CN114803366B - Wafer tray changing mechanism with double-stroke conveying device - Google Patents

Abstract

The application relates to the field of wafer tray stacking, in particular to a wafer tray changing mechanism with a double-stroke conveying device, which comprises the following components: the tray device comprises a tray holding part, a horizontal moving part and a vertical moving part which are sequentially arranged from top to bottom in the vertical direction, wherein the tray holding part is used for receiving at least one tray and holding or releasing the at least one tray, the horizontal moving part can reciprocate in the horizontal direction and hold or release the at least one tray, and the vertical moving part is used for bearing the at least one tray and moving the at least one carried tray to a first position, a second position or a third position in the vertical direction; and the double-stroke conveying device is connected with the horizontal moving part and used for driving the horizontal moving part to move to the second position or the fourth position in the horizontal direction. The application can carry out disc stacking and disc changing in a limited space, so that the space of the machine can be utilized most efficiently.

Description

Wafer tray changing mechanism with double-stroke conveying device

Technical Field

The application relates to the field of wafer tray stacking, in particular to a wafer tray changing mechanism with a double-stroke conveying device.

Background

Currently, trays are commonly used as wafer carrier trays during wafer (IC) sealing, and various semiconductor manufacturers design different machines according to the requirements for carrying and moving the trays carrying wafers. Although different from one machine to another, the machines are often sized to conform to the Joint Electron DEVICE ENGINEERING Council (JEDEC) specifications to ensure that wafers can be transferred at each test station.

The wafer needs to be classified into good products of different grades, secondary good products and various types of defective products in the final test stage, and according to different requirements, the classification from several types to tens of types is possible. In order to distinguish between different types of wafers, the simplest way is for one tray to carry one type of wafer. However, in practice, there is a problem of insufficient space, and as shown in fig. 1, the number of allowable trays on the planarization machine is limited in the case that the machine size is limited.

Disclosure of Invention

The application provides a wafer tray changing mechanism with a double-stroke conveying device, which can make the most efficient use of machine space for stacking and changing the tray in a limited space.

In a first aspect, the present application provides a wafer tray changing mechanism with a double-stroke conveying device, which adopts the following technical scheme:

a wafer pallet changing mechanism with a double stroke conveyor, comprising:

the tray device comprises a tray holding part, a horizontal moving part and a vertical moving part which are sequentially arranged from top to bottom in the vertical direction, wherein,

The holding tray part is used for receiving at least one tray and holding or releasing the at least one tray,

The horizontal moving part can reciprocate in the horizontal direction and hold or release the at least one tray,

The vertical moving part is used for bearing the at least one tray and moving the at least one bearing tray to a first position, a second position or a third position in the vertical direction; and

And the double-stroke conveying device is connected with the horizontal moving part and is used for driving the horizontal moving part to move to the second position or the fourth position in the horizontal direction.

Through adopting above-mentioned technical scheme, vertical movement portion can drive the tray and reciprocate, and holds the tray that the dish portion can keep or release on the vertical movement portion, and the horizontal movement portion of being convenient for can acquire the corresponding tray in the remaining tray on the vertical movement portion and carry out horizontal migration, finally through the cooperation of vertical movement portion, holding dish portion and horizontal movement portion for the tray that wants to use is located the top of all trays. The design thought of the traditional planarization machine is broken through, and the three-dimensional space is utilized to stack and replace the disc in the limited space, so that the machine space can be utilized most efficiently.

In a specific embodiment, the double stroke conveyor comprises:

A base;

The driving part is arranged on the base and comprises a driving wheel and a driven wheel, the driving wheel is connected with a driving motor, and a driving belt is connected between the driving wheel and the driven wheel;

A connecting part comprising a moving rail which is horizontally movably arranged on the base, wherein the moving rail is fixedly connected to a part of the driving belt, a first belt pulley and a second belt pulley are arranged on the moving rail, a driven belt is connected between the first belt pulley and the second belt pulley, and a part of the driven belt is fixedly connected to the base; and

A moving member movably connected to the moving rail, and fixedly connected to another portion of the driven belt and fixedly connected to the horizontal moving part;

Wherein, when the driving belt is driven to rotate in a first rotation direction, the moving rail is driven to move a first distance in a first direction, and then the driven belt and the moving part drive the horizontal moving part to move a second distance in the first direction until the horizontal moving part moves to the fourth position, wherein the second distance is twice the first distance, and

When the driving belt is driven to rotate in a second rotation direction, the moving rail is driven to move in a second direction for the first distance, and then the driven belt and the moving piece drive the horizontal moving part to move in the second direction for the second distance until the horizontal moving part is displaced to the second position.

