CN114803366A - Wafer tray changing mechanism with double-stroke conveying device - Google Patents
Wafer tray changing mechanism with double-stroke conveying device Download PDFInfo
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- CN114803366A CN114803366A CN202210486321.1A CN202210486321A CN114803366A CN 114803366 A CN114803366 A CN 114803366A CN 202210486321 A CN202210486321 A CN 202210486321A CN 114803366 A CN114803366 A CN 114803366A
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- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 22
- 230000005012 migration Effects 0.000 description 13
- 238000013508 migration Methods 0.000 description 13
- 230000002950 deficient Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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Abstract
The application relates to the field of stacking wafer trays, in particular to a wafer tray changing mechanism with a double-stroke conveying device, which comprises: the tray device comprises a tray holding part, a horizontal moving part and a vertical moving part which are sequentially arranged from top to bottom in the vertical direction, wherein the tray holding part is used for receiving at least one tray and holding or releasing the at least one tray, the horizontal moving part can move in a reciprocating manner in the horizontal direction and hold or release the at least one tray, and the vertical moving part is used for bearing the at least one tray and moving the borne at least one tray to a first position, a second position or a third position in the vertical direction; and the double-stroke conveying device is connected with the horizontal moving part and is used for driving the horizontal moving part to move to a second position or a fourth position in the horizontal direction. The disc stacking and changing device can stack discs and change discs in a limited space, and the space of the machine can be utilized most efficiently.
Description
Technical Field
The application relates to the field of stacking wafer trays, in particular to a wafer tray changing mechanism with a double-stroke conveying device.
Background
Currently, a tray is used as a common wafer carrier during wafer (IC) packaging and testing, and various semiconductor manufacturers design machines with different purposes according to their requirements for carrying and moving the tray carrying wafers. Although the design manufacturers of these machines are different, they are designed to comply with the Joint Electron Device Engineering Council (JEDEC) specification to ensure that the wafer can be transferred at each testing station.
In the final test stage, wafers are required to be classified into good products of different grades, defective products of different grades, and defective products of various types, and there are possibilities from several types to tens of types according to different requirements. If different types of wafers are to be distinguished, the simplest way is to have one tray carrying one type of wafer. However, in practice, the problem of insufficient space is encountered, and as shown in fig. 1, the number of allowable trays on a planarization machine is limited in the case of limited machine size.
Disclosure of Invention
In order to stack and exchange disks in a limited space and to make the most efficient use of the machine space, the present application provides a disk changing mechanism for a wafer tray having a double-stroke conveying device.
In a first aspect, the present application provides a tray changing mechanism for a wafer tray having a double-stroke conveying device, which adopts the following technical solution:
a wafer tray changing mechanism having a double stroke transport device, comprising:
a tray device comprising a tray holding part, a horizontal moving part and a vertical moving part which are arranged in sequence from top to bottom in the vertical direction,
the tray holding part is used for receiving at least one tray and holding or releasing the at least one tray,
the horizontal moving part is capable of reciprocating in a horizontal direction and holding or releasing the at least one tray,
the vertical moving part is used for carrying the at least one tray and moving the carried at least one tray to a first position, a second position or a third position in the vertical direction; and
and the double-stroke conveying device is connected with the horizontal moving part and is used for driving the horizontal moving part to move to the second position or a fourth position in the horizontal direction.
Through adopting above-mentioned technical scheme, vertical migration portion can drive the tray and reciprocate, and hold the dish portion and can keep or release the tray in the vertical migration portion, and the horizontal migration portion of being convenient for can acquire corresponding tray and carry out horizontal migration in the remaining tray in the vertical migration portion, finally through the vertical migration portion, hold the cooperation of dish portion and horizontal migration portion for the tray that wants to use is located the top of all trays. The design idea of the traditional planarization machine is broken through, and the three-dimensional space is utilized to stack and replace the disk in the limited space, so that the space of the machine can be utilized most efficiently.
