conical roller electrodes are controlled to roll in a reciprocating manner at the welding edge of the cover plate to form continuous welding spots.
In this embodiment, through the reciprocal roll of two toper gyro wheel electrodes, realize carrying out continuous welding to the border of apron.
Two conical roller electrodes detect the downforce of the conical roller electrodes on the cover plate in the process that the welding edges of the cover plate roll in a reciprocating mode, whether the pressure exceeds a standard value is detected, and after the pressure exceeds the standard value, the system can make feedback to adjust and reduce the downforce of the conical roller electrodes, so that the downforce meets the standard value.
When using conical gyro wheel electrode to weld, if conical gyro wheel electrode's overdraft is too big, then can lead to apron edge melting to warp and is flattened, lead to the thickness attenuation of apron edge part, intensity reduces, can not reach the service standard, obvious sunken can appear in the apron edge part simultaneously, and the influence is pleasing to the eye, unable normal use, when the apron receives the pressure too big simultaneously, can take place the apron skew, leads to the unable normal use in device encapsulation back.
In this embodiment, when using conical gyro wheel electrode to weld, the downforce of the cover plate of real-time detection conical gyro wheel electrode detects whether its pressure exceeds the standard value, treats behind the pressure exceeds the standard value, and the system can make the feedback and adjust the downforce of conical gyro wheel electrode and reduce, has guaranteed that the downforce of conical gyro wheel electrode is all the time in reasonable within range, has guaranteed the smooth welding of cover plate.
The two conical roller electrodes roll in a reciprocating manner at the welding edge of the cover plate, and the edge of a fillet at the welding edge is kept to be vertical to a bus of the conical roller electrodes all the time; for the same edge, the number of times of the reciprocating rolling of the conical roller electrode is determined by the welding completion degree, when the rolling is odd, the central axis of the conical roller electrode is controlled to be parallel to the horizontal plane, and when the rolling is even, the generatrix of the conical roller electrode is controlled to be parallel to the horizontal plane.
In this embodiment, when the central axis of the conical roller electrode is parallel to the horizontal plane, an acute angle is formed between the annular part of the conical roller electrode and the edge of the cover plate, in this case, the conical roller electrode is welded to the edge of the cover plate in a melting manner, the melt of the edge part is pressed downwards through the inclination of the annular surface of the conical roller electrode, so that the gap of the edge of the cover plate is blocked by the melt, after blocking, the bus of the conical roller electrode is parallel to the horizontal plane, namely, the annular surface of the conical roller electrode is completely contacted with the edge of the cover plate, at this time, the conical roller electrode compacts the blocked melt through the annular surface of the conical roller electrode, and the welding strength is improved.
As shown in fig. 1 to 4, the surface acoustic wave filter includes a tube seat 1, a built-in electrode 2, a weld ring 3, a metal cover plate 4, a piezoelectric substrate 5, a sound absorption glue 6 and a silicon-aluminum wire 7;
the multi-electrode-type solar cell comprises a tube seat 1, a plurality of built-in electrodes 2, a plurality of metal wires and a plurality of metal wires, wherein the tube seat 1 is internally provided with the built-in electrodes 2, one ends of the built-in electrodes 2 are exposed on the inner surface of the tube seat 1, the other ends of the built-in electrodes 2 are exposed on the outer surface of the tube seat 1, and the four side surfaces of the tube seat 1 are respectively provided with a plurality of arc-shaped grooves;
the welding ring 3 is connected to the tube seat 1, the metal cover plate 4 is connected to the top of the welding ring 3, the piezoelectric substrate 5 is connected to the bottom in the tube seat 1 through adhesive glue, and a plurality of sound absorption glues 6 are arranged on the edge of the upper surface of the piezoelectric substrate 5;
the silicon-aluminum wires 7 are provided with a plurality of silicon-aluminum wires, one end of each silicon-aluminum wire 7 is connected with the piezoelectric substrate 5, and the other end of each silicon-aluminum wire 7 is connected with one built-in electrode 2.