Through adopting above-mentioned technical scheme, when the drive belt is driven to the first rotation direction rotatory, drive this movable rail and remove first distance to this first direction, and then drive this horizontal migration portion through this driven belt and this moving part and remove the second distance to this first direction, until this horizontal migration portion displacement to this fourth position, wherein this second distance is twice this first distance, the multiplying power drive has been realized, when this drive belt is driven to this second rotation direction rotatory, drive this movable rail and remove this first distance to this second direction, and then drive this horizontal migration portion to this second direction through this driven belt and this moving part and remove this second distance, until this horizontal migration portion displacement to this second position, have the advantage that is suitable for driving the object and remove in the little space.

In a specific embodiment, a portion of the drive belt is provided with a first fixed block, and the moving track is fixedly connected to a portion of the drive belt by the first fixed block.

Through adopting above-mentioned technical scheme, be convenient for be connected drive belt and removal track to realize the purpose that drive belt drove the removal track and remove.

In a specific embodiment, the tray holding part includes a holding frame, a holding space capable of accommodating the at least one tray is formed between inner side walls of a circumference of the holding frame, at least one first cylinder is provided on at least two opposite side walls of the holding frame, respectively, and when the at least one tray is accommodated in the holding space, the at least one first cylinder operates to fix the at least one tray in the holding space, and when the operation of the first cylinder is released, the at least one tray is released.

Through adopting above-mentioned technical scheme, be convenient for carry out spacingly to the tray that is located in holding the dish portion to realize holding the dish portion and to the maintenance of tray. Meanwhile, the arrangement of the air cylinder is convenient for realizing the release of the tray.

In a specific embodiment, the horizontal moving part includes a moving frame, a moving space capable of accommodating the at least one tray is formed between inner side walls of the moving frame, at least one second cylinder is respectively disposed on at least two opposite side walls of the moving frame, and when the at least one tray is accommodated in the moving space, the at least one second cylinder operates to fix the at least one tray in the moving space, and when the operation of the second cylinder is released, the at least one tray is released.

Through adopting above-mentioned technical scheme, be convenient for carry out spacingly to the tray that is located horizontal migration portion to realize the horizontal migration portion and to the maintenance of tray. Meanwhile, the arrangement of the air cylinder is convenient for realizing the release of the tray.

In a specific embodiment, the vertical moving part includes a carrying plate, and a lifting element is connected to the bottom of the carrying plate, and is used for driving the carrying plate to move in a vertical direction, so as to move the at least one tray placed on the carrying plate from the first position to the second position or the third position in a lifting manner, or move the at least one tray from the second position or the third position to the first position in a descending manner.

Through adopting above-mentioned technical scheme, be convenient for remove the tray to appointed position in vertical direction, realize with holding the cooperation of dish portion and horizontal migration portion.

In a specific embodiment, the first position, the second position and the third position overlap in the vertical direction and have different levels, and the second position and the fourth position have the same level.

By adopting the technical scheme, the tray can move along a vertical direction or a horizontal direction, so that the moving efficiency can be improved to a certain extent in comparison with the mode that the path is not fixed or is not in a straight line, and the tray dislocation and even scattering caused by the fact that the path is not in a straight line can be avoided to a certain extent.

