CN109462384A - A kind of SAW filter and production method - Google Patents
A kind of SAW filter and production method Download PDFInfo
- Publication number
- CN109462384A CN109462384A CN201811622047.6A CN201811622047A CN109462384A CN 109462384 A CN109462384 A CN 109462384A CN 201811622047 A CN201811622047 A CN 201811622047A CN 109462384 A CN109462384 A CN 109462384A
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- metal block
- energy converter
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- metal
- block column
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 136
- 239000002184 metal Substances 0.000 claims abstract description 136
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000001259 photo etching Methods 0.000 claims abstract description 12
- 230000008054 signal transmission Effects 0.000 claims abstract description 11
- 230000007797 corrosion Effects 0.000 claims abstract description 9
- 238000005260 corrosion Methods 0.000 claims abstract description 9
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 3
- 230000002463 transducing effect Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 239000000356 contaminant Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000006185 dispersion Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 230000004044 response Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
This application discloses a kind of SAW filter and production methods, and the energy converter of formation is made including substrate and on the metallic film of substrate, and the side of the substrate is provided with diffusing structure perpendicular to the signal transmission direction of the energy converter.The diffusing structure is metal strip, and the metal strip is serrated towards the side of the energy converter.Production method is the following steps are included: cleaning；Plated film；Remove electrostatic；Photoetching；Corrosion.The beneficial effect of the application is the diffusing structure by the way that energy converter and metal strip structure are arranged on substrate, so that being scattered by the signal of the diffusing structure, and then avoid signal and be directly entered the influence for inside energy converter and generating larger spurious clutter after substrate end face reflection, optimize the electrical performance indexes such as passband fluctuation, the Out-of-band rejection of filter.
Description
Technical field
The present disclosure relates generally to filter fields, and in particular to a kind of SAW filter and production method.
Background technique
The characteristics of SAW filter of slanted transducer structure is that opposite band is wide, insertion loss generally in 15dB or so,
Out-of-band rejection is generally in 45dB or so.When filter relative bandwidth is wider, the influence of spurious clutter can be more prominent, and filter leads to
Band fluctuation, Out-of-band rejection can also deteriorate therewith.
Summary of the invention
In view of drawbacks described above in the prior art or deficiency, it is intended to provide a kind of SAW filter.
First aspect the application provides a kind of SAW filter, makes including substrate and on the metallic film of substrate and is formed
Energy converter, the side of the substrate is provided with diffusing structure perpendicular to the signal transmission direction of the energy converter.
According to technical solution provided by the embodiments of the present application, the diffusing structure is metal strip, and the metal strip is towards institute
The side for stating energy converter is serrated.
According to technical solution provided by the embodiments of the present application, the energy converter includes using semiconductor planar technique in piezoelectricity
The first slanted transducer and the second slanted transducer made on the metallic film on monocrystal chip surface；The diffusing structure includes
Non- transducing area of first slanted transducer far from the second slanted transducer direction from the near to the distant disposed in parallel is set
One metal block column and the second metal block column, and, second slanted transducer is set far from the first slanted transducer direction
Third metal block column and the 4th metal block disposed in parallel arrange from the near to the distant in non-transducing area, the first metal block column, the second gold medal
Belong to block column, third metal block column and the 4th metal block to arrange and rearranged by several metal blocks, the metal block is towards energy converter
To include at least one with the signal transmission direction be in for side on-right angle inclined surface.
According to technical solution provided by the embodiments of the present application, the metal block is diamond shape.
According to technical solution provided by the embodiments of the present application, the first metal block column, the second metal block column, third metal
Block column and metal block shape, size in the 4th metal block column are consistent.
According to technical solution provided by the embodiments of the present application, the level of the first metal block column and the first slanted transducer
Spacing and third metal block column are consistent with the horizontal space of the second slanted transducer.
According to technical solution provided by the embodiments of the present application, between the first metal block column and the level of the second metal block column
It is consistent with the flat spacing of the 4th metal block column water away from being arranged with third metal block.