A packaging structure of a surface acoustic wave filter, the packaging structure of the surface acoustic wave filter comprises a fixing mechanism, the fixing mechanism comprises,
the rotation control assembly is arranged on a machine tool in a workshop;
a mounting base plate 9, the mounting base plate 9 being mounted on a rotating portion of the rotation control assembly,
a plurality of pressure sensors 10 are arranged on the pressure sensor 10, the pressure sensors 10 are equidistantly installed on the upper surface of the installation bottom plate 9,
a bearing bottom plate 11, wherein the bearing bottom plate 11 is installed on the plurality of pressure sensors 10,
four sliding components 12 are arranged, four sliding components 12 are respectively arranged on four side edges of the installation bottom plate 9,
four mounting plates 13 are arranged on the mounting plates 13, the four mounting plates 13 are respectively mounted on the moving parts of the four sliding assemblies 12,
the arc fagging 14, the arc fagging 14 is provided with four groups, and four groups the arc fagging 14 is installed respectively in four on the mounting panel 13, and every group arc fagging 14 with the arc recess quantity on the corresponding side of tube socket 1 is the same and the shape matches.
Still include safety cover 8, safety cover 8 is the circular arc cover plate form, be provided with a plurality of arc recess on safety cover 8's the surface.
The arrangement positions of the pressure sensors 10 on the mounting base plate 9 are the same as the welding edge path of the metal cover plate, and in the same time period, only two rows of the pressure sensors 10 corresponding to the edges of the two metal cover plates welded by the two conical roller electrodes are in an open state.
The fixing mechanism also comprises a fixing mechanism and a fixing mechanism,
the limiting frame strips 15 are four, the limiting frame strips 15 are respectively arranged on the four groups of the upper sides of the arc supporting plates 14, the limiting frame strips 15 are matched with the four side edges of the metal cover plate 4, and corresponding fillet areas are arranged.
In this embodiment, before welding the silicon aluminum wire 7 to the built-in electrode 2 and the piezoelectric substrate 5, the protective cover 8 is firstly buckled on the piezoelectric substrate 5 to cover the sound-absorbing glue 6, and then the silicon aluminum wire 7 passes through the arc-shaped groove on the outer surface of the protective cover 8, so that when the silicon aluminum wire 7 is welded, the welding head is not easy to contact with the sound-absorbing glue 6, and the influence of high temperature on the sound-absorbing glue 6 is avoided.
When packaging is carried out, a tube seat 1 is placed on a bearing bottom plate 11, then a metal cover plate 4 is placed on a welding ring 3 in a normal position, two conical roller electrodes 2 are used for pressing two edges of the metal cover plate 4 to be packaged, then sliding assemblies 12 corresponding to the other two edges of the metal cover plate 4 are controlled to drive a mounting plate 13, arc-shaped supporting plates 14 and limiting frame strips 15 to move, so that the two groups of arc-shaped supporting plates 14 are embedded into arc-shaped grooves in the side surfaces of the tube seat 1 to fix the tube seat 1, meanwhile, the limiting frame strips 15 limit the other two edges of the metal cover plate 4, the fillet positions of the metal cover plate 4 are surrounded by the fillet regions of the limiting frame strips 15, when the two conical roller electrodes 2 are welded, the metal cover plate 4 can be fixed by the other two non-welded edges, the linear regions of the limiting frame strips 15 can block the non-welded edges for limitation, and the fillet regions of the limiting frame strips 15 can block fillets in the other direction;
in addition, in the welding process, the pressure sensor 10 can detect the pressure value of the conical roller electrode 2 to the metal cover plate 4 in real time, and after the pressure value exceeds a standard value, the pressure sensor 10 sends a signal to a system so as to control the conical roller electrode 2 to be lifted to reduce the pressure.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for packaging an SAW filter, comprising the steps of:
the method comprises the following steps: vacuumizing, baking and air washing a tube cavity of a device to be packaged;
step two: adjusting and controlling the dew point inside the seam welding equipment cavity to enable the water vapor content inside the equipment cavity to meet the seam welding requirement;
step three: filling high-purity nitrogen as protective gas into the cavity of the seam welding equipment;
step four: two conical roller electrodes are used for pressing a metal cover plate to be packaged and two sides of a metal frame on a tube shell, welding current flows through the tube shell from one end of a secondary coil of a transformer through one conical roller electrode and returns to the other end of the secondary coil of the transformer through the other conical roller electrode, two opposite sides of the cover plate are welded, only linear areas of the opposite sides are welded, corner areas of the two sides are reserved for not welding, and the side edges of the other two sides of the metal cover plate are blocked and limited;
step five: after welding two opposite sides of the cover plate, rotating the shell for ninety degrees relative to the electrode, and then welding linear areas of the other two opposite sides in the vertical direction;
step six: the angle of adjustment metal covering plate and tube to the position of conical gyro wheel electrode is adjusted, makes the edge at corner position fillet perpendicular with the generating line of conical gyro wheel electrode, then controls conical gyro wheel electrode at the position roll welding on fillet limit, guarantees constantly that the edge at fillet is perpendicular with the generating line of conical gyro wheel electrode, welds four corner positions in proper order, accomplishes the welding encapsulation of whole shell from this.