In a second aspect, the present application provides a multiple stroke conveying apparatus, which adopts the following technical scheme:

a double stroke conveyor comprising:

A base;

The driving part is arranged on the base and comprises a driving wheel and a driven wheel, the driving wheel is connected with a driving motor, and a driving belt is connected between the driving wheel and the driven wheel;

A connecting part comprising a moving rail which is horizontally movably arranged on the base, wherein the moving rail is fixedly connected to a part of the driving belt, a first belt pulley and a second belt pulley are arranged on the moving rail, a driven belt is connected between the first belt pulley and the second belt pulley, and a part of the driven belt is fixedly connected to the base; and

A moving member movably connected to the moving rail, and the moving member is fixedly connected to another portion of the driven belt.

Through adopting above-mentioned technical scheme, can drive this removal track and remove one time distance in a direction when driving belt is to a direction rotation, and then drive the moving part through driven belt and remove two times distance, realized multiplying power drive, have the advantage that is suitable for driving the object and remove in little space.

In a specific embodiment, a portion of the drive belt is provided with a first fixed block, and the moving track is fixedly connected to a portion of the drive belt by the first fixed block.

By adopting the technical scheme, a part of the driving belt is fixedly connected to the moving track, so that the moving track can move along with the moving track.

In a specific embodiment, a portion of the driven belt is provided with a second fixed block by which a portion of the driven belt is fixedly connected to the base.

Through adopting above-mentioned technical scheme, be convenient for with driven belt's a part fixed connection to the base to when making the removal track remove one time distance, the moving part of being connected with driven belt another part can remove two distances.

In summary, the present application includes at least one of the following beneficial technical effects:

1. through the cooperation of the vertical moving part, the tray holding part and the horizontal moving part, the tray to be used can be positioned at the uppermost part of all trays, the design thought of the traditional planarization machine is broken through, the three-dimensional space is utilized for stacking and replacing the trays in the limited space, and the machine space can be utilized with maximum efficiency;

2. when the driving belt is driven to rotate towards the first rotating direction, the moving rail is driven to move a first distance towards the first direction, and then the driven belt and the moving piece drive the horizontal moving part to move a second distance towards the first direction until the horizontal moving part is moved to the fourth position, wherein the second distance is twice of the first distance, multiplying power driving is achieved, and the driving device has the advantage of being suitable for driving objects to move in a small space.

Drawings

FIG. 1 is a perspective view of a planarizing wafer tray tool of the background art;

FIG. 2 is a perspective view of a wafer pallet changing mechanism according to an embodiment of the present application;

FIG. 3 is a perspective view of a double-stroke conveyor according to an embodiment of the present application;

FIG. 4A is a perspective view of a multiple stroke conveyor in a retracted state according to an embodiment of the present application;

fig. 4B is a perspective view of the double-stroke conveying device according to the embodiment of the present application in an extended state;

FIG. 5A is a schematic plan view of a double-stroke conveyor in a retracted state according to an embodiment of the present application;

FIG. 5B is a schematic plan view of a double-stroke conveyor in an extended state according to an embodiment of the present application;

Fig. 6A to 6K are schematic perspective views illustrating a serial operation of replacing and stacking trays by the tray device in combination with the double-stroke conveying device according to an embodiment of the present application;

Fig. 7A to 7K are schematic plan views showing a series of operations of exchanging and stacking trays by the tray device in cooperation with the double-stroke conveying device according to an embodiment of the present application.

Reference numerals illustrate: 1. a tray device; 11. a disk holding part; 110. a holding space; 111. a holding frame; 112. a first cylinder; 12. a horizontal moving section; 120. a moving space; 121. a moving frame; 122. a second cylinder; 13. a vertical moving part; 131. a carrying plate; 132. a lifting element; 2. a double-stroke conveying device; 20. a base; 21. a driving section; 211. a driving wheel; 212. driven wheel; 213. a drive motor; 214. a drive belt; 22. a connecting part; 221. a moving track; 222. a first fixed block; 223. a first pulley; 224. a second pulley; 225. a driven belt; 226. a second fixed block; 23. a moving member; 3. a tray; 3A, a target disk; 3B, completing the disc; d1, a first direction; d2, a second direction; r1, a first rotation direction; r2, a second rotation direction; p1, a first position; p2, the second position; p3, a third position; p4, fourth position.