In a specific possible embodiment, the double stroke conveying device comprises:
a base;
the driving part is arranged on the base and comprises a driving wheel and a driven wheel, the driving wheel is connected with a driving motor, and a driving belt is connected between the driving wheel and the driven wheel;
a coupling portion including a moving rail provided to the base to be horizontally movable, the moving rail being fixedly coupled to a portion of the driving belt, and a first pulley and a second pulley being provided on the moving rail, a driven belt being coupled between the first pulley and the second pulley, a portion of the driven belt being fixedly coupled to the base; and
a moving member movably connected to the moving rail and fixedly connected to another portion of the driven belt and to the horizontal moving part;
wherein, when the driving belt is driven to rotate in a first rotating direction, the driving belt drives the moving track to move a first distance in a first direction, and then the driven belt and the moving member drive the horizontal moving part to move a second distance in the first direction until the horizontal moving part moves to the fourth position, wherein the second distance is twice of the first distance, and
when the driving belt is driven to rotate in a second rotating direction, the moving rail is driven to move in a second direction for the first distance, and then the driven belt and the moving piece drive the horizontal moving part to move in the second direction for the second distance until the horizontal moving part moves to the second position.
By adopting the above technical scheme, drive this removal track and remove first distance toward first direction when drive belt is driven and is rotated toward first direction of rotation, and then drive this horizontal migration portion and remove the second distance toward this first direction through this driven belt and this moving member, until this horizontal migration position moves to this fourth position, wherein this second distance is twice of this first distance, magnification drive has been realized, drive this removal track and remove this first distance toward this second direction when this drive belt is driven and is rotated toward second direction of rotation, and then drive this horizontal migration portion and remove this second distance toward this second direction through this driven belt and this moving member, until this horizontal migration portion moves to this second position, have and be suitable for the advantage that the driving object body moved in the little space.
In a particular possible embodiment, a portion of the drive belt is provided with a first fixing block, and the moving rail is fixedly connected to a portion of the drive belt through the first fixing block.
Through adopting above-mentioned technical scheme, be convenient for be connected drive belt and removal track to realize drive belt and drive the purpose that the removal track removed.
In a specific embodiment, the tray holding part comprises a holding frame, a holding space for accommodating the at least one tray is formed between inner side walls of the circumference of the holding frame, at least two opposite side walls of the holding frame are respectively provided with at least one first air cylinder, when the at least one tray is accommodated in the holding space, the at least one first air cylinder operates to fix the at least one tray in the holding space, and when the operation of the first air cylinder is released, the at least one tray is released.
Through adopting above-mentioned technical scheme, be convenient for carry on spacingly to the tray that is located to hold the dish portion to the realization holds the keeping of dish portion to the tray. Simultaneously, the setting of cylinder is also convenient for realize the release to the tray.
In a specific embodiment, the horizontal moving part includes a moving frame, a moving space for accommodating the at least one tray is formed between inner sidewalls of a circumference of the moving frame, at least one second cylinder is respectively disposed on at least opposite sidewalls of the moving frame, the at least one second cylinder operates to fix the at least one tray in the moving space when the at least one tray is accommodated in the moving space, and releases the at least one tray when the operation of the second cylinder is released.
Through adopting above-mentioned technical scheme, be convenient for carry on spacingly to the tray that is located horizontal migration portion to realize the holding of horizontal migration portion to the tray. Simultaneously, the setting of cylinder is also convenient for realize the release to the tray.
In a specific embodiment, the vertical moving part includes a loading plate, a lifting element is connected to a bottom of the loading plate, and the lifting element is used for driving the loading plate to move in a vertical direction so as to lift and move the at least one tray placed on the loading plate from the first position to the second position or the third position, or to move from the second position or the third position to the first position.
By adopting the technical scheme, the tray can be conveniently moved to the designated position in the vertical direction, and the matching between the tray holding part and the horizontal moving part is realized.
In a specific possible implementation, the first position, the second position and the third position overlap in a vertical direction and have different horizontal heights, and the second position and the fourth position have the same horizontal height.
By adopting the technical scheme, the tray can move along a vertical direction or a horizontal direction, the moving efficiency can be improved to a moving degree compared with the mode that the path is not fixed or is not on a straight line, and the tray can be prevented from being dislocated or even scattered to a certain degree due to the fact that the path is not on a straight line.