According to technical solution provided by the embodiments of the present application, the material of the metal block and first slanted transducer/
Second slanted transducer material is consistent.
Second aspect the application provides a kind of production method of SAW filter, comprising the following steps:
Piezoelectric monocrystal substrate surface is cleaned, surface contaminant is removed；
Plated film, sputter in the piezoelectric monocrystal substrate surface cleaned up/evaporate layer of metal film；
Electrostatic is removed, electrostatic operation is carried out to the piezoelectric monocrystal substrate after plated film with ion fan；
Photoetching, by the figure photoetching of energy converter and diffusing structure to going on the metal film of the piezoelectric monocrystal sheet after electrostatic；
Corrosion, the Metallic film corrosion other than the piezoelectric monocrystal on piece energy converter and diffusing structure figure after photoetching is fallen.
The beneficial effect of technical scheme is: forming energy converter by making on the metallic film of filter substrate
And diffusing structure is set perpendicular to the signal transmission direction of the energy converter in the side of the substrate, so that by diffusing structure
Signal scatter, avoid signal and enter after substrate end face is directly reflected and form glitch inside the energy converter, produce
Raw larger spurious clutter.Optimize the electrical performance indexes such as bandpass flatness, the Out-of-band rejection of filter.
Detailed description of the invention
By reading a detailed description of non-restrictive embodiments in the light of the attached drawings below, the application's is other
Feature, objects and advantages will become more apparent upon:
Fig. 1 is a kind of zigzag diffusing structure schematic diagram of the application；
Fig. 2 is the floor map of the SAW filter of the application；
Fig. 3 is that signal signal when substrate end face is reflected transmits schematic diagram；
Fig. 4 is the frequency response figure of signal filter when substrate end face is reflected；
Fig. 5 is that signal of the signal of the application when metal block scatters transmits schematic diagram；
Fig. 6 is the frequency response figure of the SAW filter of the application；
Fig. 7 is the flow chart of the production method of the SAW filter of the application；
1, the first slanted transducer；2, the second slanted transducer；3, the first metal block arranges；4, the second metal block arranges；5,
Three metal blocks column；6, the 4th metal block arranges；7, without metal block front signal in non-transducing area；8, believe after metal block scatters
Number；81, signal level component after scattering；82, signal vertical component after scattering；9, substrate；10, the letter through substrate end face reflection
Number；11, zigzag diffusing structure.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that in order to
Convenient for description, part relevant to invention is illustrated only in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase
Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
A kind of SAW filter designed by the application makes formation including substrate 9 and on the metallic film of substrate 9
The side of energy converter, the substrate 9 is provided with diffusing structure perpendicular to the signal transmission direction of the energy converter.The scattering knot
Structure is metal strip, and the metal strip is serrated towards the side of the energy converter.It is as shown in Figure 1 a kind of knot of diffusing structure
Structure schematic diagram.
It is illustrated in figure 2 the floor map of the first embodiment of the SAW filter according to the application design, at this
In embodiment, the energy converter includes being made on the metallic film of piezoelectric monocrystal substrate surface of semiconductor planar technique
First slanted transducer 1 and the second slanted transducer 2；The diffusing structure includes that setting is remote in first slanted transducer 1
From the non-transducing area in 2 direction of the second slanted transducer, the first metal block column 3 and the second metal block disposed in parallel are arranged from the near to the distant
4, and, second slanted transducer 2 is set and is set in parallel from the near to the distant far from the non-transducing area in 1 direction of the first slanted transducer
The third metal block column 5 set and the 4th metal block column 6.2 interior zone of first slanted transducer 1 and the second slanted transducer
Referred to as transducing area, the non-transducing area refer to all areas on substrate other than transducing area.In the present embodiment, described first is fan-shaped
Energy converter 1 and the second slanted transducer 2 are made of interdigital transducer.
In the present embodiment, it is preferably to select, simultaneously that the diffusing structure of 9 side of substrate, which includes two column metal blocks,
It ensure that the requirement of the Miniaturization Design of dispersion effect and chip.In other embodiments, the scattering mechanism may include one
The metal block of column metal block, three column metal blocks or more multiple row, is selected with specific reference to actual conditions.