Detailed Description

The present application will be described in further detail with reference to the accompanying drawings.

The embodiment of the application discloses a wafer tray changing mechanism with a double-stroke conveying device. As shown in fig. 2, the wafer tray changing mechanism includes a tray device 1 and a double-stroke conveying device 2. The tray device 1 is a device for vertically moving at least one tray 3 to stack a plurality of trays 3, and the tray device 1 includes a tray holding portion 11, a horizontal moving portion 12, and a vertical moving portion 13 that are disposed in this order from top to bottom in the vertical direction, and the double-stroke conveying device 2 is connected to the horizontal moving portion 12.

As shown in fig. 2, the tray holding portion 11 is for receiving the tray 3 and holding or releasing the tray 3. The holding tray 11 includes a holding frame 111, a holding space 110 for accommodating a plurality of trays is formed between inner side walls of a circumference of the holding frame 111, a plurality of first cylinders 112 are respectively provided on at least two opposite side walls of the holding frame 111, when the tray 3 is accommodated in the holding space 110, the first cylinders 112 are operated to abut against the tray 3 to fix the tray 3 in the holding space 110, and when the operation of the first cylinders 112 is released, the tray 3 in the holding space 110 is released.

Specifically, the first cylinder 112 is mounted to the outside of the holding frame 111, and a holder or a jaw (not shown) may be provided at an end of a cylinder shaft of the first cylinder 112 and separated from the holding space 110 of the holding frame 111 when the first cylinder 112 is not operated, and protruded via the cylinder shaft to appropriately hold or clamp the outer side wall of the tray 3 in the holding space 110 when the first cylinder 112 is operated, thereby fixing the tray 3 by holding or clamping opposite sides of the tray 3 accommodated in the holding space 110 with respect to the holders at both sides of the holding frame 111.

More specifically, the inner peripheral dimension of the peripheral side wall of the holding frame 111 is larger than the outer peripheral dimension of the tray 3, so that the tray 3 can be easily accommodated in the holding space 110. When the tray 3 is accommodated in the holding space 110, the first air cylinder 112 operates to cause the holder to hold or grip the sidewall of the tray 3 via the air cylinder shaft to fix the tray 3, and when the operation of the first air cylinder 112 is released, the holder or grip is retracted by the air cylinder shaft to be separated from the tray 3, so that the tray 3 can be taken out of the holding space 110.

As shown in fig. 2, the horizontal moving portion 12 is for receiving the tray 3, and can be reciprocally moved in the horizontal direction by the driving of the double stroke conveyor 2 to hold or release the tray 3. Specifically, the horizontal moving portion 12 includes a moving frame 121, a moving space 120 capable of accommodating the tray 3 is formed between inner walls of the circumference of the moving frame 121, at least two opposite side walls of the moving frame 121 are respectively provided with a plurality of second air cylinders 122, when the tray 3 is accommodated in the moving space 120, the plurality of second air cylinders 122 operate to support and fix the tray 3 in the moving space 120, and when the operation of the second air cylinders 122 is released, the tray 3 in the moving space 120 is released.

Specifically, the second cylinder 122 is mounted to the outer sidewall of the moving frame 121, and a holder or a jaw (not shown) may be provided at an end of a cylinder shaft of the second cylinder 122 and separated from the moving space 120 of the moving frame 121 when the second cylinder 122 is not operated, and the holder or the jaw is appropriately held or clamped to the outer sidewall of the tray 3 in the moving space 120 via the cylinder shaft when the second cylinder 122 is operated, thereby fixing the tray 3 by holding or clamping opposite sides of the tray 3 accommodated in the moving space 120 with the holder on opposite sides of the moving frame 121.

More specifically, the inner peripheral dimension of the peripheral side wall of the moving frame 121 is larger than the outer peripheral dimension of the tray 3, so that the tray 3 can be easily accommodated in the moving space 120; when the tray 3 is accommodated in the moving space 120, the second air cylinder 122 operates to extend the holder or the jaw to the sidewall of the tray 3 via the air cylinder shaft, thereby pulling or clamping the tray 3 to be fixed, and when the operation of the second air cylinder 122 is released, the holder or the jaw is retracted by the air cylinder shaft to be separated from the tray 3, so that the tray 3 can be taken out of the moving space 120.

