CN102893121A - 用于检查结构化对象的光学设备和方法 - Google Patents
用于检查结构化对象的光学设备和方法 Download PDFInfo
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- CN102893121A CN102893121A CN2011800212264A CN201180021226A CN102893121A CN 102893121 A CN102893121 A CN 102893121A CN 2011800212264 A CN2011800212264 A CN 2011800212264A CN 201180021226 A CN201180021226 A CN 201180021226A CN 102893121 A CN102893121 A CN 102893121A
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- equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1053173A FR2959305B1 (fr) | 2010-04-26 | 2010-04-26 | Dispositif optique et procede d'inspection d'objets structures. |
FR1053173 | 2010-04-26 | ||
PCT/FR2011/050900 WO2011135231A1 (fr) | 2010-04-26 | 2011-04-19 | Dispositif optique et procede d'inspection d'objets structures |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102893121A true CN102893121A (zh) | 2013-01-23 |
CN102893121B CN102893121B (zh) | 2015-12-16 |
Family
ID=43301813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201180021226.4A Active CN102893121B (zh) | 2010-04-26 | 2011-04-19 | 用于检查结构化对象的光学设备和方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9151941B2 (zh) |
EP (1) | EP2564153A1 (zh) |
JP (2) | JP6273142B2 (zh) |
KR (1) | KR101842291B1 (zh) |
CN (1) | CN102893121B (zh) |
FR (1) | FR2959305B1 (zh) |
SG (1) | SG184974A1 (zh) |
WO (1) | WO2011135231A1 (zh) |
Cited By (16)
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---|---|---|---|---|
CN105466886A (zh) * | 2014-09-29 | 2016-04-06 | 安捷伦科技有限公司 | 中红外扫描*** |
CN105612454A (zh) * | 2013-08-15 | 2016-05-25 | 卡尔蔡司显微镜有限责任公司 | 高分辨率扫描显微术 |
CN105910541A (zh) * | 2016-06-13 | 2016-08-31 | 东莞市普密斯精密仪器有限公司 | 一种用于测量物件尺寸的测量装置和测量方法 |
CN106662430A (zh) * | 2014-03-04 | 2017-05-10 | 霍尼韦尔有限公司 | 通过中红外波长扫描干涉测量的织物产品的厚度确定 |
CN106796099A (zh) * | 2014-09-25 | 2017-05-31 | Fogale 纳米技术公司 | 用于加工期间的晶片控制的表面轮廓测定的设备和方法 |
CN107941164A (zh) * | 2016-10-12 | 2018-04-20 | 株式会社基恩士 | 形状测量装置 |
WO2018072446A1 (zh) * | 2016-10-18 | 2018-04-26 | 淮阴师范学院 | 非对称式光学干涉测量方法及装置 |
CN109073368A (zh) * | 2016-03-25 | 2018-12-21 | Fogale 纳米技术公司 | 用于晶片等对象的2d/3d检测的色差共焦装置和方法 |
CN109297991A (zh) * | 2018-11-26 | 2019-02-01 | 深圳市麓邦技术有限公司 | 一种玻璃表面缺陷检测***及方法 |
CN111213029A (zh) * | 2018-09-27 | 2020-05-29 | 合刃科技(深圳)有限公司 | 检测透明/半透明材料缺陷的方法、装置及*** |
CN111542749A (zh) * | 2018-01-04 | 2020-08-14 | 浜松光子学株式会社 | 荧光测定装置及荧光测定方法 |
CN113330274A (zh) * | 2018-11-30 | 2021-08-31 | 统一半导体公司 | 使用低相干干涉测量法测量包括不同结构的物体表面的方法和*** |
CN113670852A (zh) * | 2016-05-13 | 2021-11-19 | 苏州高迎检测技术有限公司 | 检查装置及检查方法 |
CN113841023A (zh) * | 2019-03-05 | 2021-12-24 | Fogale 纳米技术公司 | 光学元件的界面测量方法和设备 |
TWI791046B (zh) * | 2017-10-02 | 2023-02-01 | 美商奈米創尼克影像公司 | 減少顯微鏡成像中之暈影的設備及方法 |
US11880028B2 (en) | 2017-10-02 | 2024-01-23 | Nanotronics Imaging, Inc. | Apparatus and method to reduce vignetting in microscopic imaging |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
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US9323398B2 (en) | 2009-07-10 | 2016-04-26 | Apple Inc. | Touch and hover sensing |
US8982060B2 (en) | 2010-08-27 | 2015-03-17 | Apple Inc. | Touch and hover sensor compensation |
US9201547B2 (en) | 2012-04-30 | 2015-12-01 | Apple Inc. | Wide dynamic range capacitive sensing |