In a second aspect, the present application provides a double-stroke conveying device, which adopts the following technical scheme:
a double stroke delivery device comprising:
a base;
the driving part is arranged on the base and comprises a driving wheel and a driven wheel, the driving wheel is connected with a driving motor, and a driving belt is connected between the driving wheel and the driven wheel;
a coupling portion including a moving rail provided to the base to be horizontally movable, the moving rail being fixedly coupled to a portion of the driving belt, and a first pulley and a second pulley being provided on the moving rail, a driven belt being coupled between the first pulley and the second pulley, a portion of the driven belt being fixedly coupled to the base; and
a moving member movably connected to the moving rail, and the moving member is fixedly connected to another portion of the driven belt.
Through adopting above-mentioned technical scheme, can drive this removal track and remove one time distance toward one direction when drive belt is rotatory toward one direction, and then drive the moving member through driven belt and remove two times distance, realized the multiplying power drive, have and be suitable for the advantage that the object moved of drive in the little space.
In a particular possible embodiment, a portion of the drive belt is provided with a first fixing block, and the moving rail is fixedly connected to a portion of the drive belt through the first fixing block.
Through adopting above-mentioned technical scheme, be convenient for with partly fixed connection of drive belt to the removal track to make the removal track can move along with the removal track.
In a particular possible embodiment, a portion of the driven belt is provided with a second fixed block, and a portion of the driven belt is fixedly connected to the base through the second fixed block.
Through adopting above-mentioned technical scheme, be convenient for with driven belt's partly fixed connection to base to when making the removal track move one time distance, the moving member that is connected with driven belt another part can move two distances.
In summary, the present application includes at least one of the following beneficial technical effects:
1. through the matching of the vertical moving part, the tray holding part and the horizontal moving part, the tray to be used can be positioned at the top of all trays, the design thought of the traditional planarization machine is broken through, and the three-dimensional space is utilized for disc stacking and disc changing in a limited space, so that the space of the machine is utilized to the maximum degree;
2. when the driving belt is driven to rotate in a first rotating direction, the moving rail is driven to move a first distance in the first direction, and then the driven belt and the moving piece drive the horizontal moving part to move a second distance in the first direction until the horizontal moving part moves to the fourth position, wherein the second distance is twice of the first distance, so that multiplying power driving is realized, and the device has the advantage of being suitable for moving an object in a small space.
Drawings
FIG. 1 is a perspective view of a prior art planarizing wafer tray table;
FIG. 2 is a perspective view of a tray changing mechanism of a wafer tray according to an embodiment of the present application;
FIG. 3 is a perspective view of a double stroke delivery apparatus according to an embodiment of the present application;
FIG. 4A is a perspective view of the double stroke delivery device of an embodiment of the present application in a retracted state;
FIG. 4B is a perspective view of the double stroke delivery apparatus of the present application in an extended position;
FIG. 5A is a schematic plan view of the double stroke delivery device of an embodiment of the present application in a retracted state;
FIG. 5B is a schematic plan view of the double stroke delivery device of an embodiment of the present application in an extended state;
fig. 6A to 6K are schematic perspective views illustrating a series of operations of replacing and stacking trays by the tray device in cooperation with the double-stroke conveying device according to the embodiment of the present application;
fig. 7A to 7K are schematic plan views illustrating a series of operations of replacing and stacking trays by the tray device in cooperation with the double-stroke conveying device according to the embodiment of the present application.
Description of reference numerals: 1. a tray device; 11. a tray holding section; 110. a holding space; 111. a holding frame; 112. a first cylinder; 12. a horizontal moving section; 120. a movement space; 121. moving the frame; 122. a second cylinder; 13. a vertical moving section; 131. a carrier plate; 132. a lifting element; 2. a double stroke conveying device; 20. a base; 21. a drive section; 211. a drive wheel; 212. a driven wheel; 213. a drive motor; 214. a drive belt; 22. a connecting portion; 221. a moving track; 222. a first fixed block; 223. a first pulley; 224. a second pulley; 225. a driven belt; 226. a second fixed block; 23. a moving member; 3. a tray; 3A, a target disc; 3B, completing the disc; d1, first direction; d2, second direction; r1, first rotational direction; r2, second rotational direction; p1, first position; p2, second position; p3, third position; p4, fourth position.