As shown in fig. 2, the vertical moving portion 13 is an apparatus for carrying the tray 3, and can move the carried tray 3 in the vertical direction to the moving space 120 or the holding space 110. Specifically, the vertical moving portion 13 includes a supporting plate 131, the bottom surface of the supporting plate 131 is connected to a lifting element 132, and the lifting element 132 may be a lifting screw driven by a servo motor, or may be an air cylinder, a hydraulic cylinder, or the like, which is not limited in detail in the present application. The lifting member 132 is connected to the loading plate 131 via a shaft to drive the loading plate 131 to move in a vertical direction, thereby moving up the tray 3 placed on the loading plate 131 from a current initial position to the moving space 120 or the holding space 110 or moving down from the moving space 120 or the holding space 110 to an initial position. The initial position refers to a position where the lifting element 132 lowers the carrier plate 131 to the lowest position.

Further, the horizontal moving part 12 can be moved to one side of the vertical moving part 13 in the horizontal direction by the driving of the double stroke conveying device 2, or moved between the vertical moving part 13 and the holding tray part 11 from one side of the vertical moving part 13 in the horizontal direction.

The double-stroke conveying device 2 is a device in which the output end can move by multiple strokes when the driving end moves by one stroke, and in this embodiment, the output end of the double-stroke conveying device 2 can output two times of strokes. Therefore, the horizontal moving section 12 is connected to the double-stroke conveyor 2 to move the horizontal moving section 12 in the horizontal direction, and there is an advantage that the operation can be performed in a small space.

As shown in fig. 3, the double-stroke conveying device 2 includes: a base 20, a driving portion 21, a connecting portion 22 and a moving member 23. Wherein the driving part 21 is arranged on the base 20; the driving part 21 comprises a driving wheel 211 and a driven wheel 212, the driving wheel 211 is connected with a driving motor 213, the driving motor 213 and the driven wheel 212 are both fixed on the base 20, a driving belt 214 is connected between the driving wheel 211 and the driven wheel 212, and the driving motor 213 drives the driving belt 214 to rotate in the first rotation direction R1 or the second rotation direction R2 when running. A first fixed block 222 is attached to one side of the drive belt 214, and when the drive belt 214 rotates in the first rotation direction R1, the drive belt 214 side provided with the first fixed block 222 moves in the first direction D1 (right direction in the drawing); when the drive belt 214 rotates in the second rotation direction R2, the drive belt 214 side provided with the first fixing block 222 moves in the opposite second direction D1 (left direction in the drawing).

As shown in fig. 3, the connecting portion 22 is a member for connecting the driving portion 21 and the moving member 23, and includes a moving rail 221 disposed on the base 20 and capable of moving horizontally, wherein the moving rail 221 is fixedly connected to a portion of the driving belt 214 through a first fixing block 222, such that the first fixing block 222 is driven by the driving belt 214 and drives the moving rail 221 to move in the horizontal direction. The first and second pulleys 223 and 224 are installed at the bottom of the moving rail 221, a driven belt 225 is connected between the first and second pulleys 223 and 224, and a second fixing block 226 is connected to one side of the driven belt 225, the second fixing block 226 is fixedly connected to the base 20, and the moving member 23 is fixed to the other side of the driven belt 225.

Therefore, as shown in fig. 4A to 4B and fig. 5A to 5B, when the driving wheel 211 is operated to drive the driving belt 214 to rotate in the first rotation direction R1, the first fixing block 222 located at one side of the driving belt 214 drives the moving rail 221 to move a first distance L1 in the first direction D1 (right direction in the drawing), at this time, since one side of the driven belt 225 is fixed to the base 20 via the second fixing block 226, the moving member 23 fixed at the other side of the driven belt 225 is also pulled synchronously by the driven belt 225 by the first distance L1, and finally the first distance L1 of the moving member 23 itself is added to the first distance L1 of the moving rail 221 to obtain a second distance L2 which is twice the first distance L1.