2. The packaging method of claim 1, wherein in the first step, the tube cavity of the device to be packaged is heated and baked, and the tube cavity of the device to be packaged is vacuumized and filled with nitrogen gas, so as to reduce the humidity and oxygen content inside the tube cavity.
3. The SAW filter packaging method of claim 2, wherein in step two and step three, the dew point in the cavity of the seam welding equipment is controlled below-55 ℃, and high-purity nitrogen gas is filled as shielding gas for seam welding.
4. The method for packaging the sound surface filter according to any one of claims 1 to 3, wherein the secondary coil of the transformer, the two conical roller electrodes and the tube shell in the fourth step form a loop, the loop forms high resistance at the contact part of the electrode and the cover plate, and generates a large amount of heat under the action of pulse current to enable the contact part to be in a molten state, and the two conical roller electrodes are controlled to roll in a reciprocating manner at the welding edge of the cover plate to form continuous welding spots.
5. The SAW filter packaging method of claim 4, wherein during the reciprocal rolling of the welding edges of the cover plate, the two conical roller electrodes detect the downforce of the conical roller electrodes on the cover plate, detect whether the pressure exceeds a standard value, and after the pressure exceeds the standard value, the system will make feedback to adjust and reduce the downforce of the conical roller electrodes to make the downforce meet the standard value.
6. The packaging method of claim 5, wherein two conical roller electrodes roll reciprocally at the welding edge of the cover plate, keeping the edge of the fillet at the welding edge perpendicular to the generatrix of the conical roller electrodes at all times; for the same edge, the reciprocating rolling times of the conical roller electrode are determined by the welding completion degree, when the rolling times are odd, the central axis of the conical roller electrode is controlled to be parallel to the horizontal plane, and when the rolling times are even, the generatrix of the conical roller electrode is controlled to be parallel to the horizontal plane.
7. A package structure of a surface acoustic filter, which is packaged using the method for packaging a surface acoustic filter according to claim 1, wherein the package structure of a surface acoustic filter comprises a fixing mechanism, the fixing mechanism comprising,
the rotation control assembly is arranged on a machine tool of a workshop;
a mounting base plate (9), the mounting base plate (9) being mounted on a rotating portion of the rotation control assembly,
the pressure sensors (10), the pressure sensors (10) are provided with a plurality of pressure sensors, the pressure sensors (10) are equidistantly arranged on the upper surface of the mounting bottom plate (9),
a load-bearing bottom plate (11), wherein the load-bearing bottom plate (11) is arranged on the plurality of pressure sensors (10),
four sliding assemblies (12), wherein the four sliding assemblies (12) are respectively arranged on the four side edges of the installation bottom plate (9),
four mounting plates (13), wherein the four mounting plates (13) are respectively arranged on the moving parts of the four sliding components (12),
the arc fagging (14), arc fagging (14) are provided with four groups, and four groups arc fagging (14) are installed respectively in four on mounting panel (13).
8. The packaging structure of surface acoustic wave filter according to claim 7, further comprising a protective cover (8), wherein the protective cover (8) is in the shape of a circular arc cover plate, and a plurality of arc grooves are disposed on the outer surface of the protective cover (8).
9. The packaging structure of the SAW filter, according to claim 7, wherein said pressure sensors (10) are arranged on said mounting base plate (9) at the same position as the welding edge path of the metal cover plate, and only two rows of said pressure sensors (10) corresponding to two metal cover plate edges where two conical roller electrodes are welded are in an on state in the same time period.