Detailed Description
The present application is described in further detail below with reference to the attached drawings.
The embodiment of the application discloses a wafer tray disc changing mechanism with a double-stroke conveying device. As shown in fig. 2, the wafer tray exchanging mechanism includes a tray device 1 and a double-stroke conveying device 2. The tray device 1 is a device for moving at least one tray 3 in a vertical direction to stack a plurality of trays 3, the tray device 1 includes a tray holding part 11, a horizontal moving part 12 and a vertical moving part 13 which are sequentially arranged from top to bottom in the vertical direction, and the double-stroke conveying device 2 is connected with the horizontal moving part 12.
As shown in fig. 2, the tray holding section 11 is used to receive the tray 3 and hold or release the tray 3. The tray portion 11 includes a holding frame 111, a holding space 110 for accommodating a plurality of trays is formed between inner side walls of a circumference of the holding frame 111, the holding frame 111 is provided with a plurality of first cylinders 112 at least on two opposite side walls thereof, when the tray 3 is accommodated in the holding space 110, the first cylinders 112 are operated to abut against the tray 3 to fix the tray 3 in the holding space 110, and when the operation of the first cylinders 112 is released, the tray 3 in the holding space 110 is released.
Specifically, the first cylinder 112 is installed outside the holding frame 111, and a cylinder shaft end portion of the first cylinder 112 may be provided with a holder or a jaw (not shown in the drawings), and the holder or the jaw is separated from the holding space 110 of the holding frame 111 when the first cylinder 112 is not operated, and the holder or the jaw is extended via the cylinder shaft to properly hold or clamp the outer sidewall of the tray 3 in the holding space 110 when the first cylinder 112 is operated, so that the tray 3 is fixed by holding or clamping the opposite sides of the tray 3 accommodated in the holding space 110 by the holder or the jaw opposite to the both sides of the holding frame 111.
More specifically, the inner circumferential dimension of the circumferential side wall of the holding frame 111 is larger than the outer circumferential dimension of the tray 3, so that the tray 3 can be easily accommodated in the holding space 110. When the tray 3 is accommodated in the holding space 110, the first cylinder 112 operates to hold or clamp the holder on the side wall of the tray 3 via the cylinder shaft to fix the tray 3, and when the operation of the first cylinder 112 is released, the holder or the clamp is retracted by the cylinder shaft to be separated from the tray 3, so that the tray 3 can be taken out of the holding space 110.
As shown in fig. 2, the horizontal moving portion 12 is for receiving the tray 3, and can be reciprocated in the horizontal direction by the driving of the double stroke conveyor 2 to hold or release the tray 3. Specifically, the horizontal moving portion 12 includes a moving frame 121, a moving space 120 capable of accommodating the tray 3 is formed between inner sidewalls of the moving frame 121, at least two opposite sidewalls of the moving frame 121 are respectively provided with a plurality of second cylinders 122, when the tray 3 is accommodated in the moving space 120, the plurality of second cylinders 122 operate to support and fix the tray 3 in the moving space 120, and when the operation of the second cylinders 122 is released, the tray 3 in the moving space 120 is released.
Specifically, the second cylinder 122 is installed on an outer sidewall of the moving frame 121, a cylinder shaft end of the second cylinder 122 may be provided with a holder or a clamping jaw (not shown in the drawings), and the holder or the clamping jaw is separated from the moving space 120 of the moving frame 121 when the second cylinder 122 is not operated, and the holder or the clamping jaw is properly held or clamped on the outer sidewall of the tray 3 in the moving space 120 through the cylinder shaft when the second cylinder 122 is operated, so that the tray 3 is fixed by holding the holder or the clamping jaw on two sides of the moving frame 121 holding opposite sides of the tray 3 accommodated in the moving space 120.