When the driving wheel 211 is operated to drive the driving belt 214 to rotate in the second rotation direction R2, the first fixing block 222 located at one side of the driving belt 214 drives the moving rail 221 to move a first distance L1 in the second direction D2 (left direction in the drawing), at this time, since one side of the driven belt 225 is fixed on the base 20 via the second fixing block 226, the moving member 23 fixed at the other side of the driven belt 225 is also pulled synchronously by the driven belt 225 to retract the first distance L1, and finally the moving member 23 itself moves to retract by a second distance L2 which is twice the first distance L1 together with the first distance L1 by which the moving rail 221 moves. In short, the driving section 21 drives the movement rail 221 to move a distance and simultaneously moves the moving member 23 by a distance twice, so that the entire double-stroke conveying device 2 can be reduced in size, and is suitable for mechanical transmission in a small space.

In order to facilitate the following description, referring to fig. 7A, the tray 3 is defined as a first position P1 at the initial position, is defined as a second position P2 at the moving frame 121, is defined as a third position P3 at the holding frame 111, the second position P2 represents that the horizontal moving portion 12 is not yet actuated, and the moving frame 121 is defined as a fourth position P4 at one side after the horizontal moving portion 12 is actuated. That is, the first, second and third positions P1, P2 and P3 overlap in the same vertical direction, but the horizontal heights of the first, second and third positions P1, P2 and P3 sequentially increase. The second position P2 and the fourth position P4 have the same horizontal height, and the fourth position P4 does not overlap with the first position P1, the second position P2 and the third position P4.

The following description of the operation of the present application applied to a tray replacement operation for a wafer tray is given by way of example in fig. 6A to 6K and fig. 7A to 7K:

As shown in fig. 6A and 7A, the carrier plate 131 of the vertical moving portion 13 is shown to carry a plurality of trays 3, and it is necessary to move out one of the plurality of trays 3 stacked on the carrier plate 131 (hereinafter referred to as target tray 3A) to carry the sorted wafers, and to return the tray (hereinafter referred to as finish tray 3B) originally in the holding frame 111 to stack on the carrier plate 131.

First, the moving frame 121 is located at the second position P2 to correspond to the vertical moving portion 13 and the disk holding portion 11; then, as shown in fig. 6B and 7B, the lifting member 132 of the vertical movement portion 13 drives the carrier plate 131 to rise through the movement space 120 of the movement frame 121 to move the tray 3 on the carrier plate 131 upward to the third position P3, and after the first cylinder 112 releases the grip of the completed tray 3B in the holding frame 111, the carrier plate 131 is continued to rise to cause the stacked tray 3 to prop up the completed tray 3B. In this state, as shown in fig. 6C and 7C, the first cylinder 112 provided in the holding frame 111 operates to sandwich the tray 3 above the target tray 3A and then lower the vertical moving section 13 until the target tray 3A moves to the second position P2. As shown in fig. 6D and 7D, the second air cylinder 122 provided at the moving frame 121 operates to clamp the target tray 3A at this time, and the vertical moving portion 13 descends to return the rest of the trays 3 on the loading plate 131, which are not clamped by the second air cylinder 122, to the first position P1. Then, as shown in fig. 6E and 7E, the double-stroke conveyor 2 operates to move the moving frame 121 and the target disc 3A held in the moving frame 121 from the second position P2 to the fourth position P4, so that the original second position P2 is clear. Next, as shown in fig. 6F and 7F, the vertical movement portion 13 is lifted up to move the tray 3 stacked on the loading plate 131 to the third position P3 through the second position P2, and after the first cylinder 112 releases the grip of the tray 3 in the holding frame 111, the loading plate 131 stacks all of the trays 3 and the completed tray 3B. Then, as shown in fig. 6G and 7G, the vertical movement section 13 descends to move the stacked tray 3 and the completed tray 3B downward from the third position P3 to the first position P1. Then, as shown in fig. 6H and 7H, the double-stroke conveyor 2 horizontally moves the moving frame 121 and the target disk 3A held thereby from the fourth position P4 to the second position P2. As shown in fig. 6I and 7I, the vertical moving portion 13 is lifted to the second position P2 to stack the tray 3 and the completed tray 3B on the loading plate 131 below the target tray 3A in the moving frame 121. Then, as shown in fig. 6J and 7J, after the second cylinder 122 releases the clamping of the target disk 3A in the moving frame 121, the vertical moving section 13 is moved upward to the third position P3 again, the stacked target disk 3A is entered into the holding frame 111, and the target disk 3A is clamped and fixed by the first cylinder 112. As shown in fig. 6K and 7K, the vertical movement portion 13 is then moved back down to the first position P1, completing the disc replacement work of moving out the target disc 3A and returning the completed disc 3B to the stack. The target tray 3A in the holding frame 111 is used for placing the sorted wafers, and the next completed tray is obtained when the stacking is required after the placement is completed, and so on.