10. The SAW filter package structure of claim 9, wherein said fixing mechanism further comprises,
limiting frame strips (15), limiting frame strips (15) are provided with four, four limiting frame strips (15) are respectively installed on four groups arc fagging (14) upside, four limiting frame strips (15) with four side phase-matchs of metal cover plate (4) to be provided with corresponding fillet region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210562498.5A CN114826185B (en) | 2022-05-23 | 2022-05-23 | Surface acoustic wave filter packaging method and structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210562498.5A CN114826185B (en) | 2022-05-23 | 2022-05-23 | Surface acoustic wave filter packaging method and structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114826185A CN114826185A (en) | 2022-07-29 |
| CN114826185B true CN114826185B (en) | 2023-03-10 |
Family
ID=82517724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210562498.5A Active CN114826185B (en) | 2022-05-23 | 2022-05-23 | Surface acoustic wave filter packaging method and structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114826185B (en) |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6048433A (en) * | 1996-12-03 | 2000-04-11 | Murata Manufacturing Co., Ltd. | Sealing structure and method of sealing electronic component |
| JP2005184309A (en) * | 2003-12-18 | 2005-07-07 | Matsushita Electric Ind Co Ltd | Surface acoustic wave device and manufacturing method therefor |
| JP2008199660A (en) * | 2008-04-24 | 2008-08-28 | Epson Toyocom Corp | Piezoelectric substrate, piezoelectric vibrator element, piezoelectric vibrator, piezoelectric oscillator, piezoelectric wafer and its manufacturing method |
| WO2010032982A2 (en) * | 2008-09-19 | 2010-03-25 | 주식회사 씨에스티 | Acoustic signal/electric signal conversion device and manufacturing method thereof |
| CN101814904A (en) * | 2010-04-24 | 2010-08-25 | 烟台大明电子有限公司 | Quartz crystal resonator and manufacture process thereof |
| CN107534429A (en) * | 2015-07-17 | 2018-01-02 | 株式会社村田制作所 | Acoustic wave device and its manufacture method |
| CN109462384A (en) * | 2018-12-28 | 2019-03-12 | 河北时硕微芯科技有限公司 | A kind of SAW filter and production method |
| CN110993570A (en) * | 2019-12-20 | 2020-04-10 | 苏州科阳光电科技有限公司 | Wafer level packaging structure and packaging method |
| CN211743127U (en) * | 2020-05-23 | 2020-10-23 | 浙江蓝晶芯微电子有限公司 | Packaging structure of quartz wafer |
| CN112436817A (en) * | 2020-12-07 | 2021-03-02 | 苏州晶方半导体科技股份有限公司 | Surface acoustic wave filter chip packaging manufacturing method and structure thereof |
| CN213661583U (en) * | 2020-12-07 | 2021-07-09 | 苏州晶方半导体科技股份有限公司 | Surface acoustic wave filter chip packaging structure |
| CN114188473A (en) * | 2021-10-18 | 2022-03-15 | 吉林大学 | Packaging structure and method of surface acoustic wave device |
| CN216356658U (en) * | 2021-11-06 | 2022-04-19 | 深圳亿康锐达科技有限公司 | Crystal oscillator with protection function |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014197615A (en) * | 2013-03-29 | 2014-10-16 | 日本電波工業株式会社 | Electronic device and manufacturing method of the same |
| US9331667B2 (en) * | 2014-07-21 | 2016-05-03 | Triquint Semiconductor, Inc. | Methods, systems, and apparatuses for temperature compensated surface acoustic wave device |
| CN106301283A (en) * | 2016-11-07 | 2017-01-04 | 无锡吉迈微电子有限公司 | The encapsulating structure of SAW filter and manufacture method |
| US11502067B2 (en) * | 2018-07-26 | 2022-11-15 | Advanced Semiconductor Engineering, Inc. | Package structure and method for manufacturing the same |
| JP2020123804A (en) * | 2019-01-30 | 2020-08-13 | セイコーエプソン株式会社 | Oscillator, manufacturing method of the same, electronic device, and movable body |
| CN114094978B (en) * | 2022-01-19 | 2022-04-15 | 深圳新声半导体有限公司 | Decoupling packaging structure of surface acoustic wave filter bank |
-
2022
- 2022-05-23 CN CN202210562498.5A patent/CN114826185B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6048433A (en) * | 1996-12-03 | 2000-04-11 | Murata Manufacturing Co., Ltd. | Sealing structure and method of sealing electronic component |
| JP2005184309A (en) * | 2003-12-18 | 2005-07-07 | Matsushita Electric Ind Co Ltd | Surface acoustic wave device and manufacturing method therefor |
| JP2008199660A (en) * | 2008-04-24 | 2008-08-28 | Epson Toyocom Corp | Piezoelectric substrate, piezoelectric vibrator element, piezoelectric vibrator, piezoelectric oscillator, piezoelectric wafer and its manufacturing method |