In the present embodiment, the first metal block column 3, the second metal block column 4, third metal block column 5 and the 4th metal block
Column 6 are rearranged by 4 sizes, the consistent metal block of shape, and in other embodiments, the quantity of each column metal block can be
Arbitrary value within the scope of 3 to 6.It, can be by the first metal block column 3 and third metal block column 5 to optimize signal dispersion effect
Metal number of blocks be set as 4, while the metal number of blocks of the second metal block column 4 and the 4th metal block column 6 is set as 6, made
Obtaining can preferably scatter by the signal of metal block column border.In other preferred embodiments, the second metal block column 4 are wrapped
The metal block number contained than the first metal block column 3 metal block number more than arbitrary value within the scope of 2-6, the 4th metal block column 6 packet
The metal block number contained than third metal block column 5 metal block number more than arbitrary value within the scope of 1-6.
The metal block shape is square in the present embodiment, side length 100um.In other embodiments, the gold
Belonging to side of the block towards energy converter includes at least one inclined surface with the signal transmission direction in on-right angle, such as the gold
Belonging to block can be diamond shape, and side size range can be the arbitrary value within the scope of 90um to 110um.
In the present embodiment, it when the square-shaped metal block is arranged, is respectively perpendicular and parallel according to its two diagonals
The mode of the row signal transmission direction is configured, and the metal block for meeting the application in this way includes towards the side of energy converter
At least one is with signal transmission direction in the design requirement of on-right angle inclined surface.
In the present embodiment, the horizontal space and third metal block column 5 of the first metal block column 3 and the first slanted transducer 1
It is consistent with the horizontal space of the second slanted transducer 2, it is 600um, in other embodiments, which is also possible to 400-
Arbitrary value within the scope of 900um comes really with specific reference to the shell and interior chamber size of interdigital transducer size and encapsulation filter
It is fixed, when horizontal space is closer, influence dispersion effect of the acoustic signals by metal block when, distance farther out when, will increase filter
Wave device chip size is unfavorable for chip miniaturization, and within the above range when, while ensure that the dispersion effect and core of metal block
The requirement of the Miniaturization Design of piece.
In the present embodiment, the horizontal space and third metal block column 5 of the first metal block column 3 and the second metal block column 4
It is consistent with the horizontal space of the 4th metal block column 6, it is 250um, in other embodiments, which is also possible to 240-
Arbitrary value within the scope of 300um, horizontal space distance will affect signal by the second metal block column 4 and the 4th metal block when too close
Dispersion effect when column 6, apart from it is too far when will increase filter chip size, be unfavorable for chip miniaturization, and in above range
When interior, while it ensure that the requirement of the dispersion effect of metal block and the Miniaturization Design of chip.
In the present embodiment, the spacing range of adjacent metal block is 160um in same column, in other embodiments, in same column
Adjacent metal block spacing is the arbitrary value within the scope of 160-220um.The adjacent metal block spacing is too large or too small all can shadow
Ring the dispersion effect of the acoustic signals by metal block.
In the present embodiment, the material of the metal block is consistent with energy converter material.
It being illustrated in figure 3 in the prior art, signal of the acoustic signals when substrate end face is reflected transmits schematic diagram, by
The acoustic signals 7 as shown in the figure that transmission be can be seen that in non-transducing area can reflect when being transferred to chip end face, by reflection
10 intensity of acoustic signals afterwards is almost consistent with the intensity of signal 7, is entered in slanted transducer with the direction opposite with signal 7
Portion, reflection signal 10 form glitch inside energy converter, form stronger spurious clutter.Fig. 4 show acoustic signals in base
The frequency response figure of filter when piece end face is reflected, as it can be seen in the figures, stronger back wave makes filter generation stronger
Spurious clutter.