In view of the above, the present invention uses the above-mentioned working procedure to clamp and remove one target tray 3A in the stacked trays 3 by the horizontal moving portion 12, and move the target tray 3A to the tray holding portion 11 at the highest position to replace the completed tray 3B carrying the sorted wafers, and then change the stacking positions of other trays 3 to achieve the purpose of tray replacement, wherein the operation sequence and operation duration of the tray holding portion 11, the horizontal moving portion 12 and the vertical moving portion 13 are determined according to the position where each tray is to be stacked, and the whole tray replacement operation is automated and efficient by programming and arranging by using a pre-designed computer program.

The above embodiments are not intended to limit the scope of the present application, so: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.

Claims (2)

1. A disc changing method of a wafer tray disc changing mechanism with a double-stroke conveying device, wherein the wafer tray disc changing mechanism comprises a tray device (1) and a double-stroke conveying device (2);

The tray device (1) comprises a tray holding part (11), a horizontal moving part (12) and a vertical moving part (13) which are sequentially arranged from top to bottom in the vertical direction; wherein,

The holding tray part (11) is used for receiving at least one tray (3) and holding or releasing the at least one tray (3); the holding plate part (11) comprises a holding frame (111), and a holding space (110) capable of accommodating the at least one tray (3) is formed between the inner side walls of the periphery of the holding frame (111);

The horizontal movement part (12) can reciprocate in the horizontal direction and holds or releases the at least one tray (3); the horizontal moving part (12) comprises a moving frame (121), and a moving space (120) capable of accommodating the at least one tray (3) is formed between inner side walls of the circumference of the moving frame (121);

the vertical moving part (13) is used for bearing the at least one tray (3) and moving the at least one borne tray (3) to a first position, a second position or a third position in the vertical direction; the vertical moving part (13) comprises a bearing plate (131), and the bottom of the bearing plate (131) is connected with a lifting element (132); the lifting element (132) is used for driving the bearing plate (131) to move in the vertical direction so as to move the at least one tray (3) placed on the bearing plate (131) from the first position to the second position or the third position in a lifting manner or from the second position or the third position to the first position in a descending manner;

The double-stroke conveying device (2) is connected with the horizontal moving part (12) and is used for driving the horizontal moving part (12) to move to the second position or a fourth position in the horizontal direction;

the first position, the second position, and the third position overlap in a vertical direction and have different horizontal heights, and the second position and the fourth position have the same horizontal height;

It is characterized in that the method comprises the steps of,

At least one first cylinder (112) is respectively arranged on at least two opposite side walls of the retaining frame (111);

-said at least one first cylinder (112) operates to fix said at least one tray (3) in said holding space (110) when said at least one tray (3) is housed in said holding space (110), releasing said at least one tray (3) when the operation of said first cylinder (112) is released;

at least one second cylinder (122) is respectively arranged on at least two opposite side walls of the movable frame (121);

-said at least one second cylinder (122) operates to fix said at least one tray (3) in said movement space (120) when said at least one tray (3) is housed in said movement space (120), releasing said at least one tray (3) when the operation of said second cylinder (122) is released;

The double-stroke conveying device (2) comprises a base (20), a driving part (21), a connecting part (22) and a moving part (23); wherein,

