CN105308839A - 直线电机及工作台装置 - Google Patents

直线电机及工作台装置 Download PDF

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Publication number
CN105308839A
CN105308839A CN201380076945.5A CN201380076945A CN105308839A CN 105308839 A CN105308839 A CN 105308839A CN 201380076945 A CN201380076945 A CN 201380076945A CN 105308839 A CN105308839 A CN 105308839A
Authority
CN
China
Prior art keywords
magnet
armature coil
row
armature
electric motors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380076945.5A
Other languages
English (en)
Chinese (zh)
Inventor
柳启二
木场龙彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Publication of CN105308839A publication Critical patent/CN105308839A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
CN201380076945.5A 2013-05-27 2013-05-27 直线电机及工作台装置 Pending CN105308839A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2013/064623 WO2014192058A1 (ja) 2013-05-27 2013-05-27 リニアモータ及びステージ装置

Publications (1)

Publication Number Publication Date
CN105308839A true CN105308839A (zh) 2016-02-03

Family

ID=51988137

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380076945.5A Pending CN105308839A (zh) 2013-05-27 2013-05-27 直线电机及工作台装置

Country Status (3)

Country Link
JP (1) JPWO2014192058A1 (ja)
CN (1) CN105308839A (ja)
WO (1) WO2014192058A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107872140A (zh) * 2016-09-26 2018-04-03 上海微电子装备（集团）股份有限公司 一种音圈电机及平台装置
CN107482872B (zh) * 2017-06-26 2024-04-12 浙江大学 二维电磁激励器

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005237078A (ja) * 2004-02-18 2005-09-02 Toshiba Mach Co Ltd リニア同期モータ
JP2010074976A (ja) * 2008-09-19 2010-04-02 Yaskawa Electric Corp Ｘｙ軸コアレスリニアモータ及びそれを用いたステージ装置
CN101771323A (zh) * 2009-01-07 2010-07-07 山洋电气株式会社 线性电动机
JP2011193553A (ja) * 2010-03-11 2011-09-29 Yaskawa Electric Corp ２自由度コアレスリニアモータ
CN102246401A (zh) * 2008-12-10 2011-11-16 株式会社日立制作所 推力产生机构、驱动装置、xy工作台以及xyz工作台
JP2013027054A (ja) * 2011-07-14 2013-02-04 Yaskawa Electric Corp コアレスリニアモータ
CN102934337A (zh) * 2010-06-09 2013-02-13 株式会社日立制作所 发电机以及使用发电机的发电装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005237078A (ja) * 2004-02-18 2005-09-02 Toshiba Mach Co Ltd リニア同期モータ
JP2010074976A (ja) * 2008-09-19 2010-04-02 Yaskawa Electric Corp Ｘｙ軸コアレスリニアモータ及びそれを用いたステージ装置
CN102246401A (zh) * 2008-12-10 2011-11-16 株式会社日立制作所 推力产生机构、驱动装置、xy工作台以及xyz工作台
CN101771323A (zh) * 2009-01-07 2010-07-07 山洋电气株式会社 线性电动机
JP2011193553A (ja) * 2010-03-11 2011-09-29 Yaskawa Electric Corp ２自由度コアレスリニアモータ
CN102934337A (zh) * 2010-06-09 2013-02-13 株式会社日立制作所 发电机以及使用发电机的发电装置
JP2013027054A (ja) * 2011-07-14 2013-02-04 Yaskawa Electric Corp コアレスリニアモータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107872140A (zh) * 2016-09-26 2018-04-03 上海微电子装备（集团）股份有限公司 一种音圈电机及平台装置
CN107482872B (zh) * 2017-06-26 2024-04-12 浙江大学 二维电磁激励器

Also Published As

Publication number Publication date
JPWO2014192058A1 (ja) 2017-02-23
WO2014192058A1 (ja) 2014-12-04

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Application publication date: 20160203

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