More specifically, the inner circumferential size of the circumferential sidewall of the moving frame 121 is larger than the outer circumferential size of the tray 3, so that the tray 3 can be easily accommodated in the moving space 120; when the tray 3 is accommodated in the moving space 120, the second cylinder 122 operates to extend the holder or the jaw to the sidewall of the tray 3 through the cylinder shaft, thereby dragging or clamping the tray 3 for fixing, and when the second cylinder 122 is deactivated, the holder or the jaw is retracted through the cylinder shaft to be separated from the tray 3, thereby taking the tray 3 out of the moving space 120.
As shown in fig. 2, the vertical moving part 13 is a device for carrying the tray 3, and can move the carried tray 3 in a vertical direction to the moving space 120 or the holding space 110. Specifically, the vertical moving part 13 includes a supporting plate 131, a lifting element 132 is connected to a bottom surface of the supporting plate 131, and the lifting element 132 may be a lifting screw driven by a servo motor, or an air cylinder, a hydraulic cylinder, or the like, which is not limited in this application. The elevating member 132 is connected to the loading plate 131 via a shaft to drive the loading plate 131 to move in a vertical direction, thereby moving the tray 3 placed on the loading plate 131 to be raised from a current initial position to the moving space 120 or the holding space 110, or to be lowered from the moving space 120 or the holding space 110 to be moved to an initial position. The initial position refers to a position where the lifting element 132 lowers the supporting plate 131 to the lowest position.
More specifically, the horizontal moving portion 12 can be moved to the side of the vertical moving portion 13 in the horizontal direction or moved from the side of the vertical moving portion 13 to between the vertical moving portion 13 and the tray holding portion 11 in the horizontal direction by the driving of the double stroke conveying device 2.
The double-stroke conveying device 2 is a device in which the output end can move by multiple strokes when the driving end moves by one stroke, and in this embodiment, the output end of the double-stroke conveying device 2 can output twice strokes. Therefore, the double-stroke conveying device 2 is connected to the horizontal movement part 12 to move the horizontal movement part 12 in the horizontal direction, and thus, there is an advantage that the operation can be performed in a small space.
As shown in fig. 3, the double-stroke conveying device 2 includes: a base 20, a driving portion 21, a connecting portion 22 and a moving member 23. Wherein, the driving part 21 is arranged on the base 20; the driving unit 21 includes a driving wheel 211 and a driven wheel 212, the driving wheel 211 is connected with a driving motor 213, the driving motor 213 and the driven wheel 212 are both fixed to the base 20, a driving belt 214 is connected between the driving wheel 211 and the driven wheel 212, and the driving motor 213 drives the driving belt 214 to rotate in a first rotation direction R1 or a second rotation direction R2 when operating. A first fixed block 222 is mounted on one side of the driving belt 214, and when the driving belt 214 rotates in the first rotation direction R1, the side of the driving belt 214 on which the first fixed block 222 is mounted moves in the first direction D1 (the right direction in the figure); when the driving belt 214 rotates in the second rotating direction R2, the side of the driving belt 214 where the first fixed block 222 is disposed moves in the opposite second direction D1 (left direction in the figure).
As shown in fig. 3, the connection portion 22 is a member for connecting the driving portion 21 and the moving member 23, and includes a moving rail 221 horizontally movably disposed on the base 20, and the moving rail 221 is fixedly connected to a portion of the driving belt 214 through the first fixing block 222, so that the first fixing block 222 is moved in the horizontal direction while being moved by the driving belt 214. A first pulley 223 and a second pulley 224 are installed at the bottom of the moving rail 221, a driven belt 225 is connected between the first pulley 223 and the second pulley 224, a second fixing block 226 is connected to one side of the driven belt 225, the second fixing block 226 is fixedly connected to the base 20, and the moving member 23 is fixed to the other side of the driven belt 225.
Therefore, as shown in fig. 4A to 4B and fig. 5A to 5B, when the driving wheel 211 operates to drive the driving belt 214 to rotate in the first rotating direction R1, the first fixed block 222 on one side of the driving belt 214 drives the moving track 221 to move the first distance L1 in the first direction D1 (the right direction shown in the figure), at this time, since one side of the driven belt 225 is fixed on the base 20 via the second fixed block 226, the moving member 23 fixed on the other side of the driven belt 225 is also synchronously pulled by the driven belt 225 by the first distance L1, and finally, the first distance L1 moved by the moving member 23 itself and the first distance L1 moved by the moving track 221 are added to obtain the second distance L2 which is twice as large as the first distance L1.