The driving part (21) is arranged on the base (20), the driving part (21) comprises a driving wheel (211) and a driven wheel (212), the driving wheel (211) is connected with a driving motor (213), and a driving belt (214) is connected between the driving wheel (211) and the driven wheel (212);

the connecting part (22) comprises a moving track (221), the moving track (221) is horizontally movably arranged on the base (20), the moving track (221) is fixedly connected to a part of the driving belt (214), a first belt pulley (223) and a second belt pulley (224) are arranged on the moving track (221), a driven belt (225) is connected between the first belt pulley (223) and the second belt pulley (224), and a part of the driven belt (225) is fixedly connected to the base (20);

The moving member (23) is movably connected to the moving rail (221), and the moving member (23) is fixedly connected to another portion of the driven belt (225) and fixedly connected to the horizontal moving portion (12);

Wherein, when the driving belt (214) is driven to rotate in a first rotation direction, the moving rail (221) is driven to move a first distance in a first direction, and then the driven belt (225) and the moving piece (23) drive the horizontal moving part (12) to move a second distance in the first direction until the horizontal moving part (12) is displaced to the fourth position, wherein the second distance is twice the first distance, and when the driving belt (214) is driven to rotate in a second rotation direction, the moving rail (221) is driven to move the first distance in a second direction, and then the driven belt (225) and the moving piece (23) drive the horizontal moving part (12) to move the second distance in the second direction until the horizontal moving part (12) is displaced to the second position;

the steps of disc replacement operation based on the wafer tray disc replacement mechanism with the double-stroke conveying device are as follows:

firstly, the moving frame (121) is positioned at a second position to correspond to the vertical moving part (13) and the disk holding part (11);

Then, the lifting element (132) of the vertical movement part (13) drives the bearing plate (131) to ascend through the movement space (120) of the movement frame (121) to move the tray (3) on the bearing plate (131) upward to a third position, and after the first cylinder (112) releases the clamping of the finished tray (3B) in the holding frame (111), the bearing plate (131) is continuously ascended to make the stacked tray (3) prop up the finished tray (3B); in this state, the first cylinder 112 provided in the holding frame 111 operates to clamp the tray 3 on the target disk 3A and then to lower the vertical moving section 13 until the target disk 3A moves to the second position; the second cylinder (122) arranged on the moving frame (121) operates to clamp the target disc (3A), and the vertical moving part (13) descends to enable the rest of the trays (3) which are not clamped by the second cylinder (122) on the bearing plate (131) to return to the first position;

Then, the double-stroke conveying device (2) operates to move the moving frame (121) and the target disc (3A) held in the moving frame (121) from the second position to the fourth position, so that the original second position is clear;

Then, the vertical movement section (13) is lifted to move the trays (3) stacked on the carrier plate (131) to the third position through the second position, and after the first cylinder (112) releases the clamping of the trays (3) in the holding frame (111), the carrier plate (131) stacks all of the trays (3) and the completed tray (3B);

then, the vertical moving part (13) descends to move the stacked trays (3) and the completed trays (3B) downward from the third position to the first position;

Then, the double-stroke conveying device (2) horizontally moves the moving frame (121) and the target disk (3A) clamped by the moving frame from the fourth position to the second position; the vertical moving part (13) is lifted to a second position to stack the tray (3) and the finished disc (3B) on the bearing plate (131) below the target disc (3A) in the moving frame (121);

Then, after the second cylinder (122) releases the clamping of the target disk (3A) in the moving frame (121), the vertical moving part (13) is moved upwards to a third position, the stacked target disk (3A) enters the holding frame (111), and then the first cylinder (112) clamps and fixes the target disk (3A);

then, the vertical movement section (13) is moved back down to the first position again, completing the disc replacement work of moving out the target disc (3A) and returning the completed disc (3B) to the stack.

2. The disc changing method of a wafer tray changing mechanism with a double-stroke transporting device according to claim 1, wherein,

A part of the driving belt (214) is provided with a first fixed block (222), and the moving rail (221) is fixedly connected to a part of the driving belt (214) through the first fixed block (222).