EP2662661A1 (de) * | 2012-05-07 | 2013-11-13 | Leica Geosystems AG | Messgerät mit einem Interferometer und einem ein dichtes Linienspektrum definierenden Absorptionsmedium |
FR2994734B1 (fr) * | 2012-08-21 | 2017-08-25 | Fogale Nanotech | Dispositif et procede pour faire des mesures dimensionnelles sur des objets multi-couches tels que des wafers. |
KR20140054645A (ko) * | 2012-10-29 | 2014-05-09 | 한국전자통신연구원 | 알츠하이머병을 진단하기 위한 진단 장치 및 이를 이용한 진단 방법 |
US9835444B2 (en) | 2013-05-20 | 2017-12-05 | Koh Young Technology Inc. | Shape measuring device using frequency scanning interferometer |
ITBO20130403A1 (it) * | 2013-07-26 | 2015-01-27 | Marposs Spa | Metodo e apparecchiatura per il controllo ottico mediante interferometria dello spessore di un oggetto in lavorazione |
US9933879B2 (en) | 2013-11-25 | 2018-04-03 | Apple Inc. | Reconfigurable circuit topology for both self-capacitance and mutual capacitance sensing |
KR102316146B1 (ko) * | 2014-08-13 | 2021-10-22 | 삼성전자주식회사 | 표면 검사용 광학 모듈 및 이를 포함하는 표면 검사 장치 |
US9787916B2 (en) * | 2014-10-28 | 2017-10-10 | The Boeing Company | Active real-time characterization system |
FR3045813B1 (fr) * | 2015-12-22 | 2020-05-01 | Unity Semiconductor | Dispositif et procede de mesure de hauteur en presence de couches minces |
CN107036539B (zh) * | 2017-06-14 | 2018-07-13 | 深圳中科飞测科技有限公司 | 膜厚测量***及方法 |
US10712265B2 (en) | 2018-02-22 | 2020-07-14 | The Boeing Company | Active real-time characterization system providing spectrally broadband characterization |
CN109828365B (zh) * | 2019-02-25 | 2021-05-04 | 南京理工大学 | Mirau型超分辨率干涉显微物镜 |
WO2020245511A1 (fr) * | 2019-06-07 | 2020-12-10 | Fogale Nanotech | Dispositif et procédé de mesure d'interfaces d'un élément optique |
CN111122508A (zh) * | 2019-11-08 | 2020-05-08 | 桂林电子科技大学 | 基于f-p干涉仪的双波长共路相位显微成像测量*** |
EP4279861A1 (en) * | 2022-05-19 | 2023-11-22 | Unity Semiconductor | A method and a system for characterising structures etched in a substrate |
EP4279862A1 (en) * | 2022-05-19 | 2023-11-22 | Unity Semiconductor | A method and a system for combined characterisation of structures etched in a substrate |
EP4279860A1 (en) * | 2022-05-19 | 2023-11-22 | Unity Semiconductor | A method and a system for characterising structures through a substrate |
KR102573768B1 (ko) * | 2023-02-01 | 2023-09-01 | (주)토핀스 | 단파장 적외선 하이퍼 스펙트럴 이미징 현미경 시스템 |
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US20080062429A1 (en) * | 2006-09-12 | 2008-03-13 | Rongguang Liang | Low coherence dental oct imaging |
US20090303495A1 (en) * | 2005-10-14 | 2009-12-10 | Alain Courteville | Method and device for measuring heights of patterns |
CN101631522A (zh) * | 2007-03-13 | 2010-01-20 | 眼科医疗公司 | 用于创建眼睛手术和松弛切口的装置 |
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-
2010
- 2010-04-26 FR FR1053173A patent/FR2959305B1/fr active Active
-
2011
- 2011-04-19 CN CN201180021226.4A patent/CN102893121B/zh active Active
- 2011-04-19 JP JP2013506713A patent/JP6273142B2/ja active Active
- 2011-04-19 US US13/643,435 patent/US9151941B2/en active Active
- 2011-04-19 KR KR1020127028050A patent/KR101842291B1/ko active IP Right Grant
- 2011-04-19 SG SG2012078218A patent/SG184974A1/en unknown
- 2011-04-19 WO PCT/FR2011/050900 patent/WO2011135231A1/fr active Application Filing
- 2011-04-19 EP EP11721347A patent/EP2564153A1/fr not_active Ceased
-
2016
- 2016-12-02 JP JP2016235402A patent/JP2017096956A/ja active Pending
Patent Citations (3)
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US20090303495A1 (en) * | 2005-10-14 | 2009-12-10 | Alain Courteville | Method and device for measuring heights of patterns |
US20080062429A1 (en) * | 2006-09-12 | 2008-03-13 | Rongguang Liang | Low coherence dental oct imaging |
CN101631522A (zh) * | 2007-03-13 | 2010-01-20 | 眼科医疗公司 | 用于创建眼睛手术和松弛切口的装置 |
Cited By (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108873285A (zh) * | 2013-08-15 | 2018-11-23 | 卡尔蔡司显微镜有限责任公司 | 高分辨率扫描显微术 |
CN105612454A (zh) * | 2013-08-15 | 2016-05-25 | 卡尔蔡司显微镜有限责任公司 | 高分辨率扫描显微术 |
CN108873285B (zh) * | 2013-08-15 | 2020-11-24 | 卡尔蔡司显微镜有限责任公司 | 高分辨率扫描显微术 |
CN106662430A (zh) * | 2014-03-04 | 2017-05-10 | 霍尼韦尔有限公司 | 通过中红外波长扫描干涉测量的织物产品的厚度确定 |
CN106662430B (zh) * | 2014-03-04 | 2020-06-16 | 霍尼韦尔有限公司 | 通过中红外波长扫描干涉测量的织物产品的厚度确定 |
CN106796099A (zh) * | 2014-09-25 | 2017-05-31 | Fogale 纳米技术公司 | 用于加工期间的晶片控制的表面轮廓测定的设备和方法 |
CN106796099B (zh) * | 2014-09-25 | 2020-11-03 | 统一半导体公司 | 用于加工期间的晶片控制的表面轮廓测定的设备和方法 |
US11300773B2 (en) | 2014-09-29 | 2022-04-12 | Agilent Technologies, Inc. | Mid-infrared scanning system |
CN105466886B (zh) * | 2014-09-29 | 2019-11-26 | 安捷伦科技有限公司 | 中红外扫描*** |
CN105466886A (zh) * | 2014-09-29 | 2016-04-06 | 安捷伦科技有限公司 | 中红外扫描*** |
CN109073368B (zh) * | 2016-03-25 | 2020-07-24 | Fogale 纳米技术公司 | 用于晶片等对象的2d/3d检测的色差共焦装置和方法 |
CN109073368A (zh) * | 2016-03-25 | 2018-12-21 | Fogale 纳米技术公司 | 用于晶片等对象的2d/3d检测的色差共焦装置和方法 |
CN113670852A (zh) * | 2016-05-13 | 2021-11-19 | 苏州高迎检测技术有限公司 | 检查装置及检查方法 |
CN105910541A (zh) * | 2016-06-13 | 2016-08-31 | 东莞市普密斯精密仪器有限公司 | 一种用于测量物件尺寸的测量装置和测量方法 |
CN107941164A (zh) * | 2016-10-12 | 2018-04-20 | 株式会社基恩士 | 形状测量装置 |
WO2018072446A1 (zh) * | 2016-10-18 | 2018-04-26 | 淮阴师范学院 | 非对称式光学干涉测量方法及装置 |
US11880028B2 (en) | 2017-10-02 | 2024-01-23 | Nanotronics Imaging, Inc. | Apparatus and method to reduce vignetting in microscopic imaging |
TWI791046B (zh) * | 2017-10-02 | 2023-02-01 | 美商奈米創尼克影像公司 | 減少顯微鏡成像中之暈影的設備及方法 |
CN111542749A (zh) * | 2018-01-04 | 2020-08-14 | 浜松光子学株式会社 | 荧光测定装置及荧光测定方法 |
CN111542749B (zh) * | 2018-01-04 | 2023-07-18 | 浜松光子学株式会社 | 荧光测定装置及荧光测定方法 |
CN111213029A (zh) * | 2018-09-27 | 2020-05-29 | 合刃科技(深圳)有限公司 | 检测透明/半透明材料缺陷的方法、装置及*** |
CN109297991B (zh) * | 2018-11-26 | 2019-12-17 | 深圳市麓邦技术有限公司 | 一种玻璃表面缺陷检测***及方法 |
CN109297991A (zh) * | 2018-11-26 | 2019-02-01 | 深圳市麓邦技术有限公司 | 一种玻璃表面缺陷检测***及方法 |
CN113330274A (zh) * | 2018-11-30 | 2021-08-31 | 统一半导体公司 | 使用低相干干涉测量法测量包括不同结构的物体表面的方法和*** |
CN113841023A (zh) * | 2019-03-05 | 2021-12-24 | Fogale 纳米技术公司 | 光学元件的界面测量方法和设备 |
Also Published As
Publication number | Publication date |
---|---|
SG184974A1 (en) | 2012-11-29 |
KR101842291B1 (ko) | 2018-05-04 |
EP2564153A1 (fr) | 2013-03-06 |
US9151941B2 (en) | 2015-10-06 |
FR2959305A1 (fr) | 2011-10-28 |
CN102893121B (zh) | 2015-12-16 |
JP6273142B2 (ja) | 2018-01-31 |
KR20130083830A (ko) | 2013-07-23 |
WO2011135231A1 (fr) | 2011-11-03 |
FR2959305B1 (fr) | 2014-09-05 |
JP2013528791A (ja) | 2013-07-11 |
JP2017096956A (ja) | 2017-06-01 |
US20130038863A1 (en) | 2013-02-14 |
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