When the driving wheel 211 operates to drive the driving belt 214 to rotate in the second rotating direction R2, the first fixed block 222 located on one side of the driving belt 214 drives the moving rail 221 to move by the first distance L1 in the second direction D2 (left direction shown in the figure), at this time, since one side of the driven belt 225 is fixed on the base 20 via the second fixed block 226, the moving element 23 fixed on the other side of the driven belt 225 is also synchronously pulled by the driven belt 225 to retract by the first distance L1, and finally, the moving element 23 moves by the retracted first distance L1 plus the retracted first distance L1 of the moving rail 221 to retract by a second distance L2 which is twice the first distance L1. In short, the moving rail 221 is driven by the driving part 21 to move for a distance and the moving member 23 can move for a distance twice, so that the volume of the whole double-stroke conveying device 2 can be reduced and the device is suitable for mechanical transmission in a small space.
For convenience of the following description, referring to fig. 7A, the tray 3 is defined as a first position P1 at the initial position, a second position P2 at the moving frame 121, a third position P3 at the holding frame 111, and the second position P2 indicates that the horizontal moving portion 12 is not actuated, and a fourth position P4 at the position where the moving frame 121 is moved to one side after the horizontal moving portion 12 is actuated. That is, the first position P1, the second position P2, and the third position P3 overlap in the same vertical direction, but the horizontal heights of the first position P1, the second position P2, and the third position P3 increase in order. The second position P2 and the fourth position P4 have the same level, and the fourth position P4 does not overlap with the first position P1, the second position P2 and the third position P4.
Next, the operation mode of the present application applied to the disc exchange operation of the wafer tray will be described as follows by way of example in fig. 6A to 6K and fig. 7A to 7K:
as shown in fig. 6A and 7A, the carrier plate 131 of the vertical moving part 13 is shown to carry a plurality of trays 3, and one of the plurality of trays 3 stacked on the carrier plate 131 (hereinafter, referred to as a target tray 3A) needs to be moved out to carry the sorted wafers, and the tray originally in the holding frame 111 (hereinafter, referred to as a finished tray 3B) needs to be returned and stacked onto the carrier plate 131.
First, the moving frame 121 is located at the second position P2 to correspond to the vertical moving part 13 and the tray holding part 11; then, as shown in fig. 6B and 7B, the lifting member 132 of the vertical moving part 13 drives the carrier plate 131 to rise through the moving space 120 of the moving frame 121 to move the tray 3 on the carrier plate 131 upward to the third position P3, and after the first cylinder 112 releases the clamping of the completed tray 3B in the holding frame 111, the carrier plate 131 continues to rise to make the stacked tray 3 lift up the completed tray 3B. In this state, as shown in fig. 6C and 7C, the first air cylinder 112 provided in the holding frame 111 operates to clamp the pallet 3 above the target tray 3A and then lowers the vertically moving portion 13 until the target tray 3A moves to the second position P2. As shown in fig. 6D and 7D, the second cylinder 122 disposed at the moving frame 121 operates to clamp the target tray 3A at this time, and the vertical moving portion 13 descends to return the remaining trays 3 on the carrying plate 131, which are not clamped by the second cylinder 122, to the first position P1 again. Then, as shown in fig. 6E and 7E, the double-stroke conveying device 2 operates to move the moving frame 121 and the target tray 3A held in the moving frame 121 from the second position P2 to the fourth position P4, so that the original second position P2 is allowed to be empty. Next, as shown in fig. 6F and 7F, the vertical moving part 13 is raised to move the tray 3 stacked on the carrier plate 131 to the third position P3 through the second position P2, and the carrier plate 131 stacks all the trays 3 and the completed tray 3B after the first cylinder 112 releases the clamping of the tray 3 in the holding frame 111. Then, as shown in fig. 6G and 7G, the vertical moving portion 13 descends to move the stacked tray 3 and completed tray 3B downward from the third position P3 to the first position P1. Next, as shown in fig. 6H and 7H, the double stroke conveying device 2 horizontally moves the moving frame 121 and the target disk 3A clamped by the moving frame from the fourth position P4 to the second position P2. As shown in fig. 6I and 7I, the vertical moving portion 13 is raised to the second position P2 to stack the tray 3 and the finished tray 3B on the supporting plate 131 below the target tray 3A in the moving frame 121. Then, as shown in fig. 6J and 7J, after the second air cylinder 122 releases the clamping of the target disk 3A in the moving frame 121, the vertically moving part 13 is moved up to the third position P3 again, the stacked target disks 3A are inserted into the holding frame 111, and the target disk 3A is clamped and fixed by the first air cylinder 112. As shown in fig. 6K and 7K, the vertical moving portion 13 is then moved back down to the first position P1, completing the disc replacement work for removing the target disc 3A and returning the completed disc 3B to the stack. The target tray 3A in the holding frame 111 is used for placing the sorted wafers, and when the sorted wafers need to be returned and stacked after the placement is completed, the next completed tray is obtained, and so on.