| WO2010032982A2 (en) * | 2008-09-19 | 2010-03-25 | 주식회사 씨에스티 | Acoustic signal/electric signal conversion device and manufacturing method thereof |
| CN101814904A (en) * | 2010-04-24 | 2010-08-25 | 烟台大明电子有限公司 | Quartz crystal resonator and manufacture process thereof |
| CN107534429A (en) * | 2015-07-17 | 2018-01-02 | 株式会社村田制作所 | Acoustic wave device and its manufacture method |
| CN109462384A (en) * | 2018-12-28 | 2019-03-12 | 河北时硕微芯科技有限公司 | A kind of SAW filter and production method |
| CN110993570A (en) * | 2019-12-20 | 2020-04-10 | 苏州科阳光电科技有限公司 | Wafer level packaging structure and packaging method |
| CN211743127U (en) * | 2020-05-23 | 2020-10-23 | 浙江蓝晶芯微电子有限公司 | Packaging structure of quartz wafer |
| CN112436817A (en) * | 2020-12-07 | 2021-03-02 | 苏州晶方半导体科技股份有限公司 | Surface acoustic wave filter chip packaging manufacturing method and structure thereof |
| CN213661583U (en) * | 2020-12-07 | 2021-07-09 | 苏州晶方半导体科技股份有限公司 | Surface acoustic wave filter chip packaging structure |
| CN114188473A (en) * | 2021-10-18 | 2022-03-15 | 吉林大学 | Packaging structure and method of surface acoustic wave device |
| CN216356658U (en) * | 2021-11-06 | 2022-04-19 | 深圳亿康锐达科技有限公司 | Crystal oscillator with protection function |
Non-Patent Citations (3)
| Title |
|---|
| NO2气敏LB膜及其微结构传感器研究;谢丹;《中国优秀博硕士学位论文全文数据库 (博士) 信息科技辑》;20020615(第1(2002年)期);I140-46 * |
| Reliability study of high-density EBGA packages using the Cu metallized silicon;Liyu Yang 等;《IEEE Transactions on Components and Packaging Technologies》;20091231;第31卷(第3期);702-711 * |
| 超声表面波应力无损检测技术研究;邵营;《中国优秀硕士学位论文全文数据库 工程科技Ⅰ辑》;20170215(第2(2017年)期);B020-52 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114826185A (en) | 2022-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114826185B (en) | Surface acoustic wave filter packaging method and structure | |
| US6264708B1 (en) | Method of manufacturing a prismatic battery | |
| KR20200014278A (en) | Vacuum glass products | |
| CN1074316C (en) | Method of fastening strip of thin sheet metal on conical separation disc of thin sheet metal and separation disc provided in this manner with strip of thin sheet metal | |
| CN1243777A (en) | High-frequency heating and pressurizing technology and equipment for soldering ring and planar parts made of different metals | |
| JP3198817B2 (en) | Lamination welding method for narrow groove butt welding of fixed pipe | |
| CA2211617A1 (en) | Consumable electrode type arc welding method and device | |
| JPH08315788A (en) | Manufacture of square battery | |
| EP0076104B1 (en) | Package for semicondutor device and method of manufacturing it | |
| KR101277848B1 (en) | Resistance spot welder | |
| CN205074665U (en) | Welding wheel symmetry contact resistance roll welding mechanism | |
| CN108746948A (en) | T connector full penetration exempts from back chipping Lincoln weld horizontal position welding technique | |
| CN107824939A (en) | A kind of photodetector parallel seam welding device and method | |
| JP2003001428A (en) | Device for temporarily welding lid in package sealing | |
| JP3022183B2 (en) | Corrugated Welding Method for Corrugated Laminated Plate Welding Robot | |
| JP3198816B2 (en) | First layer welding method for single-sided butt welding of fixed pipes | |
| JPH08104139A (en) | Roll molding | |
| CN109175687A (en) | A kind of industrial automation welding robot | |
| KR100569058B1 (en) | Welding machine for both spot and seam welding | |
| CN113857627A (en) | Welding method for fillet welding of medium-thickness steel plate at top | |
| JPH08108270A (en) | Narrow gap butt welding method of fixed tube | |
| EP4300593A1 (en) | Welding method for photovoltaic cell and photovoltaic module | |
| JPH0635061B2 (en) | Narrow groove TIG welding equipment | |
| JP3166511B2 (en) | Narrow butt welding method for fixed pipe | |
| JPH08108272A (en) | Narrow gap butt welding method of fixed tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230531 Address after: 210000 Lishui Economic Development Zone, Nanjing, Jiangsu Province Patentee after: NANJING QINZHI ELECTRONIC TECHNOLOGY CO.,LTD. Address before: 065300 Langfang City, Hebei Province, Dachang Chao Bai River Industrial Area Patentee before: HEBEI SHISHUO MICROCHIP TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |