CN114574832A - 成膜装置以及脚手架单元 - Google Patents
成膜装置以及脚手架单元 Download PDFInfo
- Publication number
- CN114574832A CN114574832A CN202111373132.5A CN202111373132A CN114574832A CN 114574832 A CN114574832 A CN 114574832A CN 202111373132 A CN202111373132 A CN 202111373132A CN 114574832 A CN114574832 A CN 114574832A
- Authority
- CN
- China
- Prior art keywords
- unit
- scaffold
- source unit
- film
- film formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
- Y02A40/10—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in agriculture
- Y02A40/25—Greenhouse technology, e.g. cooling systems therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020198681A JP7177130B2 (ja) | 2020-11-30 | 2020-11-30 | 成膜装置及び足場ユニット |
JP2020-198681 | 2020-11-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114574832A true CN114574832A (zh) | 2022-06-03 |
Family
ID=81770334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202111373132.5A Pending CN114574832A (zh) | 2020-11-30 | 2021-11-19 | 成膜装置以及脚手架单元 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7177130B2 (ja) |
CN (1) | CN114574832A (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003081560A (ja) * | 2001-09-11 | 2003-03-19 | Toshiba Elevator Co Ltd | エレベータ |
CN201065753Y (zh) * | 2007-07-03 | 2008-05-28 | 魏峰 | 折叠式抽油机高空作业安全平台 |
TW201346050A (zh) * | 2012-02-06 | 2013-11-16 | Tokyo Electron Ltd | 成膜裝置及成膜方法 |
JP2016014174A (ja) * | 2014-07-02 | 2016-01-28 | 株式会社アルバック | 成膜装置及び成膜装置のメンテナンス方法 |
CN108689356A (zh) * | 2018-06-14 | 2018-10-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | 一种具有自锁功能的多连杆结构 |
CN109217175A (zh) * | 2018-10-25 | 2019-01-15 | 河北晋昌电力工程有限公司 | 一种平台装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030010288A1 (en) | 2001-02-08 | 2003-01-16 | Shunpei Yamazaki | Film formation apparatus and film formation method |
JP4557710B2 (ja) | 2004-12-24 | 2010-10-06 | 株式会社ユーテック | 成膜装置及び蒸着装置 |
JP4800149B2 (ja) * | 2006-08-17 | 2011-10-26 | 東京エレクトロン株式会社 | 半導体製造装置 |
JP5350692B2 (ja) * | 2008-07-03 | 2013-11-27 | 東京エレクトロン株式会社 | 基板処理装置及びそれに用いられる支持フレーム |
JP5449878B2 (ja) * | 2009-06-19 | 2014-03-19 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP2011107521A (ja) | 2009-11-19 | 2011-06-02 | Miyagi Nikon Precision Co Ltd | 搬送装置のメンテナンス方法 |
KR20130069037A (ko) | 2011-12-16 | 2013-06-26 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 표시 장치의 제조 방법 및 유기 발광 표시 장치 |
JP2013162068A (ja) | 2012-02-08 | 2013-08-19 | Tokyo Electron Ltd | 基板処理装置 |
JP7259281B2 (ja) * | 2018-11-21 | 2023-04-18 | 東京エレクトロン株式会社 | 基板処理装置、基板処理システム及び基板処理方法 |
-
2020
- 2020-11-30 JP JP2020198681A patent/JP7177130B2/ja active Active
-
2021
- 2021-11-19 CN CN202111373132.5A patent/CN114574832A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003081560A (ja) * | 2001-09-11 | 2003-03-19 | Toshiba Elevator Co Ltd | エレベータ |
CN201065753Y (zh) * | 2007-07-03 | 2008-05-28 | 魏峰 | 折叠式抽油机高空作业安全平台 |
TW201346050A (zh) * | 2012-02-06 | 2013-11-16 | Tokyo Electron Ltd | 成膜裝置及成膜方法 |
JP2016014174A (ja) * | 2014-07-02 | 2016-01-28 | 株式会社アルバック | 成膜装置及び成膜装置のメンテナンス方法 |
CN108689356A (zh) * | 2018-06-14 | 2018-10-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | 一种具有自锁功能的多连杆结构 |
CN109217175A (zh) * | 2018-10-25 | 2019-01-15 | 河北晋昌电力工程有限公司 | 一种平台装置 |
Also Published As
Publication number | Publication date |
---|---|
JP7177130B2 (ja) | 2022-11-22 |
JP2022086584A (ja) | 2022-06-09 |
KR20220076322A (ko) | 2022-06-08 |
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