In summary, according to the present invention, through the above-mentioned work flow, the horizontal moving portion 12 clamps and moves out one target tray 3A of the stacked trays 3, and moves the target tray 3A to the highest tray holding portion 11 to replace the completed tray 3B that has completed bearing the sorted wafers, and then changes the stacking position of the other trays 3 to achieve the purpose of tray changing, the operation sequence and operation duration of the tray holding portion 11, the horizontal moving portion 12 and the vertical moving portion 13 are determined according to the position where each tray is to be stacked, and the operation is planned and arranged by using the pre-designed computer program, so that the entire tray changing operation is automated and efficient.
The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (10)
1. A wafer tray changing mechanism having a double stroke transport device, comprising:
a pallet device (1) comprising a pallet section (11), a horizontal movement section (12) and a vertical movement section (13) arranged in this order from the top in the vertical direction,
the tray holding part (11) is used for receiving at least one tray (3) and holding or releasing the at least one tray (3),
the horizontal moving section (12) is capable of reciprocating in the horizontal direction and holding or releasing the at least one tray (3),
the vertical moving part (13) is used for carrying the at least one tray (3) and moving the carried at least one tray (3) to a first position, a second position or a third position in the vertical direction; and
the double-stroke conveying device (2) is connected with the horizontal moving part (12) and is used for driving the horizontal moving part (12) to move to the second position or a fourth position in the horizontal direction.
2. The wafer tray changing mechanism with the double stroke conveying device according to claim 1, wherein the double stroke conveying device (2) comprises:
a base (20);
the driving part (21) is arranged on the base (20), the driving part (21) comprises a driving wheel (211) and a driven wheel (212), the driving wheel (211) is connected with a driving motor (213), and a driving belt (214) is connected between the driving wheel (211) and the driven wheel (212);
a coupling section (22) including a movement rail (221), the movement rail (221) being provided on the base (20) so as to be horizontally movable, the movement rail (221) being fixedly connected to a part of the drive belt (214), the movement rail (221) being provided with a first pulley (223) and a second pulley (224), a driven belt (225) being connected between the first pulley (223) and the second pulley (224), a part of the driven belt (225) being fixedly connected to the base (20); and
a moving member (23) movably connected to the moving rail (221), and the moving member (23) is fixedly connected to another portion of the driven belt (225) and fixedly connected to the horizontally moving part (12);
wherein, when the driving belt (214) is driven to rotate in a first rotating direction, the moving rail (221) is driven to move in a first direction for a first distance, and then the driven belt (225) and the moving member (23) drive the horizontal moving part (12) to move in the first direction for a second distance until the horizontal moving part (12) moves to the fourth position, wherein the second distance is twice of the first distance, and
when the driving belt (214) is driven to rotate in a second rotating direction, the moving rail (221) is driven to move in a second direction for the first distance, and then the driven belt (225) and the moving piece (23) drive the horizontal moving part (12) to move in the second direction for the second distance until the horizontal moving part (12) moves to the second position.
3. The wafer tray changing mechanism with the double stroke conveying device according to claim 2, wherein a portion of the driving belt (214) is provided with a first fixing block (222), and the moving rail (221) is fixedly connected to a portion of the driving belt (214) through the first fixing block (222).