Fig. 5 is that signal of the acoustic signals when scattering on metal block transmits schematic diagram, as can be seen from Figure, non-to change
The acoustic signals 7 of energy area transmission scatter on metal block column, signal 8 are formed after scattering, signal 8 can be according to x, y
The coordinate direction of axis is decomposed into horizontal signal component 81 and vertical signal component 82, wherein only horizontal signal component 81 can be with
Enter inside slanted transducer along the direction opposite with 7 transmission direction of signal, spurious clutter is formed, due to horizontal component signal 81
Signal strength be less than signal 8 signal strength, thus the spurious clutter generated by horizontal signal component 81 be less than signal 8 generate
Spurious clutter, optimize bandpass flatness, Out-of-band rejection of filter etc..
In a preferred embodiment, by adjacent two parallel column metal blocks along on the direction vertical with signal transmission direction
Under be staggered arrangement, preferably make the metal block in a column arrange the gap for facing an other column.With the first metal block column 3 and second
For metal block column 4, the signal 7 across 3 gap of the first metal block column understands the metal block in the second metal block column 4 faced
It is upper to scatter, signal 7 can be enabled to occur more adequately to scatter in this way, further decrease spurious clutter.This is preferred real
Applying the distance that is staggered described in example is 150um, in other embodiments, described to be staggered distance appointing within the scope of 120-160um
Meaning value.
It is illustrated in figure 6 the frequency response figure of SAW filter designed by the application, as can be seen from Figure, set by the application
The filter of meter has lesser spurious clutter compared to Fig. 4, has achieved the purpose that the application designs.
It is illustrated in figure 7 the step flow chart of the production method of above-mentioned SAW filter provided by the present application, including following
Step:
S10: cleaning piezoelectric monocrystal substrate surface removes surface contaminant；
Piezoelectric monocrystal substrate surface has many impurity to pollute, and is mostly derived from process, environmental pollution, water pollution, reagent
Pollution, process gas pollution, the plant-scale equipment, vessel, tool and easily-consumed products pollution, man body pollution and technical process etc., pass through
Cleaning process removes chemistry and molecular force between pollutant and wafer surface, remove organic matter brought by the pollution sources,
Particle, metallic atom (ion) and it is micro- coarse the problems such as.
S20: plated film, sputter in the piezoelectric monocrystal substrate surface cleaned up/evaporate layer of metal film.
S30: removing electrostatic, carries out electrostatic operation to the piezoelectric monocrystal substrate after plated film with ion fan.
S40: photoetching, by the figure photoetching of energy converter and diffusing structure to the metal film for going the piezoelectric monocrystal sheet after electrostatic
On；
By ultraviolet exposure, by the figure photoetching (duplication) of the energy converter and diffusing structure that are designed on filter mother matrix
On the metal film (aluminium film) of substrate surface.
S50: corrosion, by the Metallic film corrosion other than the piezoelectric monocrystal on piece energy converter and diffusing structure figure after photoetching
Fall；
The effect of corrosion is that the metal film (aluminium film) needed on piezoelectric monocrystal substrate is left, unwanted metal film
(aluminium film) erodes.In the first embodiment, when photoetching corrosion, needs to leave the metal film in slanted transducer at interdigital item
(aluminium film) leaves between signal input part, signal output end, ground wire, the first slanted transducer 1 and the second slanted transducer 2
Metal film (aluminium film) at shielding strip erodes the metal film (aluminium film) of gap location；For metal block region, metal is left
Metal film (aluminium film) on block erodes the metal film (aluminium film) of blank space other than metal block.Metal block is just fabricated in this way
On piezoelectric monocrystal substrate, each chip is followed to be made in corresponding shell by processes such as the segmentation of subsequent chip, encapsulation.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic
Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature
Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein
Can technical characteristic replaced mutually and the technical solution that is formed.
Claims (9)
1. a kind of SAW filter, which is characterized in that the energy converter of formation is made including substrate and on the metallic film of substrate,
The side of the substrate is provided with diffusing structure perpendicular to the signal transmission direction of the energy converter.
2. SAW filter according to claim 1, which is characterized in that the diffusing structure is metal strip, the metal
Item is serrated towards the side of the energy converter.