4. The tray changing mechanism with multiple stroke transferring apparatus of claim 1, wherein the tray holding portion (11) comprises a holding frame (111), a holding space (110) for accommodating the at least one tray (3) is formed between inner side walls of the circumference of the holding frame (111), at least one first cylinder (112) is respectively disposed on at least two opposite side walls of the holding frame (111), the at least one first cylinder (112) operates to fix the at least one tray (3) in the holding space (110) when the at least one tray (3) is accommodated in the holding space (110), and releases the at least one tray (3) when the operation of the first cylinder (112) is released.
5. The wafer tray changing mechanism with the double stroke transferring device as claimed in claim 1, wherein the horizontal moving part (12) includes a moving frame (121), a moving space (120) for accommodating the at least one tray (3) is formed between inner sidewalls of a circumference of the moving frame (121), at least one second cylinder (122) is provided on at least opposite sidewalls of the moving frame (121), the at least one second cylinder (122) operates to fix the at least one tray (3) in the moving space (120) when the at least one tray (3) is accommodated in the moving space (120), and releases the at least one tray (3) when the operation of the second cylinder (122) is released.
6. The wafer tray changing mechanism with double stroke conveying device according to claim 1, wherein the vertical moving part (13) comprises a carrying plate (131), a lifting element (132) is connected to a bottom of the carrying plate (131), the lifting element (132) is used for driving the carrying plate (131) to move in a vertical direction so as to move the at least one tray (3) placed on the carrying plate (131) from the first position to the second position or the third position in a rising manner, or from the second position or the third position in a falling manner to the first position.
7. The wafer tray changing mechanism with multiple stroke transport device of claim 1, wherein the first position, the second position and the third position overlap in a vertical direction and have different horizontal heights, and the second position and the fourth position have the same horizontal height.
8. A double stroke conveyor, comprising:
a base (20);
the driving part (21) is arranged on the base (20), the driving part (21) comprises a driving wheel (211) and a driven wheel (212), the driving wheel (211) is connected with a driving motor (213), and a driving belt (214) is connected between the driving wheel (211) and the driven wheel (212);
a coupling section (22) including a movement rail (221), the movement rail (221) being provided on the base (20) so as to be horizontally movable, the movement rail (221) being fixedly connected to a part of the drive belt (214), the movement rail (221) being provided with a first pulley (223) and a second pulley (224), a driven belt (225) being connected between the first pulley (223) and the second pulley (224), a part of the driven belt (225) being fixedly connected to the base (20); and
a moving member (23) movably connected to the moving rail (221), and the moving member (23) is fixedly connected to another portion of the driven belt (225).
9. The double-stroke conveying device according to claim 8, wherein a portion of the driving belt (214) is provided with a first fixing block (222), and the moving rail (221) is fixedly connected to a portion of the driving belt (214) through the first fixing block (222).
10. The double-stroke conveying device according to claim 8, wherein a portion of the driven belt (225) is provided with a second fixed block (226), and a portion of the driven belt (225) is fixedly connected to the base (20) through the second fixed block (226).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210486321.1A CN114803366B (en) | 2022-05-06 | Wafer tray changing mechanism with double-stroke conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210486321.1A CN114803366B (en) | 2022-05-06 | Wafer tray changing mechanism with double-stroke conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114803366A true CN114803366A (en) | 2022-07-29 |
| CN114803366B CN114803366B (en) | 2024-06-28 |
Family
ID=
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| CN215945873U (en) * | 2021-05-10 | 2022-03-04 | 视比特(长沙)机器人科技有限公司 | Multi-layer tray converter |
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|---|---|---|---|---|
| JP3012606U (en) * | 1994-12-19 | 1995-06-20 | タカコ精機株式会社 | Tray changer |
| CN1393386A (en) * | 2001-06-22 | 2003-01-29 | 未来产业株式会社 | Stacker for tray feeder |
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| CN112978266A (en) * | 2021-03-11 | 2021-06-18 | 广州得尔塔影像技术有限公司 | Loading and unloading device and production equipment with same |
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