3. SAW filter according to claim 1, which is characterized in that the energy converter includes using semiconductor planar work
The first slanted transducer and the second slanted transducer that skill makes on the metallic film of piezoelectric monocrystal substrate surface；The scattering
Structure includes that non-transducing area of first slanted transducer far from the second slanted transducer direction is arranged in is parallel from the near to the distant
The the first metal block column and the second metal block column being arranged, and, setting is in second slanted transducer far from the first fan-shaped transducing
Third metal block column and the 4th metal block disposed in parallel arrange from the near to the distant in the non-transducing area in device direction, first metal block
Column, the second metal block column, third metal block column and the 4th metal block are arranged and are rearranged by several metal blocks, the metal block face
It include at least one inclined surface with the signal transmission direction in on-right angle to the side of energy converter.
4. SAW filter according to claim 3, which is characterized in that the metal block is diamond shape.
5. SAW filter according to claim 3, it is characterised in that: the first metal block column, the second metal block
Metal block shape, size are consistent in column, third metal block column and the 4th metal block column.
6. SAW filter according to claim 3, it is characterised in that: the first metal block column are changed with the first sector
The horizontal space and third metal block column of energy device are consistent with the horizontal space of the second slanted transducer.
7. SAW filter according to claim 3, it is characterised in that: the first metal block column and the second metal block
Horizontal space and third the metal block column of column are consistent with the flat spacing of the 4th metal block column water.
8. the SAW filter according to any one of claim 3-7, it is characterised in that: the material of the metal block with
First slanted transducer/second slanted transducer material is consistent.
9. a kind of production method of SAW filter, which comprises the following steps:
Piezoelectric monocrystal substrate surface is cleaned, surface contaminant is removed；
Plated film, sputter in the piezoelectric monocrystal substrate surface cleaned up/evaporate layer of metal film；
Electrostatic is removed, electrostatic operation is carried out to the piezoelectric monocrystal substrate after plated film with ion fan；
Photoetching, by the figure photoetching of energy converter and diffusing structure to going on the metal film of the piezoelectric monocrystal sheet after electrostatic；
Corrosion, the Metallic film corrosion other than the piezoelectric monocrystal on piece energy converter and diffusing structure figure after photoetching is fallen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811622047.6A CN109462384B (en) | 2018-12-28 | 2018-12-28 | Acoustic surface filter and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811622047.6A CN109462384B (en) | 2018-12-28 | 2018-12-28 | Acoustic surface filter and manufacturing method thereof |
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| CN109462384A true CN109462384A (en) | 2019-03-12 |
| CN109462384B CN109462384B (en) | 2024-07-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114826185A (en) * | 2022-05-23 | 2022-07-29 | 河北时硕微芯科技有限公司 | Surface acoustic wave filter packaging method and structure |
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| CN105406834A (en) * | 2015-11-19 | 2016-03-16 | 北京中讯四方科技股份有限公司 | Surface acoustic wave filter based on capacitive weighed fan-shaped single-phase unidirectional transducers |
| CN105634437A (en) * | 2015-12-25 | 2016-06-01 | 宇龙计算机通信科技(深圳)有限公司 | Surface acoustic wave filter, processing method of surface acoustic wave filter and communication equipment |
| CN108039873A (en) * | 2017-11-30 | 2018-05-15 | 深圳华远微电科技有限公司 | A kind of chip-scale SAW filter production method |
| CN108511600A (en) * | 2018-02-28 | 2018-09-07 | 云南中烟工业有限责任公司 | A kind of sound causes the preparation method of atomization chip |
| CN209201028U (en) * | 2018-12-28 | 2019-08-02 | 河北时硕微芯科技有限公司 | A kind of SAW filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114826185A (en) * | 2022-05-23 | 2022-07-29 | 河北时硕微芯科技有限公司 | Surface acoustic wave filter packaging method and structure |
| CN114826185B (en) * | 2022-05-23 | 2023-03-10 | 河北时硕微芯科技有限公司 | Surface acoustic wave filter packaging method and structure |
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